CN103692294B - The superhigh precision processing method of rice magnitude optical element - Google Patents
The superhigh precision processing method of rice magnitude optical element Download PDFInfo
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- CN103692294B CN103692294B CN201310554717.6A CN201310554717A CN103692294B CN 103692294 B CN103692294 B CN 103692294B CN 201310554717 A CN201310554717 A CN 201310554717A CN 103692294 B CN103692294 B CN 103692294B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of superhigh precision processing method of meter of magnitude optical element, the method utilizes annular polishing technology and Technique of Magnetorheological Finishing to combine, by the optimum organization to different working process parameters, achieve the superhigh precision to rice magnitude optical element to process, the method processes the PV value of surface figure accuracy and reaches 1/8 wavelength, and RMS value reaches the rice magnitude optical element of 1/50 wavelength.
Description
Technical field
The invention belongs to a meter magnitude optical element processing, the particularly superhigh precision processing method of a kind of meter of magnitude optical element.
Technical background
Along with the fast development of modern science and technology, the rice magnitude optical element being applied in various optical system is proposed increasingly higher requirement. The rice magnitude optical element requiring final production under normal circumstances has high surface figure accuracy. The image quality that high surface figure accuracy can ensure that, reduces scattering, it is possible to avoid a meter magnitude optical element destruction in high-energy applications. Thus the performance of rice magnitude optical element depends greatly on manufacture process. Work out multiple processing method and can obtain high-precision finished surface, wherein typical processing method has plasticity grinding, chemical polishing, floating polishing, elastic emission machining, ion beam polishing etc., the above processing method is both for small-bore rice magnitude optical element, and for large scale rice magnitude optical element, these processing methods or polishing efficiency are relatively low, or polish wayward, be individually present certain defect. For rice magnitude optical element, currently existing method mainly uses annular polishing technology, and annular polishing technology work in-process can exist astigmatism relatively greatly, the situation that machining accuracy is not high.
MRF, is the rheological characteristic utilizing Magnetorheologicai polishing liquid in magnetic field technology that workpiece carries out local shape modifications and polishing. magnetic flow liquid is by carrier fluid (such as water, silicone oil etc.), discrete polarizable micron dimension magnetosensitive microgranule, surfactant, polishing particles and the additive composition with other functions. magnetic flow liquid is brought in the polishing area of the fine pitch formed between workpiece and polishing disk by polishing disk circulation, in this region, magnetic flow liquid is under the effect of high-gradient magnetic field, occur rheological effect and hardening, viscosity increases, magnetic-particle therein arranges chaining along the direction of magnetic field intensity, form the effigurate protruding ribbon of tool, and polishing powder granule therein does not have magnetic, therefore can be extruded and float to the weak top of magnetic field intensity, so go up edema over the face the protruding ribbon of one layer of polishing particles and just constitute one " flexible polishing mould ", when this flexible polishing mould flows through the small?gap suture that workpiece is formed with moving coil under the drive of moving coil, surface of the work can be produced very big shearing force, realize removing to surface of the work material.
Both at home and abroad magnetic rheological polishing method is carried out substantial amounts of research, MRF has been studied by the units such as domestic mainly Changchun optical precision optical machinery institute, Harbin Institute of Technology and the National University of Defense technology, but only it is usable on less optical element, not for the processing method of heavy-calibre planar rice magnitude optical element. And if the mode husked rice magnitude optical element of small workpiece is processed in use, because its process time is long, magnetic flow liquid character will appear from instability, as easy as rolling off a log cause heavy caliber rice magnitude optical element surface occur beyond thought defect, be difficulty with the superhigh precision to rice magnitude optical element and process.
Summary of the invention
The present invention provides the superhigh precision processing method of a kind of meter of magnitude optical element, annular polishing technology is combined with Technique of Magnetorheological Finishing, the method can produce the PV value of surface figure accuracy and reach 1/8 wavelength, and RMS value reaches the rice magnitude optical element of 1/50 wavelength.
