CN103900467B - Single fiber coupling ball minute yardstick sensor based on polarization state detection - Google Patents
Single fiber coupling ball minute yardstick sensor based on polarization state detection Download PDFInfo
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- CN103900467B CN103900467B CN201410118921.8A CN201410118921A CN103900467B CN 103900467 B CN103900467 B CN 103900467B CN 201410118921 A CN201410118921 A CN 201410118921A CN 103900467 B CN103900467 B CN 103900467B
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Abstract
Single fiber coupling ball minute yardstick sensor based on polarization state detection belongs to precision instrument manufacture and measurement technology；This sensor includes laser instrument, semi-transparent semi-reflecting prism, wave plate, probe, polarization state detection device A, polarization state detection device B, computer, its middle probe is become with coupling set of balls by single-mode fiber, laser instrument, semi-transparent semi-reflecting prism, wave plate, probe is arranged in order, described laser emitting light is respectively through semi-transparent semi-reflecting prismatic reflection, transmission, reflection light enters polarization state detection device A, transmission light enters probe and realizes light beam reverse transfer by probe outgoing through overcoupling ball, emergent light again passes by wave plate and is entered polarization state detection device B by semi-transparent semi-reflecting prismatic reflection, when the difference of the polarization state that the polarization state that polarization state detection device B detects detects relative to polarization state detection device A changes, i.e. can determine whether that probe and measured hole occur to touch to survey；This sensor accuracy is high, speed is fast.
Description
Technical field
The invention belongs to precision instrument manufacture and measurement technology, relate generally to a kind of based on polarization state
The single fiber coupling ball minute yardstick sensor of detection.
Background technology
Continuous along with aerospace industry, auto industry, electronics industry and sophisticated industry etc.
Development, for the demand sharp increase of accurate micro-member.Due to by space scale and to be measured
The restriction of micro-member capture-effect and the impact of measurement contact force, the essence of micro-member yardstick
Close measurement becomes difficult to achieve, and the degree of depth especially measuring small inner chamber component is difficult to improve, this
A little " bottlenecks " becoming restriction industry development already.In order to realize smaller szie measurement, increase and survey
The amount degree of depth, most widely used way is exactly the inner chamber using elongated probe to go deep into micro-member
Detect, by the way of aiming at sender, measure the small inside dimension on different depth.Therefore,
The accurate measurement of micro-member size at present mainly combines with coordinate measuring machine has very thin probe
Aiming signal sending type detection system be main, owing to the development of measurement of coordinates machine technology is compared into
Ripe, it is provided that accurate three-dimensional space motion, the therefore detection mode of aiming triggering type probe
Become the key of micro-member size detection system design.
At present, the Main Means of micro-member dimensional measurement includes following several method:
1. China Harbin Institute of Technology Tan Jiubin professor and Cui Ji culture and education are awarded et al. and to be proposed one
The probe structure coupled based on double optical fiber, is connected two optical fiber, welding by end welding ball
Ball is as gauge head, and a relatively long optical fibers introduces light, and an other relatively short-range missile goes out light, overcomes
The limitation that low-light pearl scattering method fathoms, it is possible to achieve to diameter not less than 0.01mm,
Aspect ratio is not more than the fine sight during micro deep-hole measurement of 15: 1.Although this method is one
Determine to overcome in degree capture-effect, but the light energy of the reverse transfer of coupling ball realization extremely has
Limit, fathoms and is difficult to promote further.
2. USA National Institute of Standard and Technology employs single fiber measuring staff and combines the spy of low-light pearl
Pin, amplifies about 35 times by optical fiber measuring staff imaging in the two-dimensional direction by optical design, uses
2 area array CCDs are differentiated and are received optical fiber measuring staff imaging on two-dimensional directional, then to reception
To image carry out contour detecting, thus monitor the small shifting during measuring of optical fiber measuring staff
Dynamic, and then realize trigger-type measurement, the theoretical resolution of this detection system can reach 4nm,
The probe diameter of detection system is Φ 75 μm, measures the aperture of Φ 129 μm in experiment, its
Expanded uncertainty probit has reached 70nm (k=2), and measurement power is μ N magnitude.This
Method detection resolving power is high, and certainty of measurement is high, and the gauge head of use is prone to miniaturization, can measure
The micropore of bigger aspect ratio.But the two dimension of detection optical fiber measuring staff is touched displacement and must be made in method
By two set imaging systems, causing system structure more complicated, measurement data amount of calculation is bigger,
These factors cause the real-time of detection system poor, and system constitutes more complicated.
