CN103884284A - Embedded laser displacement sensor and normalization processing method thereof - Google Patents
Embedded laser displacement sensor and normalization processing method thereof Download PDFInfo
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Abstract
The invention provides an embedded laser displacement sensor. The embedded laser displacement sensor comprises parts of an emission light filter, an emission lens set, a laser device, a casing, a processing circuit, a socket, a cable, a photoelectric device, a receiving lens set and a receiving light filter. The embedded laser displacement sensor is characterized in that all the parts of the embedded laser displacement sensor are integrated on a measuring probe to realize the embedded measuring process. The processing circuit realizes self-adaption control on output light intensity and modulation frequency of the laser device, a feedback signal is from the sampling data of the photoelectric device, a waveform peak value of light spot imaging is employed unifiedly as the feedback information, the output light intensity and the modulation frequency of the laser device are controlled, so a measuring error caused by change of a detected object is avoided. The processing circuit makes the digital position signal of the light spot imaging acquired through sampling be in one-to-one correspondence with a reference displacement to acquire a measuring curve, then successive polynomial fitting of the measuring curve is employed to eliminate a non-linear measuring error, and thereby all the sensors have standard normalization output.
Description
Technical field
What the present invention relates to is the sensor in a kind of displacement measuring technology field, specifically a kind of embedded laser displacement transducer and method for normalizing.
Background technology
At present, the manufacturing industry various online detection meanss of opposing have also proposed more and more higher requirement, except the measurement performances such as high precision, noncontact, digitizing require, requirement for maintainabilities such as stability, versatility, interchangeability also grows with each passing day, to constantly reducing maintenance cost, become the future trend of generally acknowledged online detection field.Wherein, displacement is an important measurement content, is widely used in the every field of industrial detection.Laser triangle displacement sensor, as a kind of contactless measurement in Photoelectric Detection, has the advantages such as measuring speed is fast, precision is high, antijamming capability is strong, measurement point is little, applied widely, is subject to paying close attention to more and more widely.Wherein the most representative is the production high precision measuring instrument companies such as Japanese Keyence, Germany's rice iridium, U.S. Banner, U.S. MTI, Japanese 0mron, is all classified as important high-tech product, and has released the laser displacement sensor of seriation.
But existing laser displacement sensor is all made up of gauge head and two parts of electronic box conventionally in the world at present, is connected by cable, complicated structure, volume (the particularly volume of electronic box) is large, and cost is high.In use, need extra electronic box be installed and shown link, to some occasion and be not suitable for, it is convenient not to operate.Particularly, in on-the-spot use procedure, the probability of damage of gauge head and damaged condition, all far away higher than electronic box, therefore often need to be changed gauge head.But the gauge head of existing various laser displacement sensors and electronic box are through careful demarcation and calibration before dispatching from the factory, are one to one, the data of gauge head are the data of peculiar formalization specification separately, between the gauge head of same manufacturer different sensors and electronic box, can not exchange.Therefore, cannot meet the requirement of embedded TT&C system.
Germany's rice is according to first proposing integrated laser displacement transducer concept, and priority is released the integrated laser displacement sensor of ILD1400 and two serial treatment circuits of ILD1700.But the result of this integrated transducer treatment circuit is only hot spot is imaged on the positional information on line array CCD, instead of real shift value.Need to further process at host computer, and to non-linear calibration theing exist in principle, could finally obtain tested shift value.This has not only increased the computing workload of host computer, and cannot meet plug and play and exempt from the as requested embedded of computing.
On the other hand, existing laser displacement sensor is in the time measuring different target, such as, due to the difference (color, roughness, texture etc.) of target surface characteristic, generally can cause the difference that receives signal waveform quality even significantly to decline, therefore bring very large measuring error, even cause sensor to work.This is also the common defects place of this type of laser displacement sensor.
Summary of the invention
The object of the invention is to the problems referred to above that exist for existing laser displacement sensor, propose a kind of laser displacement sensor of realizing embedded installation.The composition of this laser displacement sensor only has a gauge head and cable, the repertoires such as the data acquisition of sensor, data processing, demarcation calibration are integrated among transducer probe assembly, and adopting the digital interface of standard to export, Output rusults is normalization, standardized data.Be aided with unique normalization laser control method and normalization data disposal route simultaneously, in ensureing the original function and precision of conventional laser sensor, make the structure of whole sensing system simpler, integrated level is higher, volume is less, and can realize 100% exchange and embedded installation, measure and safeguard convenient flexibly, usable range is more extensive.
