CN103871919B - Solar silicon wafers and defects of battery plate detection system - Google Patents
Solar silicon wafers and defects of battery plate detection system Download PDFInfo
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- CN103871919B CN103871919B CN201210539390.0A CN201210539390A CN103871919B CN 103871919 B CN103871919 B CN 103871919B CN 201210539390 A CN201210539390 A CN 201210539390A CN 103871919 B CN103871919 B CN 103871919B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention discloses a kind of solar silicon wafers and defects of battery plate detection system, photoluminescence detection platform is provided with being messaging in the minority carrier life time detector of processor, electroluminescent fluorescent detection platform is provided with applying the power-up device of DC source to sample, and this power-up device, sample and electroluminescent fluorescent detection platform can form a galvanic circle, minority carrier life time detection module can launch flash of light towards photoluminescence detection platform, laser illumination system can launch laser towards one of photoluminescence detection platform and electroluminescent fluorescent detection platform, image capturing system can the fluoroscopic image that sends of collected specimens deliver a letter to processor, one equipment of the present invention can carry out photoluminescence detection respectively, electroluminescent fluorescent detects, minority carrier lifetime and series resistance test, sample defects detection is analyzed comprehensively, accurately, and without more exchange device repeatedly, easy to operate, it is effectively improved work efficiency, save production cost.<!--1-->
Description
Technical field
The present invention relates to a kind of solar silicon wafers and cell piece detection system, particularly to a kind of solar silicon wafers and defects of battery plate detection system.
Background technology
Domestic and international theCourse of PV Industry is swift and violent, and raising electricity conversion and reduction cost become the target of whole industry.The black core, the black surround that occur in manufacture of solar cells flow process, hidden split, diffusion problem, pollute, collapse limit and minority carrier life time etc. defect and seriously limit electricity conversion and the service life of battery.Therefore, solar energy industry is needed related process grouping system badly and is gone out to affect all kinds of defects of electricity conversion, improves transformation efficiency.Progressively tend to ripe along with photovoltaic industry, the dependence for detecting equipment will be increasing.The importance of solaode detection and screening installation day by day highlights, and will become the key equipment of solar photovoltaic industry, also it is faced with higher accuracy of detection simultaneously, detects speed faster, meets online and offline inspection and the more fully series of challenges such as detection method.
Photoluminescence image, electroluminescent fluorescent image detection be illuminated by powering on mechanism or high power laser light sample is encouraged, it is made to give off fluorescence, fluoroscopic image is caught by recycling high-resolution near infrared imaging system, it is possible to the defect of detection includes black core, black surround, hidden splits, breaks, black angle etc..
Owing to the performance of crystal-silicon solar cell depends mainly in cell body and the compound of electron-hole pair on surface, therefore, it is possible to obtain exactly minority carrier life time data to analyze improve production interchange efficiency be very in important.
The quality condition being distributed equally possible reflection product of series resistance, by the test to series resistance, it is possible to the technique such as diffusion, electrode print is carried out management and control.
Sun energy silicon chip and defects of battery plate monitoring at present is all adopt in said method, it can only analyze the segmental defect that a certain operation stage is likely to occur, the defect situation of sun energy silicon chip and cell piece can not be reflected comprehensively, and current various detection is all carried out respectively by respective detection equipment, carry out two or more detections to need to change different detection equipment, detection efficiency is low, and detection program is loaded down with trivial details.
Summary of the invention
In order to make up above deficiency, the invention provides a kind of solar silicon wafers and defects of battery plate detection system, this solar silicon wafers and defects of battery plate detection system can analyze the defect of sample more fully, accurately, it also avoid the lengthy and tedious operation of repetition simultaneously, improve work efficiency, save production cost.
The present invention is to solve that its technical problem be the technical scheme is that a kind of solar silicon wafers and defects of battery plate detection system, including frame, sample placement platform, processor, minority carrier life time detection module, image capturing system and laser illumination system, described minority carrier life time detection module, image capturing system and laser illumination system are fixedly arranged in frame respectively, guide rail that sample placement platform includes being fixed in frame and can along the photoluminescence detection platform of slide and electroluminescent fluorescent detection platform, described photoluminescence detection platform is provided with minority carrier life time detector, this minority carrier life time detector is messaging in processor, described electroluminescent fluorescent detection platform is provided with applying the power-up device of DC source to sample, and this power-up device, sample and electroluminescent fluorescent detection platform can form a galvanic circle, minority carrier life time detection module can glisten towards the electromagnetic radiation in the photoluminescence detection platform being positioned at setting position, laser illumination system can towards the electromagnetic radiation laser in one of photoluminescence detection platform and electroluminescent fluorescent detection platform, image capturing system can gather fluoroscopic image that the sample being in setting position sends and deliver a letter and be analyzed to processor and process.