3. Union Bank of Switzerland metering office have developed a novel coordinate measuring machine and is devoted to little
Structural member nano-precision can the measurement of trace.This measuring machine have employed based on stamp identification former
The novel touch probe of flexure hinge structure of reason, this design can reduce moving mass and
Guarantee omnidirectional soft, be a probe with three-D space structure detectivity.This
The measurement power of one sensing arrangement is less than 0.5mN, supports removable probe, probe diameter simultaneously
Minimum to Φ 100 μm.Detection system combines a high position developed by Philips CFT
The platform of precision, the positional precision of platform is 20nm.The mark of this measurement systematic survey repeatability
Quasi-deviation reaches 5nm, and the uncertainty of measurement result is 50nm.This kind of method structure design
Complexity, requires that measuring staff has higher rigidity and hardness simultaneously, is otherwise difficult to effective touching
Displacement senses, and this makes measuring staff structure be difficult to further miniaturization, and the aspect ratio of measurement is simultaneously
Being restricted, the resolving power of detection system is difficult to improve further.
4. Harbin Institute of Technology of China Cui Ji culture and education is awarded and is proposed a kind of base with Yang Fuling et al.
In pore size measurement apparatus and the method for FBG Bending, the method utilizes fiber grating to add
The probe of work and corresponding light source, detection device, as aiming at triggering system, coordinate double-frequency laser
Interferometer measuring motion, it is possible to obtain the pore size of different cross section.The minute yardstick of the method passes
Sensor is when tactile survey deformation, and the main stress of probe does not act on fiber grating, dividing of system
Resolution is the lowest, it is difficult to improve further.
In sum, in current microsize and coordinates detection method, due to the spy of optical fiber fabrication
Needle set have probe size little, measure contact force little, measure aspect ratio big, certainty of measurement is high
Feature and obtain extensive concern, utilize its distinctive optical characteristics and mechanical property by multiple
Mode achieves the minute sized accurate measurement on certain depth.Existing measurement means is mainly deposited
Problem have:
1. the tactile displacement resolving power of detection system is difficult to improve further.Existing detection system
The primary amplification of system is relatively low, result in its overall amplification relatively low, it is difficult to realize its tactile location
Move the further raising of resolving power.The light of pore size measuring method based on FBG Bending
Main micro-touch displacement exercising result can not be applied on fiber grating by fine light gridded probe, enters
And the transducing signal that is converted into spectral information is faint, the resolving power of system is the lowest.
2. detection system poor real, it is difficult to realize accurate on-line measurement.American National mark
The detection method that quasi-Institute for Research and Technology uses must use two-way area array CCD to receive signal graph
Picture, it is necessary to use more complicated image algorithm could realize optical fiber measuring staff is touched the high score of displacement
Distinguishing that power is monitored, this causes measurement system to need data volume to be processed to be greatly increased, and reduces detection
The real-time performance of system, it is difficult to aim at during realizing small inner chamber size and two-dimensional coordinate measurement
Sender and the synchronicity opened, only measure.
Summary of the invention
In order to overcome the deficiency of above-mentioned prior art, to meet small inner chamber chi, in high precision, greatly
Aspect ratio and the demand quickly measured, the present invention proposes one can go deep into micro-deep inside cavity general
Optical fiber coupling ball and inner chamber body sidewall touch survey positional information and are converted into the base of light polarization information
Single fiber coupling ball minute yardstick sensor in polarization state detection.
The object of the present invention is achieved like this:
A kind of single fiber coupling ball minute yardstick sensor based on polarization state detection, described sensor
Including laser instrument, semi-transparent semi-reflecting prism,Wave plate, probe, polarization state detection device A,
Polarization state detection device B, computer, described probe is become with coupling set of balls by optical fiber, described
Optical fiber is single-mode fiber, and optical fiber is made up of covering and fibre core, and one end of optical fiber is fixed with coupling ball
Connecting, coupling ball is as the contact of probe；Laser instrument, semi-transparent semi-reflecting prism,Wave plate,
Probe is arranged in order, and wherein the emergent light of laser instrument is through the beam optical axis of semi-transparent semi-reflecting prism transmission
With the optical axis coincidence of optical fiber, described polarization state detection device A is positioned at the emergent light warp of laser instrument
On reflected light path optical axis A after semi-transparent semi-reflecting prismatic reflection, polarization state detection device B is positioned at
On the emergent light of probe reflected light path optical axis B after semi-transparent semi-reflecting prismatic reflection, by number
Polarization state detects respectively device A according to line be connected with computer with polarization state detection device B,
Probe is placed in measured hole；Polarization with the light beam that described polarization state detection device A detects
State is as reference signal, with the polarization state of the light beam that described polarization state detection device B detects
As detection signal, when the polarization state difference relative to the polarization state of reference signal detecting signal
When changing, probe and measured hole occur to touch to be surveyed.
