CN103529322B - A kind of piezoelectric ceramics quick deflecting mirror dynamic frequency response test system and method - Google Patents
A kind of piezoelectric ceramics quick deflecting mirror dynamic frequency response test system and method Download PDFInfo
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- CN103529322B CN103529322B CN201310470166.5A CN201310470166A CN103529322B CN 103529322 B CN103529322 B CN 103529322B CN 201310470166 A CN201310470166 A CN 201310470166A CN 103529322 B CN103529322 B CN 103529322B
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Abstract
The present invention discloses a kind of piezoelectric ceramics quick deflecting mirror dynamic frequency response test system and method, for testing the quick deflecting mirror frequency response of piezoelectric ceramics, investigates its dynamic displacement characteristic.System is made up of Frequency Response Analyser and piezoelectric ceramics controller.First swept-frequency signal is exported by Frequency Response Analyser, the quick deflecting mirror deflection of rear drive piezoelectric ceramics is amplified through piezoelectric ceramics controller, then Frequency Response Analyser to detect on piezoelectric ceramics quick deflecting mirror paste the voltage of foil gauge, finally by Frequency Response Analyser by the driving voltage that compares output and the foil gauge voltage detected, automatically draw the dynamic frequency response Bode diagram of the quick deflecting mirror of piezoelectric ceramics.The voltage and foil gauge voltage of exporting to the quick deflecting mirror of piezoelectric ceramics compare by native system, utilize Frequency Response Analyser to obtain the frequency response characteristic of the quick deflecting mirror of piezoelectric ceramics, and structure is simple, easy to operate.
Description
Technical field:
The present invention relates to a kind of dynamic frequency response test system and method, be specifically related to a kind of piezoelectric ceramics quick deflecting mirror dynamic frequency response test system and method.
Background technology:
The quick deflecting mirror of piezoelectric ceramics has the advantages such as response is fast, displacement resolution is high, High power output, power consumption are little, do not generate heat, and has been widely used in the fields such as Aero-Space, microelectron-mechanical, Precision Machining; In the occasion of some quick actions, dynamic respond is fast, the feature of spectral flatness to require the quick deflecting mirror of piezoelectric ceramics also should have, and therefore needs the dynamic frequency response testing piezoelectric ceramics deflecting mirror.Method of testing about the frequency response of piezoelectric ceramics quick deflecting mirror is less, some utilizes velocity pick-up method, interferometric method, test macro is complicated, the method utilizing foil gauge to feed back is comparatively simple, at present also not by the method for the quick deflecting mirror frequency response characteristic of foil gauge feedback voltage test piezoelectric ceramics.
Summary of the invention:
The object of the invention is to the dynamic frequency response characteristic for the quick deflecting mirror of piezoelectric ceramics, a kind of test macro and method of testing are provided, make, when investigating the frequency response of the quick deflecting mirror of piezoelectric ceramics, an effective test macro and correct method of testing can be provided.The present invention is equally applicable to other piezoelectric ceramics deflecting mirror frequency responses test.
Method of the present invention utilizes Frequency Response Analyser to export sweep voltage, sweep voltage is the quick deflecting mirror of Direct driver piezoelectric ceramics after piezoelectric ceramics controller amplifies, the quick deflecting mirror deflection of piezoelectric ceramics to cause on pottery paste foil gauge change in resistance, change in resistance causes foil gauge change in voltage, the foil gauge voltage of change is gathered by Frequency Response Analyser after piezoelectric ceramics controller amplifies, and Frequency Response Analyser draws the frequency response Bode diagram of surveyed deflecting mirror automatically.
The piezoelectric ceramics quick deflecting mirror dynamic frequency response test system that can realize the inventive method as shown in Figure 1, comprising: Frequency Response Analyser 1, piezoelectric ceramics controller 2, is characterized in that:
Described Frequency Response Analyser 1 is the Frequency Response Analyser with frequency sweep function; The XE501-D piezoelectric ceramics controller that described piezoelectric ceramics controller 2 Shi Xin company's tomorrow produces.
Frequency Response Analyser 1 exports and is connected with piezoelectric ceramics controller 2 control signal input end, piezoelectric ceramics controller 2 position sensing output terminal inputs with Frequency Response Analyser 1 and is connected, piezoelectric ceramics controller 2 High voltage output is connected with piezoelectric ceramics 3, and piezoelectric ceramics controller 2 position sensing input end is connected with foil gauge 4.
Realize the concrete grammar of frequency response test:
1. Frequency Response Analyser 1 is set and exports sweep voltage to piezoelectric ceramics controller control signal input end, the amplitude of voltage, frequency, swept frequency range and frequency sweep are set simultaneously and count.