The present invention is achieved by the following technical solutions:
Laser displacement sensor of the present invention mainly comprises: transmitting optical filter, transmitting mirror group, laser instrument, shell, treatment circuit, socket, cable, photoelectric device, reception mirror group, reception optical filter.The workflow of whole system is: after the laser beam of laser instrument transmitting is collimated and focused on by transmitting mirror group, be irradiated to the surface of measured target and form a hot spot, this hot spot is imaged on photoelectric device by receiving mirror group, photoelectric device converts image space signal digital signal to and is sent to treatment circuit, treatment circuit obtains the displacement measurement of testee by certain algorithm, and displacement measurement is formed to standardized digital signal, send other equipment to by cable.
Laser instrument of the present invention is a kind of small laser device, preferentially selects semiconductor laser, requires the continual and steady of output intensity and beam cross-section shape.Meanwhile, in order to meet TT&C requirement, this laser instrument be not only can continue luminous, and can continuous modulation, modulating frequency and pulse width are continuously adjustable.
Photoelectric device of the present invention can adopt line array CCD, and its number of pixels can be selected according to measuring accuracy, and its sample rate can require to select according to the measuring speed of sensor.
Laser displacement sensor of the present invention has two arrangement of mirrors groups: transmitting mirror group and reception mirror group.Transmitting mirror group is to produce the hot spot that light distribution is even, size is suitable, receives mirror group the hot spot of body surface is imaged on photovalve.
The effect of transmitting optical filter of the present invention and reception optical filter, is mainly other environment parasitic lights of filtering, reduces interference and the impact of surround lighting, the stability of a working sensor and reliability.
The effect of shell of the present invention, is the accurate and stable of mutual alignment relation between guarantee unit device on the one hand, is the effect with waterproof and dustproof, anti-ambient light interference on the other hand, ensures that sensor has higher reliability and degree of protection.
The effect of socket of the present invention and cable, being for gauge head provides required power supply on the one hand, is that the standardized data of being responsible for treatment circuit to form are sent to external unit, therefore on the other hand, socket and cable all need to adopt water proof type device, and adopt the universal digital interface of standard.
The main practical function for the treatment of circuit of the present invention comprises: (1) controls laser instrument: treatment circuit includes drive circuit for laser module, can control output intensity, modulating frequency and the pulse width of laser instrument.(2) drive photoelectric device: treatment circuit includes photoelectricity drive circuit module, can drive photoelectric device normally to work.(3) data acquisition: treatment circuit includes data acquisition circuit module, realizes high speed acquisition and the storage of light activated element output signal.(4) data processing: treatment circuit includes data processing circuit module, realizes the high speed processing to collection signal, finally provides measurement result.(5) data communication: treatment circuit includes data communication circuit module, is converted to standardized digital signal by the displacement measurement obtaining after data processing, and is realized and communicating by letter with external unit by standard digital interface, swap data.
Adapt to above-mentioned embedded laser displacement transducer item, the present invention proposes a kind of normalization processing method, can realize plug and play, exempts from host computer computing and adapt to multiple different measured target.Comprise particularly normalization laser control method and normalized data processing method.
Normalization laser control method of the present invention, adopts luminous intensity and the modulating frequency of the method control laser instrument of adaptive control exactly.The method of controlling can adopt two kinds of conventional current feedback and light intensity feedbacks, and wherein the advantage of light intensity feedback is using light intensity as feedback, can not affect along with the increase of laser instrument service time, and more stable laser intensity can be provided.Feedback signal derives from the sampled data of photoelectric device, by the processing to sampled data, obtain the waveform quality of hot spot imaging, and unified " peak value " evaluation foundation as waveform quality that adopts, using this as feedback information, control output intensity and the modulating frequency of laser instrument, realize thus the waveform quality that receives signal all the time in optimum condition, change thereby overcome measured target the measuring error of bringing, ensured the normalization of measuring accuracy.
The content that normalization data disposal route of the present invention comprises two steps: the first step is to convert facula position information to tested displacement information, second step is to be non-linearly normalized correction by what exist in Fundamentals of Sensors.
