CN103695845B - A kind of pollution-free heating tube device of vertical vacuum ion film coating machine - Google Patents
A kind of pollution-free heating tube device of vertical vacuum ion film coating machine Download PDFInfo
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- CN103695845B CN103695845B CN201310628380.9A CN201310628380A CN103695845B CN 103695845 B CN103695845 B CN 103695845B CN 201310628380 A CN201310628380 A CN 201310628380A CN 103695845 B CN103695845 B CN 103695845B
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Abstract
The invention discloses a kind of pollution-free heating tube device of vertical vacuum ion film coating machine, comprise heating tube assembly, bellows component, corrugated tube supporting holder assembly and hoisting appliance, heating tube assembly comprises heating tube, its upper end is the wire terminals of tape insulation, heating tube flange is welded with slightly by below, heating tube flange connects bellows component downwards, bellows component connects corrugated tube supporting holder assembly downwards, the corrugated tube supporting holder assembly heating tube gangway passed downwardly through out again on body of heater top board is communicated with in stove, heating tube passes the hollow cavity of bellows component and corrugated tube supporting holder assembly, the heating tube gangway put on body of heater top board enters in stove, heating tube is by heating tube Flange joint hoisting appliance.Because heating tube during plated film is not in coating chamber, it can not adhere to residual coating, solve secondary pollution problem caused by heating tube; The present invention is simple and compact for structure, saves the work of cleaning heating tube, improves quality of coating and working efficiency, reduce production cost.
Description
Technical field
The present invention relates to vertical vacuum ion film coating machine, particularly relate to a kind of pollution-free heating tube device of vertical vacuum ion film coating machine.
Background technology
One of vaccum ion coater main application is coated with decorating film, mostly ion plating decorating film is to adopt magnesium-yttrium-transition metal target, as Ti, Zr, with Cr etc., metallic plasma is produced by cathode arc or magnetron sputtering, with nitrogen, the Reactive Synthesis such as acetylene and oxygen nitride, carbide, nitrogen carbide and oxide compound etc., to obtain simulating golden colour, rose golden, black, coffee-like, brown, silvery white, blueness waits decorating film, not only wear-resistant but also corrosion-resistant, currently be widely used in wrist-watch part, mobile phone shell, ornaments, golf club, defend sanitary equipment, handware, art metal furniture, hotel's utensil, stainless steel plaque etc., be coated with various color decorating film thereon, play colourful effect.
At present, along with improving constantly of people's living standard, to the high-end decorating film of ion plating require also more and more higher, for high gear wrist-watch, ornaments and mobile phone shell etc., decorating film quality except color require various and bright-coloured except, also require high luminance brightness.But there is larger difficulty in the rete obtaining special high brightness, this is because in coating process flow process, a lot of influence factor can cause coating surface to send out dim, thus reduces its luminance brightness.
Verified through production practice: the surface gloss of plating piece, the cleanliness factor of plating piece cleaning, plated film adopt technology (as electric arc ion-plating deposition technology inevitably makes rete to exist a large amount of mechanistic defect----plating material metallic particles), target quality is bad (as impurity, the plating material particles splatter caused such as not fine and close), coating chamber gas leakage or water mixing, plating piece after cleaning is hung with transportation contaminated (as dust fall again at dress, saliva), plating piece enters the secondary pollution after stove (as the floating dust in stove, furnace wall, the explosion splashing etc. of residual rete on furnace interior part and hanger), it is all the influence factor causing coating surface to send out Mongolian.After taking appropriate measures, above-mentioned influence factor can obtain some and improve, such as improve quality of finish to improve plating piece surface gloss, reinforcement cleaning measure improves plating piece cleanliness factor Jin Liang Minus few arc deposited time and mainly takes the macrobead of the few arc deposited of magnetron sputtering deposition plated film Yi Minus, improve workshop and clean the few environment dust fall of environment Minus, infuse the residual coating on cleaning furnace wall, the end and stove Inner parts and hanger, from and the few stove internal contamination of Minus.
