CN103911602A - Control system of chemical vapor deposition equipment - Google Patents
Control system of chemical vapor deposition equipment Download PDFInfo
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- CN103911602A CN103911602A CN201210591240.4A CN201210591240A CN103911602A CN 103911602 A CN103911602 A CN 103911602A CN 201210591240 A CN201210591240 A CN 201210591240A CN 103911602 A CN103911602 A CN 103911602A
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- programmable logic
- logic controller
- processing module
- module
- network connection
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Abstract
The invention discloses a control system of chemical vapor deposition equipment to control a deposition process of the chemical vapor deposition equipment. The control system includes a programmable logic controller processing module and a plurality of programmable logic controller control modules. The plurality of programmable logic controller control modules and the programmable logic controller processing module are connected in series through multiple segments of network connection lines to form a ring network, so that each of the programmable logic controller control modules can have communication with the programmable logic controller processing module through two-way network lines. According to the control system provided by the invention, even if the network connection line at one end of any programmable logic controller processing module breaks down to result in that the programmable logic controller control modules lose communication with the programmable logic controller processing module, communication with the programmable logic controller processing module can be carried out by means of the network connection line at the other end of the programmable logic controller processing module, thus enhancing the reliability of the overall chemical vapor deposition equipment's control system.
Description
Technical field
The invention belongs to vapour deposition field, more particularly, relate to a kind of Controlling System of chemical vapor depsotition equipment.
Background technology
In existing vapor deposition apparatus, programmable logic controller (Programmable Logic Controller, PLC) starshaped net topology that is connected employing EtherNet/IP industrial Ethernet agreement between processing module and several Controlled by Programmable Controller modules, each Controlled by Programmable Controller module is that single network connection 50 is connected with programmable logic controller processing module, specifically please refer to Fig. 1.
Be illustrated in figure 1 the schematic diagram of the Controlling System of existing a kind of chemical vapor depsotition equipment, programmable logic controller (PLC) processing module 10 and Controlled by Programmable Controller module K
1, K
2, K
3..., K
j..., K
m-1, K
madopt the starshaped net topology of EtherNet/IP industrial ethernet protocol, wherein, 1≤j≤m, and j is natural number, Controlled by Programmable Controller module K
ibe all that single network connection 50 is connected with programmable logic controller processing module 10, in the time having the network connection 50 at any place to break down in Y-network, will cause the Controlled by Programmable Controller module K on corresponding network wire 50
jlose communication contact with programmable logic controller processing module 10, now, corresponding Controlled by Programmable Controller module K
jin runaway condition, affect the normal operation of whole chemical vapor depsotition equipment.
Summary of the invention
The problem existing in order to solve above-mentioned prior art, the invention provides a kind of Controlling System of chemical vapor depsotition equipment, be used for controlling chemical vapor depsotition equipment and carry out depositing operation, described Controlling System comprises programmable logic controller processing module and several Controlled by Programmable Controller modules, described several Controlled by Programmable Controller modules and described programmable logic controller processing module are connected in series formation ring network by multistage network connection, make each described Controlled by Programmable Controller module carry out communication contact by two-way network line and described programmable logic controller processing module.
Further, when one section of network connection that in described ring network, Controlled by Programmable Controller module one end connects described in any one breaks down, one section of network connection and described programmable logic controller processing module that described any one Controlled by Programmable Controller module connects by described any one Controlled by Programmable Controller module the other end are carried out communication contact.
Further, each described Controlled by Programmable Controller module comprises a fault detection module, whether described fault detection module disconnects in order to the one section of network connection that detects corresponding Controlled by Programmable Controller module two ends and connect respectively, in the time that described fault detection module detects that one section of network connection of one end disconnects, the Controlled by Programmable Controller module of described correspondence sends trouble signal by one section of network connection of the other end to described programmable logic controller processing module, described programmable logic controller processing module connects an alarm unit, described programmable logic controller processing module makes described alarm unit send guard signal after receiving described trouble signal.