As a further improvement on the present invention, described photoluminescence detection platform and electroluminescent fluorescent detection platform adopt the frame for movement of linkage location.
As a further improvement on the present invention, described guide rail is provided with adjustable limit ring, this adjustable limit ring can dismantle fixing connection with photoluminescence detection platform and electroluminescent fluorescent detection platform, and one of photoluminescence detection platform and electroluminescent fluorescent detection platform are fixed on setting position.
As a further improvement on the present invention, described electroluminescent fluorescent detection platform is connected with vacuum generator, and vacuum generator can make generation vacuum between electroluminescent fluorescent detection platform and sample.
As a further improvement on the present invention, the power-up device in described electroluminescent fluorescent detection platform is three probe bars, and these three probe bars can be in close contact with sample.
As a further improvement on the present invention, described three probe bars can be dismantled and be fixed on probe carriage, and probe carriage and electroluminescent fluorescent detection platform are articulated and connected, and are additionally provided with a retaining mechanism, and cover plate and electroluminescent fluorescent detection platform can be locked by this retaining mechanism.
As a further improvement on the present invention, being additionally provided with gas spring, the two ends of gas spring are fixing with electroluminescent fluorescent detection platform and probe carriage sidewall respectively to be connected.
As a further improvement on the present invention, described laser illumination system includes controlling laser instrument and laser lighting camera lens, described control laser instrument is able to receive that processor command launches laser to laser lighting camera lens, is sequentially provided with beam shaping light pipe, amasthenic lens and hot spot adjusting apparatus in laser lighting camera lens.
As a further improvement on the present invention, described image capturing system is CCD camera.
As a further improvement on the present invention, the DC source that described power-up device applies is two quadrant programmable DC power supply.
The method have the benefit that: the present invention is by the design that photoluminescence detection platform and electroluminescent fluorescent detection platform mechanical type linked, it is made to select the setting position being positioned at detection of at slide on rails, one equipment can carry out photoluminescence detection, electroluminescent fluorescent detection, minority carrier lifetime and series resistance test respectively, solar silicon wafers and defects of battery plate just can be carried out complete detection by one equipment, sample defects detection is analyzed comprehensive, accurate, and without more exchange device repeatedly, easy to operate, it is effectively improved work efficiency, saves production cost.
Accompanying drawing explanation
Fig. 1 is the first detection state front view of the present invention；
Fig. 2 is the second detection state front view of the present invention；
Fig. 3 is sample placement platform front view；
Fig. 4 is sample placement platform top view；
Fig. 5 is electroluminescent fluorescent detection platform axonometric chart；
Fig. 6 is photoluminescence defects detection principle schematic；
Fig. 7 is electroluminescent fluorescent defects detection principle schematic；
Fig. 8 is minority carrier life time Cleaning Principle schematic diagram.
Detailed description of the invention
Embodiment: a kind of solar silicon wafers and defects of battery plate detection system, including frame, sample placement platform, processor 12, minority carrier life time detection module 1, image capturing system 4 and laser illumination system 5, described minority carrier life time detection module 1, image capturing system 4 and laser illumination system 5 are fixedly arranged in frame respectively, sample placement platform includes being fixed on the guide rail 3 in frame and the photoluminescence detection platform 2 can slided along guide rail 3 and electroluminescent fluorescent detection platform 7, described photoluminescence detection platform 2 is provided with minority carrier life time detector 10, this minority carrier life time detector 10 is messaging in processor 12, described electroluminescent fluorescent detection platform 7 is provided with applying the power-up device 16 of DC source to sample 11, and this power-up device 16, sample 11 and electroluminescent fluorescent detection platform 7 can form a galvanic circle, minority carrier life time detection module 1 can launch flash of light towards the sample 11 in the photoluminescence detection platform 2 being positioned at setting position, laser illumination system 5 can launch laser towards the sample 11 in one of photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7, image capturing system 4 can gather fluoroscopic image that the sample 11 being in setting position sends and deliver a letter and be analyzed to processor 12 and process, when carrying out photoluminescence detection, the photoluminescence detection platform 2 of sample placement platform is slided into setting position, processor 12 controls laser illumination system 5 to sample 11 Output of laser 15, the hot spot of laser 15 is radiated on sample 11, sample 11 sends fluoroscopic image 13, data are exported to processor 12 after this fluoroscopic image 13 is acquired by image capturing system 4, the relevant information of the processor 12 photoluminescence image 13 of rear output detections sample 11 by analysis；
When carrying out electroluminescent fluorescent detection, sample 11 is positioned in electroluminescent fluorescent detection platform 7 and is moved into setting position, processor 12 controls power-up device 16 and sample 11 is applied unidirectional current, produce after sample 11 energising to export to processor 12 by data after this fluoroscopic image is acquired by fluoroscopic image acquisition system 4, the relevant information of the processor 12 electroluminescent fluorescent image of rear output detections sample 11 by analysis；
Minority carrier lifetime, sample 11 is placed in photoluminescence detection platform 2, and it being moved into setting position, processor 12 controls minority carrier life time detection module 1 and flashes 17 irradiation samples 11, and the data of collection are transferred to processor 12 by minority carrier life time detector 10；
When carrying out series resistance test, sample 11 is positioned in electroluminescent fluorescent detection platform 7 and is moved into setting position, processor 12 controls power-up device 16 and sample 11 is applied unidirectional current, sample 11 is carried out the collection of fluoroscopic image and transfers data to processor 12 by image capturing system 4, processor 12 controls laser illumination system 5 to sample 11 Output of laser, hot spot is irradiated on sample 11, image capturing system 4 carries out the collection of fluoroscopic image again and transfers data to processor 12, last processor 12 carries out Automatic analysis to collecting two groups of data, finally show the relevant information of the sample 11 series resistance distributed image detected.
