CN103759643B - Two-dimentional micro-scale measurement device and method based on twin-core fiber grating - Google Patents
Two-dimentional micro-scale measurement device and method based on twin-core fiber grating Download PDFInfo
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- CN103759643B CN103759643B CN201410030738.2A CN201410030738A CN103759643B CN 103759643 B CN103759643 B CN 103759643B CN 201410030738 A CN201410030738 A CN 201410030738A CN 103759643 B CN103759643 B CN 103759643B
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Abstract
Two-dimentional micro-scale measurement device and method based on twin-core fiber grating belongs to precision instrument manufacture and field of measuring technique; Described device includes wide frequency light source, spectroanalysis instrument, optical circulator, control computer, Multichannel photoswitch and external reference grating, Multichannel photoswitch is connected by two single-mode fibers respectively with twin-core fiber fan-out device, one end of twin-core fiber is connected on twin-core fiber fan-out device, being fixedly mounted with twin-core fiber light gridded probe by Probe clip holder on the other end of twin-core fiber, described twin-core fiber is connected formation path with twin-core fiber light gridded probe; Described method is to control computer to control Multichannel photoswitch switching-over light path, uses spectroanalysis instrument to measure the reflectance spectrum of fiber grating respectively, and utilizes differential data Processing Algorithm, it is achieved without the two-dimentional micro-scale measurement of temperature coupling. The present invention has precision height, contact force is little, the feature of the effects that is not masked, probe long service life.
Description
Technical field
The invention belongs to precision instrument manufacture and field of measuring technique, particularly to a kind of two-dimentional micro-scale measurement device and method based on twin-core fiber grating.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member. Owing to being subject to the restriction of space scale and micro-member capture-effect to be measured and measuring the impact of contact force, the accurate measurement of micro-member yardstick becomes difficult to achieve, especially the degree of depth measuring small inner chamber component is difficult to improve, and these become " bottleneck " of restriction industry development already. In order to realize smaller szie measurement, increase fathoming, most widely used way is exactly use the inner chamber that elongated probe gos deep into micro-member to be detected, and measures the small inside dimension on different depth by aiming at the mode of sender. Therefore, the accurate measurement of current micro-member size mainly combines the aiming signal sending type detection system with very thin probe based on coordinate measuring machine, development comparative maturity due to measurement of coordinates machine technology, can providing accurate three-dimensional space motion, therefore the detection mode of aiming triggering type probe becomes the key of micro-member size detection system design.
At present, the Main Means of micro-member dimensional measurement includes following several method:
1. China Harbin Institute of Technology Tan Jiubin professor and Cui Ji culture and education are awarded et al. and to be proposed a kind of probe structure coupled based on double; two optical fiber, two optical fiber by the connection of end welding ball, welding ball is as gauge head, one relatively long optical fibers introduce light, other one relatively short-range missile go out light, overcome the limitation that low-light pearl scattering method fathoms, it is possible to achieve diameter is not less than 0.01mm, aspect ratio be not more than 15: 1 micro deep-hole measure time fine sight.Although this method overcomes capture-effect to a certain extent, but the light energy of the reverse transfer of coupling ball realization is extremely limited, fathoms and is difficult to further lifting.
2. USA National Institute of Standard and Technology employs the single fiber measuring staff probe in conjunction with low-light pearl, in the two-dimensional direction optical fiber measuring staff imaging is amplified about 35 times by optical design, differentiate with 2 area array CCDs and receive optical fiber measuring staff imaging on two-dimensional directional, then the image received is carried out contour detecting, thus monitoring the minute movement in measurement process of optical fiber measuring staff, and then realize trigger-type measurement, the theoretical resolution of this detection system can reach 4nm, the probe diameter of detection system is �� 75 ��m, experiment measures the aperture of �� 129 ��m, its expanded uncertainty probit has reached 70nm (k=2), measurement power is �� N magnitude. this method detection resolving power is high, and certainty of measurement is high, and the gauge head of use is prone to miniaturization, it is possible to measure the micropore of bigger aspect ratio. but the two dimension of the method detection optical fiber measuring staff touches displacement must use two set imaging systems, causes that system structure is more complicated, and measurement data amount of calculation is relatively larger, and these factors cause that the real-time of detection system is poor, and system constitutes more complicated.
