CN103615992B - Method and device for detecting roughness of inner surface of micro-pore - Google Patents
Method and device for detecting roughness of inner surface of micro-pore Download PDFInfo
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- CN103615992B CN103615992B CN201310572234.9A CN201310572234A CN103615992B CN 103615992 B CN103615992 B CN 103615992B CN 201310572234 A CN201310572234 A CN 201310572234A CN 103615992 B CN103615992 B CN 103615992B
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- 238000000034 method Methods 0.000 title claims abstract description 32
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- 239000013307 optical fiber Substances 0.000 claims description 39
- 230000003746 surface roughness Effects 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 16
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- 238000005253 cladding Methods 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 7
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- 238000005516 engineering process Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 4
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- 229910052710 silicon Inorganic materials 0.000 description 2
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Abstract
The invention provides a method and device for detecting the roughness of the inner surface of a micro-pore. The method comprises the steps that diffuse scattering luminous fluxes of different positions modulated through the rough surface intensity are collected so that the roughness can be evaluated; a non-linear relationship exists between the ratio of voltages generated by two sets of luminous fluxes and the roughness, a micro-pore with the known roughness is calibrated, the micro-pore to be detected is compared with a calibration value, and then the roughness of the micro-pore to be detected is detected. By the adoption of the method and device for detecting the roughness of the inner surface of the micro-pore, the problem that a sensor cannot extend into the micro-pore in the prior art is solved, the angle of the sensor can be changed flexibly and conveniently, the measurement accuracy is high, and efficiency is high.
Description
Technical field
The present invention relates to photoelectron technology fields of measurement, specifically a kind of detection method of micropore inside surface roughness and its
Device.
Background technology
With the progress and development of modern science and technology, the appearance of various extra accuracy process technologies, high-quality surface processing
It is achieved, so as to propose higher and higher requirement to surface roughness side amount.And in some high sophisticated technology fields, produce
Product are more and more presented the development trend of miniaturization, wherein micropore device machinery, instrument, aviation, electronics, biologic medical and
The application of textile industry is more and more extensive.How to micropore inwall thing followed problem is the inspection of surface roughness, mesh
Front the more commonly used method measures the method for the roughness on micropore inwall surface according to measuring principle and the difference of implementation,
Generally can be divided into comparative measurement method, Mechanical stylus method, electron microscope method, optical method and some other comprehensive measuring method etc..
But in some fields, such as on aircraft industry, big aircraft engine and rocket motor device ejector filler hole diameter are 400
Below μm, how many above method is restricted, and such as uses Mechanical stylus method, it is difficult to stretch in micropore, and produces more miniature spy
Pin then high cost etc..These micropore inwall quality directly influence performance and the life-span of whole product, especially for
Running speed is fast, assembly precision is high, sealing requirements are tight and work in hot environment under product, its influence shows more prominent
Go out.
For many years, the problem of the measurement of micropore inwall roughness is one of important topic of experiment and theoretical research all the time.
The particularly middle and late stage seventies in last century, with computer utility progressively popularization and microelectric technique, Modern Optics Technology and
The development of laser application technique, micropore roughness concentration technology have obtained certain development.At present, micropore inside surface roughness
The method of inspection, in terms of tending to the non-destroyed measurement of FOS-RIM type optical fiber surface roughness penetration type sensor micropore inwalls.But
It is that as the activity space of measuring device is restricted, and operation adjustment is inconvenient, and measurement efficiency is not high, it is impossible to realize on-line measurement,
Growing industrialization demand can not be met.
The content of the invention
The invention provides a kind of detection method of micropore inside surface roughness and its device, effectively overcome existing skill
In art, sensor cannot stretch into the problem of micropore, and sensor angles change is flexible, and certainty of measurement is high, efficiency high.
