CN103533493B - Silicon microphone and the encapsulating structure of application product thereof - Google Patents

Silicon microphone and the encapsulating structure of application product thereof Download PDF

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Publication number
CN103533493B
CN103533493B CN201310505115.1A CN201310505115A CN103533493B CN 103533493 B CN103533493 B CN 103533493B CN 201310505115 A CN201310505115 A CN 201310505115A CN 103533493 B CN103533493 B CN 103533493B
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Prior art keywords
acoustic aperture
silicon microphone
aperture
wiring board
coating
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CN201310505115.1A
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CN103533493A (en
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宋青林
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Goertek Microelectronics Inc
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Goertek Inc
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Priority to CN201310505115.1A priority Critical patent/CN103533493B/en
Priority claimed from CN2010102708717A external-priority patent/CN102387454B/en
Publication of CN103533493A publication Critical patent/CN103533493A/en
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Abstract

The invention provides the encapsulating structure of a kind of silicon microphone and application product thereof, silicon microphone includes shell and wiring board, shell and wiring board constitute the outer enclosure structure of silicon microphone, in the PCB surface within encapsulating structure, MEMS chip is installed, and on encapsulating structure, it is provided with the acoustic aperture for receiving external sound signal, wherein, the exterior circumferential surface of acoustic aperture is provided with dark colour coating;Further, acoustic aperture is arranged on wiring board or shell;Coating in the exterior circumferential surface of setting acoustic aperture in the circuit board is to be arranged on the solder resist of PCB surface;Outer surface at wiring board is provided with the pad that the external circuit with silicon microphone electrically connects.The present invention only makes an uproar effect by being arranged around can realizing by the way of light-absorbing dark coating well dropping light in the acoustic aperture of silicon microphone outer surface, design is simple and is easily achieved, production cost and the size of product will not be increased, and the pickup effect of product will not be produced impact.

