CN103591897B - The inspection unit of plate glass and the equipment of manufacture - Google Patents

The inspection unit of plate glass and the equipment of manufacture Download PDF

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Publication number
CN103591897B
CN103591897B CN201310245003.7A CN201310245003A CN103591897B CN 103591897 B CN103591897 B CN 103591897B CN 201310245003 A CN201310245003 A CN 201310245003A CN 103591897 B CN103591897 B CN 103591897B
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plate glass
forming direction
checks
inspection unit
described plate
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CN103591897A (en
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切通隆则
佐藤诚
辻田京史
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Kawasaki Motors Ltd
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Kawasaki Jukogyo KK
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

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  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Textile Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The present invention provides inspection unit and the manufacture equipment of the plate glass that a kind of plate glass to having forming direction can carry out high efficiency inspection, according to the inspection unit (20) of the manufacture equipment (100) of the present invention be downstream transmit the plate glass (101) with forming direction while carry out the inspection unit that checks.With rotary apparatus (40) for benchmark, at its upstream and in downstream, it is configured with parallel edge in side and checks device (30), be configured with orthogonal edges at opposite side and check that device (50), face check device (60) and ray detection device (70).

Description

The inspection unit of plate glass and the equipment of manufacture
Technical field
The present invention relates to the inspection unit of the plate glass on manufacturing line, plate glass checked.Again, the manufacture equipment containing the plate glass of this inspection unit is related to.
Background technology
Plate glass to accept various inspection after fabrication, and determine reached certain standard after just can carry out shipment.In plate glass inspection, such as, Patent Document 1 discloses " shape measuring apparatus of glass substrate and assay method ", Patent Document 2 discloses " foreign body detecting device and inspection method ", Patent Document 3 discloses " flaw detection apparatus of the tabular transparent body and method thereof ", Patent Document 4 discloses " the end face inspection method of light transmission rectangular-shaped piece and end face check device ".As it appears from the above, the apparatus and method etc. that plate glass is checked have been proposed in more document.
Prior art literature:
Patent documentation 1: Japanese Unexamined Patent Publication 2007-205724 publication;
Patent documentation 2: Japanese Unexamined Patent Publication 2010-169453 publication;
Patent documentation 3: Japanese Unexamined Patent Publication 2012-007993 publication;
Patent documentation 4: Japanese Unexamined Patent Publication 2011-227049 publication.
Summary of the invention
The problem that invention to solve:
But, the either of which being recorded in the technology in document is one that is only conceived in multiple inspection project, does not but do discussion fully on this point that how the apparatus and method etc. about carrying out various inspection combining.Furtherly, in the literature even just effective related Revelation with each device of which kind of baseline configuration all without record.At this, what inventor had in mind is the plate glass with " forming direction ", namely send and the plate glass of molding with certain direction on manufacturing line, the directivity (directivity) having in the defects such as the striped optical inhomogeneous part of striated or stratiform (be present in optical glass), scuffing.
The present invention is formed in view of the above problems, is by offer, the plate glass with forming direction can be carried out for the purpose of the inspection unit of high efficiency inspection.
The means of solution problem:
The inspection unit of the form according to the present invention be downstream transmit the rectangular-shaped plate glass with forming direction while carry out the inspection unit that checks, wherein, this inspection unit possesses: check that the parallel edge on the limit extended on forming direction of the described plate glass passed through checks device;Described plate glass is made to rotate so that the forming direction rotary apparatus orthogonal with carrying direction;Check that the orthogonal edges on the limit orthogonal with forming direction of the described plate glass passed through checks device;Check that the face on the whole surface of the described plate glass passed through checks device;The line orthogonal with forming direction checks the ray detection device on the surface of the described plate glass passed through;With described rotary apparatus for benchmark, at its upstream and in downstream, be configured with described parallel edge in side and check device, opposite side be configured with described orthogonal edges check device, described check device and described ray detection device.
At this, the plate glass with forming direction easily scratches on forming direction, the defect of striped etc..Therefore, if face checks that device and ray detection device carry out the inspection of plate glass with the direction orthogonal with forming direction, it becomes possible to carry out high accuracy and check.And, according to said structure, owing to the two to be checked device is intensively arranged in downstream or the upstream of rotary apparatus, therefore can change in the direction without repeating plate glass, thus carrying out high-precision inspection expeditiously.