The method that the conversion of first step positional information adopts is as follows: first adopt the non-contact displacement transducer of a high level accuracy as displacement datum, the hot spot image space digital signal of the laser displacement sensor treatment circuit output of the present invention of synchro measure is mapped one by one, obtains thus measuring curve.
The method that second step gamma correction adopts is as follows: above-mentioned measurement curve is carried out to fitting of a polynomial, by increasing gradually polynomial order, progressively reduce matched curve and the deviation of measuring curve, until this deviation is less than the accuracy requirement of laser displacement sensor.Polynomial fitting curve is now the gamma correction curve that meets accuracy requirement.
In actual sensor measurement process, taking above-mentioned matched curve as standard, hot spot image space is calibrated, can obtain desirable linear measurement result, thereby the measurement nonlinearity erron existing in elimination principle, now all sensors all have normalized normal bit and move numerical information output, can realize 100% exchange, host computer is without calculating again, thereby meets to greatest extent Embedded requirement.
Brief description of the drawings
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is embedded laser displacement transducer composition schematic diagram of the present invention;
Fig. 2 is different wave quality normalization processing method schematic diagram of the present invention;
Fig. 3 is sensor measurement curve synoptic diagram of the present invention;
Fig. 4 is cubic polynomial matched curve of the present invention and the deviation schematic diagram of measuring curve;
Fig. 5 is five order polynomial matched curves of the present invention and the deviation schematic diagram of measuring curve;
In figure, 1 is measured target, and 2 is transmitting optical filter, and 3 is transmitting mirror group, and 4 is laser instrument, and 5 is shell, and 6 is treatment circuit, and 7 is socket, and 8 is cable, and 9 is photoelectric device, and 10 for receiving mirror group, and 11 for receiving optical filter.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the invention are elaborated: the present embodiment is implemented under taking technical solution of the present invention as prerequisite, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, laser displacement sensor of the present invention mainly comprises: transmitting optical filter 2, transmitting mirror group 3, laser instrument 4, shell 5, treatment circuit 6, socket 7, cable 8, photoelectric device 9, reception mirror group 10, reception optical filter 11.The workflow of whole system is: after the laser beam that laser instrument 4 is launched is collimated and focused on by transmitting mirror group 3, be irradiated to the surface of measured target 1 and form a hot spot, this hot spot is imaged on photoelectric device 9 by receiving mirror group 10, photoelectric device 9 converts image space signal digital signal to and is sent to treatment circuit 6, treatment circuit 6 obtains the displacement measurement of testee 1 by certain algorithm, and displacement measurement is formed to standardized digital signal, send other external units to by cable 8, for example host computer, PLC or other-end.
Laser displacement sensor of the present invention has two arrangement of mirrors groups: transmitting mirror group 3 and reception mirror group 10.Transmitting mirror group 3 is to produce the hot spot that light distribution is even, size is suitable, receives mirror group 10 hot spot of body surface is imaged on photovalve.
The effect of transmitting optical filter 2 of the present invention and reception optical filter 11, is mainly other environment parasitic lights of filtering, reduces interference and the impact of surround lighting, the stability of a working sensor and reliability.
The effect of shell 5 of the present invention, is the accurate and stable of mutual alignment relation between guarantee unit device on the one hand, is the effect with waterproof and dustproof, anti-ambient light interference on the other hand, ensures that sensor has higher reliability and degree of protection.
The effect of socket 7 of the present invention and cable 8, is for gauge head provides required power supply on the one hand, is that the standardized data of being responsible for treatment circuit to form are sent to external unit on the other hand.Therefore, socket 7 and cable 8 all need to adopt water proof type device, and adopt the universal digital interface of standard, such as USB, RS-232, RS-422, RS-485, CanBus, Profibus etc.
The main practical function for the treatment of circuit 6 of the present invention comprises: (1) controls laser instrument 4: treatment circuit 6 includes drive circuit for laser module, can control output intensity, modulating frequency and the pulse width of laser instrument 4.(2) drive photoelectric device 9: treatment circuit 6 includes photoelectricity drive circuit module, can drive photoelectric device 9 normally to work.(3) data acquisition: treatment circuit 6 includes data acquisition circuit module, realizes high speed acquisition and the storage of light activated element 9 output signals.(4) data processing: treatment circuit 6 includes data processing circuit module, realizes the high speed processing to collection signal, finally provides measurement result.(5) data communication: treatment circuit 6 includes data communication circuit module, is converted to standardized digital signal by the displacement measurement obtaining after data processing, and is realized and communicating by letter with external unit by standard digital interface, swap data.