Description

Silicon microphone and the encapsulating structure of application product thereof
Technical field
The present invention relates to electroacoustic transducer technical field, more specifically, relate to one and can have against sunshine The silicon microphone of effect of making an uproar and the encapsulating structure of application product thereof.
Background technology
Along with progress and the development of technology of society, in recent years, along with the electronics such as mobile phone, notebook computer Small product size constantly reduces, and people are more and more higher to the performance requirement of these portable electronic products, thus The volume also requiring that matched electronic component constantly reduces, performance and concordance improve constantly.At this Under kind of background, the microphone products field as one of the strength member of above-mentioned portable electronic products is also released A lot of novel products, wherein to utilize semiconductor fabrication process technology and silicon microphone that batch realizes For representative products.
For the operation principle of this silicon microphone product, United States Patent (USP) US6781231 has ratio More detailed introduction.Such as the silicon microphone product profile that accompanying drawing 1 is a kind of routine, square including one Wiring board 1 and square metal shell 2 constitute the outer enclosure of silicon microphone, on metal shell 2 It is provided with the acoustic aperture 21 for receiving external sound signal, on the wiring board 1 within encapsulation, pacifies respectively Equipped with IC chip 3 and MEMS chip 4, wherein MEMS chip 4 is for utilizing MEMS(micro electronmechanical System) technique making, extraneous acoustical signal can be transformed into the signal of telecommunication, the electricity of MEMS chip 4 IC chip 3 on pole and wiring board 1 electrically connects, and the signal of telecommunication that IC chip processed the most at last passes through Multiple pads 11 that wiring board 1 outer surface is arranged are transferred to silicon microphone outside and are connected to external electrical Road.As accompanying drawing 2 is demonstrated by structure chart when this silicon microphone is arranged on a kind of electronics applications, false If it is arranged in mobile phone, in figure, 5 represent the shell of mobile phone, and phone housing 5 is provided with for receiving The acoustic aperture 51 of external sound signal, silicon microphone is arranged on the main circuit board 7 of mobile phone by its pad 11, Then silicon microphone acoustic aperture 21 and mobile phone acoustic aperture 51 are docked, therebetween by a flexible gum cover 6 even Connecing, gum cover 6 is provided with the acoustic aperture 61 that can transmit acoustical signal, gum cover 6 can ensure that silicon microphone and Air-tightness is kept, it is ensured that what acoustical signal can be airtight passes through mobile phone sound respectively from the external world between phone housing Hole 51, gum cover acoustic aperture 61 and silicon microphone acoustic aperture 21 enter inside silicon microphone, silicon microphone realize sound- After the conversion of the signal of telecommunication, the signal of telecommunication is transmitted by mobile phone main circuit board 7.
But, owing to the operation principle of silicon microphone require that its structure have to exist connection space outerpace Acoustic aperture, this has resulted in extraneous light easily by mobile phone acoustic aperture 51, gum cover acoustic aperture 61 and silicon microphone Acoustic aperture 21 is irradiated inside silicon microphone, and is irradiated in MEMS chip, and this can be to MEMS core The work of sheet brings certain interference, is commonly called as " optical noise ".Further, in order to ensure the transmission of acoustical signal And the needs of guarantee acoustical behavior, mobile phone acoustic aperture 51, gum cover acoustic aperture 61 and silicon microphone acoustic aperture 21 are all That can not design is too small, otherwise can affect the pickup effect of silicon microphone.
Thus, it is desirable to a kind of simple in construction of design, and can be good at realizing fall light and make an uproar the silicon wheat of effect Gram wind structure.
Summary of the invention
In view of the above problems, it is an object of the invention to provide a kind of simple in construction and can realize well Fall light is made an uproar the silicon microphone of effect and the encapsulating structure of application product thereof.
According to an aspect of the invention, it is provided a kind of silicon microphone, including shell and wiring board, institute State shell and the outer enclosure structure of wiring board composition silicon microphone, at the circuit within described encapsulating structure Plate surface is provided with MEMS chip, and is provided with for receiving external sound on described encapsulating structure The acoustic aperture of signal, wherein, is provided with dark colour coating in the exterior circumferential surface of described acoustic aperture;Further, Described acoustic aperture is arranged on described wiring board or described shell;The acoustic aperture being arranged on described wiring board Coating in exterior circumferential surface is to be arranged on the solder resist of described PCB surface;At described wiring board Outer surface is provided with the pad that the external circuit with described silicon microphone electrically connects.
Furthermore it is preferred that technical scheme be, the color of described coating be black, navy blue, Dark grey, Dark brown, blackish green, dark-brown or coffee color.
Furthermore, preferred technical scheme is, described acoustic aperture be aperture be 0.1~1.5mm aperture or The multiple single small aperture of person is the aperture of 0.03~0.1mm.
According to a further aspect in the invention, it is provided that a kind of silicon microphone and the encapsulating structure of application product, Wherein, described silicon microphone is the silicon microphone described in preceding solution;Outside described application product The application product acoustic aperture corresponding with the acoustic aperture of described silicon microphone it is provided with on shell;And in described silicon wheat It is additionally provided with in order to the described silicon microphone of airtight docking between acoustic aperture and the described application product acoustic aperture of gram wind Acoustic aperture and the gum cover of described application product acoustic aperture, be provided with gum cover acoustic aperture in described gum cover.