3. what Union Bank of Switzerland metering office have developed that a novel coordinate measuring machine is devoted to structural features nano-precision can the measurement of trace. This measuring machine have employed the novel touch probe of the flexure hinge structure based on stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity. The measurement power of this sensing arrangement, lower than 0.5mN, supports removable probe simultaneously, and probe diameter is minimum to �� 100 ��m. Detection system combines the platform of a high position precision developed by PhilipsCFT, and the positional precision of platform is 20nm. The standard deviation of this measurement systematic survey repeatability reaches 5nm, and the uncertainty of measurement result is 50nm. This kind of method complex structural designs, requiring that measuring staff has higher rigidity and hardness simultaneously, be otherwise difficult to effectively touch displacement sensing, this makes measuring staff structure be difficult to further miniaturization, the aspect ratio measured is restricted simultaneously, and the resolving power of detection system is difficult to further raising.
4. Harbin Institute of Technology of China Cui Ji culture and education awards a kind of pore size measurement apparatus based on FBGBending and the method for proposing with Yang Fuling et al., the method utilizes probe and corresponding light source, detecting device that fiber grating processes as aiming at triggering system, coordinate two-frequency laser interferometer measuring motion, it is possible to obtain the pore size of different cross section. The minute yardstick sensor of the method is when tactile survey deformation, and the main stress of probe does not act on fiber grating, and the resolution of system is very low, it is difficult to improve further.
In sum, in current microsize and coordinates detection method, due to the probe of optical fiber fabrication have probe size little, measure contact force little, measure the feature that aspect ratio is big, certainty of measurement is high and obtain extensive concern, utilize its distinctive optical characteristics and mechanical property to be accomplished in several ways the minute sized accurate measurement on certain depth. The problem that existing measurement means is primarily present has:
1. the tactile displacement resolving power of detection system is difficult to further raising. The primary amplification of existing detection system is relatively low, result in its overall amplification relatively low, it is difficult to realize the further raising of its tactile displacement resolving power.Main micro-touch displacement exercising result can not be applied on fiber grating by the fiber grating probe based on the pore size measuring method of FBGBending, and then the transducing signal being converted into spectral information is faint, and the resolving power of system is very low.
2. detection system poor real, it is difficult to realize accurate on-line measurement. The detection method that USA National Institute of Standard and Technology adopts must use two-way area array CCD to receive signal pattern, more complicated image algorithm must be used could to realize optical fiber measuring staff is touched the high resolution monitoring of displacement, this causes that measurement system needs data volume to be processed to be greatly increased, reduce the real-time performance of detection system, it is difficult to realize the synchronicity aiming at sender and opening in small inner chamber size and two-dimensional coordinate measurement process, only measure.
3. there is two dimension and radially touch the coupling of displacement. Probe based on the pore size measuring method of FBGBending has each consistent to performance, coupling is there is when radially two dimension touches displacement sensing, and cannot separate, cause that two-dimensional measurement exists very big error, it is impossible to realize radially two dimension and touch the accurate measurement of displacement.
4. do not possess the decoupling ability of radial and axial detection. Above-mentioned detection method or do not possess axial detection ability or do not possess the decoupling ability of radial and axial detection, when carrying out micro-scale measurement, measuring process is complicated, it is low to measure efficiency.
Summary of the invention
It is an object of the invention to overcome micro-member dimension measurement method resolving power in prior art low, the drawback that tested dimension is single, a kind of device and method suitable in micro-member two dimension micro-scale measurement is provided, twin-core fiber light gridded probe is after end is by tactile displacement effect, stress causes that the parameter of fiber grating changes, and then there is corresponding change in its reflectance spectrum centre wavelength, Multichannel photoswitch is adopted to carry out the passage of handover measurement fiber grating, to obtain corresponding reflectance spectrum centre wavelength information, then it is made differential data to process, reduce the temperature fluctuation impact on measurement result, substantially increase this device adaptive capacity to environment, thus realizing a kind of brand-new temperature without coupling two dimension micro-scale measurement.