Further, described programmable logic controller processing module also connects a display unit, in the time that described fault detection module detects that one section of network connection of Controlled by Programmable Controller module one end connection of described correspondence disconnects, the position of the one section of network connection disconnecting described in the Controlled by Programmable Controller module records of described correspondence, and form corresponding position signal; One section of network connection that the Controlled by Programmable Controller module of described correspondence connects by the other end sends position signal to described programmable logic controller processing module, and described programmable logic controller processing module makes described display unit show the position of one section of network connection of described disconnection after receiving described position signal.
Further, described programmable logic controller processing module also comprises a fault detection module, whether one section of network connection that described fault detection module connects respectively for detection of described programmable logic controller processing module two ends disconnects, in the time that described fault detection module detects that one section of network connection of one end disconnects, described fault detection module sends trouble signal, described programmable logic controller processing module connects an alarm unit, and described programmable logic controller processing module makes described alarm unit send guard signal after receiving described trouble signal.
According to the Controlling System of chemical vapor depsotition equipment of the present invention, this Controlling System is serially connected in a closed ring network by several Controlled by Programmable Controller modules and programmable logic controller processing module by multistage network connection, makes each Controlled by Programmable Controller module carry out communication contact by two-way network line network connection and programmable logic controller processing module.Even arbitrary Controlled by Programmable Controller module one end connect one section of network connection break down and make this Controlled by Programmable Controller module and programmable logic controller processing module lose communication contact, one section of network connection and the programmable logic controller processing module that also can connect by this Controlled by Programmable Controller module the other end are carried out communication contact, have improved the reliability of the Controlling System of whole chemical vapor depsotition equipment.
Brief description of the drawings
Fig. 1 is the schematic diagram of the Controlling System of existing a kind of chemical vapor depsotition equipment.
Fig. 2 is the schematic diagram of the Controlling System of the chemical vapor depsotition equipment of the embodiment of the present invention.
Embodiment
Technique means and the effect thereof taked in order to set forth better the present invention, be described in detail below in conjunction with embodiments of the invention and accompanying drawing thereof, and wherein, identical label represents identical parts all the time.
Figure 2 shows that the schematic diagram of the Controlling System of the chemical vapor depsotition equipment of the embodiment of the present invention.
With reference to Fig. 2, this Controlling System 100 comprises programmable logic controller (PLC) processing module 10 and n Controlled by Programmable Controller module K thereof
1, K
2..., K
i..., K
n, wherein n is more than or equal to 2 natural number, 1≤i≤n, and i is also natural number.Specifically, in the present embodiment, by described programmable logic controller processing module 10 and described n Controlled by Programmable Controller module K
1, K
2..., K
i..., K
nbe connected in series closed ring network of formation by multistage network connection 50, described programmable logic controller processing module 10 is connected in Controlled by Programmable Controller module K by network connection 50
1with K
nbetween, that is to say, each Controlled by Programmable Controller module can be carried out communication contact by two-way network line and programmable logic controller processing module 10.
In the time that chemical vapor depsotition equipment carries out depositing operation, when in closed ring network with Controlled by Programmable Controller module K
ione section of network connection 50 connecting of A end for example, while breaking down (network connection 50 disconnects), Controlled by Programmable Controller module K
ican be by holding the one section of network connection not breaking down 50 being connected to carry out communication contact, i.e. programmable logic controller control module K with programmable logic controller processing module 10 with B
ican pass through by programmable logic controller processing module 10, Controlled by Programmable Controller module K
1, Controlled by Programmable Controller module K
2..., and Controlled by Programmable Controller module K
ithe one section of network line and the programmable logic controller processing module 10 that form are carried out communication contact.Similarly, when in closed ring network with Controlled by Programmable Controller module K
ione section of network connection connecting of B end for example, while breaking down 50 (network connection 50 disconnects), Controlled by Programmable Controller module K
ican be by holding the one section of network connection not breaking down 50 being connected to carry out communication contact, i.e. programmable logic controller control module K with programmable logic controller processing module 10 with A
ican pass through by programmable logic controller processing module 10, Controlled by Programmable Controller module K
n, Controlled by Programmable Controller module K
n-1..., and Controlled by Programmable Controller module K
ithe one section of network line and the programmable logic controller processing module 10 that form are carried out communication contact.