The technical solution of the present invention is as follows:
The superhigh precision processing method of a kind of meter of magnitude optical element, it is characterised in that the method comprises the following steps:
1) annular polishing:
Using annular polishing machine that rice magnitude optical element is carried out preprocessing, the PV value of the surface figure accuracy of use rice magnitude optical element described in �� 300mm interferometer measurement in the course of processing, until the surface figure accuracy of this meter of magnitude optical element is less than 1 wavelength;
2) magnetorheological processing:
1. the burnishing parameters of magnetorheological lathe is set: the rotating speed of buff wheel is as 170-180r/min, field supply is 6.5��7A, the viscosity of magnetic flow liquid is 190��195Pa s, and flow is 110��120L/h, and bottom buff wheel, the upper surface distance with described rice magnitude optical element is 1��1.1mm;
2. magnetic flow liquid removal efficiency is demarcated:
A) measure original shape of the round mirror of �� 100mm with �� 100mm interferometer, be stored in technique computer;
B) the round mirror of described �� 100mm is placed on the adjustment frame of turntable of magnetorheological lathe, regulates described adjustment frame, coordinate dial gauge to make the round mirror maintenance level of described �� 100mm;
C) four quadrature position fixed point polishing T seconds, the face shape after utilizing interferometer to measure processing on the round mirror of �� 100mm, be stored in technique computer;
D) the face shape after the processing of technique computer deducts original shape, obtain the removal degree of depth of the orthogonal fixed point polishing area of described four, the removal degree of depth in four fixed point regions is denoted as L1, L2, L3, L4 respectively, be averaging the average of magnetic flow liquid removes degree of depth L=(L1+L2+L3+L4)/4, the removal volume in four fixed point regions is denoted as V1, V2, V3, V4, and according to T process time, it is averaging to obtain average removal efficiency ��=(the V1+V2+V3+V4)/4T of magnetic flow liquid;
3. rice magnitude optical element location: described rice magnitude optical element is fixed on the turntable central authorities of magnetorheological lathe, dial gauge is utilized to determine the center of described rice magnitude optical element x-axis on turntable and y-axis position (X1, Y1), the position (Z1) of the upper surface of described rice magnitude optical element is determined by setting system, utilizing the pad scraps of paper under described rice magnitude optical element to coordinate dial gauge to make described rice magnitude optical element maintenance level, the difference in height of the upper surface of whole described rice magnitude optical element is less than 1 ��m;
4. numerical control machining code generates: first by interferometer, described rice magnitude optical element is carried out surface shape measurement, to determine the material removal amount V of described rice magnitude optical element surface, then processing step pitch is set as 0.5��2mm, described rice magnitude optical element is divided into n machining area, the removal degree of depth L and removal efficiency �� of the material removal amount V according to surface and magnetic flow liquid, pulse iterative method is used to draw the residence time of each machining area, generate numerical control machining code, be stored in technique computer;
5. numerical control machining code is copied to numerical control of machine tools computer from described technique computer, after viscosity and the flow indication of magnetic flow liquid are stable, rice magnitude optical element is processed;
6. using interferometer measurement after machining, when surface figure accuracy PV value reaches 1/8 wavelength, RMS value reaches 1/50 wavelength, then complete superhigh precision processing; Otherwise enter step 7.;
7. repeat step 2.��5., carry out reworking, until it reaches the required index of superhigh precision processing.
The technique effect of the present invention:
Showing through measuring, the present invention can realize the machining accuracy to rice magnitude optical element, reaches surface figure accuracy PV value and reaches 1/8 wavelength, and RMS value reaches more than 1/50 wavelength.
Detailed description of the invention
Below in conjunction with embodiment, the present invention is elaborated.