But, the residual coating in coating chamber, heating tube deposited is the most unmanageable, because heating tube before plated film and coating process sometime section need electrified regulation, the tube wall of heating tube is in higher temperatures state, even if when the spaced apart fire door clearing furnace of plated film, the remaining temperature of heating tube is still higher, so that be difficult to set about to clear up residual coating on it, in addition, some heating tubes are contained in and are remotely difficult to clean from fire door, and the quantity of heating tube is more, also inconvenience usually disassembles to stove and clears up outward; Often residual coating is more long-pending thicker, these residual coating be attached on heating tube adhere to loosely, coating is also more loose, because the effect of expanding with heat and contract with cold is easy to explosion fragmentation in coating process, they are splashed to plating space, room and become cluster shape debris particle to be attached on workpiece surface, cause coating to send out Mongolian, cause secondary pollution in stove.Various cause heating tube in dim reason remain rete explosion fragment become the most scabrous problem.Therefore, be coated with the coating equipment of high-end decorating film with ion plating, solve residual coating on its heating tube and cause the problem of secondary pollution in stove to become the key improving coated article luminance brightness.At present, occur often propping up technology heating tube all adopting and rotates semi arch cover baffle plate, although non-heated time deposited plating layer on heat-generating pipe can be blocked, but, coating still can be deposited on the outside surface of semi arch cover, in coating process, residual coating fragment on it still cannot be avoided to splash, so the secondary pollution problem of heating tube system still thoroughly can not be solved, and after semi arch cover baffle plate has been installed, heating tube peripheral available space is very limited, and semi arch cover baffle plate can because consequently occurring stuck phenomenon by thermogenesis distortion.
Summary of the invention
The object of the present invention is to provide a kind of simple and compact for structure, secondary pollution problem caused by heating tube can be solved, reliable, time saving and energy saving, efficiency is high, the pollution-free heating tube device of vertical vacuum ion film coating machine that can reduce product fraction defective, reduce costs.
Object of the present invention is realized by following technical measures: a kind of pollution-free heating tube device of vertical vacuum ion film coating machine, it is characterized in that: comprise heating tube assembly, bellows component, corrugated tube supporting holder assembly and hoisting appliance, described heating tube assembly comprises heating tube, its upper end is the wire terminals of tape insulation, heating tube flange is welded with slightly by below, described heating tube flange connects bellows component downwards, described bellows component connects corrugated tube supporting holder assembly downwards, the corrugated tube supporting holder assembly heating tube gangway passed downwardly through out again on body of heater top board is communicated with in stove, described heating tube passes the hollow cavity of bellows component and corrugated tube supporting holder assembly, the heating tube gangway put on body of heater top board enters in stove, described heating tube is by hoisting appliance described in heating tube Flange joint, described hoisting appliance drives heating tube flange, drive heating tube declines, make heating tube enter coating chamber to carry out heating and to bleed operation, heating tube is driven to rise away from coating chamber to carry out plated film operation under vacuum conditions again.
The present invention is positioned at coating chamber when heating tube, carries out heating and to bleed operation, then promote heating tube to outside coating chamber by hoisting appliance, carry out plated film operation.In coating process, because heating tube is not in coating chamber, therefore heating tube can not adhere to residual coating, solve the secondary pollution problem caused by heating tube; In addition, the present invention is simple and compact for structure, eliminates the work of cleaning heating tube, time saving and energy saving, and improves quality of coating and working efficiency, decreases product fraction defective, reduces production cost.
Heating tube assembly of the present invention also comprises heating tube termination water-cooling cover and Water Exit is chewed, under the convex shoulder of described heating tube flange boxing on heating tube, between the upper surface and heating tube of heating tube flange spatially, cover welding there is any discrepancy water coolant cover that water chews, by the heat that the water coolant absorption heating tube in water-cooling cover is uploaded, thus ensure the electrical isolation of heating tube leading-out end, ensure that the vacuum-sealing of heating tube flange is not impaired simultaneously.
As one embodiment of the present invention, described bellows component comprises corrugated tube, corrugated tube upper flange and corrugated tube lower flange, described corrugated tube welds with corrugated tube upper flange and corrugated tube lower flange and is connected, the intermediate throughholes of the upper and lower flange of described corrugated tube and the mouth of pipe size of corrugated tube adapt, and the upper and lower port of described corrugated tube is positioned at the periphery of the upper and lower flange intermediate throughholes of described corrugated tube; Described heating tube flange and corrugated tube upper flange realize vacuum by sealing-ring and are sealed and are connected, and heating tube flange and corrugated tube upper flange is common and hoisting appliance is connected, described corrugated tube lower flange and corrugated tube supporting base Flange joint.