In addition, each Controlled by Programmable Controller module comprises a fault detection module 20, whether fault detection module 20 disconnects in order to the one section of network connection 50 that detects corresponding Controlled by Programmable Controller module two ends and connect respectively, for example whether described fault detection module 20 is the voltage of floating by the voltage that detects this section of network connection 50, thereby judges whether this section of network connection 50 disconnects; When the voltage that this network connection 50 detected is when floating voltage, described fault detection module 20 judges that this section of network connection 50 disconnects.In the present embodiment, with Controlled by Programmable Controller module K
iin fault detection module 20 for example describes, when this fault detection module 20 detects while holding the one section of network connection 50 being connected to disconnect with A, Controlled by Programmable Controller module K
iby holding the one section of network connection not breaking down 50 being connected to send trouble signal to programmable logic controller processing module 10 with B; Or when this fault detection module 20 detects while holding the one section of network connection 50 being connected to disconnect with B, Controlled by Programmable Controller module K
iby holding the one section of network connection not breaking down 50 being connected to send trouble signal to programmable logic controller processing module 10 with A.Programmable logic controller processing module 10 connects an alarm unit 30, makes alarm unit 30 send guard signal after programmable logic controller processing module 10 receives described trouble signal, breaks down, in time monitoring device with alert equipment.
In addition, programmable logic controller processing module 10 also connects a display unit 40, when fault detection module 20 detects and Controlled by Programmable Controller module K
ia end or B end connect one section of network connection 50 while disconnecting, described Controlled by Programmable Controller module K
ithe one section of network connection 50 that records described disconnection be for described Controlled by Programmable Controller module K
ia end or B hold the one section of network connection 50 disconnecting, this record is as the positional information of one section of network connection 50 of described disconnection, described Controlled by Programmable Controller module K
iform corresponding position signal; Then Controlled by Programmable Controller module K
iby holding the one section of network connection not breaking down 50 being connected to send described position signal to programmable logic controller processing module 10 with B end or A, after receiving described position signal, programmable logic controller processing module 10 make display unit 40 show the position of the network connection 50 of described disconnection, so that operator can after find accurately the position of the network connection 50 of described disconnection, it is keeped in repair in time.
Further, in the present embodiment, programmable logic controller processing module 10 also can comprise a fault detection module 20, and whether this fault detection module 20 disconnects in order to detect the one section of network connection 50 being connected respectively with described programmable logic controller processing module 10 two ends.When fault detection module 20 detects while holding the one section of network connection 50 being connected to disconnect with the C end of described programmable logic controller processing module 10 or D, the fault detection module 20 of programmable logic controller processing module 10 sends trouble signal, and described programmable logic controller processing module 10 makes alarm unit 30 send guard signal after receiving described trouble signal; One section of network connection 50 that programmable logic controller processing module 10 can also record described disconnection is simultaneously to hold one section of network connection 50 being connected or hold one section of network connection 50 being connected positional information as one section of network connection 50 of described disconnection with D with C, and forms corresponding position signal; After obtaining described position signal, programmable logic controller processing module 10 make display unit 40 show the position of the network connection 50 of described disconnection.
In sum, according to the Controlling System of chemical vapor depsotition equipment of the present invention, this Controlling System is serially connected in a closed ring network by several Controlled by Programmable Controller modules and programmable logic controller processing module by multistage network connection, makes each Controlled by Programmable Controller module carry out communication contact by two-way network line and programmable logic controller processing module.Even if breaking down, the network connection of arbitrary Controlled by Programmable Controller module one end make this Controlled by Programmable Controller module and programmable logic controller processing module lose communication contact, also can carry out communication contact by the network connection of this Controlled by Programmable Controller module the other end and programmable logic controller processing module, improve the reliability of the Controlling System of whole chemical vapor depsotition equipment.The alarm unit that this Controlling System has can send guard signal in the time that network connection breaks down, remind in time operator to carry out Inspection and maintenance to equipment, and the display unit that this Controlling System has can demonstrate the position of breaking down in network connection exactly, convenient operation personnel accurately find position of fault, fix a breakdown in time.
The present invention is described by above-mentioned related embodiment, but above-described embodiment is only for implementing example of the present invention, does not limit the scope of the invention.Amendment in every spirit and category being contained in claims and impartial setting include within the scope of the invention.