The invention have the characteristics that and good result:
1. the probe of sensor is to along axle and the force-sensitive of vertical axle, therefore can realize three
The detection of dimension space position signalling.
2. optical detection signal transmits at inside of optical fibre, is not affected by micropore inwall, measures
Maximum aspect ratio, up to 50: 1, meets big aspect ratio micro measurement requirement.
3. judging to touch by the change of detection outgoing polarization state and survey signal, precision is high, processes
Speed is fast, meets industrial requirement.
4. this sensor introduces with reference to polarized light, environmental factors can be eliminated and survey judging to touch
The impact of signal, substantially increases the adaptation ability of sensors towards ambient, is applicable to industry existing
Field measurement.
Accompanying drawing explanation
Fig. 1 is single fiber coupling ball minute yardstick sensor population structure based on polarization state detection
Schematic diagram；
Fig. 2 is the profile of A-A in Fig. 1.
In figure: 1, laser instrument, 2, semi-transparent semi-reflecting prism, 3,Wave plate, 4, probe, 5,
Optical fiber, 6, coupling ball, 7, measured hole, 8, polarization state detection device A, 9, polarization state inspection
Survey device B, 10a, reflected light path optical axis, 10b, reflected light path optical axis, 11, computer,
12, covering, 13, fibre core.
Detailed description of the invention
Below in conjunction with the accompanying drawings the embodiment of the present invention is described in detail.
A kind of single fiber coupling ball minute yardstick sensor based on polarization state detection, described sensor
Including laser instrument 1, semi-transparent semi-reflecting prism 2,Wave plate 3, probe 4, polarization state detection dress
Putting A8, polarization state detection device B9, computer 11, described probe 4 is by optical fiber 5 and coupling
Closing ball 6 to form, described optical fiber 5 is single-mode fiber, and optical fiber 5 is by covering 12 and fibre core 13 structure
Becoming, one end of optical fiber 5 is fixing with coupling ball 6 to be connected, and coupling ball 6 is as the contact of probe 4；
Laser instrument 1, semi-transparent semi-reflecting prism 2,Wave plate 3, probe 4 are arranged in order, wherein laser
The emergent light of device 1 beam optical axis through the transmission of semi-transparent semi-reflecting prism 2 and the optical axis weight of optical fiber 5
Closing, described polarization state detection device A8 is positioned at the emergent light of laser instrument 1 through semi-transparent semi-reflecting prism
On reflected light path optical axis A10a after 2 reflections, polarization state detection device B9 is positioned at probe 4
Emergent light through semi-transparent semi-reflecting prism 2 reflect after reflected light path optical axis B10b on, by number
Respectively polarization state is detected device A8 and polarization state detection device B9 and computer 11 phase according to line
Even, probe 4 is placed in measured hole 7；The light detected with described polarization state detection device A8
The polarization state of bundle is as reference signal, the light beam detected with described polarization state detection device B9
Polarization state as detection signal, when the polarization state of detection signal is relative to the polarization of reference signal
When the difference of state changes, probe 4 and measured hole 7 occur to touch to be surveyed.
The work process of the present invention is as follows:
Laser instrument 1 sends S light as incident illumination, and a part of S light is through semi-transparent semi-reflecting prism 2
Being reflected into polarization state detection device A8, its polarization state is as with reference to polarization state, another part
The semi-transparent semi-reflecting prism of S light transmission 2, then pass throughWave plate 3 enters single fiber 4, through overcoupling
Ball 6 realizes the reverse transfer of light and by probe 4 outgoing, and emergent light again passes byWave plate
3 and by semi-transparent semi-reflecting prism 2 be reflected into polarization state detection device B9.Due to twice process
Wave plate 3, the polarization state of the polarized light reflected in theory will be turned into P light.At probe 4 by edge
When axle and vertical direction of principal axis active force occur to touch survey deformation, the polarization transmitting light in optical fiber will be changed
State, in optical fiber, the polarization state of the optical signal of transmission can be with the size of deformation quantity to other polarization states
Conversion, polarization state detects the polarization state of light beam received by device B9 and changes, i.e. this light
The polarization state of bundle is sent out relative to the difference of the reference polarization state that polarization state detection device A8 detects
Changing, using this change as measuring signal, for mobile device or realize measurement apparatus and survey long.