As a kind of optimal way of the present invention, the compression ratio of described corrugated tube is 8:1, and described corrugated tube heatproof is at least 600 degree.Corrugated tube pulls open, and (length) ensures enough length, make its promote expansion space be enough to hold heating tube and maintain vacuum, and corrugated tube can tolerate the radiation of heating tube waste heat.
As one embodiment of the present invention, described corrugated tube supporting holder assembly is made up of corrugated tube bearing flange, heating tube gangway sleeve pipe, outer water jacket and heating tube copper dust washer, heating tube gangway its lower end stretches in the perforate of body of heater top board, be welded and fixed with body of heater top board, heating tube gangway sleeve upper end mouth and corrugated header flange soldered, outer water jacket is enclosed within sleeve pipe periphery, heating tube gangway, it welds with corrugated header flange and body of heater top board and is connected, form the water cooling chamber of annular, described outer water jacket is provided with entery and delivery port, and Cooling Water passes in and out; Described corrugated tube supporting base flange is fixedly connected with described corrugated tube lower flange, realizes vacuum-sealing between the two by sealing-ring; The radiant heat that the water coolant flow through in described water cooling chamber absorbs heating tube damages to prevent described vacuum-sealing, described heating tube copper dust washer kink outside heating tube, and is placed in the upper surface of corrugated tube supporting base flange and the annular groove of corrugated tube lower flange lower surface to stop that the filth on heating rod falls in stove.
Heating tube assembly of the present invention, bellows component and corrugated tube supporting holder assembly are tightly connected, vacuum space is communicated with into the hollow cavity of corrugated tube supporting holder assembly from the following bellows component of heating tube flange, heating tube enters in stove by this vacuum space through heating tube gangway, becomes the vacuum tunnel of heating tube up-and-down movement by this corrugated tube variable inner chamber of the length that causes that stretches.
The present invention is in order to realize single heating tube lifting object, a hoisting appliance can be equipped with for single heating tube, as one embodiment of the present invention, described hoisting appliance comprises lifting arm and cylinder, the piston rod of described cylinder protrudes upward, described lifting arm arranged transversely, its one end is connected with the edge of described heating tube flange, and the other end is connected with described piston rod; The cylinder body of described cylinder is supported on the end face of coating chamber.
As a modification of the present invention, described hoisting appliance also comprises guiding mechanism, described guiding mechanism is primarily of guide pillar seat, guide pillar, linear bearings, the gentle cylinder retaining plate composition of linear axis bearing, described air cylinder fixed plate is horizontally disposed with, one end of described air cylinder fixed plate is connected on the end face of described coating chamber, to realize supporting cylinder on the cylinder body that the other end is connected to cylinder; Described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on the upper surface of described air cylinder fixed plate, described guide pillar seat is arranged in the perforate of lifting arm, and the upper end of described guide pillar to be fixed in guide pillar seat and to stretch out air cylinder fixed plate after being passed down through linear bearings.Guiding mechanism of the present invention can ensure that lifting arm is steadily elevated, does not vibrate, is not shifted, do not deflect.
The present invention is elevated object to realize multiple heating tube simultaneously, only can be equipped with a hoisting appliance, as another kind of mode of the present invention, described hoisting appliance comprises lifter plate, cylinder and cylinder cover, described cylinder is arranged on the end face of described coating chamber, the piston rod of described cylinder protrudes upward, described cylinder cover covers on described cylinder, described piston rod is connected with the end face of described cylinder cover, described lifter plate is placed on the bottom of cylinder, the lower port of described cylinder cover is fixed on described lifter plate, described lifter plate has several open holes stretched out for heating tube, heating tube flange on each heating tube is connected with the aperture lower periphery of described open holes.