In addition, in above-mentioned inspection unit, can also being that described parallel edge checks that device is formed as detecting the defect on two limits extended on forming direction of described plate glass, the position calculation being simultaneously based on these two limits goes out the structure of the size on the direction orthogonal with forming direction of described plate glass;Described orthogonal edges checks that device is formed as detecting the defect on two orthogonal with forming direction the limit of described plate glass, and the position calculation being simultaneously based on these two limits goes out the structure of the size on the forming direction of described plate glass;Described checks that device is formed as detecting the structure of the defect of the surface of described plate glass and inside;Described ray detection device is formed as measuring the thickness of described plate glass, detects the structure of the striped of described plate glass simultaneously.
Again, in above-mentioned inspection unit, it is also possible to be also equipped with from ray detection device;The plate thickness sensor of the described plate thickness having from ray detection device for measuring plate glass, for the stress determination sensor measuring the residual stress of plate glass and the drive division moved in parallel relative to plate glass;Described plate thickness sensor and described stress determination sensor are formed as being arranged on described drive division, and the structure simultaneously moved.
If plate thickness measures and stress determination carries out with high accuracy, spended time can be compared, but according to said structure, it is possible to carrying out these simultaneously and check, on the basis that therefore review time shortens, precision and efficiency are very high, and the quality management of plate glass also becomes easy.
Additionally, the manufacture equipment according to the plate glass of the present invention possesses: above-mentioned inspection unit;And it is positioned at the upstream side of described inspection unit, there is the cleaning unit of blow-off outlet to the plate glass blow out air passed through;Described blow-off outlet is upwardly extending relative to the side that the direction orthogonal with the carrying direction of plate glass tilts.
According to said structure, it is possible to prevent the power of air when plate glass closes on blow-off outlet to be applied to the situation on plate glass, and power produced by air can be applied to plate glass lentamente quickly.Accordingly it is possible to prevent the phenomenon that when plate glass is by blow-off outlet, contingent plate glass is shaken in vertical direction.
The inspection unit of other forms according to the present invention is to be moved into this forming direction by the rectangular-shaped plate glass with forming direction, and carries out the inspection unit checked while downstream transmitting;Wherein, this inspection unit possesses: make described plate glass rotate so that the forming direction rotary apparatus orthogonal with carrying direction;Suspend and transmit, check the full marginal check device on four limits of described plate glass;Check that the face on the whole surface of the described plate glass passed through checks device;Ray detection device with the surface checking the described plate glass passed through on the line orthogonal with forming direction;It is configured with described in the downstream of described rotary apparatus and checks device and described ray detection device.
According to said structure, although device and orthogonal edges check that device adopts full marginal check device to replace parallel edge to check, but owing to face checks that device and ray detection device are by the centralized configuration downstream at rotary apparatus, therefore, even if in such cases, also plate glass can carried out high efficiency inspection.
The inspection unit of the other form according to the present invention is to be moved into the direction orthogonal with this forming direction by the rectangular-shaped plate glass with forming direction, and while downstream transmitting, carry out the inspection unit checked, wherein, this inspection unit possesses: suspends and transmits, checks the full marginal check device on four limits of described plate glass;Check that the face on the whole surface of the described plate glass passed through checks device;Ray detection device with the surface checking the described plate glass passed through on the line orthogonal with forming direction.
Again, in above-mentioned inspection unit, can also being the described full marginal check device defect that is formed as detecting four limits of described plate glass, the position calculation being simultaneously based on each limit goes out the size on the forming direction of described plate glass and the structure of the size on the direction orthogonal with forming direction;Described checks that device is formed as detecting the structure of the defect of the surface of described plate glass and inside;Described ray detection device is formed as measuring the thickness of described plate glass, detects the structure of the striped of described plate glass simultaneously.
The effect of invention
As it has been described above, can provide a kind of inspection unit according to the present invention, this inspection unit can perform the inspection to the plate glass with forming direction expeditiously.