Claims (1)
1. a single fiber coupling ball minute yardstick sensor based on polarization state detection, it is characterised in that: described sensing
Device include laser instrument (1), semi-transparent semi-reflecting prism (2),Wave plate (3), probe (4), polarization state detection device
A (8), polarization state detection device B (9), computer (11), described probe (4) is by optical fiber (5) and coupling ball
(6) composition, described optical fiber (5) is single-mode fiber, and optical fiber (5) is made up of covering (12) and fibre core (13), optical fiber
(5) one end is fixing with coupling ball (6) to be connected, and coupling ball (6) is as the contact of probe (4)；Laser instrument (1),
Semi-transparent semi-reflecting prism (2),Wave plate (3), probe (4) are arranged in order, wherein the emergent light warp of laser instrument (1)
The beam optical axis of semi-transparent semi-reflecting prism (2) transmission and the optical axis coincidence of optical fiber (5), described polarization state detection device
A (8) is positioned at the emergent light of laser instrument (1) reflected light path optical axis A (10a) after semi-transparent semi-reflecting prism (2) reflects
On, polarization state detection device B (9) is positioned at anti-after semi-transparent semi-reflecting prism (2) reflects of the emergent light of probe (4)
Penetrate on light path light axis B (10b), respectively polarization state is detected by data wire device A (8) and polarization state detection
Device B (9) is connected with computer (11), and probe (4) is placed in measured hole (7)；With described polarization state detection dress
Put the polarization state of the light beam that A (8) detects as reference signal, with described polarization state detection device B (9) inspection
The polarization state of the light beam measured is as detection signal, when the polarization state of detection signal is relative to reference signal
When the difference of polarization state changes, probe (4) and measured hole (7) occur to touch to be surveyed.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410118921.8A CN103900467B (en) | 2014-03-20 | 2014-03-20 | Single fiber coupling ball minute yardstick sensor based on polarization state detection |
| GB1611798.8A GB2536171B (en) | 2014-03-20 | 2014-12-31 | Method and apparatus based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part |
| US15/101,905 US9618331B2 (en) | 2014-03-20 | 2014-12-31 | Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part |
| PCT/CN2014/095838 WO2015139505A1 (en) | 2014-03-20 | 2014-12-31 | Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410118921.8A CN103900467B (en) | 2014-03-20 | 2014-03-20 | Single fiber coupling ball minute yardstick sensor based on polarization state detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103900467A CN103900467A (en) | 2014-07-02 |
| CN103900467B true CN103900467B (en) | 2017-01-04 |
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| CN201410118921.8A Expired - Fee Related CN103900467B (en) | 2014-03-20 | 2014-03-20 | Single fiber coupling ball minute yardstick sensor based on polarization state detection |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9618331B2 (en) * | 2014-03-20 | 2017-04-11 | Harbin Institute Of Technology | Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part |
| CN104677293B (en) * | 2015-03-05 | 2017-06-09 | 哈尔滨工业大学 | The three core fibre grating micro-scale measurement probe manufacturing methods based on self assembly principle |
| CN104677294B (en) * | 2015-03-05 | 2017-06-09 | 哈尔滨工业大学 | The seven core fibre grating micro-scale measurement probe manufacturing methods based on self assembly principle |
| CN104677283B (en) * | 2015-03-05 | 2017-06-09 | 哈尔滨工业大学 | Four-core fiber grating micro-scale measurement probe manufacturing method based on self assembly principle |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS61196103A (en) * | 1985-02-27 | 1986-08-30 | Nec Corp | Displacement meter |
| CN1036292C (en) * | 1992-09-17 | 1997-10-29 | 清华大学 | Two-frequency laser collimation measuring method and interferometer |
| CN1166918C (en) * | 2001-08-31 | 2004-09-15 | 清华大学 | Tumble angle measuring method and measurer |
| CN1200247C (en) * | 2001-11-02 | 2005-05-04 | 清华大学 | Transverse double-frequency zeeman laser linearity/coaxality measuring mechanism |
| CN1180222C (en) * | 2002-06-07 | 2004-12-15 | 清华大学 | Double-frequency confocal step height microscope measuring device |
| US6876456B2 (en) * | 2002-09-27 | 2005-04-05 | The Regents Of The University Of California | Absolute calibration of optical flats |
| US8416496B2 (en) * | 2009-03-23 | 2013-04-09 | Ase Optics Inc. | Device for dividing an optical beam into four beams and non-contact optical profilometer comprising same |
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