As a modification of the present invention, described hoisting appliance also comprises guiding mechanism, described guiding mechanism forms primarily of guide pillar top board, guide pillar, linear bearings, linear axis bearing and guide pillar base, the lower end of described guide pillar is fixed on the end face of coating chamber by guide pillar base, described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on described lifter plate, described guide pillar is upward through linear bearings and is connected with guide pillar top board.In heating tube lifting process, guide pillar slides in linear bearings, can ensure that lifter plate is steadily elevated, does not vibrate, is not shifted, do not deflect.
Compared with prior art, the present invention has following significant effect:
(1) the present invention is positioned at coating chamber when heating tube, carries out heating and to bleed operation, then promote heating tube to outside coating chamber by hoisting appliance, carry out plated film operation.In coating process, because heating tube is not in coating chamber, therefore heating tube can not adhere to residual coating, solve the secondary pollution problem caused by heating tube.
(2) corrugated tube of the present invention pulls open guarantee and has sufficient length, make its promote expansion space maintain vacuum, and corrugated tube can tolerate the radiation of heat-generating pipe waste heat.Special ripple pipe has the property point that thermotolerance is high, magnification ratio is large, fatigability is good, makes novel structure of the present invention, succinct, reliably, equipment is compacter, and manufacturing process more simplifies.
(3) owing to solving the secondary pollution problem caused by heating tube, improve quality of coating, decrease product fraction defective.
(4) guiding mechanism of the present invention ensure that the steady lifting of heating tube, makes this plant running reliable.
(5) water-cooling cover can absorb the heat that heating tube is uploaded, and ensures the electrical isolation of heating tube leading-out end, guarantees that heating tube is in vacuum-sealing environment simultaneously; Water jacket can absorb the radiant heat of heating tube, ensures that sealing-ring cooling is not damaged.
(6) dust washer of the present invention can stop that the filth on heating tube falls to entering coating chamber, further increases coating quality.
(7) of the present invention simple and compact for structure, eliminate the work of residual coating on cleaning heating tube, time saving and energy saving, improve working efficiency, reduce production cost.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is the sectional structure chart (heating tube drops to extreme lower position) of the embodiment of the present invention 1;
Fig. 2 is the sectional structure chart (heating tube drops to extreme lower position) of the embodiment of the present invention 2;
Fig. 3 is A close-up schematic view in Fig. 2.
Embodiment
Embodiment 1
As shown in Figure 1, be the pollution-free heating tube device of a kind of vertical vacuum of the present invention ion film coating machine, comprise heating tube assembly, bellows component, corrugated tube supporting holder assembly and hoisting appliance.Heating tube assembly is chewed 11 formed by special heating tube 10, heating tube flange 12, heating tube termination water-cooling cover 9, Water Exit.Special heating tube 10 upper end is wire terminals, leading-out end is provided with isolating joint, the position of the heating wire in heating tube 10 is away from lead, when heating tube 10 drops to extreme lower position, heating wire is positioned at body of heater top board 21 slightly below place, and body of heater top board 21 is positioned at the upper end of the body of heater coaming plate 22 of coating chamber 24.Under heating tube flange 12 againsts the convex shoulder of heating tube 10 upper end, anchor ring boxing is connected and fixed, between the upper surface of heating tube flange 12 and heating tube 10 spatially, cover welding there is any discrepancy water chews 11 water coolant cover 9, be configured for the annular water cooling chamber 26 of flow of cooling water, entery and delivery port 11 communicates with water cooling chamber 26, the heat that water-cooling cover inner cold water and heating tube are uploaded carries out heat exchange, absorb the heat that heating tube is uploaded, ensure the electrical isolation of heating tube leading-out end, ensure that the vacuum-sealing 13 on heating tube flange does not damage simultaneously.
Bellows component is made up of corrugated tube 15, corrugated tube upper flange 14, corrugated tube lower flange 16.The intermediate throughholes of corrugated tube upper flange 14 and corrugated tube lower flange 16 and the mouth of pipe size of corrugated tube 15 adapt, and the port of corrugated tube is positioned at the periphery of corrugated tube flange intermediate throughholes, and three's welding is connected.