Preferably, at described gum cover acoustic aperture and/or the acoustic aperture of described silicon microphone and/or described application product sound The inwall in hole is provided with dark colour coating.
Preferably, described silicon microphone is arranged on shell and the master of described application product of described application product Between wiring board, described silicon microphone is arranged on the main circuit board of described application product by pad.
Utilize the above-mentioned silicon microphone according to the present invention and the encapsulating structure with application product thereof, by silicon In the acoustic aperture exterior circumferential of mike and the acoustic aperture inwall of encapsulating structure, dark colour coating is set, it is possible to inhale Receive most of illumination that the external world enters, light line reflection repeatedly will not be formed outside silicon microphone acoustic aperture, The extraneous illumination being seldom enters inside silicon microphone, thus well realizes noise reduction, and not Influence whether the reception of acoustical signal.
In order to realize above-mentioned and relevant purpose, one or more aspects of the present invention include below will be in detail The feature illustrating and being particularly pointed out in the claims.Description below and accompanying drawing are described in detail this Some bright illustrative aspects.But, the principle that only can use the present invention of these aspects instruction Some modes in various modes.Additionally, it is contemplated that include all these aspect and they etc. Jljl.
Accompanying drawing explanation
By with reference to below in conjunction with the explanation of accompanying drawing and the content of claims, and along with to the present invention Be more fully understood from, other purpose of the present invention and result will be more apparent and should be readily appreciated that.In the accompanying drawings:
Fig. 1 is the cross-sectional view of traditional silicon mike;
Fig. 2 is the application structure schematic diagram of traditional silicon mike;
Fig. 3 is the cross-sectional view of the embodiment of the present invention one;
Fig. 4 is the top view of the embodiment of the present invention one;
Fig. 5 is the application structure schematic diagram of the embodiment of the present invention one;
Fig. 6 is the cross-sectional view of the embodiment of the present invention two;
Fig. 7 is the top view of the embodiment of the present invention two;
Fig. 8 is the cross-sectional view of the embodiment of the present invention three;
Fig. 9 is the upward view of the embodiment of the present invention three;
Figure 10 is the application structure schematic diagram of the embodiment of the present invention three.
The most identical label indicates similar or corresponding feature or function.
Detailed description of the invention
Below with reference to accompanying drawing, the specific embodiment of the present invention is described in detail.
Embodiment one
Fig. 3 and Fig. 4 is cross-sectional view and the top view of the embodiment of the present invention one.Such as Fig. 3, Fig. 4 Shown in, in embodiment one, a square wiring board 1 and a square metal shell 2 constitute silicon wheat The outer enclosure of gram wind, metal shell 2 is provided with the acoustic aperture 21 for receiving external sound signal, On wiring board 1 within Feng Zhuan, it is separately installed with IC chip 3 and MEMS chip 4, wherein MEMS Chip 4 is for utilizing MEMS(MEMS) technique making, extraneous acoustical signal can be changed Becoming the signal of telecommunication, the IC chip 3 on the electrode of MEMS chip 4 and wiring board 1 electrically connects, and the most at last Multiple pads 11 that the signal of telecommunication that IC chip processed is arranged by wiring board 1 outer surface are transferred to silicon wheat Gram wind is outside and is connected with external circuit.Further, the present invention in order to realize reducing the effect made an uproar of light, Dark colour coating 22 it is provided with in the exterior circumferential surface of acoustic aperture 21.
As preferred technical scheme, the color of coating 22 can select black, navy blue, Dark grey, Dark brown, blackish green, dark-brown, coffee color or the color of other dark systems, in order to absorb from silicon Most of illumination outside mike, from without making extraneous light become in the acoustic aperture external effect of silicon microphone Light line reflection repeatedly, reduces the illumination entered within silicon microphone as far as possible, to realize the effect that fall light is made an uproar Really.In the present embodiment one, preferred black is as the color of coating 22, can reach optimal effect.
In the production design process of silicon microphone, the size of acoustic aperture is also to affect silicon microphone acoustic efficiency One of and the important indicator of anti-light effect of making an uproar.As preferred technical scheme, in the present embodiment one Acoustic aperture 21 be an aperture be the aperture of 0.1-0.5mm, it is possible to acoustics pickup and fall light make an uproar aspect obtain Balance, reaches preferably to drop light and makes an uproar effect and acoustic efficiency.
It addition, as preferred technical scheme, as shown in Figure 4, in the present embodiment one, coating 22 is It is arranged on the annular coating around metal shell 2 surface, acoustic aperture 21.