The technical scheme is that a kind of two-dimentional micro-scale measurement device based on twin-core fiber grating, including wide frequency light source, spectroanalysis instrument, light annular device, control computer, Multichannel photoswitch and external reference grating, described wide frequency light source and spectroanalysis instrument are connected with light annular device respectively, optical circulator and Multichannel photoswitch, Multichannel photoswitch and control computer, control computer and spectroanalysis instrument, Multichannel photoswitch is connected formation path with external reference grating, Multichannel photoswitch is connected by two single-mode fibers respectively with twin-core fiber fan-out device, one end of twin-core fiber is connected on twin-core fiber fan-out device, the other end of twin-core fiber is fixedly mounted with twin-core fiber light gridded probe by Probe clip holder, described twin-core fiber is connected formation path with twin-core fiber light gridded probe.
A kind of two-dimentional micro-scale measurement method based on twin-core fiber grating is as follows: in measurement process, Multichannel photoswitch switches different light paths under the control controlling computer, spectroanalysis instrument is used to measure the double joint fiber grating of twin-core fiber grating probe interior and the reflectance spectrum of external reference grating respectively, Data processing, two fiber grating reflectance spectrum centre wavelengths in twin-core fiber light gridded probe are done differential data process, the decoupling one-dimensional radial direction along twin-core fiber fibre core distribution arrangement can touch displacement and temperature drift, two fiber grating reflectance spectrum centre wavelength meansigma methodss and external reference grating reflection spectral centre wavelength in twin-core fiber light gridded probe are done differential data process, obtain without the axially tactile displacement radially touching displacement and temperature drift coupling, realize the two-dimentional micro-scale measurement without temperature coupling.
The invention have the advantage that
1. have precision height based on the two-dimentional micro-scale measurement device and method of twin-core fiber grating, contact force is little, do not damage tested component surface, the feature of probe long service life.
2. optical detection signal is only in fiber grating internal transmission, contact in space is converted into the change of reflectance spectrum centre wavelength, it is not subject to the impact of component capture-effect when measuring minute yardstick component, measures aspect ratio up to 100: 1, meet big aspect ratio micro structure micro-scale measurement requirement.
3. can realize based on the two-dimentional micro-scale measurement method of twin-core fiber grating radial and axial without coupling measurement simultaneously, make the step of micro-scale measurement be simplified, improve the efficiency of micro-scale measurement.
4. the differential compensation system of reference each other is devised in probe interior, in conjunction with the two-dimentional micro-scale measurement method based on twin-core fiber grating, eliminate the variation of ambient temperature impact on measuring, substantially increase the adaptive capacity of sensors towards ambient, can be deep into traditional measurement instrument cannot the space of normal operation and environment to carry out accurate measurement, such as narrow and small hemi-closure space and inflammable and explosive environment etc., it is also applied for industry spot and measures.
Accompanying drawing explanation
Fig. 1 is based on the two-dimentional micro-scale measurement apparatus structure schematic diagram of twin-core fiber grating;
Fig. 2 is A-A profile in Fig. 1;
Fig. 3 is twin-core fiber light gridded probe profile in Fig. 1;
In figure: 1. wide frequency light source, 2. spectroanalysis instrument, 3. optical circulator, 4. control computer, 5. Multichannel photoswitch, 6. single-mode fiber, 7. external reference grating, 8. twin-core fiber fan-out device, 9. twin-core fiber, 10. Probe clip holder, 11. twin-core fiber light gridded probes.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail:
A kind of two-dimentional micro-scale measurement device based on twin-core fiber grating, including wide frequency light source 1, spectroanalysis instrument 2, light annular device 3, control computer 4, Multichannel photoswitch 5 and external reference grating 7, described wide frequency light source 1 and spectroanalysis instrument 2 are connected with light annular device 3 respectively, optical circulator 3 and Multichannel photoswitch 5, Multichannel photoswitch 5 and control computer 4, control computer 4 and spectroanalysis instrument 2, Multichannel photoswitch 5 is connected formation path with external reference grating 7, Multichannel photoswitch 5 is connected by two single-mode fibers 6 respectively with twin-core fiber fan-out device 8, one end of twin-core fiber 9 is connected on twin-core fiber fan-out device 8, the other end of twin-core fiber 9 is fixedly mounted with twin-core fiber light gridded probe 11 by Probe clip holder 10, described twin-core fiber 9 is connected formation path with twin-core fiber light gridded probe 11.