Embodiment 1
A kind of superhigh precision processing method of meter of magnitude optical element, its procedure of processing is as follows:
1) annular polishing:
Use annular polishing machine that rice magnitude optical element is carried out preprocessing, use �� 300mm interferometer to measure the PV value of meter surface figure accuracy of magnitude optical element in the course of processing, until the surface figure accuracy of rice magnitude optical element is less than 1 wavelength;
2) magnetorheological processing:
1. the burnishing parameters of magnetorheological lathe is set: the rotating speed of buff wheel is as 180r/min, and field supply is 7A, and the viscosity of magnetic flow liquid is 193.0Pa s, and flow is 120L/h, and bottom buff wheel, the upper surface distance with rice magnitude optical element is 1.05mm;
2. magnetic flow liquid removal efficiency is demarcated:
A) measure original shape of the round mirror of �� 100mm with �� 100mm interferometer, be stored in technique computer;
B) the round mirror of described �� 100mm is placed on the adjustment frame of turntable of magnetorheological lathe, regulates described adjustment frame, coordinate dial gauge to make the round mirror maintenance level of �� 100mm;
C) four quadrature position fixed point polishing T seconds, the face shape after utilizing interferometer to measure processing on the round mirror of �� 100mm, be stored in technique computer;
D) the face shape after the processing of technique computer deducts original shape, obtain the face shape of the orthogonal fixed point polishing area of described four, the degree of depth in four fixed point regions is denoted as L1, L2, L3, L4 respectively, be averaging the average of magnetic flow liquid removes degree of depth L (L=(L1+L2+L3+L4)/4), the volume in four fixed point regions is denoted as V1, V2, V3, V4, and according to T process time, it is averaging to obtain the average removal efficiency �� (��=(V1+V2+V3+V4)/4T) of magnetic flow liquid;
3. rice magnitude optical element location: rice magnitude optical element is fixed on the turntable central authorities of magnetorheological lathe, dial gauge is utilized to determine meter center of magnitude optical element x-axis on turntable and y-axis position (X1, Y1), a meter position for the upper surface of magnitude optical element (Z1) is determined by setting system, utilizing the pad scraps of paper under workpiece to coordinate dial gauge to make workpiece maintenance level, the difference in height of the upper surface of whole workpiece is less than 1 ��m;
4. numerical control machining code generates: first by interferometer, the rice magnitude optical element of required processing is carried out surface shape measurement, to determine the material removal amount V of meter magnitude optical element surface, then processing step pitch is set as 1mm, rice magnitude optical element is divided into n machining area, the removal degree of depth L and removal efficiency �� of the material removal amount V according to surface and magnetic flow liquid, use pulse iterative method to draw the residence time of each machining area, generate numerical control machining code, be stored in technique computer;
5. numerical control machining code is copied to numerical control of machine tools computer from described technique computer, after viscosity and the flow indication of magnetic flow liquid are stable, rice magnitude optical element is processed;
6. using interferometer measurement after machining, when surface figure accuracy PV value reaches 1/8 wavelength, RMS value reaches 1/50 wavelength, then complete superhigh precision processing; Otherwise enter step 7.;
7. repeat step 2.��5., carry out second time processing, until it reaches the required index of superhigh precision processing. After tested, the PV value of the surface figure accuracy of the rice magnitude optical element of embodiment 1 processing is 0.127 wavelength, and RMS value is 0.022 wavelength.
The machined parameters of embodiment 2 to embodiment 13 is as shown in table 1.
Embodiment 2��13 mainly investigates rice magnitude optical element in the course of processing, with the upper surface distance of rice magnitude optical element and the impact processing the step pitch PV value on the surface figure accuracy of rice magnitude optical element and RMS value bottom the rotating speed of buff wheel, field supply, magnetic flow liquid viscosity, magnetic flow liquid flow, buff wheel. Specific implementation process with embodiment 1, be distinctive in that change respectively bottom the rotating speed of buff wheel, field supply, magnetic flow liquid viscosity, magnetic flow liquid flow, buff wheel with the upper surface distance of rice magnitude optical element and processing step pitch. Being drawn by experimental result, optimum machined parameters is: buff wheel rotating speed is 180r/min, and field supply is 7A, magnetic flow liquid viscosity is 193Pa s, magnetic flow liquid flow is 120L/h, and bottom buff wheel, the distance with the upper surface of rice magnitude optical element is 1.05mm, and processing step pitch is 1mm. Machining accuracy to rice magnitude optical element, reaches surface figure accuracy PV value and reaches 1/8 wavelength, and RMS value reaches more than 1/50 wavelength.