Fig. 5 is the application structure schematic diagram that the silicon microphone of the present embodiment one is arranged in a kind of electronic product. As it is shown in figure 5, after the silicon microphone shown in the present embodiment one is installed, it is assumed that it is arranged in mobile phone, then In Fig. 5,5 represent the shell of mobile phone, phone housing 5 are provided with the acoustic aperture 21 with silicon microphone corresponding , for receiving the mobile phone acoustic aperture 51 of external sound signal, silicon microphone is arranged on hands by its pad 11 On owner's wiring board 7, silicon microphone acoustic aperture 21 and mobile phone acoustic aperture 51 are docked, therebetween by one Flexible gum cover 6 connects, and is provided with the gum cover acoustic aperture 61 that can transmit acoustical signal, gum cover 6 in gum cover 6 Airtight docking silicon microphone acoustic aperture 21 and mobile phone acoustic aperture 51, thereby may be ensured that silicon microphone and phone housing Between keep air-tightness, it is ensured that acoustical signal can be airtight from the external world respectively by mobile phone acoustic aperture 51, glue Set acoustic aperture 61 and silicon microphone acoustic aperture 21 enter inside silicon microphone, and silicon microphone realizes sound-electric signal After conversion, the signal of telecommunication is transmitted by mobile phone main circuit board 7.When light irradiates into mobile phone acoustic aperture 51 He After the space that gum cover acoustic aperture 61 is formed, major part is irradiated to the black around silicon microphone acoustic aperture 21 In coating 22, coating 22, will not be in mobile phone acoustic aperture 51 and gum cover acoustic aperture 61 by major part luminous absorption Multiple reflections in the space formed, thus drastically reduce the area the light irradiated into silicon microphone acoustic aperture 21, Eventually reduce optical noise.
This design of the present invention is only by being arranged around absorbing in the acoustic aperture of silicon microphone outer surface The mode of the dark coating of light realizes well dropping light and makes an uproar effect, and design is simple and is easily achieved, no Production cost and the size of product can be increased, and the pickup effect of product will not be produced impact.
Further, make an uproar the impact on mike to reduce light further, be preferable to carry out of the present invention In mode, the inwall of gum cover acoustic aperture 61, silicon microphone acoustic aperture 21 and mobile phone acoustic aperture 51 is also provided with There is the dark colour coating (not shown) being similar to above-mentioned coating 22, be used for absorbing extraneous entrance acoustic aperture Light and reduce light reflection in acoustic aperture or refraction.For providing the gum cover sound of sound channel Hole 61, silicon microphone acoustic aperture 21 and mobile phone acoustic aperture 51, can arrange deep on all of acoustic aperture inwall Color coating, it is also possible to dark colour coating is set on the inwall of an one of which or two acoustic aperture.
Equally, the color of the dark colour coating being arranged on acoustic aperture inwall can select black, navy blue, deep Lycoperdon polymorphum Vitt, dark brown, blackish green, dark-brown, coffee color or the color of other dark systems are the most permissible Reach the black of optimal extinction effect.
Embodiment two
Fig. 6 and Fig. 7 is respectively cross-sectional view and the top view of the embodiment of the present invention two.As Fig. 6, Shown in Fig. 7, in the present embodiment two, a square wiring board 1 and square metal shell 2 structure Become the outer enclosure of silicon microphone, metal shell 2 is provided with the acoustic aperture for receiving external sound signal 21, on the wiring board 1 within encapsulation, it is separately installed with IC chip 3 and MEMS chip 4, wherein MEMS chip 4 is for utilizing MEMS(MEMS) technique making, can be by extraneous sound letter Number being transformed into the signal of telecommunication, the IC chip 3 on the electrode of MEMS chip 4 and wiring board 1 electrically connects, and Multiple pads 11 that the signal of telecommunication that IC chip processed the most at last is arranged by wiring board 1 outer surface pass It is passed to silicon microphone outside and is connected to external circuit.Further, the present invention is in order to realize reducing the effect that light is made an uproar Really, the exterior circumferential surface of acoustic aperture 21 is provided with dark colour coating 22.
As preferred technical scheme, the color of coating 22 can select black, navy blue, Dark grey, Dark brown, blackish green, dark-brown, coffee color or the color of other dark systems, in order to absorb from silicon Most of illumination outside mike, from without making extraneous light become in the acoustic aperture external effect of silicon microphone Light line reflection repeatedly, reduces the illumination entered within silicon microphone as far as possible, to realize the effect that fall light is made an uproar Really.In the present embodiment one, preferred black is as the color of coating 22, can reach optimal effect.
In the production design process of silicon microphone, the size of acoustic aperture is also to affect silicon microphone acoustic efficiency One of and the important indicator of anti-light effect of making an uproar.Unlike embodiment one, in the present embodiment two, Acoustic aperture 21 is multiple aperture, and preferred single small aperture is 0.03-0.1mm, can reach preferably to drop Light is made an uproar effect and acoustic efficiency, and compare to embodiment one only by the aperture structure that an aperture is bigger The acoustic aperture become, the acoustic aperture that the aperture less by multiple single small apertures in the present embodiment two forms is permissible Preferably realize dust-proof effect and wind resistance is made an uproar effect.
As preferred technical scheme, in the present embodiment two, coating 22 is for being arranged on acoustic aperture 21 place Whole coatings in package surface.This design can preferably prevent light from irradiating inside silicon microphone.
Embodiment three
Fig. 8 and Fig. 9 is respectively cross-sectional view and the upward view of the embodiment of the present invention three.
As shown in Figure 8 and Figure 9, similar with previous embodiment, the silicon microphone of the present embodiment three is also Outer enclosure is constituted, within encapsulation by a square wiring board 1 and a square metal shell 2 On wiring board 1, being separately installed with IC chip 3 and MEMS chip 4, wherein MEMS chip 4 is Utilize MEMS(MEMS) technique making, extraneous acoustical signal can be transformed into the signal of telecommunication, IC chip 3 on the electrode of MEMS chip 4 and wiring board 1 electrically connects, and the most at last at IC chip Multiple pads 11 that the signal of telecommunication managed is arranged by wiring board 1 outer surface are transferred to outside silicon microphone And it is connected to external circuit.
