CN103768905A - Moveable air chemical filtration apparatus - Google Patents
Moveable air chemical filtration apparatus Download PDFInfo
- Publication number
- CN103768905A CN103768905A CN201210401269.1A CN201210401269A CN103768905A CN 103768905 A CN103768905 A CN 103768905A CN 201210401269 A CN201210401269 A CN 201210401269A CN 103768905 A CN103768905 A CN 103768905A
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- China
- Prior art keywords
- chemical filter
- air
- power supply
- fan
- blower fan
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Cooling Or The Like Of Electrical Apparatus (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention provides a moveable air chemical filtration apparatus, which is characterized by comprising a moving platform, a chemical filter, a fan and a power supply, wherein the fan is arranged above a position provided for placing an electronic component and positioned on the moving platform, the chemical filter is arranged above the fan, air is purified through the chemical filter and then is blown downwardly through the fan so as to provide purified air for the electronic component placed on the moving platform, and the power supply provides electricity for the fan. According to the present invention, the arrangement of the chemical filter is improved to carry out effective protection on the specific product so as to ensure complete protection on electronic components such as wafers, masks and the like during the transmission process.
Description
Technical field
The present invention relates to the field that electronic semi-conductor manufactures field and other use chemical filter unit, particularly, relate to a kind of portable air chemical filter unit polluting for eliminating aerochemistry in semiconductor crystal wafer manufacture.
Background technology
Today of electronic technology develop rapidly, manufacturing technology is maked rapid progress.More and more higher along with the short and small frivolous requirement of consumer to electronic product, the wire diameter of semiconductor integrated circuit has arrived nanoscale.How on smaller szie, to realize function as much as possible, become the focus of semicon industry competition.But more and more less integrated circuit wire diameter also means that device is to more and more sensitivity of environmental requirement.Except conventional temperature, humidity, particle, the micro-pollution of air becomes the key factor that affects integrated circuit yield day by day.The micro-pollution of air comprises inorganic (acid/alkaline gas), organic gas (VOC) etc.Show according to interrelated data, in 0.2 micron of wire diameter or more advanced wafer process, the micro-pollution of air of ppb level can cause wafer or light shield burn into fuzzy etc. abnormal, cause damage very large, only the expense of a slice light shield just reaches hundreds thousand of units.
The requirements at the higher level that micro-pollution protection proposes for above-mentioned air, what industry adopted at present is, at key area, chemical filter unit is installed, airborne inorganic to remove, organic micro-pollution.This device is installed in the circulatory system of air conventionally, as ceiling, and return air pipe well etc.This device can protect respective regions environment that micro-air pollution is dropped to below normal concentration.But this device need to be installed in whole return air region, and cost is very high; Owing to only installing in subregion, if need the electronic devices and components of protection, as wafer, light shield etc., while transmission, often can not get effective protection between different key areas simultaneously, increase the potential failure risk of product.
Summary of the invention
For the drawback of prior art, the object of the invention is to propose a kind of portable air chemical filter unit, comprise mobile platform, chemical filter, blower fan and power supply, wherein
Described blower fan is arranged on the top at putting electronic device position on described mobile platform;
Described chemical filter is arranged on described blower fan top;
Air is blowed downwards by blower fan after described chemical filter purifies, for the electronic devices and components that are positioned on mobile platform provide the air after purification;
Described power supply is blower fan power supply.
Further, described power supply is uninterrupted power source.
Further, described mobile platform is handcart.
The present invention, by improving the layout of chemical filter, effectively protects specific products, to guarantee electronic devices and components, as wafer, light shield etc., in transport process, can comprehensively be protected.
Accompanying drawing explanation
Fig. 1 is structural representation according to a preferred embodiment of the invention.
The specific embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that embodiment described herein is only for explaining the present invention, rather than for limiting the present invention.
As shown in Figure 1, portable air chemical filter unit, comprises mobile platform 1, chemical filter 3, blower fan 4 and power supply 5, wherein
Described blower fan 4 is arranged on the top at putting electronic device 2 positions on described mobile platform 1;
Described chemical filter 3 is arranged on described blower fan 4 tops;
Air is blowed downwards by blower fan 4 after described chemical filter 3 purifies, for the electronic devices and components 2 that are positioned on mobile platform 1 provide the air after purification;
Described power supply 5 is powered for blower fan 4.
Flow downward because blower fan drives air, make electronic devices and components surrounding environment be full of the air after purification, thereby reach electronic devices and components and avoid the object of the micro-pollution of air.
Described electronic devices and components comprise wafer, light shield or other electronic devices and components to the micro-pollution sensibility of air.