Accompanying drawing explanation
Fig. 1 is the approximate vertical view illustrating the major part manufacturing equipment according to the present invention the 1st embodiment;
Fig. 2 is the approximate three-dimensional map from ray detection device shown in Fig. 1;
Fig. 3 is the approximate vertical view illustrating the major part manufacturing equipment according to the present invention the 2nd embodiment;
Fig. 4 is the approximate vertical view illustrating the major part manufacturing equipment according to the present invention the 3rd embodiment;
Fig. 5 is the approximate vertical view illustrating the major part manufacturing equipment according to the present invention the 4th embodiment;
Symbol description:
10 cleaning units;
11 blow-off outlets;
20 inspection units;
30 parallel edges check device;
35 full marginal check devices;
40 rotary apparatuss;
50 orthogonal edges check device;
60 check device;
70 ray detection devices;
71 thickness measurement sensors;
72 stripeds check sensor;
80 high speed stress determination devices;
81 stress determination sensors;
90 from ray detection device;
92 drive divisions;
93 plate thickness sensors;
94 stress determination sensors;
100,200,300,400 equipment is manufactured.
Detailed description of the invention
While below with reference to accompanying drawings, the embodiment according to the present invention is illustrated.Hereinafter, key element same or equivalent in all accompanying drawings is marked with identical symbol, and the repetitive description thereof will be omitted.
(the 1st embodiment)
First, the manufacture equipment 100 of the plate glass according to the present invention the 1st embodiment is described with reference to Fig. 1 and Fig. 2.Fig. 1 is the approximate vertical view of the major part illustrating the manufacture equipment 100 according to this embodiment.In figure, plate glass 101 is carried from the right direction left direction of paper under the effect of feeding roller.Figure is marked with the plate glass 101 of A to H symbol is illustrated that As time goes on plate glass 101 presents towards and position.Hereinafter, in the drawings the position being marked with the plate glass 101 of A to H symbol is such as called " position A " etc. and illustrates.Send additionally, the plate glass 101 of this embodiment is the melting furnace (not shown) from the upstream side being arranged in manufacturing line and is shaped, and there is " forming direction ".Though plate glass 101 is formed with rectangular shape (rectangular shape), but there is parallel relation between its long limit and forming direction.As it is shown in figure 1, the manufacture equipment 100 according to this embodiment possesses cleaning unit 10 and inspection unit 20.
Cleaning unit 10 is the unit that the plate glass 101 passed through is cleaned.Plate glass 101 is moved into cleaning unit 10 after being cut to arbitrary size in preceding working procedure (not shown).In cleaning unit 10, remove the chip powder etc. of attachment when being cut off by plate glass 101, then plate glass 101 is sent to the inspection unit 20 being positioned at downstream.Additionally, under this embodiment, plate glass 101 is moved into cleaning unit 10 with forming direction.That is, plate glass 101 makes long limit with to move into direction consistent and moves in cleaning unit 10.
Additionally, have a blow-off outlet 11 on cleaning unit 10, it is to plate glass 101 blow out air passed through.In FIG, plate glass 101 will pass through this blow-off outlet 11 from position A to the position B process moved.Blow-off outlet 11 is not upwardly extending in the side orthogonal with the carrying direction of plate glass 101, but upwardly extending relative to the side that the direction orthogonal with carrying direction tilts.According to said structure, it is possible to prevent when plate glass 101 closes on blow-off outlet 11, the power of air is applied to the situation on plate glass 101 quickly, and can apply the power of air at leisure to plate glass 101.Accordingly it is possible to prevent the phenomenon that when plate glass 101 is by blow-off outlet 11, issuable plate glass 101 is shaken in vertical direction.
Inspection unit 20 be plate glass 101 is downstream carried while carry out the unit that checks.In FIG, plate glass 101, from position B to the position H period moved, relies on inspection unit 20 to check.Under this embodiment, plate glass 101 is moved into inspection unit 20 from above-mentioned cleaning unit 10 with the state not rotated.That is, plate glass 101 is to be carried to inspection unit 20 in the way of forming direction is consistent with the maintenance of carrying direction.Again, as it is shown in figure 1, inspection unit 20 possess parallel edge check device 30, rotary apparatus 40, orthogonal edges check device 50, face check device 60, ray detection device 70, high speed stress determination device 80, from ray detection device 90.These devices are except being all arranged on straight line except ray detection device 90.