Unlike previous embodiment, in the present embodiment three, for receiving the sound of external sound signal Hole 12 is arranged on wiring board 1, in order to realize reducing the effect that light is made an uproar, in the exterior circumferential of acoustic aperture 12 Dark colour coating 13 it is again provided with on surface.
Equally, the color of coating 13 can select black, navy blue, Dark grey, dark brown, blackish green, Dark-brown, coffee color or the color of other dark systems, in order to absorb from the big portion outside silicon microphone Light splitting photograph, from without making extraneous light become light line reflection repeatedly in the acoustic aperture external effect of silicon microphone, Reduce the illumination entered within silicon microphone as far as possible, to realize the effect that fall light is made an uproar.At the present embodiment one In preferably black as the color of coating 13, can reach optimal effect selection black, navy blue or The color of other dark systems, in the present embodiment, preferred black, can reach best effect.
In the present embodiment three, acoustic aperture 13 is an aperture, and aperture is 0.1-0.5mm, can reach relatively Good fall light is made an uproar effect and acoustic efficiency.
It addition, as it is shown in figure 9, in the present embodiment three, coating 13 is for being arranged on acoustic aperture 12 place envelope Whole coatings on dress surface.This design can preferably prevent light from irradiating inside silicon microphone. Further, coating 13 is the solder resist being arranged on wiring board 1 surface, and such coating 13 can be at wiring board 1 Manufacturing process in complete, technique is simple, and in circuit board manufacturing process, the making of solder resist Journey is a necessary process, can't increase production cost.
Figure 10 is the application structure signal that the silicon microphone of the present embodiment three is arranged in a kind of electronic product Figure.As shown in Figure 10, after the silicon microphone shown in the present embodiment three is installed, it is assumed that it is arranged in mobile phone, In figure, 5 represent the shell of mobile phone, and phone housing 5 is provided with the mobile phone for receiving external sound signal Acoustic aperture 51, silicon microphone is arranged on mobile phone main circuit board 7 by its pad 11, mobile phone main circuit board 7 Upper and mobile phone acoustic aperture 51 correspondence position is provided with main circuit board acoustic aperture 71, then main circuit board acoustic aperture 71 Docking with mobile phone acoustic aperture 51, connected by a flexible gum cover 6 therebetween, gum cover 6 is provided with permissible The gum cover acoustic aperture 61 of transmission acoustical signal, gum cover 6 can ensure that and keeps between silicon microphone and phone housing Air-tightness, it is ensured that acoustical signal can be airtight from the external world respectively by mobile phone acoustic aperture 51, gum cover acoustic aperture 61, Main circuit board acoustic aperture 71 and silicon microphone acoustic aperture 12 enter inside silicon microphone, and silicon microphone realizes sound-electric After the conversion of signal, the signal of telecommunication is transmitted by mobile phone main circuit board 7.
When light irradiates into mobile phone acoustic aperture 51, gum cover acoustic aperture 61 and main circuit board acoustic aperture 71 from outer handset After the space formed, major part light is irradiated to the black coating 13 around silicon microphone acoustic aperture 12 On, coating 13, will not be at mobile phone acoustic aperture 51, gum cover acoustic aperture 61 and main line by major part luminous absorption Multiple reflections in the space that plate acoustic aperture 71 is formed, thus drastically reduce the area and irradiate into silicon microphone acoustic aperture 12 Light, eventually reduce the optical noise impact on silicon microphone.
The present embodiment three equally can be by being simply provided around the acoustic aperture of silicon microphone outer surface dark painting Layer absorbs light, the effect thus realization well fall light is made an uproar, and will not produce the pickup effect of product Impact.
It addition, make an uproar the impact on mike to reduce light further, it is preferable to carry out of the present invention In mode, equally at gum cover acoustic aperture 61, silicon microphone acoustic aperture 12, mobile phone acoustic aperture 51 and main circuit board It is also equipped with being similar to the dark colour coating (not shown) of above-mentioned coating 22 on the inwall of acoustic aperture 71, For absorbing the extraneous light entering acoustic aperture and reducing light reflection in acoustic aperture or refraction.For The gum cover acoustic aperture 61 of sound channel, silicon microphone acoustic aperture 12, mobile phone acoustic aperture 51 and main circuit board are provided Acoustic aperture 71, can arrange dark colour coating, it is also possible to an one of which on all of acoustic aperture inwall Or dark colour coating is set on the inwall of two acoustic aperture.
Equally, the color of the dark colour coating being arranged on acoustic aperture inwall can select black, navy blue, deep Lycoperdon polymorphum Vitt, dark brown, blackish green, dark-brown, coffee color or the color of other dark systems are the most permissible Reach the black of optimal extinction effect.
In three embodiments enumerated above, all have employed square shell and wiring board, shell is The metal groove form casing of one.It is true that shell and wiring board can also be other shapes, shell is also Wiring board material, plastic material etc. can be used to make, and shell can also be a framework and a lid Combine;Wiring board in this patent can be using preferred resin material as base material;Silicon microphone is installed Application product can be mobile phone, it is also possible to be such as other electricity such as transmitter receiver, notebook computer, palm PC Sub-product.In a word, the various choices of technology on the premise of not violating this novel silicon microphone design purport Mode is all within the protection of this patent.In addition, it is necessary to explanation, suitable in view of MEMS chip Adjusting the purport on the present invention not affect, the MEMS chip in pattern represents only with simple pattern.