The present invention proposes the method for normalizing for above-mentioned embedded laser displacement transducer, can realize plug and play, exempts from host computer computing and adapt to multiple different measured target.Comprise particularly normalization laser control method and normalized data processing method.
Normalization laser control method of the present invention, adopts luminous intensity and the modulating frequency of the method control laser instrument 4 of adaptive control exactly.The method of controlling can adopt two kinds of conventional current feedback and light intensity feedbacks, and wherein the advantage of light intensity feedback is using light intensity as feedback, can not affect along with the increase of 4 service times of laser instrument, and more stable laser intensity can be provided.Feedback signal derives from the sampled data of photoelectric device 9, by the processing to sampled data, obtain the waveform quality of hot spot imaging, and the unified evaluation foundation that adopts " peak value/width " to be compared to waveform quality, using this as feedback information, control output intensity and the modulating frequency of laser instrument 4, realize thus the waveform quality that receives signal all the time in optimum condition, change thereby overcome measured target the measuring error of bringing, ensured the normalization of measuring accuracy.
Fig. 2 is different wave quality of the present invention and normalized schematic diagram, and wherein desirable optimum waveform quality can be as shown by the solid line, and wave characteristics is for high narrow, and its peak value is G
olarge as far as possible, 85% left and right of general desirable full scale; And actual waveform quality is shown in dotted line, due to the character of surface difference of different measured targets 1, the waveform that usually makes sampling obtain is short and wide, i.e. the peak value G of actual waveform
rbe generally less than the peak value G of ideal waveform
othereby, cause location, waveform position to occur larger error, reduce measuring accuracy.The present invention adopts the waveform quality that actual samples obtains (in this example, to adopt peak value G
r) as feedback information, by controlling the output of laser instrument 4, change waveform the optimum condition that makes it again to reach desirable (are the output of controlling laser instrument 4 in this example, make G
rstrengthen and be approximately equal to G
o), thereby while having ensured measurement different target, the waveform quality that sampling obtains is same, thereby has ensured the normalization of measuring accuracy.
The content that normalization data disposal route of the present invention comprises two steps: the first step is to convert facula position information to tested displacement information, second step is to be non-linearly normalized correction by what exist in Fundamentals of Sensors.
The method that the conversion of first step positional information adopts is as follows: first adopt the non-contact displacement transducer of a high level accuracy as displacement datum, the hot spot image space digital signal of the laser displacement sensor treatment circuit output of the present invention of synchro measure is mapped one by one, obtain thus measuring curve, as shown in Figure 3.
The method that second step gamma correction adopts is as follows: above-mentioned measurement curve is carried out to fitting of a polynomial, by increasing gradually polynomial order, progressively reduce matched curve and the deviation of measuring curve, until this deviation is less than the accuracy requirement of laser displacement sensor.
If the form of cubic polynomial function is:
y＝a×x
3+b×x
2+c×x+d
Three multinomial matched curves with measure curve deviation as shown in Figure 4, be about ± 1mm of maximum deviation in figure.
If five order polynomial functional forms are:
y＝a×x
5+b×x
4+c×x
3+d×x
2+e×x+f
Five multinomial matched curves with measure curve deviation as shown in Figure 5, be about ± 0.2mm of maximum deviation in figure.
By that analogy, till papery matched curve reaches the accuracy requirement of sensor with the deviation of measuring curve.Polynomial fitting curve is now the gamma correction curve that meets accuracy requirement.
The invention has the beneficial effects as follows, compared with existing laser displacement sensor, the present invention is integrated in the repertoires such as the data acquisition of sensor, data processing, demarcation calibration among transducer probe assembly, and adopt the digital interface of standard to export, be aided with unique method for normalizing, Output rusults is normalization, standardization, normalized displacement numerical information simultaneously.Like this, in ensureing the original function and precision of sensor, make the structure of whole sensing system simpler, integrated level is higher, and volume is less, and can 100% exchanges, and meets the requirement of embedded TT&C system completely.