Parallel edge checks that device 30 is the device checking on the limit (long limit) extended on forming direction in the plate glass 101 that passes through whether existing defects.Parallel edge checks that device 30 has two CCD(ChargeCoupledDevice;Charge-coupled image sensor) camera 31.On the position that each CCD camera 31 is arranged in above plate glass 101 and limit long with the two of plate glass 101 is corresponding.Being moved into place in the process of C at plate glass 101 by position B, the long limit of plate glass 101 will rely on this CCD camera 31 to shoot.And, parallel edge checks that the view data shooting gained based on CCD camera 31 is judged on long limit whether existing defects (defect, slight crack, grinding speckle and stain) by device 30.Additionally, due to view data can be relied on to measure the position, long limit of plate glass 101, the position calculation on long limit according to this size of minor face can be gone out, namely from a long limit of side to the distance on the long limit of the opposing party.Furthermore, check on the quality to improve, it is also possible to above plate glass 101, lower section, place, three, side CCD camera 31 is set simultaneously.
Rotary apparatus 40 is the device making plate glass 101 horizontally rotate.In this embodiment, make plate glass 101 90-degree rotation, the state so that long limit and carrying direction are orthogonal.By means of this, than rotary apparatus 40 on the position in downstream, plate glass 101 is to carry with the direction being orthogonal with forming direction.Rotary apparatus 40 utilizes tool suctorial arm 41 that plate glass 101 is adsorbed at C place, position, mentioned under this embodiment, and makes it land after rotating on the D of position.But, the concrete structure of rotary apparatus 40 is not limited to that, making it rotate with any method can.
At this, with the position of rotary apparatus 40 for benchmark, the configuration sequence of each device constituting inspection unit 20 is as described below.That is, the upstream side of rotary apparatus 40 is configured with parallel edge and checks device 30.Additionally, the downstream of rotary apparatus 40 is configured with orthogonal edges check that device 50, face check device 60, ray detection device 70 and high speed stress determination device 80.It addition, high speed stress determination device 80 location is not particularly limited.Again, as long as orthogonal edges checks that device 50, face check that device 60, ray detection device 70 are positioned at the downstream of rotary apparatus 40, the position of above three device can also exchange.
Orthogonal edges checks that device 50 is the device checking on the limit orthogonal with forming direction (minor face) of plate glass 101 passed through whether existing defects.Orthogonal edges checks that device 50 has two CCD camera 51.CCD camera 51 is arranged in above plate glass 101 and on the position corresponding with two minor faces of plate glass 101.Moved into place in the process of E by position D at plate glass 101, rely on this CCD camera 51 that the minor face of plate glass 101 is shot.And, the view data based on shooting gained is judged on minor face whether existing defects.Again, owing to view data can be relied on to measure the minor face position of plate glass 101, therefore also calculate the size on long limit based on the position of this minor face, namely from side's minor face to the distance of the opposing party's minor face simultaneously.It addition, check on the quality to improve, it is also possible to above plate glass 101, lower section, position, three, side CCD camera 51 is set simultaneously.
Face checks that device 60 is the device on the whole surface checking the plate glass 101 passed through.Face checks that device 60 has multiple CCD camera 61.CCD camera 61 is positioned at above plate glass 101, and is arranged on the direction orthogonal with carrying direction.Moved into place in the process of F by position E at plate glass 101, rely on these CCD camera 61 that the whole surface of plate glass 101 is shot.And, the view data based on shooting gained is judged, and whether plate glass 101 exists the surface defect attachment of foreign body (scratch) and internal flaw (bubble, foreign body be mixed into).It addition, the scuffing on plate glass 101 surface is easily formed along forming direction.Therefore, by towards the direction observation surface orthogonal with forming direction, when there is scuffing, view data can be susceptible to change, thus being readily inspected out scuffing.It is to say, rely on this structure that the degree of accuracy of surface inspection can be made to improve.