A kind of two-dimentional micro-scale measurement method based on twin-core fiber grating is as follows: in measurement process, Multichannel photoswitch 5 switches different light paths under the control controlling computer 4, spectroanalysis instrument 2 is used to measure the reflectance spectrum of the double joint fiber grating within twin-core fiber light gridded probe 11 and external reference grating 7 respectively, Data processing, two fiber grating reflectance spectrum centre wavelengths in twin-core fiber light gridded probe 11 are done differential data process, the decoupling one-dimensional radial direction along twin-core fiber fibre core distribution arrangement can touch displacement and temperature drift, two fiber grating reflectance spectrum centre wavelength meansigma methodss and external reference grating 7 reflectance spectrum centre wavelength in twin-core fiber light gridded probe 11 are done differential data process, obtain without the axially tactile displacement radially touching displacement and temperature drift coupling, realize the two-dimentional micro-scale measurement without temperature coupling.
The work process of the present invention is as follows:
The wide band light that wide frequency light source 1 produces, Multichannel photoswitch 5 is entered through optical circulator 3, Multichannel photoswitch 5 is under the control controlling computer 4, and the reflectance spectrum centre wavelength of two fiber gratings and external reference grating 7 in twin-core fiber light gridded probe 11 measured respectively by spectroanalysis instrument 2. Surveying when twin-core fiber light gridded probe 11 and component to be measured occur to touch, the reflectance spectrum centre wavelength of twin-core fiber light gridded probe 11 inner fiber grating will change. The reflectance spectrum centre wavelength of two fiber gratings in twin-core fiber light gridded probe 11 is made differential data process, it is possible to obtain the radial direction along twin-core fiber fibre core distribution arrangement of temperature decoupling touches displacement; The reflectance spectrum centre wavelength of two fiber grating reflectance spectrum centre wavelength meansigma methodss in twin-core fiber light gridded probe 11 Yu external reference grating 7 is done differential data process, it is possible to obtain without the axially tactile displacement radially touching displacement and warm drift coupling.
Comprehensive radial and axial tactile displacement information, finally realizes the two-dimentional micro-scale measurement of component to be measured.
Claims (2)
1. the two-dimentional micro-scale measurement device based on twin-core fiber grating, including wide frequency light source (1), spectroanalysis instrument (2), light annular device (3), control computer (4), Multichannel photoswitch (5) and external reference grating (7), described wide frequency light source (1) and spectroanalysis instrument (2) are connected with light annular device (3) respectively, light annular device (3) and Multichannel photoswitch (5), Multichannel photoswitch (5) and control computer (4), control computer (4) and spectroanalysis instrument (2), Multichannel photoswitch (5) is connected formation path with external reference grating (7), it is characterized in that Multichannel photoswitch (5) is connected by two single-mode fibers (6) respectively with twin-core fiber fan-out device (8), one end of twin-core fiber (9) is connected on twin-core fiber fan-out device (8), the other end of twin-core fiber (9) is fixedly mounted with twin-core fiber light gridded probe (11) by Probe clip holder (10), described twin-core fiber (9) is connected formation path with twin-core fiber light gridded probe (11).