The detection method of the micropore inside surface roughness that the present invention is provided is comprised the following steps：
1) by generating laser, photodetector turn-on power preheats 10-30 minutes；
2) standard sample of known micropore inwall roughness is placed on three-dimensional working platform, and is fixed with fixture, adjusted
Three-dimensional working platform, makes RIM_FOS sensor emissions laser in the plane through micropore axis, is 2- with standard sample spacing
4mm, and adjust clamp of sensor and make RIM_FOS sensors horizontal by 30-60 °；
3) two group luminous fluxes of the laser Jing after roughness modulation inside standard sample micropore are gathered by photodetector, by number
According to being stored in host computer after process；
4) select the standard sample of some known micropore inwall roughness, 2) 3), host computer is by the data obtained for repeat step
Processed, recorded the voltage U that the corresponding two groups of luminous fluxes of each micropore are produced respectively1And U2Ratio, due to micropore inwall it is coarse
Degree σ2The voltage U produced with two groups of luminous fluxes1And U2Ratio into non-linear relation：
F (x) is demarcated according to the data of statistics；
5) by step 2) in standard sample change into and treat test sample block, repeat step 2) 3), by gained U1And U2Bring formula into
In, the evaluation of roughness inside micrometer hole is treated in realization.
Further improve, the micropore of described standard sample sets in a row, step 3) in, by the tune of three-dimensional working platform
It is whole, multi-point sampling is carried out to four orientation mutually in 90 ° of single micropore first, then rows of micropore on standard specimen is adopted by column
Collection.
Further improve, described step 3) 3) in processing procedure include amplify, filtering and noise suppression preprocessing.
Present invention also offers a kind of device of the detection method for realizing micropore inside surface roughness, including three-dimensional work
Platform, generating laser, photodetector and RIM_FOS sensors, sample block are fixed on three-dimensional working platform, RIM_FOS sensors
It is clipped on three-dimensional working platform by clamp of sensor, is suspended in above sample block, generating laser and photodetector is connected to
RIM_FOS sensors rear end.
Further improve, described RIM_FOS sensors are included in head and head by optical fiber interface stationary fixture
Three groups of fixed optical fiber, three groups of optical fiber include the input optical fibre being connected with generating laser positioned at center, and are centered around input
Reception optical fiber group one and reception optical fiber group two that optical fiber surrounding is connected with photodetector.
Further improve, described input optical fibre cladding diameter 125um, core diameter 62.5um；Described reception optical fiber
Group one includes three root receiving fibers, cladding diameter 105um, core diameter 105um；Described reception optical fiber group two is thin comprising three
Optical fiber, cladding diameter 125um, core diameter 62.5um.
Further improve, described photodetector is connected with multichannel small-signal acquisition process circuit.
Beneficial effect of the present invention is：
1st, the present invention slants the light flux ratio that two groups of angle difference diffusing scatterings of micropore inwall to be measured are returned by determining laser
Value is compared with the ratio of corresponding standard microwell, to pass judgment on the roughness of all angles of micropore inner surface to be measured, is
A kind of roughness concentration that many sensors can not be stretched into, there is provided brand-new method.
When the 2nd, carrying out the collection of standard roughness micropore scatter light flux, four orientation mutually in 90 ° of single micropore are carried out
Multi-point sampling, then the standard roughness micropore to opening up on standard specimen in a row carries out the collection of photoelectricity standard value by column；It is each to arrange
Difference between the ratio of the two groups of photoelectric currents of photoelectricity flow standard corresponding to standard roughness micropore is for corresponding to what is gathered
Respectively arranging the corresponding two groups of photoelectric current ratio of roughness micropore to be measured carries out error compensation；Due to two groups of photoelectric currents of photodetector
Ratio and micropore inwall roughness, the power and detector sensitivity of laser is directly proportional, therefore with the survey of first row
Value is standard, and photoelectric current ratio and its ratio of other row are the penalty coefficient of the row, are normalized；Work as survey
When measuring part to be measured, the measurement photoelectric current ratio of other row can then eliminate each row micropore and be located divided by corresponding penalty coefficient
The error of lasing light emitter and detector affect, improve certainty of measurement.
3rd, as the response frequency of photodetector is very high, in measurement process, Linear Array Realtime sensor can be scanned on workpiece simultaneously
The output intensity signal of multiple micropores, realizes the parallel measurement of many micropore geometric parameters, in addition amplify, filtering and denoising step by
Measuring circuit is completed, and its detection time is greatly shortened compared with the single hole based on machine vision is detected, for thousands of micropores
Part plate detection time will be reduced to tens of seconds from several tens minutes, so as to substantially increase the detection efficiency of micropore.
4th, the present invention is carried out to the current signal that each photodetector is input into using multichannel small-signal acquisition process circuit
Amplification, filtering, denoising, by the most of noise filtering in the current signal, improve signal to noise ratio, improve measurement accurately
Degree.