Ray detection device 70 is the device on the surface checking the plate glass 101 passed through on the line orthogonal with forming direction (while the direction relative movement orthogonal with forming direction).Ray detection device 70 has thickness measurement sensor 71 and striped checks sensor 72.Thickness measurement sensor 71 is observed after irradiating above plate glass 101, at the light that plate glass 101 upper surface and lower surface reflect.Ray detection device 70 is based on this observed result, it is possible to determine the thickness at the plate glass 101 checked on position.Additionally, striped inspection sensor 72 observation is penetrate the light within plate glass 101.Ray detection device 70 is based on this observed result, it is possible to detect the striped within plate glass 101.In FIG, plate glass 101 is moved into place in the process of G by position F, has also checked whether that striped exists while measuring plate glass 101 thickness.At this, easily there is the change of thickness in the plate glass 101 with forming direction on the direction orthogonal with forming direction.Again, striped is formed along forming direction.Therefore, as in the present embodiment, check thickness and striped etc. while relatively moving towards the direction orthogonal with forming direction, the thickness of plate glass exception, striped etc. can be detected accurately with this.
High speed stress determination device 80 is the device measuring at a high speed plate glass 101 internal residual stress.High speed stress determination device 80 has multiple stress determination sensor 81.Stress determination sensor 81 is positioned at above plate glass 101, and is arranged on the direction orthogonal with carrying direction.High speed stress determination device 80 has the illuminating part (not shown) being positioned at below plate glass 101.Illuminating part is to plate glass 101 lower surface irradiating laser.Laser penetration is received light by stress determination sensor 81 behind this plate glass 101 inside.And, high speed stress determination device 80 calculates residual stress based on the goniometer of the laser being incident upon stress determination sensor 81.In FIG, plate glass 101 is moved into place in the process of H by position G, determines the residual stress of this plate glass 101.Generally, compare spended time with high-precision measuring residual stress, but in the high speed stress determination device 80 of this embodiment, be configured with multiple stress determination sensor 81 and illuminating part, reduce simultaneously and measure number of times, achieve the high speed of mensuration with this.
It it is the device that the plate glass 101 taken out from manufacturing line is checked from ray detection device 90.The mode automatic or manual taking out plate glass 101 can.It addition, in this embodiment, being formed as by the plate glass 101 checked from ray detection device 90 can from the position G structure taken out.In this embodiment from ray detection device 90, carrying out the mensuration of mensuration and the plate thickness resulting from the residual stress of plate glass 101 simultaneously.At this, Fig. 2 is the approximate three-dimensional map from ray detection device 90.In ray detection device 90, plate glass 101 it is placed on it and checks, hereinafter, the direction (drawing on be direction from upper right to lower-left) parallel with the long limit of this plate glass being set to " X-direction ";The direction (drawing on be from direction left to bottom right) parallel with plate glass 101 minor face is set to " Y-direction ".
As in figure 2 it is shown, there is table top 91, drive division 92, plate thickness sensor 93 and stress determination sensor 94 from ray detection device 90.Table top 91 is by the table top of plate glass 101 horizontal positioned, and is formed as the structure can slided towards X-direction.Additionally, table top 91 has been regularly formed multiple through hole (not shown), their through direction and the perpendicular of table top 91.Configured under at table top 91 has illuminating part (not shown), and when launching laser from this illuminating part, this laser is through through hole and irradiates to plate glass 101.Drive division 92 is positioned at the top of table top 91, drives along the track 95 extending Y-direction towards Y-direction.Drive division 92 is provided with plate thickness sensor 93 and stress determination sensor 94.That is, plate thickness sensor 93 and stress determination sensor 94 are adjacent to, and are formed as the structure that simultaneously can move together with drive division 92 towards Y-direction.It addition, along with stress determination sensor 94 moves towards Y-direction, above-mentioned illuminating part also moves towards Y-direction.
Plate thickness sensor 93 can check the flexibility of plate glass 101, and receives the light reflected by plate glass 101.Further, plate thickness sensor 93 detects the flexibility of plate glass 101 based on the angle of the light received.Furthermore, it is possible to calculate the plate thickness of plate glass 101 from these detection data.Stress determination sensor 94 is essentially identical with the stress determination sensor 81 in above-mentioned high speed stress determination device 80.But, the accuracy of detection of the stress determination sensor 81 that the accuracy of detection from the stress determination sensor 94 in ray detection device 90 is higher than in high speed stress determination device 80.Additionally, in this embodiment, be based not only on the angle of the laser carrying out self-luminescent part received by stress determination sensor 94, plate thickness calculating (mensuration) being additionally based upon the actual plate glass 101 that plate thickness sensor 93 calculates goes out residual stress.