Described power supply 5 is preferably uninterrupted power source, to continue to provide the air after purification for responsive electronic devices and components.
In a preferred embodiment, as shown in Figure 1, the part that described mobile platform 1 is handcart, operating personnel can promote handcart, carry out Product transport.
The present invention, by improving the layout of chemical filter, effectively protects specific products, to guarantee electronic devices and components, as wafer, light shield etc., in transport process, can comprehensively be protected.
Above are only preferred embodiment of the present invention, certainly, can also have other embodiment with further exploration according to actual needs.But, should be clear and definite, based on similar the conversion above-mentioned or embodiment with same idea that other is not explained out, all should be encompassed among the protection domain of the claims in the present invention.
Claims (3)
1. a portable air chemical filter unit, is characterized in that, comprises mobile platform, chemical filter, blower fan and power supply, wherein
Described blower fan is arranged on the top at putting electronic device position on described mobile platform;
Described chemical filter is arranged on described blower fan top;
Air is blowed downwards by blower fan after described chemical filter purifies, for the electronic devices and components that are positioned on mobile platform provide the air after purification;
Described power supply is blower fan power supply.
2. device according to claim 1, is characterized in that, described power supply is uninterrupted power source.
3. device according to claim 1, is characterized in that, described mobile platform is handcart.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210401269.1A CN103768905A (en) | 2012-10-19 | 2012-10-19 | Moveable air chemical filtration apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210401269.1A CN103768905A (en) | 2012-10-19 | 2012-10-19 | Moveable air chemical filtration apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103768905A true CN103768905A (en) | 2014-05-07 |
Family
ID=50561944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210401269.1A Pending CN103768905A (en) | 2012-10-19 | 2012-10-19 | Moveable air chemical filtration apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103768905A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105652790A (en) * | 2014-11-30 | 2016-06-08 | 沈阳芯源微电子设备有限公司 | Microenvironment control system |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2178004A (en) * | 1985-07-18 | 1987-02-04 | Tensho Electric Ind Co | Semi-conductor wafer container |
| US4804086A (en) * | 1986-12-22 | 1989-02-14 | Siemens Aktiengesellschaft | Transport container with an interchangeable inside container |
| EP0854498A1 (en) * | 1997-01-21 | 1998-07-22 | International Business Machines Corporation | Ultra-clean transport carrier |
| CN1389903A (en) * | 2001-06-06 | 2003-01-08 | 松下电器产业株式会社 | Environment control device of display device and its environment control method |
| CN1712831A (en) * | 2004-06-16 | 2005-12-28 | 松下电器产业株式会社 | Cleaning chamber, local cleaning system, use thereof and cleaning chamber security system |
| CN1779902A (en) * | 2004-11-25 | 2006-05-31 | 联华电子股份有限公司 | Semiconductor manufacturing equipment |
| CN101274701A (en) * | 2007-03-30 | 2008-10-01 | 霓佳斯株式会社 | Custody apparatus |
| CN202844844U (en) * | 2012-10-19 | 2013-04-03 | 和舰科技(苏州)有限公司 | Mobile air chemical filter device |
-
2012
- 2012-10-19 CN CN201210401269.1A patent/CN103768905A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2178004A (en) * | 1985-07-18 | 1987-02-04 | Tensho Electric Ind Co | Semi-conductor wafer container |
| US4804086A (en) * | 1986-12-22 | 1989-02-14 | Siemens Aktiengesellschaft | Transport container with an interchangeable inside container |
| EP0854498A1 (en) * | 1997-01-21 | 1998-07-22 | International Business Machines Corporation | Ultra-clean transport carrier |
| CN1389903A (en) * | 2001-06-06 | 2003-01-08 | 松下电器产业株式会社 | Environment control device of display device and its environment control method |
| CN1712831A (en) * | 2004-06-16 | 2005-12-28 | 松下电器产业株式会社 | Cleaning chamber, local cleaning system, use thereof and cleaning chamber security system |
| CN1779902A (en) * | 2004-11-25 | 2006-05-31 | 联华电子股份有限公司 | Semiconductor manufacturing equipment |
| CN101274701A (en) * | 2007-03-30 | 2008-10-01 | 霓佳斯株式会社 | Custody apparatus |
| CN202844844U (en) * | 2012-10-19 | 2013-04-03 | 和舰科技(苏州)有限公司 | Mobile air chemical filter device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105652790A (en) * | 2014-11-30 | 2016-06-08 | 沈阳芯源微电子设备有限公司 | Microenvironment control system |
| CN105652790B (en) * | 2014-11-30 | 2018-08-07 | 沈阳芯源微电子设备有限公司 | A kind of micro environment control system |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140507 |