CN103592464B - 一种基于约瑟夫逊效应检测的硅压阻式加速度计 - Google Patents
一种基于约瑟夫逊效应检测的硅压阻式加速度计 Download PDFInfo
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CN105974104B (zh) * | 2016-05-12 | 2017-12-15 | 南京信息工程大学 | 基于巨压阻结构的悬臂梁生化传感器及悬臂梁制作方法 |
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CN100468063C (zh) * | 2007-04-19 | 2009-03-11 | 中北大学 | 三轴压阻微加速度计 |
CN101118249A (zh) * | 2007-08-25 | 2008-02-06 | 中北大学 | 压阻式高g值加速度计 |
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