Corrugated tube supporting holder assembly is made up of corrugated tube bearing flange 18, heating tube gangway sleeve pipe 19, outer water jacket 20 and heating tube copper dust washer 23.Sleeve pipe 19 lower end, heating tube gangway is stretched in the perforate of 21 body of heater top boards, is welded and fixed with body of heater top board 21.Heating tube gangway sleeve pipe 19 upper port and corrugated header flange 18 soldered, the outer water jacket 20 of tubular is enclosed within gangway sleeve pipe 19 periphery, the upper end of outer water jacket 20 is welded with corrugated header flange 18 and is connected, its lower end is welded with body of heater top board 21 and is connected, and three and heating tube gangway sleeve pipe 19 outer wall surround annular water cooling chamber 25.There is any discrepancy that water coolant chews (not shown) for outer water jacket 20, and this entery and delivery port passes to water cooling chamber 25 radiant heat absorbing heating tube mutually, protects the vacuum-sealing 13 on corrugated tube supporting base flange not damage simultaneously.
Heating tube flange 12 and corrugated tube upper flange 14 are sealed by sealing-ring 13 vacuum and are connected, and heating tube flange 12 is connected by the lifting arm 8 of screw and hoisting appliance together with corrugated tube upper flange 14.Corrugated tube lower flange 16 is connected with corrugated tube supporting base flange 18, and realizes vacuum-sealing by sealing-ring 17.Heating tube copper dust washer 23 adopts copper product to make, and dust washer 23 kink, outside heating tube 10, is placed in the upper surface of corrugated tube supporting base flange 18 and the annular groove of corrugated tube lower flange 16.Dust washer can stop that the filth on heating tube falls to entering coating chamber 24, can improve coating quality further.
Heating tube assembly, bellows component and corrugated tube supporting base are tightly connected, vacuum space is become with corrugated tube supporting base inner space from heating tube flange less than 18 bellows component, heating tube 10 enters in stove by it through body of heater top board 21, becomes the vacuum tunnel of heating tube up-and-down movement.
Heating tube 10 connects hoisting appliance by heating tube flange 18, hoisting appliance drives heating tube flange to drive heating tube to decline to make heating tube to enter coating chamber to carry out heating and to bleed operation, then drives heating tube to rise away from coating chamber to carry out plated film operation under vacuum conditions.The compression ratio of corrugated tube 15 is 8:1, and corrugated tube 15 heatproof is at least 600 degree.Corrugated tube pulls open and ensures enough length, make its promote expansion space be enough to hold Jia Re Guan And and maintain vacuum, and corrugated tube can tolerate the radiation of heat-generating pipe waste heat.
The present embodiment is applied to the lifting of single heating tube, for single heating tube is equipped with a hoisting appliance, hoisting appliance comprises lifting arm 8 and cylinder 1, the cylinder body air inlet/outlet of cylinder 1 connects external compressed gas source (not shown in FIG.), promote cylinder body inner carrier (not shown in FIG.) by pressurized air to move up and down, thus promotion piston rod 3 moves up and down.The piston rod 3 of cylinder 1 protrudes upward, lifting arm 8 arranged transversely, and edge and the corrugated tube upper flange of its one end and heating tube flange 12 are connected by screw, and the upper end of the other end and piston rod 3 is fastenedly connected by double nut; The cylinder body of cylinder 1 is supported on the end face of coating chamber.Hoisting appliance also comprises guiding mechanism, in the present embodiment, guiding mechanism forms primarily of guide pillar seat 7, guide pillar 6, linear bearings 5, linear axis bearing 4 and air cylinder fixed plate 2, air cylinder fixed plate 2 is horizontally disposed with, one end of air cylinder fixed plate 2 is connected by screw on the body of heater top board of coating chamber, to realize supporting cylinder on the cylinder body that the other end is connected to cylinder 1, specifically in air cylinder fixed plate, offers through hole, the cylinder body of cylinder is fixed on through hole periphery, and piston rod then stretches out from through hole; Linear bearings 5 is arranged in linear axis bearing 4, and linear axis bearing is fixed on the upper surface of air cylinder fixed plate 2, guide pillar seat 7 is arranged in the perforate of lifting arm 8, the upper end of guide pillar 6 to be fixed on guide pillar seat 7 and to stretch out air cylinder fixed plate 2 after being passed down through linear bearings 5, and wherein linear bearings 5 and guide pillar 6 are for being slidably matched.Guide pillar seat 7 is made up of web plate and the cylindrical shell be located on web plate lower surface, and the upper end of guide pillar 6 is inserted and is fixed in cylindrical shell, and web plate is positioned at the top of lifting arm 8 perforate, is fixed by screws in the hole of perforate along upper.