Description of the drawings
Fig. 1 is overall structure diagram of the present invention.
Fig. 2 is RIM_FOS Sensor section enlarged diagrams in Fig. 1.
Fig. 3 is RIM_FOS sensor main views.
Fig. 4 is RIM_FOS sensor right views.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
The device of the detection method for realizing micropore inside surface roughness that the present invention is provided is as shown in figure 1, including three-dimensional work
Make platform, generating laser 9, photodetector 14 and RIM_FOS sensors 15, on three-dimensional working platform base 1, be sequentially provided with Y-axis essence
Close mobile station 2, X-axis precision translation stages 3 and sample stage 4, are provided with Y-axis precision guide hole 17 between X-axis precision translation stages 3 and base 1.
Above base 1 by support 5 be equipped with cross bar 7, pass sequentially through in the middle of cross bar 7 Z axis precision guide case 11, Z axis precision translation stages 12,
Z axis rotate vertical bar 13 and clamp of sensor 6 accompanies RIM_FOS sensors 15, and generating laser 9 and photodetector 14 connect
In 15 rear end of RIM_FOS sensors.
The signal output part of each photodetector 14 corresponding signal respectively with multichannel small-signal acquisition process circuit 10
Input connects；As micropore size is between tens of to hundreds of microns, along with diffuse-reflectance amount it is relatively micro- in reciprocal amount
It is weak, therefore the signal that photodetector is received is very faint, simultaneously as the presence of various noises such as thermal noise, shot noise
Deng the output of, photodetector signal be often deeply buried in noise among, therefore Weak Signal Processing device includes preposition amplifying electricity
Road, the voltage-controlled low-pass filter circuit of second order and main amplifying circuit come that output amplitude is suitable, and filter out the to be detected of most of noise
Signal.
As shown in Figures 2 and 3, RIM_FOS sensors 15 include fixing by optical fiber interface in head 18 and head 18
Three groups of optical fiber that fixture 8 is fixed, three groups of optical fiber include the input optical fibre 19 being connected with generating laser positioned at center, and surround
The reception optical fiber group 1 being connected with photodetector 14 in input optical fibre surrounding and reception optical fiber group 2 21.
15 internal optical fiber of RIM_FOS sensors is as shown in figure 4, design parameter is as follows：Described 19 covering of input optical fibre is straight
Footpath 125um, core diameter 62.5um；Described reception optical fiber group 1 includes three root receiving fibers, and cladding diameter 105um is fine
Core diameter 105um；Described reception optical fiber group 2 21 includes three thin optic fibres, cladding diameter 125um, core diameter 62.5um.
The detection method of the micropore inside surface roughness that the present invention is provided is comprised the following steps：
1) by generating laser, photodetector turn-on power preheats 10-30 minutes；
2) standard sample of known micropore inwall roughness is placed on three-dimensional working platform, and is fixed with fixture, adjusted
Three-dimensional working platform, makes RIM_FOS sensor emissions laser in the plane through micropore axis, is 2- with standard sample spacing
4mm, and adjust clamp of sensor and make RIM_FOS sensors horizontal by 45 °；
3) two group luminous fluxes of the laser Jing after roughness modulation inside sample blocks micropore are gathered by photodetector, by data
It is stored in host computer after process；
4) select the standard sample of some known micropore inwall roughness, 2) 3), host computer is by the data obtained for repeat step
Processed, recorded the voltage U that the corresponding two groups of luminous fluxes of each micropore are produced respectively1And U2Ratio, due to micropore inwall it is coarse
Degree σ2The voltage U produced with two groups of luminous fluxes1And U2Ratio into non-linear relation：
F (x) is demarcated according to the data of statistics；
5) by step 2) in standard sample change into and treat test sample block, repeat step 2) 3), by gained U1And U2Bring formula into
In, the evaluation of roughness inside micrometer hole is treated in realization.