Such as, even if the angle of the laser of stress determination sensor 94 reception is identical, if but the plate thickness of plate glass 101 is different, then and residual stress would not be identical.That is, in order to determine correct residual stress, it is necessary to the information of the plate thickness of plate glass 101.But, in the past, the device measuring the residual stress of plate glass 101 is that the device measured from the plate thickness that can carry out plate glass 101 is independent set.Therefore, residual stress is calculated when hypothesis plate glass 101 plate thickness is certain, and its result can produce the error of about 10% degree.Relative to this, this embodiment from ray detection device 90 owing to possessing both plate thickness sensor 93 and stress determination sensor 94, therefore residual stress can be calculated based on the plate thickness of actual plate glass 101, its result is able to carry out the mensuration of residual stress with high accuracy, and makes quality management also become easy.
Possess as described below plate glass 101 being checked from ray detection device 90 of above structure.First, adjust table top 91 position in the X direction, make plate thickness sensor 93 and stress determination sensor 94 can measure near the minor face of a side of plate glass 101.Then, when fixing table top 91 position, drive division 92 is little by little changed the long limit to opposite side, the position from the long edge Y-direction of plate glass 101 side, and the plate thickness carrying out plate glass 101 measures and stress determination.And, when drive division 92 arrives the long limit of the opposite side of plate glass 101, it is make table top 91 slightly move with X-direction specifically, in the same way, drive division 92 is little by little changed the long limit to side, the position from the long limit of plate glass 101 opposite side, carries out plate thickness mensuration and stress determination simultaneously.Repeating above operation, after whole plate glass 101 has carried out inspection, off-line inspection terminates.It addition, plate thickness measures and stress determination is to launch with high accuracy, any one all compares spended time, but in this embodiment from ray detection device 90, checking owing to can carry out these simultaneously, therefore shorten on the basis of minute, not only precision is high and efficiency is high.
It is above the plate glass according to this embodiment is manufactured the explanation of equipment 100.Inspection unit 20 in this embodiment has possessed face and has checked device 60 and ray detection device 70.When this stream oriented device checks from the direction orthogonal with forming direction, defect can be detected accurately.And, these devices are owing to centralized configuration is in the downstream of rotary apparatus 40, and therefore the direction without repeating plate glass 101 is changed, it is possible to check expeditiously.It addition, in this embodiment, although inspection unit 20 has possessed high speed stress determination device 80, but owing to passing through also can measure the residual stress of plate glass 101 from ray detection device 90, therefore, inspection unit 20 can not also possess from ray detection device 90.
(the 2nd embodiment)
It follows that the manufacture equipment 200 of the plate glass 101 according to the present invention the 2nd embodiment is described with reference to Fig. 3.Fig. 3 is the approximate vertical view of the major part illustrating the manufacture equipment 200 according to this embodiment.When this embodiment and the 1st embodiment are contrasted, according to the manufacture equipment 200 of this embodiment plate glass 101 move into direction and constitute inspection unit 20 device configuration sequence in different from the manufacture equipment 100 according to the 1st embodiment.Aspect in addition, the two equipment substantially has identical structure.
Particularly in this embodiment, plate glass 101 is moved to cleaning unit 10 and inspection unit 20 with the direction orthogonal with forming direction.Again, when the configuration sequence of the device of composition inspection unit 20 is with rotary apparatus 40 for benchmark as described below.That is, it is configured with orthogonal edges at the upstream side of rotary apparatus 40 and checks that device 50, face check device 60 and ray detection device 70.Again, it is configured with parallel edge in the downstream of rotary apparatus 40 and checks device 30 and high speed stress determination device 80.So, when this embodiment, owing to face to be checked the centralized configuration such as device 60 and ray detection device 70 is in the upstream of rotary apparatus 40, therefore the same with the situation of the 1st embodiment, direction without repeating plate glass 101 is changed, and can carry out high-precision inspection expeditiously.