Working process of the present invention is as follows: single heating tube is in and drops to extreme lower position state, now in stove, (in coating chamber) carries out plated film operational procedure, first vacuumize, after reaching specified vacuum degree, heating tube electrified regulation, furnace temperature of being heated in stove rises, this is conducive to the assorted G&W vapour getting rid of stove internal adsorption, when furnace temperature rises to preset temperature, and insulation is to the specified time, after completing the operation of heating air aspiration stage, then heat-generating pipe power-off stops heating, while bleed in stove, furnace temperature gradually declines, more than heating tube, temperature also declines, after being extended down to the specified time, then promote heating tube to outside stove, plated film operation is started in stove.The process promoting heating tube is: start lifting switch, enter in cylinder by peripheral hardware pressure gas source from the lifting air nozzle of cylinder, promote cylinder body inner carrier up, piston rod rises slowly, drive lifting arm rises, guide pillar seat on lifting arm drags guide pillar and rises, and guide pillar is by the location of the linear bearings be arranged in air cylinder fixed plate and linear axis bearing and restriction, and lifting arm also drags be connected heating tube and corrugated tube rising thereon simultaneously; Namely lifting arm mentions corrugated tube upper flange, so originally namely pulled open by the corrugated tube compressed by the heating tube flange lifting heating tube be connected with it simultaneously.Here select special corrugated tube, its compression ratio reaches 8 to 1, and material heatproof reaches more than 600 degree, when heating tube rises to outside body of heater top board completely.Corrugated tube pulls open, and (length) ensures enough height, can maintain risen space and be in vacuum state, and corrugated tube can tolerate the radiation of heat-generating pipe waste heat.Special ripple pipe has the property point that thermotolerance is high, magnification ratio is large, fatigability is good, makes novel structure of the present invention, succinct, reliably, equipment is compacter, and manufacturing process more simplifies.
Embodiment 2
As shown in Figure 2,3, the difference of the present embodiment and embodiment 1 is: the present embodiment is applied to multiple heating tube and is elevated simultaneously, only be equipped with a hoisting appliance, hoisting appliance comprises lifter plate 2-6, cylinder 2-2 and cylinder cover, and cylinder cover is made up of support tube 2-5 and the support tube flange 2-4 of the upper port being positioned at support tube 2-5.Cylinder 2-2 is arranged on the body of heater top board 2-12 of coating chamber by cylinder firm banking 2-1, and the piston rod 2-3 of cylinder 2-2 protrudes upward.Cylinder cover covers on cylinder 2-2, and the support tube flange 2-4 end face of piston rod 2-3 and cylinder cover is fixedly connected.Lifter plate 2-6 is placed on the bottom of cylinder 2-2, and the lower port of support tube 2-5 is fixed on lifter plate 2-6, and lifter plate 2-6 has several open holes stretched out for heating tube, and the heating tube flange 12 on each heating tube is connected with the aperture lower periphery of open holes.
In the present embodiment, guiding mechanism forms primarily of guide pillar top board 2-11, guide pillar 2-7, linear bearings 2-9, linear axis bearing 2-8 and guide pillar base 2-10, the lower end of guide pillar 2-7 is fixed on the body of heater top board of coating chamber by guide pillar base 2-10, linear bearings 2-9 is arranged in linear axis bearing 2-8, and linear axis bearing 2-8 is fixed on lifter plate 2-6, guide pillar 2-7 is upward through linear bearings 2-9 and is connected with guide pillar top board 2-11.