Claims (5)
1. an embedded laser displacement transducer, it is made up of parts such as launching optical filter, transmitting mirror group, laser instrument, shell, treatment circuit, socket, cable, photoelectric device, reception mirror group, reception optical filter, it is characterized in that, laser displacement sensor of the present invention is all integrated in all said system ingredients among a gauge head, thereby realizes integral structure form.Meanwhile, the repertoire such as data sampling and processing, calibration is integrated in treatment circuit, the direct output displacement measurement result of sensor, calculates without host computer, realizes plug and play, meets embedded TT&C system demand.
2. embedded laser displacement transducer according to claim 1, is characterized in that, described laser instrument is that output intensity, modulating frequency and pulse width are continuously adjustable.
3. embedded laser displacement transducer according to claim 1, is characterized in that, the universal digital interface of described socket and cable standard for manual sampling, and the standardized data layout of all output data samplings, can directly directly be connected with various universal external equipment.
4. embedded laser displacement transducer according to claim 1, it is characterized in that, described treatment circuit adopts output intensity and the modulating frequency of normalization control method to laser instrument to carry out adaptive control, feedback signal derives from the sampled data of photoelectric device, adopt the waveform peak of hot spot imaging as feedback information, the output intensity and the modulating frequency that control laser instrument, change thereby overcome measured target the measuring error of bringing, and ensured the normalization of measuring accuracy.
5. integrated laser displacement transducer according to claim 1, it is characterized in that, by corresponding with the measurement result meaning of basis displacement sensor the facula position information for the treatment of circuit output, obtain measuring curve, then carry out fitting of a polynomial to measuring curve, and progressively increase polynomial exponent number, until reaching measuring accuracy, the deviation of matched curve and measurement curve requires, polynomial fitting curve is now the gamma correction curve that meets accuracy requirement, thereby the measurement nonlinearity erron existing in elimination principle, make all sensors all there is normalized normal linearity output, can realize 100% exchange.
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| CN105352534A (en) * | 2015-12-11 | 2016-02-24 | 泉州市汉威机械制造有限公司 | Encoder position value setting method |
| CN107167079A (en) * | 2017-05-30 | 2017-09-15 | 常州高晟传感技术有限公司 | Height of materials and evenness measuring system, measuring method and its method for self-calibrating |
| CN107449364A (en) * | 2016-05-30 | 2017-12-08 | 上海砺晟光电技术有限公司 | Laser displacement sensor with reference beam |
| CN107621279A (en) * | 2017-09-12 | 2018-01-23 | 歌尔股份有限公司 | Data processing method, sensing data calibration method and device |
| CN109916307A (en) * | 2018-12-27 | 2019-06-21 | 河南中原光电测控技术有限公司 | Variable power laser measurement method and device |
| CN109974617A (en) * | 2019-04-01 | 2019-07-05 | 湖北工业大学 | The control method of light intensity consistency in a kind of multi-wavelength interferometry |
| CN110132171A (en) * | 2019-05-31 | 2019-08-16 | 长春巨达智能科技有限公司 | A kind of hand-held laser profilometry device |
| CN112405108A (en) * | 2020-09-17 | 2021-02-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN113483649A (en) * | 2021-06-17 | 2021-10-08 | 国家石油天然气管网集团有限公司华南分公司 | Magnetostrictive displacement sensor blind area detection device and use method |
| CN115079196A (en) * | 2022-06-06 | 2022-09-20 | 上海钊晟传感技术有限公司 | Long-distance high-precision laser displacement sensor method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105352534A (en) * | 2015-12-11 | 2016-02-24 | 泉州市汉威机械制造有限公司 | Encoder position value setting method |
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| CN109916307A (en) * | 2018-12-27 | 2019-06-21 | 河南中原光电测控技术有限公司 | Variable power laser measurement method and device |
| CN109974617A (en) * | 2019-04-01 | 2019-07-05 | 湖北工业大学 | The control method of light intensity consistency in a kind of multi-wavelength interferometry |
| CN110132171A (en) * | 2019-05-31 | 2019-08-16 | 长春巨达智能科技有限公司 | A kind of hand-held laser profilometry device |
| CN112405108A (en) * | 2020-09-17 | 2021-02-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN113483649A (en) * | 2021-06-17 | 2021-10-08 | 国家石油天然气管网集团有限公司华南分公司 | Magnetostrictive displacement sensor blind area detection device and use method |
| CN115079196A (en) * | 2022-06-06 | 2022-09-20 | 上海钊晟传感技术有限公司 | Long-distance high-precision laser displacement sensor method |
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