Claims (5)
1. the Controlling System of a chemical vapor depsotition equipment, be used for controlling chemical vapor depsotition equipment and carry out depositing operation, described Controlling System comprises programmable logic controller processing module and several Controlled by Programmable Controller modules, it is characterized in that, described several Controlled by Programmable Controller modules and described programmable logic controller processing module are connected in series formation ring network by multistage network connection, make each described Controlled by Programmable Controller module carry out communication contact by two-way network line and described programmable logic controller processing module.
2. Controlling System according to claim 1, it is characterized in that, when one section of network connection that in described ring network, Controlled by Programmable Controller module one end connects described in any one breaks down, one section of network connection and described programmable logic controller processing module that described any one Controlled by Programmable Controller module connects by described any one Controlled by Programmable Controller module the other end are carried out communication contact.
3. Controlling System according to claim 1 and 2, it is characterized in that, each described Controlled by Programmable Controller module comprises a fault detection module, whether described fault detection module disconnects in order to the one section of network connection that detects corresponding Controlled by Programmable Controller module two ends and connect respectively, in the time that described fault detection module detects that one section of network connection of one end disconnects, the Controlled by Programmable Controller module of described correspondence sends trouble signal by one section of network connection of the other end to described programmable logic controller processing module, described programmable logic controller processing module connects an alarm unit, described programmable logic controller processing module makes described alarm unit send guard signal after receiving described trouble signal.
4. Controlling System according to claim 3, it is characterized in that, described programmable logic controller processing module also connects a display unit, in the time that described fault detection module detects that one section of network connection of Controlled by Programmable Controller module one end connection of described correspondence disconnects, the position of the one section of network connection disconnecting described in the Controlled by Programmable Controller module records of described correspondence, and form corresponding position signal; One section of network connection that the Controlled by Programmable Controller module of described correspondence connects by the other end sends position signal to described programmable logic controller processing module, and described programmable logic controller processing module makes described display unit show the position of one section of network connection of described disconnection after receiving described position signal.
5. Controlling System according to claim 1 and 2, it is characterized in that, described programmable logic controller processing module also comprises a fault detection module, whether one section of network connection that described fault detection module connects respectively for detection of described programmable logic controller processing module two ends disconnects, in the time that described fault detection module detects that one section of network connection of one end disconnects, described fault detection module sends trouble signal, described programmable logic controller processing module connects an alarm unit, described programmable logic controller processing module makes described alarm unit send guard signal after receiving described trouble signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210591240.4A CN103911602A (en) | 2012-12-31 | 2012-12-31 | Control system of chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210591240.4A CN103911602A (en) | 2012-12-31 | 2012-12-31 | Control system of chemical vapor deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103911602A true CN103911602A (en) | 2014-07-09 |
Family
ID=51037597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210591240.4A Pending CN103911602A (en) | 2012-12-31 | 2012-12-31 | Control system of chemical vapor deposition equipment |
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| CN (1) | CN103911602A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0380187A (en) * | 1989-08-22 | 1991-04-04 | Nec Corp | Control system for semiconductor vapor growth device |
| TW200719152A (en) * | 2005-11-11 | 2007-05-16 | Delta Electronics Inc | Parallel fast communication interface for PLC host and expander in serial connection |
| TW201037473A (en) * | 2009-04-10 | 2010-10-16 | Hon Hai Prec Ind Co Ltd | System and method for remotely monitoring the scene of industry |
| CN203007418U (en) * | 2012-12-31 | 2013-06-19 | 光达光电设备科技（嘉兴）有限公司 | Control system of chemical vapor deposition equipment |
-
2012
- 2012-12-31 CN CN201210591240.4A patent/CN103911602A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0380187A (en) * | 1989-08-22 | 1991-04-04 | Nec Corp | Control system for semiconductor vapor growth device |
| TW200719152A (en) * | 2005-11-11 | 2007-05-16 | Delta Electronics Inc | Parallel fast communication interface for PLC host and expander in serial connection |
| TW201037473A (en) * | 2009-04-10 | 2010-10-16 | Hon Hai Prec Ind Co Ltd | System and method for remotely monitoring the scene of industry |
| CN203007418U (en) * | 2012-12-31 | 2013-06-19 | 光达光电设备科技（嘉兴）有限公司 | Control system of chemical vapor deposition equipment |
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Application publication date: 20140709 |