Claims (9)

1. a silicon microphone, constitutes silicon microphone including shell and wiring board, described shell and wiring board Outer enclosure structure, in the PCB surface within described encapsulating structure, MEMS chip is installed, and And on described encapsulating structure, it is provided with the acoustic aperture for receiving external sound signal, it is characterised in that
The exterior circumferential surface of described acoustic aperture is provided with dark colour coating;Further,
Described acoustic aperture is arranged on described wiring board or described shell;
The acoustic aperture being arranged on described wiring board is arranged on described wiring board and installs described MEMS chip Position corresponding;
Outer surface at described wiring board is provided with the weldering that the external circuit with described silicon microphone electrically connects Dish.
2. silicon microphone as claimed in claim 1, it is characterised in that
The color of described coating be black, navy blue, Dark grey, dark brown, blackish green, dark-brown or Person is coffee-like.
3. silicon microphone as claimed in claim 1, it is characterised in that
Described acoustic aperture be aperture be 0.1~1.5mm aperture or multiple single small aperture be The aperture of 0.03~0.1mm.
4. silicon microphone as claimed in claim 1, it is characterised in that
Described shell is metal shell, and described acoustic aperture is arranged on the housing, and described coating is arranged on institute State case surface.
5. silicon microphone as claimed in claim 1, it is characterised in that
The coating being arranged in the exterior circumferential surface of the acoustic aperture on described wiring board is for being arranged on described circuit The solder resist on plate surface.
6. silicon microphone as claimed in claim 1, it is characterised in that
Described coating is to be arranged on the annular coating around described acoustic aperture or for being arranged on described acoustic aperture place Whole coatings in package surface.
7. a silicon microphone and the encapsulating structure of application product, it is characterised in that
Described silicon microphone is the silicon microphone according to any one of claim 1~6;
The shell of described application product is provided with the application corresponding with the acoustic aperture of described silicon microphone produce Product acoustic aperture;And
It is additionally provided with in order to airtight docking between the acoustic aperture and described application product acoustic aperture of described silicon microphone The acoustic aperture of described silicon microphone and the gum cover of described application product acoustic aperture, be provided with gum cover sound in described gum cover Hole.
8. encapsulating structure as claimed in claim 7, it is characterised in that
In described gum cover acoustic aperture and/or the acoustic aperture of described silicon microphone and/or described application product acoustic aperture Wall is provided with dark colour coating.
9. encapsulating structure as claimed in claim 7, it is characterised in that
Described silicon microphone be arranged on the shell of described application product and described application product main circuit board it Between, described silicon microphone is arranged on the main circuit board of described application product by pad.
CN201310505115.1A 2010-09-03 2010-09-03 Silicon microphone and the encapsulating structure of application product thereof Active CN103533493B (en)