Working process of the present invention is as follows: branched heating tube drops to extreme lower position and (only draws a heating tube in Fig. 2, other heating tube states are identical with it), plated film operational procedure is carried out identical with embodiment 1 in stove, first vacuumize, subsequently each heating tube electrified regulation, after completing the operation of heating air aspiration stage, then each heat-generating pipe power-off stops heating, after temperature drops to the specified time more than heating tube, then promote each heating tube to outside body of heater top board, in stove, start plated film operation.Promote the operational process of each heating tube: start lifting switch, enter in cylinder by peripheral hardware pressure gas source from the lifting air nozzle of cylinder, promote cylinder body inner carrier up, piston rod rises slowly, and drive support tube flange---support tube---lifter plate to rise, each heating tube flange be connected in immediately on lifter plate promotes simultaneously, and drag each heating tube and also rise, and mention corrugated tube upper flange, so originally namely pulled open (length) by the corrugated tube compressed, make promote expansion space maintain vacuum.Lifter plate is slidably connected through linear bearings and guide pillar by the linear axis bearing be connected again, lifter plate moves up and down the location of by guide pillar---linear bearings---linear axis bearing and restriction, ensure that lifter plate is steadily elevated, do not vibrate, be not shifted, do not deflect, also ensure that lifter plate drag the heating tube that is connected thereon and corrugated tube lifting steadily, not bias.
Embodiments of the present invention are not limited thereto; according to foregoing of the present invention; according to ordinary technical knowledge and the customary means of this area; do not departing under the present invention's above-mentioned basic fundamental thought prerequisite; the present invention can also make the amendment of other various ways, replacement or change, all drops within rights protection scope of the present invention.
Claims (10)
1. the pollution-free heating tube device of a vertical vacuum ion film coating machine, it is characterized in that: comprise heating tube assembly, bellows component, corrugated tube supporting holder assembly and hoisting appliance, described heating tube assembly comprises heating tube, its upper end is the wire terminals of tape insulation, heating tube flange is welded with slightly by below, described heating tube flange connects bellows component downwards, described bellows component connects corrugated tube supporting holder assembly downwards, the corrugated tube supporting holder assembly heating tube gangway passed downwardly through out again on body of heater top board is communicated with in stove, described heating tube passes the hollow cavity of bellows component and corrugated tube supporting holder assembly, the heating tube gangway put on body of heater top board enters in stove, described heating tube is by hoisting appliance described in heating tube Flange joint, described hoisting appliance drives heating tube flange, drive heating tube declines, make heating tube enter coating chamber to carry out heating and to bleed operation, heating tube is driven to rise away from coating chamber to carry out plated film operation under vacuum conditions again.
2. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 1; it is characterized in that: described heating tube assembly also comprises heating tube termination water-cooling cover and Water Exit is chewed; under the convex shoulder of described heating tube flange boxing on heating tube; between the upper surface and heating tube of heating tube flange spatially; cover welding there is any discrepancy water coolant cover that water chews; by the heat that the water coolant absorption heating tube in water-cooling cover is uploaded; thus ensure the electrical isolation of heating tube leading-out end, protect the vacuum-sealing of heating tube flange not impaired simultaneously.
3. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 2, it is characterized in that: described bellows component comprises corrugated tube, corrugated tube upper flange and corrugated tube lower flange, described corrugated tube welds with corrugated tube upper flange and corrugated tube lower flange and is connected, the intermediate throughholes of the upper and lower flange of described corrugated tube and the mouth of pipe size of corrugated tube adapt, and the upper and lower port of described corrugated tube is positioned at the periphery of the upper and lower flange intermediate throughholes of described corrugated tube; Described heating tube flange and corrugated tube upper flange realize vacuum-sealing by sealing-ring and are connected, and heating tube flange and corrugated tube upper flange are common and hoisting appliance is connected, described corrugated tube lower flange and corrugated tube supporting base Flange joint.
4. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 3, is characterized in that: the compression ratio of described corrugated tube is 8:1, and described corrugated tube heatproof is at least 600 degree.
5. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 4, it is characterized in that: described corrugated tube supporting holder assembly is by corrugated tube bearing flange, heating tube gangway sleeve pipe, outer water jacket and heating tube copper dust washer composition, heating tube gangway its lower end stretches in the perforate of body of heater top board, be welded and fixed with body of heater top board, heating tube gangway sleeve upper end mouth and corrugated header flange soldered, outer water jacket is enclosed within sleeve pipe periphery, heating tube gangway, it welds with corrugated header flange and body of heater top board and is connected, form the water cooling chamber of annular, described outer water jacket be provided with into, water outlet, Cooling Water passes in and out, described corrugated tube supporting base flange is fixedly connected with described corrugated tube lower flange, realizes vacuum-sealing between the two by sealing-ring, the radiant heat that the water coolant flow through in described water cooling chamber absorbs heating tube damages to prevent described vacuum-sealing, described heating tube copper dust washer kink outside heating tube, and is placed in the upper surface of corrugated tube supporting base flange and the annular groove of corrugated tube lower flange lower surface to stop that the filth on heating rod falls in stove.
6. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 1, it is characterized in that: described heating tube assembly, bellows component and corrugated tube supporting holder assembly are tightly connected, vacuum space is communicated with into the hollow cavity of corrugated tube supporting holder assembly from the following bellows component of heating tube flange, heating tube enters in stove by this vacuum space through heating tube gangway, becomes the vacuum tunnel of heating tube up-and-down movement by this corrugated tube variable inner chamber of the length that causes that stretches.
7. the pollution-free heating tube device of the vertical vacuum ion film coating machine according to any one of claim 1 ~ 6, it is characterized in that: described hoisting appliance comprises lifting arm and cylinder, the piston rod of described cylinder protrudes upward, described lifting arm arranged transversely, its one end is connected with the edge of described heating tube flange, and the other end is connected with described piston rod; The cylinder body of described cylinder is supported on the end face of coating chamber.
8. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 7, it is characterized in that: described hoisting appliance also comprises guiding mechanism, described guiding mechanism is primarily of guide pillar seat, guide pillar, linear bearings, the gentle cylinder retaining plate composition of linear axis bearing, described air cylinder fixed plate is horizontally disposed with, one end of described air cylinder fixed plate is connected on the end face of described coating chamber, to realize supporting cylinder on the cylinder body that the other end is connected to cylinder; Described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on the upper surface of described air cylinder fixed plate, described guide pillar seat is arranged in the perforate of lifting arm, and the upper end of described guide pillar to be fixed in guide pillar seat and to stretch out air cylinder fixed plate after being passed down through linear bearings.
9. the pollution-free heating tube device of the vertical vacuum ion film coating machine according to any one of claim 1 ~ 6, it is characterized in that: described hoisting appliance comprises lifter plate, cylinder and cylinder cover, described cylinder is arranged on the end face of described coating chamber, the piston rod of described cylinder protrudes upward, described cylinder cover covers on described cylinder, described piston rod is connected with the end face of described cylinder cover, described lifter plate is placed on the bottom of cylinder, the lower port of described cylinder cover is fixed on described lifter plate, described lifter plate has several open holes stretched out for heating tube, heating tube flange on each heating tube is connected with the aperture lower periphery of described open holes.
10. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 9, it is characterized in that: described hoisting appliance also comprises guiding mechanism, described guiding mechanism forms primarily of guide pillar top board, guide pillar, linear bearings, linear axis bearing and guide pillar base, the lower end of described guide pillar is fixed on the end face of coating chamber by guide pillar base, described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on described lifter plate, described guide pillar is upward through linear bearings and is connected with guide pillar top board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN110040684B (en) * | 2019-05-14 | 2024-04-09 | 苏州美图半导体技术有限公司 | Automatic bond-releasing machine |
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| CN202183884U (en) * | 2011-07-06 | 2012-04-04 | 苏州泰升电热设备有限公司 | Transformable heating tube |
| CN203613251U (en) * | 2013-11-29 | 2014-05-28 | 东莞市汇成真空科技有限公司 | Pollution-free heating pipe device of vertical vacuum ion coating machine |
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| JPH09263939A (en) * | 1996-03-26 | 1997-10-07 | Sharp Corp | Heater |
| KR100680283B1 (en) * | 2005-07-01 | 2007-02-08 | 부산대학교 산학협력단 | Recycling Technology Development of Functional Parts by Controlling Solid Fraction and Vacuum Pressurization |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202183884U (en) * | 2011-07-06 | 2012-04-04 | 苏州泰升电热设备有限公司 | Transformable heating tube |
| CN203613251U (en) * | 2013-11-29 | 2014-05-28 | 东莞市汇成真空科技有限公司 | Pollution-free heating pipe device of vertical vacuum ion coating machine |
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Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: 523838 Guangdong province Dongguan City Dalingshan Yan Wu Cun Industrial Zone fourth Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd. |