In order to increase the degree of accuracy of measurement, the micropore of described standard sample sets in a row, step 3) in, by three-dimensional work
Make the adjustment of platform, multi-point sampling is carried out to four orientation mutually in 90 ° of single micropore first, then to rows of micropore on standard specimen
16 gather by column.Difference between the ratio of the two groups of photoelectric currents of photoelectricity flow standard corresponding to each row standard roughness micropore is used for
The corresponding corresponding two groups of photoelectric current ratio of roughness micropore to be measured that respectively arranges to being gathered carries out error compensation；Due to photodetection
The ratio of two groups of photoelectric currents of device and the roughness of micropore inwall, the power and detector sensitivity of laser are directly proportional, because
, with the measured value of first row as standard, photoelectric current ratio and its ratio of other row are the penalty coefficient of the row, carry out for this
Normalized；When part to be measured is measured, the measurement photoelectric current ratio of other row can then disappear divided by corresponding penalty coefficient
Except the lasing light emitter that each row micropore is located is affected with the error of detector.
Described step 3) 4) in processing procedure be multichannel small-signal acquisition process circuit it is defeated to each photodetector
The current signal for entering is amplified, filters, denoising, by the most of noise filtering in the current signal, improves noise
Than improving measuring accuracy.
Operation principle of the present invention is as follows：Due to micropore inwall roughness σ2The voltage U produced with two groups of luminous fluxes1And U2's
Ratio is into non-linear relation：
F (x) is demarcated by known roughness micro hole, the micro hole of roughness to be measured is only by luminous flux bad student's
Magnitude of voltage U1And U2Bring in formula, you can the evaluation of roughness inside micrometer hole is treated in realization.
Proof procedure：
1. light intensity φ that two groups of reception optical fibers are received1, φ2, it is radiated on light cell and produces micro voltage, then through light electrical resistivity survey
The amplification and the corresponding voltage U1 and U2 of filtering generation for surveying device (can detect that U1And U2Value).Set their ratio (S'n：Two
The beam intensity ratio that group reception optical fiber is received) it is S'n, then have relational expression：
2. S' is affectednThe factor of value includes on both macro and micro that its expression formula is S'n=Mf·Ms(formula 2) (Mf：
Macroscopical intensity modulation function；Ms：Microcosmic intensity modulation function).
3. macroscopical intensity modulation function M is solvedf：Analyzed by macrostructure(wherein M2：Second group of reception optical fiber
With the structure intensity modulation function of launching fiber；M1：The structure intensity modulation function of first group of reception optical fiber and launching fiber.)：
Due to solving M1,M2Process is the same, therefore only represents them with M
Wherein
Sr：Optical fiber receiving cross section；
I(ρ,d,θi)：By ρ (ρ：The distance of receiving point and spot center), d (d：Reception optical fiber end face and scattering surface away from
From) and θi(θi：Laser light incident angle) the receiving point light intensity expression that determines of three parameters.
Conclusion 1：Due to ρ, d, θiIt is setting value, so M1,M2And their ratio MfCan be equivalent to a fixed coefficient.4.
Solve microcosmic intensity modulation function Ms：According to B_K scattering models and principle(PS：Receive the average work(of scattering in direction
Rate；PD：Diffusing scattering mean power), it is laser light incident angle θ in the initial condition of this patenti=-θsUnder：WithWherein：
ρ0：The scattering coefficient of smooth surface；
σ：Roughness correlation；
λ：Laser wave long value；
T：Surface correlation length；
A：The region rectangle area of scattering point；
SimplifyHaveWherein K1：By parameter ρ0,T,A
The coefficient of decision；K2：The coefficient determined by parameter lambda.
Conclusion 2：Equally, θiFor setting value, K1, K2Coefficient is fixed, MsOnly and σ2It is relevant, and be in non-linear relation.
5. formula (3) is substituted in formula (2), then S'n=Mf·K1exp(-K2σ2cos2θi), then by above-mentioned conclusion 1 and 2
Understand, S'nOnly and σ2It is relevant, and be in non-linear relation, while from formula (1)Ratio only and σ2It is relevant, and in non-
Linear relationship, so, to sum up, final simplified style
In addition, this measuring system adopts photovoltaic detector silicon cell as sensor, silicon cell is a large area
Photodiode, it can be converted into electric energy the luminous energy for inciding its surface, be based on light volta effect make photovoltaic
Detector.As the response frequency of photodetector is very high, in above-mentioned measurement process, Linear Array Realtime sensor can scan workpiece simultaneously
The output intensity signal of upper multiple micropores, realizes the parallel measurement of many micropore geometric parameters.