(the 3rd embodiment)
It follows that the manufacture equipment 300 of the plate glass 101 of the 3rd embodiment according to the present invention is described with reference to Fig. 4.Fig. 4 is the approximate vertical view of the major part illustrating the manufacture equipment 300 according to this embodiment.During by this embodiment with the 1st embodiment contrast, manufacture equipment 300 according to this embodiment does not possess parallel edge at inspection unit 20 and checks that device 30 and orthogonal edges check device 50, and replace and possess full marginal check device 35 on this point, different from manufacture equipment 100 structure according to the 1st embodiment.Aspect in addition, the two equipment substantially has identical structure.Therefore, will illustrate centered by full marginal check device 35 at this.
The full marginal check device 35 of this embodiment is the device checking 101 4 limits of plate glass.Full marginal check device 35 has 4 CCD camera 36.Each CCD camera 36 is positioned at the top of plate glass 101, and is arranged respectively on the position corresponding with plate glass 101 4 limit.The plate glass 101 moved into full marginal check device 35 temporarily ceases it and transmits, and each CCD camera 36 can move along each self-corresponding limit in this state.And, this limit, in the period moved along corresponding limit, is shot by each CCD camera 36.And, full marginal check device 35 is based on the view data relying on each CCD camera 36 to shoot gained, it is judged that whether existing defects on each limit.It addition, more than, although describing full marginal check device 35 there is the situation of 4 CCD camera 36, but it is not limited to such structure.For example, it is also possible to be formed as arranging 1 CCD camera 36, and make its structure moved along the whole four edges of plate glass 101.It addition, for the quality improving inspection, it is also possible to above each limit of plate glass 101, lower section, position, three, side CCD camera 36 is set simultaneously.
Additionally, plate glass 101 minor face and the position on long limit can be determined according to view data, and based on these measurement results, it is possible to calculate the size on the long limit of plate glass 101 and the size of minor face.It addition, in this embodiment, although full marginal check device 35 is arranged in the downstream of rotary apparatus 40 but it also may be arranged in the upstream side of rotary apparatus 40.In this embodiment, although device 30 and orthogonal edges check that device 50 adopts full marginal check device 35 to replace parallel edge to check, but check device 60 and ray detection device 70 centralized configuration situation in the downstream of rotary apparatus 40 with face identically, even if when this embodiment, also plate glass 101 can be carried out high efficiency inspection.
(the 4th embodiment)
It follows that the manufacture equipment 400 of the plate glass 101 according to the present invention the 4th embodiment is described with reference to Fig. 5.Fig. 5 is the approximate vertical view of the major part illustrating the manufacture equipment 400 according to this embodiment.During by this embodiment with the 2nd embodiment contrast, manufacture equipment 400 according to this embodiment does not possess parallel edge at inspection unit 20 and checks that device 30 and orthogonal edges check device 50, replace and possess full marginal check device 35, do not possess on this point of rotary apparatus 40 different from manufacture equipment 200 structure according to the 2nd embodiment in addition.In addition, the two equipment has substantially the same structure.
It addition, the full marginal check device 35 of this embodiment is identical with the full marginal check device 35 illustrated in the 3rd embodiment.In this embodiment, owing to plate glass 101 is to move into inspection unit 20 with the direction orthogonal with forming direction, so even do not rotate plate glass 101 to change its direction, also can check that device 60 and ray detection device 70 carry out high-precision inspection by leading surface.Therefore, the inspection unit 20 of this embodiment can omit rotary apparatus 40.Also it is that centralized configuration has face to check device 60 and ray detection device 70 when this embodiment, and identical with other embodiments, plate glass 101 can be checked expeditiously.
Describing the embodiment of the present invention above by reference to accompanying drawing, but concrete structure is not limited to these embodiments, the change etc. in design without departing from the scope of the subject in the invention is also contained in the present invention.
Industrial applicability:
Can providing a kind of inspection unit according to the present invention, the plate glass with forming direction can be carried out high efficiency inspection by this inspection unit.Therefore, the present invention is significant in the technical field manufacturing equipment of the plate glass comprising inspection unit.