Table 1 is the processing conditions of the embodiment of the present invention:
Claims (1)
1. a superhigh precision processing method for rice magnitude optical element, the method comprising the steps of:
1) annular polishing:
Use annular polishing machine that rice magnitude optical element is carried out preprocessing, the PV value of the surface figure accuracy of use rice magnitude optical element described in �� 300mm interferometer measurement in the course of processing, until the PV value of the surface figure accuracy of this meter of magnitude optical element is less than 1 wavelength;
It is characterized in that, further comprise the steps of:
2) magnetorheological processing:
1. the burnishing parameters of magnetorheological lathe is set: the rotating speed of buff wheel is as 170-180r/min, field supply is 6.5��7A, the viscosity of magnetic flow liquid is 190��195Pa s, and flow is 110��120L/h, and bottom buff wheel, the upper surface distance with described rice magnitude optical element is 1��1.1mm;
2. magnetic flow liquid removal efficiency is demarcated:
A) measure original shape of the round mirror of �� 100mm with �� 100mm interferometer, be stored in technique computer;
B) the round mirror of described �� 100mm is placed on the adjustment frame of turntable of magnetorheological lathe, regulates described adjustment frame, coordinate dial gauge to make the round mirror maintenance level of described �� 100mm;
C) four quadrature position fixed point polishing T seconds, the face shape after utilizing interferometer to measure processing on the round mirror of �� 100mm, be stored in technique computer;
D) the face shape after the processing of technique computer deducts original shape, obtain the removal degree of depth of the orthogonal fixed point polishing area of described four, the removal degree of depth in four fixed point regions is denoted as L1, L2, L3, L4 respectively, be averaging the average of magnetic flow liquid removes degree of depth L=(L1+L2+L3+L4)/4, the removal volume in four fixed point regions is denoted as V1, V2, V3, V4, and according to T process time, it is averaging to obtain average removal efficiency ��=(the V1+V2+V3+V4)/4T of magnetic flow liquid;
3. rice magnitude optical element location: described rice magnitude optical element is fixed on the turntable central authorities of magnetorheological lathe, dial gauge is utilized to determine the center of described rice magnitude optical element x-axis on turntable and y-axis position (X1, Y1), the position (Z1) of the upper surface of described rice magnitude optical element is determined by setting system, utilizing the pad scraps of paper under described rice magnitude optical element to coordinate dial gauge to make described rice magnitude optical element maintenance level, the difference in height of the upper surface of whole described rice magnitude optical element is less than 1 ��m;
4. numerical control machining code generates: first by interferometer, described rice magnitude optical element is carried out surface shape measurement, to determine the material removal amount V of described rice magnitude optical element surface, then processing step pitch is set as 0.5��2mm, described rice magnitude optical element is divided into n machining area, the removal degree of depth L and removal efficiency �� of the material removal amount V according to surface and magnetic flow liquid, pulse iterative method is used to draw the residence time of each machining area, generate numerical control machining code, be stored in technique computer;
5. numerical control machining code is copied to numerical control of machine tools computer from described technique computer, after viscosity and the flow indication of magnetic flow liquid are stable, rice magnitude optical element is processed;
6. using interferometer measurement after machining, when surface figure accuracy PV value reaches 1/8 wavelength, RMS value reaches 1/50 wavelength, then complete superhigh precision processing; Otherwise enter step 7.;
7. repeat step 2.��5., carry out reworking, until it reaches the required index of superhigh precision processing.
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| CN105300324B (en) * | 2015-09-16 | 2018-06-01 | 浙江工业大学 | A kind of evaluation method of brittle material surface before polishing |
| CN106007406B (en) * | 2016-05-17 | 2019-02-01 | 中国科学院上海光学精密机械研究所 | The processing method of meter level heavy caliber phosphate laser neodymium glass optical surface wavefront gradients reparation and scratch passivation |
| CN106826401B (en) * | 2016-07-25 | 2019-01-22 | 中国科学院长春光学精密机械与物理研究所 | A kind of Magnetorheological Polishing face shape error convergence control processing method |
| CN106225714B (en) * | 2016-08-02 | 2018-04-10 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical calibration method for being used for MR fluid ribbon in magnetorheological process equipment |
| CN109623507A (en) * | 2019-01-02 | 2019-04-16 | 中国科学院上海光学精密机械研究所 | YAG slab laser crystal reflection face shape processing method |
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| CN102756336A (en) * | 2012-02-23 | 2012-10-31 | 清华大学 | Optimal adjustment method for silhouette removal in revolution autorotation magneto-rheological finishing |
| CN102848287A (en) * | 2012-09-14 | 2013-01-02 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
| CN103192297A (en) * | 2012-08-24 | 2013-07-10 | 广东工业大学 | Combined machining method for chemistry cluster magneto-rheological of monocrystal silicon carbide wafer |
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| US8271120B2 (en) * | 2009-08-03 | 2012-09-18 | Lawrence Livermore National Security, Llc | Method and system for processing optical elements using magnetorheological finishing |
| CN102161169B (en) * | 2011-01-19 | 2012-06-20 | 湖南大学 | Small-caliber aspherical composite precise processing method |
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| CN102756336A (en) * | 2012-02-23 | 2012-10-31 | 清华大学 | Optimal adjustment method for silhouette removal in revolution autorotation magneto-rheological finishing |
| CN103192297A (en) * | 2012-08-24 | 2013-07-10 | 广东工业大学 | Combined machining method for chemistry cluster magneto-rheological of monocrystal silicon carbide wafer |
| CN102848287A (en) * | 2012-09-14 | 2013-01-02 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
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