CN103563059B - 置换金属栅极工艺流程中具有低电阻源极区和漏极区的方法和结构 - Google Patents
置换金属栅极工艺流程中具有低电阻源极区和漏极区的方法和结构 Download PDFInfo
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- CN103563059B CN103563059B CN201280024783.6A CN201280024783A CN103563059B CN 103563059 B CN103563059 B CN 103563059B CN 201280024783 A CN201280024783 A CN 201280024783A CN 103563059 B CN103563059 B CN 103563059B
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- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/518—Insulating materials associated therewith the insulating material containing nitrogen, e.g. nitride, oxynitride, nitrogen-doped material
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (25)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US13/170,565 | 2011-06-28 | ||
US13/170,565 US8432002B2 (en) | 2011-06-28 | 2011-06-28 | Method and structure for low resistive source and drain regions in a replacement metal gate process flow |
PCT/US2012/037919 WO2013002902A2 (en) | 2011-06-28 | 2012-05-15 | Method and structure for low resistive source and drain regions in a replacement metal gate process flow |
Publications (2)
Publication Number | Publication Date |
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CN103563059A CN103563059A (zh) | 2014-02-05 |
CN103563059B true CN103563059B (zh) | 2017-02-15 |
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CN201280024783.6A Expired - Fee Related CN103563059B (zh) | 2011-06-28 | 2012-05-15 | 置换金属栅极工艺流程中具有低电阻源极区和漏极区的方法和结构 |
Country Status (4)
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US (1) | US8432002B2 (zh) |
CN (1) | CN103563059B (zh) |
DE (1) | DE112012002700B4 (zh) |
WO (1) | WO2013002902A2 (zh) |
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US8994123B2 (en) | 2011-08-22 | 2015-03-31 | Gold Standard Simulations Ltd. | Variation resistant metal-oxide-semiconductor field effect transistor (MOSFET) |
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US9373684B2 (en) | 2012-03-20 | 2016-06-21 | Semiwise Limited | Method of manufacturing variation resistant metal-oxide-semiconductor field effect transistor (MOSFET) |
US9263568B2 (en) | 2012-07-28 | 2016-02-16 | Semiwise Limited | Fluctuation resistant low access resistance fully depleted SOI transistor with improved channel thickness control and reduced access resistance |
US9269804B2 (en) * | 2012-07-28 | 2016-02-23 | Semiwise Limited | Gate recessed FDSOI transistor with sandwich of active and etch control layers |
US9190485B2 (en) | 2012-07-28 | 2015-11-17 | Gold Standard Simulations Ltd. | Fluctuation resistant FDSOI transistor with implanted subchannel |
US9029208B2 (en) * | 2012-11-30 | 2015-05-12 | International Business Machines Corporation | Semiconductor device with replacement metal gate and method for selective deposition of material for replacement metal gate |
US9093285B2 (en) * | 2013-03-22 | 2015-07-28 | United Microelectronics Corp. | Semiconductor structure and process thereof |
US9012276B2 (en) | 2013-07-05 | 2015-04-21 | Gold Standard Simulations Ltd. | Variation resistant MOSFETs with superior epitaxial properties |
US9614053B2 (en) * | 2013-12-05 | 2017-04-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Spacers with rectangular profile and methods of forming the same |
US9773869B2 (en) * | 2014-03-12 | 2017-09-26 | Samsung Electronics Co., Ltd. | Semiconductor device and method of fabricating the same |
US9865603B2 (en) * | 2015-03-19 | 2018-01-09 | Globalfoundries Inc. | Transistor structure having N-type and P-type elongated regions intersecting under common gate |
FR3035265B1 (fr) | 2015-04-16 | 2018-02-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de fabrication de transistors soi pour une densite d'integration accrue |
US11049939B2 (en) | 2015-08-03 | 2021-06-29 | Semiwise Limited | Reduced local threshold voltage variation MOSFET using multiple layers of epi for improved device operation |
US9496283B1 (en) * | 2015-08-10 | 2016-11-15 | Stmicroelectronics, Inc. | Transistor with self-aligned source and drain contacts and method of making same |
US10062693B2 (en) * | 2016-02-24 | 2018-08-28 | International Business Machines Corporation | Patterned gate dielectrics for III-V-based CMOS circuits |
US10593600B2 (en) | 2016-02-24 | 2020-03-17 | International Business Machines Corporation | Distinct gate stacks for III-V-based CMOS circuits comprising a channel cap |
CN107275278A (zh) * | 2016-04-07 | 2017-10-20 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构的形成方法 |
US9960083B1 (en) * | 2016-11-02 | 2018-05-01 | United Microelectronics Corp. | Method for fabricating semiconductor device |
US10461152B2 (en) * | 2017-07-10 | 2019-10-29 | Globalfoundries Inc. | Radio frequency switches with air gap structures |
CN111033756A (zh) * | 2017-09-29 | 2020-04-17 | 英特尔公司 | 提供晶体管的受应力沟道的装置、方法和*** |
FR3090195B1 (fr) * | 2018-12-18 | 2021-04-02 | Commissariat Energie Atomique | Procédé de fabrication d’un transistor à effet de champ a performances optimisées |
US10998418B2 (en) * | 2019-05-16 | 2021-05-04 | Cree, Inc. | Power semiconductor devices having reflowed inter-metal dielectric layers |
US10937479B1 (en) * | 2019-08-29 | 2021-03-02 | Spin Memory, Inc. | Integration of epitaxially grown channel selector with MRAM device |
US11239117B1 (en) * | 2020-08-27 | 2022-02-01 | Micron Technology, Inc. | Replacement gate dielectric in three-node access device formation for vertical three dimensional (3D) memory |
US11373696B1 (en) | 2021-02-19 | 2022-06-28 | Nif/T, Llc | FFT-dram |
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2011
- 2011-06-28 US US13/170,565 patent/US8432002B2/en active Active
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2012
- 2012-05-15 CN CN201280024783.6A patent/CN103563059B/zh not_active Expired - Fee Related
- 2012-05-15 DE DE112012002700.0T patent/DE112012002700B4/de active Active
- 2012-05-15 WO PCT/US2012/037919 patent/WO2013002902A2/en active Application Filing
Patent Citations (1)
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CN102104061A (zh) * | 2009-12-21 | 2011-06-22 | 台湾积体电路制造股份有限公司 | 用于场效应晶体管的栅极电极以及场效应晶体管 |
Also Published As
Publication number | Publication date |
---|---|
US8432002B2 (en) | 2013-04-30 |
DE112012002700T5 (de) | 2014-03-20 |
US20130001706A1 (en) | 2013-01-03 |
WO2013002902A3 (en) | 2013-04-25 |
DE112012002700B4 (de) | 2021-06-17 |
WO2013002902A2 (en) | 2013-01-03 |
CN103563059A (zh) | 2014-02-05 |
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