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CN2010102708717A CN102387454B (en) 2010-09-03 2010-09-03 Silicon microphone and packaging structure of product applying same
CN201310505115.1A CN103533493B (en) 2010-09-03 2010-09-03 Silicon microphone and the encapsulating structure of application product thereof

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CN106412783B (en) * 2016-11-23 2022-04-12 上海传英信息技术有限公司 Microphone structure and mobile terminal
CN108074498B (en) * 2017-12-27 2020-08-11 威创集团股份有限公司 Display module, display device and manufacturing method
CN109769184B (en) * 2019-01-16 2024-04-02 钰太芯微电子科技(上海)有限公司 Packaging structure of microphone
CN111683332B (en) * 2020-06-08 2021-11-09 荣成歌尔电子科技有限公司 Optical noise test system, optical noise test method and storage medium

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US6781231B2 (en) * 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
US7095333B2 (en) * 2003-09-18 2006-08-22 Emerson Electric Company Method and apparatus for enabling optical communication through low intensity indicators in an appliance that uses a vacuum fluorescent display
CN101808264A (en) * 2010-02-10 2010-08-18 中国科学院半导体研究所 Optical fiber laser microphone
CN102387454B (en) * 2010-09-03 2013-11-20 歌尔声学股份有限公司 Silicon microphone and packaging structure of product applying same

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Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268

Patentee after: Goertek Inc.

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