Described photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7 adopt the frame for movement of linkage location.
Described guide rail 3 is provided with adjustable limit ring 9, this adjustable limit ring 9 can dismantle fixing connection with photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7, and one of photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7 are fixed on setting position, photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7 can quickly be fixed by adjustable limit ring 9, guarantee that sample 11 position will not change when detection, ensure the degree of accuracy of detection, adjustable limit ring 9 can be in of setting position, its selective one of photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7 carrying out with needs detecting is fixed and is connected, it can also be three groups of parallel interval arrangement, wherein adjacent two groups are fixed with photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7 simultaneously, and make one of photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7 be positioned at setting position, this setting position is the centre position of three groups of adjustable limit rings 9, adjustable limit ring 9 is connected as reasonable scheme with photoluminescence detection platform 2 and electroluminescent fluorescent detection platform 7 surely by the mode of buckle, certainly can also is that other demountable connected mode, as held out against fixing connected mode, connected mode of clamping etc., this structure that it is readily conceivable that according to this patent for those skilled in the art, belong to the equivalent replacement of this patent.
Described electroluminescent fluorescent detection platform 7 is connected with vacuum generator, vacuum generator can make generation vacuum between electroluminescent fluorescent detection platform 7 and sample 11, electroluminescent fluorescent detection platform 7 contacts formation galvanic circle by electrode with sample 11, after producing vacuum between electroluminescent fluorescent detection platform 7 and sample 11, it is possible to make testing sample 11 and the electrode good contact in electroluminescent fluorescent detection platform 7.
Power-up device 16 in described electroluminescent fluorescent detection platform 7 is three probe bars, and these three probe bars can be in close contact with sample 11.
It is additionally provided with probe carriage 6, article three, probe bar can be dismantled and be fixed on probe carriage 6, probe carriage 6 and electroluminescent fluorescent detection platform 7 are articulated and connected, it is additionally provided with a retaining mechanism 8, cover plate and electroluminescent fluorescent detection platform 7 can be locked by this retaining mechanism 8, use 5 can be replaced, the probe of 6inch is fixed on probe carriage 6 solar battery sheet of different size is powered up, during use, probe carriage 6 and electroluminescent fluorescent detection platform 7 fasten, probe bar on probe carriage 6 just contacts with sample 11, then retaining mechanism 8 is locked, ensure that the connection status that probe bar and sample 11 remain stable for.
Being additionally provided with gas spring, the two ends of gas spring are fixing with electroluminescent fluorescent detection platform 7 and probe carriage 6 sidewall respectively to be connected.
Described laser illumination system 5 includes controlling laser instrument 14 and laser lighting camera lens, described control laser instrument 14 is able to receive that processor 12 order launches laser to laser lighting camera lens, is sequentially provided with beam shaping light pipe, amasthenic lens and hot spot adjusting apparatus in laser lighting camera lens.
Described image capturing system 4 is CCD camera.
The DC source that described power-up device 16 applies is two quadrant programmable DC power supply.
Claims (10)
1. a solar silicon wafers and defects of battery plate detection system, it is characterized in that: include frame, sample placement platform, processor (12), minority carrier life time detection module (1), image capturing system (4) and laser illumination system (5), described minority carrier life time detection module (1), image capturing system (4) and laser illumination system (5) are fixedly arranged in frame respectively, guide rail (3) that sample placement platform includes being fixed in frame and the photoluminescence detection platform (2) can slided along guide rail (3) and electroluminescent fluorescent detection platform (7), described photoluminescence detection platform (2) is provided with minority carrier life time detector (10), this minority carrier life time detector (10) is messaging in processor (12), described electroluminescent fluorescent detection platform (7) is provided with applying the power-up device (16) of DC source to sample (11), and this power-up device (16), sample (11) and electroluminescent fluorescent detection platform (7) can form a galvanic circle, minority carrier life time detection module (1) can launch flash of light towards the sample (11) in the photoluminescence detection platform (2) being positioned at setting position, laser illumination system (5) can launch laser towards the sample (11) in one of photoluminescence detection platform (2) and electroluminescent fluorescent detection platform (7), image capturing system (4) can gather fluoroscopic image that the sample (11) being in setting position sends and deliver a letter and be analyzed to processor (12) and process.