Claims (7)

1. an inspection unit, it is characterised in that be downstream transmit the rectangular-shaped plate glass with forming direction while carry out the inspection unit that checks, this inspection unit possesses:
Check that the parallel edge on the limit extended on forming direction of the described plate glass passed through checks device;
Described plate glass is made to rotate so that the forming direction rotary apparatus orthogonal with carrying direction;
Check that the orthogonal edges on the limit orthogonal with forming direction of the described plate glass passed through checks device;
Check that the face on the whole surface of the described plate glass passed through checks device;
The line orthogonal with forming direction checks the ray detection device on the surface of the described plate glass passed through,
With described rotary apparatus for benchmark, at its upstream and in downstream, be configured with described parallel edge in side and check device, opposite side be configured with described orthogonal edges check device, described check device and described ray detection device.
2. inspection unit according to claim 1, it is characterized in that, described parallel edge checks that device is formed as detecting the defect on two limits extended on forming direction of described plate glass, and the position calculation being simultaneously based on these two limits goes out the structure of the size on the direction orthogonal with forming direction of described plate glass;
Described orthogonal edges checks that device is formed as detecting the defect on two orthogonal with forming direction the limit of described plate glass, and the position calculation being simultaneously based on these two limits goes out the structure of the size on the forming direction of described plate glass;
Described checks that device is formed as detecting the structure of the defect of the surface of described plate glass and inside;
Described ray detection device is formed as measuring the thickness of described plate glass, detects the structure of the striped of described plate glass simultaneously.
3. inspection unit according to claim 2, it is characterised in that be also equipped with from ray detection device;
The plate thickness sensor of the described plate thickness having from ray detection device for measuring plate glass,
For measure the residual stress of plate glass stress determination sensor and
Relative to the drive division that plate glass moves in parallel;
Described plate thickness sensor and described stress determination sensor are formed as being arranged on described drive division, and the structure simultaneously moved.
4. the manufacture equipment of a plate glass, it is characterised in that possess:
Inspection unit according to claim 3;And
It is positioned at the upstream side of described inspection unit, there is the cleaning unit of blow-off outlet to the plate glass blow out air passed through;
Described blow-off outlet is upwardly extending relative to the side that the direction orthogonal with the carrying direction of plate glass tilts.
5. an inspection unit, it is characterised in that be that the rectangular-shaped plate glass with forming direction is moved into this forming direction, and carry out the inspection unit checked while downstream transmitting, this inspection unit possesses:
Described plate glass is made to rotate so that the forming direction rotary apparatus orthogonal with carrying direction;
Suspend and transmit, check the full marginal check device on four limits of described plate glass;
Check that the face on the whole surface of the described plate glass passed through checks device;With
The line orthogonal with forming direction checks the ray detection device on the surface of the described plate glass passed through;
It is configured with described in the downstream of described rotary apparatus and checks device and described ray detection device.
6. inspection unit according to claim 5, it is characterised in that
Described full marginal check device is formed as detecting the defect on four limits of described plate glass, and the position calculation being simultaneously based on each limit goes out and the structure of the size in the size on the forming direction of described plate glass and the direction orthogonal with forming direction;
Described checks that device is formed as detecting the structure of the defect of the surface of described plate glass and inside;
Described ray detection device is formed as measuring the thickness of described plate glass, detects the structure of the striped of described plate glass simultaneously.
7. an inspection unit, it is characterised in that be that the rectangular-shaped plate glass with forming direction is moved into the direction orthogonal with this forming direction, and carry out the inspection unit checked while downstream transmitting, this inspection unit possesses:
Suspend and transmit, check the full marginal check device on four limits of described plate glass;
Check that the face on the whole surface of the described plate glass passed through checks device;With
The line orthogonal with forming direction checks the ray detection device on the surface of the described plate glass passed through;
Described full marginal check device is formed as detecting the defect on four limits of described plate glass, and the position calculation being simultaneously based on each limit goes out and the structure of the size in the size on the forming direction of described plate glass and the direction orthogonal with forming direction;
Described checks that device is formed as detecting the structure of the defect of the surface of described plate glass and inside;
Described ray detection device is formed as measuring the thickness of described plate glass, detects the structure of the striped of described plate glass simultaneously.
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JP5923172B2 (en) 2016-05-24
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WO2014027375A1 (en) 2014-02-20

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