2. according to the measuring method of the two-dimentional micro-scale measurement device based on twin-core fiber grating a kind of described in claim 1, it is characterized in that in measurement process, Multichannel photoswitch (5) light path that switching is different under the control controlling computer (4), spectroanalysis instrument (2) is used to measure the reflectance spectrum of the internal double joint fiber grating of twin-core fiber light gridded probe (11) and external reference grating (7) respectively, Data processing, two fiber grating reflectance spectrum centre wavelengths in twin-core fiber light gridded probe (11) are done differential data process, the decoupling one-dimensional radial direction along twin-core fiber fibre core distribution arrangement can touch displacement and temperature drift, two fiber grating reflectance spectrum centre wavelength meansigma methodss and external reference grating (7) reflectance spectrum centre wavelength in twin-core fiber light gridded probe (11) are done differential data process, obtain without the axially tactile displacement radially touching displacement and temperature drift coupling, realize the two-dimentional micro-scale measurement without temperature coupling.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410030738.2A CN103759643B (en) | 2014-01-17 | 2014-01-17 | Two-dimentional micro-scale measurement device and method based on twin-core fiber grating |
| GB1610692.4A GB2536588B (en) | 2014-01-17 | 2014-12-25 | Method and apparatus based on fiber bragg grating probe for measuring structures of a micro part |
| US15/112,179 US10060723B2 (en) | 2014-01-17 | 2014-12-25 | Method and equipment based on multi-core fiber Bragg grating probe for measuring structures of a micro part |
| PCT/CN2014/094987 WO2015106621A1 (en) | 2014-01-17 | 2014-12-25 | Method and equipment based on multi-core fiber bragg grating probe for measuring structures of a micro part |
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| CN201410030738.2A CN103759643B (en) | 2014-01-17 | 2014-01-17 | Two-dimentional micro-scale measurement device and method based on twin-core fiber grating |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US10060723B2 (en) | 2014-01-17 | 2018-08-28 | Harbin Institute Of Technology | Method and equipment based on multi-core fiber Bragg grating probe for measuring structures of a micro part |
| CN104677291A (en) * | 2015-03-08 | 2015-06-03 | 哈尔滨工业大学 | Double-core fiber bragg grating probe micro-scale measuring device and method based on linear cavity optical fiber laser |
| CN104697448A (en) * | 2015-03-05 | 2015-06-10 | 哈尔滨工业大学 | Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device |
| CN104848879B (en) * | 2015-03-05 | 2017-06-13 | 哈尔滨工业大学 | Fiber Bragg grating sensor signal demodulating method based on linear work grating matching method |
| US10082383B2 (en) | 2015-03-05 | 2018-09-25 | Harbin Institute Of Technology | Method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core FBG probe |
| CN106404741B (en) * | 2016-10-11 | 2018-11-13 | 北京信息科技大学 | Enhancing Raman spectrum liquid detecting method based on dual-hollow optical fiber |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102022980A (en) * | 2010-10-24 | 2011-04-20 | 天津大学 | Micro-longhole measuring method based on fiber grating |
| CN102564309A (en) * | 2011-12-16 | 2012-07-11 | 哈尔滨工业大学 | Device and method for measuring micro-pore size based on fiber Bragg grating |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100090590A (en) * | 2009-02-06 | 2010-08-16 | 한국과학기술원 | Multiplex physical quantity measuring method and system using optical multiple fiber bragg grating |
| KR20110032514A (en) * | 2009-09-23 | 2011-03-30 | 한국에너지기술연구원 | High-speed demodulation system for fbg sensors using multi-window fabry-perot filter |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102022980A (en) * | 2010-10-24 | 2011-04-20 | 天津大学 | Micro-longhole measuring method based on fiber grating |
| CN102564309A (en) * | 2011-12-16 | 2012-07-11 | 哈尔滨工业大学 | Device and method for measuring micro-pore size based on fiber Bragg grating |
Non-Patent Citations (2)
| Title |
|---|
| Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios;Jiwen Cui et.al;《OPTICS LETTERS》;20111201;第36卷(第23期);4689-4691 * |
| 基于双光纤耦合的微深孔测量方法;崔继文 等;《红外与激光工程》;20090228;第38卷(第1期);106-109 * |
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