2. solar silicon wafers as claimed in claim 1 and defects of battery plate detection system, is characterized in that: described photoluminescence detection platform (2) and electroluminescent fluorescent detection platform (7) adopt the frame for movement of linkage location.
3. solar silicon wafers as claimed in claim 2 and defects of battery plate detection system, it is characterized in that: described guide rail (3) is provided with adjustable limit ring (9), this adjustable limit ring (9) can dismantle fixing connection with photoluminescence detection platform (2) and electroluminescent fluorescent detection platform (7), and one of photoluminescence detection platform (2) and electroluminescent fluorescent detection platform (7) are fixed on setting position.
4. solar silicon wafers as claimed in claim 1 and defects of battery plate detection system, it is characterized in that: described electroluminescent fluorescent detection platform (7) is connected with vacuum generator, vacuum generator can make generation vacuum between electroluminescent fluorescent detection platform (7) and sample (11).
5. solar silicon wafers as claimed in claim 1 and defects of battery plate detection system, it is characterized in that: the power-up device (16) on described electroluminescent fluorescent detection platform (7) is three probe bars, these three probe bars can be in close contact with sample (11).
6. solar silicon wafers as claimed in claim 5 and defects of battery plate detection system, it is characterized in that: be additionally provided with probe carriage (6), article three, probe bar can be dismantled and be fixed on probe carriage (6), probe carriage (6) and electroluminescent fluorescent detection platform (7) are articulated and connected, being additionally provided with a retaining mechanism (8), cover plate and electroluminescent fluorescent detection platform (7) can be locked by this retaining mechanism (8).
7. solar silicon wafers as claimed in claim 6 and defects of battery plate detection system, is characterized in that: be additionally provided with gas spring, and the two ends of gas spring are fixing with electroluminescent fluorescent detection platform (7) and probe carriage (6) sidewall respectively to be connected.
8. solar silicon wafers as claimed in claim 1 and defects of battery plate detection system, it is characterized in that: described laser illumination system (5) includes controlling laser instrument (14) and laser lighting camera lens, described control laser instrument (14) is able to receive that processor (12) order launches laser to laser lighting camera lens, is sequentially provided with beam shaping light pipe, amasthenic lens and hot spot adjusting apparatus in laser lighting camera lens.
9. solar silicon wafers as claimed in claim 1 and defects of battery plate detection system, is characterized in that: described image capturing system (4) is CCD camera.
10. solar silicon wafers as claimed in claim 1 and defects of battery plate detection system, is characterized in that: the DC source that described power-up device (16) applies is two quadrant programmable DC power supply.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210539390.0A CN103871919B (en) | 2012-12-13 | 2012-12-13 | Solar silicon wafers and defects of battery plate detection system |
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| CN201210539390.0A CN103871919B (en) | 2012-12-13 | 2012-12-13 | Solar silicon wafers and defects of battery plate detection system |
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| CN103871919B true CN103871919B (en) | 2016-06-29 |
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| CN106287126A (en) * | 2015-05-21 | 2017-01-04 | 研祥智能科技股份有限公司 | Camera fixing device and there is the visual identity equipment of this camera fixing device |
| CN106290452B (en) * | 2016-08-25 | 2019-04-09 | 青岛励赫化工科技有限公司 | The successional detection device of conductive adhesive tape in a kind of detection tire |
| CN107742286B (en) * | 2017-09-28 | 2021-01-29 | 河北工业大学 | Method for detecting EL test crack defects of polycrystalline silicon solar cell |
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| JPH04139852A (en) * | 1990-10-01 | 1992-05-13 | Nec Corp | Inspecting method for semiconductor substrate |
| WO2008014537A1 (en) * | 2006-08-01 | 2008-02-07 | Newsouth Innovations Pty Limited | Determining diffusion length of minority carriers using luminescence |
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Effective date of registration: 20220708 Address after: 526238 No. 20, Beijiang Avenue, high tech Zone, Zhaoqing City, Guangdong Province Patentee after: ZHONGDAO OPTOELECTRONIC EQUIPMENT CO.,LTD. Address before: 215311 Rui'an Road, Lingang Industrial Park, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhongdao Photoelectric Equipment Co.,Ltd. |
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