Concrete application approach of the present invention is a lot, and the above is only the preferred embodiment of the present invention, it is noted that for
For those skilled in the art, under the premise without departing from the principles of the invention, some improvement can also be made, this
A little improvement also should be regarded as protection scope of the present invention.
Claims (7)
1. a kind of detection method of micropore inside surface roughness, it is characterised in that comprise the following steps：
1) by generating laser, photodetector turn-on power preheats 10-30 minutes；
2) standard sample of known micropore inwall roughness is placed on three-dimensional working platform, and is fixed with fixture, adjustment is three-dimensional
Workbench, makes RIM_FOS sensor emissions laser in the plane through micropore axis, is 2-4mm with standard sample spacing, and
Adjustment clamp of sensor makes RIM_FOS sensors horizontal by 30-60 °；
3) two group luminous fluxes of the laser Jing after roughness modulation inside standard sample micropore are gathered by photodetector, at data
Reason obtains relevant voltage U1And U2After be stored in host computer；
4) standard sample of some known micropore inwall roughness is selected, 2) 3), the data obtained is carried out repeat step by host computer
Process, record the voltage U that the corresponding two groups of luminous fluxes of each micropore are produced respectively1And U2Ratio, due to micropore inwall roughness σ2
The voltage U produced with two groups of luminous fluxes1And U2Ratio into non-linear relation：
F (x) is demarcated according to the data of statistics；
5) by step 2) in standard sample change into and treat test sample block, repeat step 2) 3), by gained U1And U2Bring in formula, it is real
The evaluation of roughness inside micrometer hole is treated now.
2. the detection method of micropore inside surface roughness according to claim 1, it is characterised in that：Described standard sample
Micropore set in a row, step 3) in, by the adjustment of three-dimensional working platform, first four orientation mutually in 90 ° of single micropore are entered
Row multi-point sampling, then rows of micropore on standard sample is gathered by column.
3. according to claim 1, it is characterised in that：Described step 3) 4) in processing procedure include amplify, filtering
And noise suppression preprocessing.
4. a kind of device for realizing the detection method of micropore inside surface roughness described in claim 1, it is characterised in that：Including three
Dimension workbench, generating laser, photodetector and RIM_FOS sensors, sample block are fixed on three-dimensional working platform, RIM_FOS
Sensor is clipped on three-dimensional working platform by clamp of sensor, is suspended in above sample block, and generating laser and photodetector connect
It is connected on RIM_FOS sensors rear end.
5. the detection means of micropore inside surface roughness according to claim 4, it is characterised in that：Described RIM_FOS
Sensor includes the three groups of optical fiber fixed by optical fiber interface stationary fixture in head and head, during three groups of optical fiber include being located at
The input optical fibre that the heart is connected with generating laser, and it is centered around the reception optical fiber that input optical fibre surrounding is connected with photodetector
Group one and reception optical fiber group two.
6. the detection means of micropore inside surface roughness according to claim 5, it is characterised in that：Described input optical fibre
Cladding diameter 125um, core diameter 62.5um；Described reception optical fiber group one includes three root receiving fibers, cladding diameter
105um, core diameter 105um；Described reception optical fiber group two includes three thin optic fibres, cladding diameter 125um, core diameter
62.5um。
7. the detection means of micropore inside surface roughness according to claim 5, it is characterised in that：Described photodetection
Device is connected with multichannel small-signal acquisition process circuit.
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| CN104132629A (en) * | 2014-08-12 | 2014-11-05 | 太仓思比科微电子技术有限公司 | Visible infrared light smoothness detection device |
| US9988242B1 (en) | 2017-01-11 | 2018-06-05 | Otis Elevator Company | Elevator rail healthy monitoring method |
| CN106643629A (en) * | 2017-03-15 | 2017-05-10 | 安徽理工大学 | Tubular structure inner surface roughness measurement calculating method |
| CN108332689B (en) * | 2018-02-08 | 2019-12-20 | 南京航空航天大学 | Optical measurement system and method for detecting surface roughness and surface damage |
| US10942025B2 (en) | 2018-06-27 | 2021-03-09 | Dalian University Of Technology | Measurement method for micro topography and roughness of internal surface of gap |
| CN114812449B (en) * | 2022-04-21 | 2024-05-03 | 深圳市汇投智控科技有限公司 | Finish detection device and finish detection method |
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