2. the swept-frequency signal that Frequency Response Analyser 1 exports by piezoelectric ceramics controller 2 exports to the quick deflecting mirror 3 of piezoelectric ceramics after amplifying, and drives the quick deflecting mirror 3 of piezoelectric ceramics to deflect.
3. the deflection of piezoelectric ceramics quick deflecting mirror 3 to cause on pottery paste foil gauge change in voltage, export to Frequency Response Analyser after the foil gauge voltage of change gathers amplification by piezoelectric ceramics controller 2.
4. Frequency Response Analyser is by the swept-frequency signal comparing output and the foil gauge voltage signal detected, automatically draws the dynamic frequency response Bode diagram of the quick deflecting mirror of piezoelectric ceramics.
The present invention has following beneficial effect:
Test macro can arrange the parameter of Frequency Response Analyser according to demand flexibly, comprises swept frequency range, frequency sweep point, the voltage bias of swept-frequency signal and effective value; The frequency sweep time is short, and frequency sweep terminates the frequency response Bode diagram that rear Frequency Response Analyser directly shows tested deflecting mirror, and USB interface can be used to be connected with computing machine by Frequency Response Analyser, is deposited on computing machine by Bode diagram.These advantages make the present invention be highly suitable for the test of the quick deflecting mirror frequency response of piezoelectric ceramics above.
Accompanying drawing illustrates:
Fig. 1 is the frequency response test system structural representation of application the inventive method.
Embodiment:
The whole piezoelectric ceramics quick deflecting mirror dynamic frequency response test system that can be used for forms as shown in Figure 1.In this instance system, testing Frequency Response Analyser 1 used is the FRA5022 Frequency Response Analyser that NF company produces, and swept frequency range, frequency sweep point, voltage bias and effective value can change flexibly, and the frequency sweep time is short.Testing the quick deflecting mirror 3 of piezoelectric ceramics used is S-330.8 piezoelectric ceramics deflecting mirrors that PI Corp. produces, and piezoelectric ceramics carries foil gauge 4.Set forth application the present invention further by composition graphs 1 and can realize test macro embodiment:
1. Frequency Response Analyser 1 is set and exports swept-frequency signal to piezoelectric ceramics controller control signal input end, the amplitude of signal and swept frequency range are arranged according to the capacitive characteristics of piezoelectric ceramics, in test, signalization direct current biasing is 2V, effective value 0.0707V, signal swept frequency range is 1Hz-2kHz, and it is 200 that frequency sweep is counted.
2. arrange piezoelectric ceramics controller 2 and work in analog control mode, the swept-frequency signal exported by Frequency Response Analyser 1 exports to the quick deflecting mirror 3 of piezoelectric ceramics after amplifying, and causes the quick deflecting mirror 3 of piezoelectric ceramics to deflect.
3. the deflection of piezoelectric ceramics quick deflecting mirror 3 to cause on pottery paste the change in voltage of foil gauge 4, export to Frequency Response Analyser after the foil gauge voltage of change is amplified by piezoelectric ceramics controller 2.
4. Frequency Response Analyser is by the driving voltage comparing output and the foil gauge voltage detected, automatically draws the dynamic frequency response Bode diagram of the quick deflecting mirror of piezoelectric ceramics.
Claims (2)
1. a piezoelectric ceramics quick deflecting mirror dynamic frequency response test system, it comprises: Frequency Response Analyser (1) and piezoelectric ceramics controller (2), is characterized in that:
Described Frequency Response Analyser (1) is the Frequency Response Analyser with frequency sweep function; The XE501-D piezoelectric ceramics controller that described piezoelectric ceramics controller (2) Shi Xin company's tomorrow produces;
Frequency Response Analyser (1) exports and is connected with piezoelectric ceramics controller (2) control signal input end, piezoelectric ceramics controller (2) position sensing output terminal inputs with Frequency Response Analyser (1) and is connected, piezoelectric ceramics controller (2) High voltage output is connected with the quick deflecting mirror of piezoelectric ceramics (3), and piezoelectric ceramics controller (2) position sensing input end is connected with foil gauge (4).
2., based on a frequency response method of testing for test macro described in claim 1, it is characterized in that comprising the following steps:
1). Frequency Response Analyser (1) is set and exports sweep voltage to piezoelectric ceramics controller control signal input end, the amplitude of voltage, frequency, swept frequency range and frequency sweep are set simultaneously and count;
2). the swept-frequency signal that Frequency Response Analyser (1) exports by piezoelectric ceramics controller (2) exports to the quick deflecting mirror of piezoelectric ceramics (3) after amplifying, and drives the quick deflecting mirror of piezoelectric ceramics (3) deflection;
3). the quick deflecting mirror of piezoelectric ceramics (3) deflection to cause on pottery institute to paste foil gauge change in voltage, and the foil gauge voltage of change exports to Frequency Response Analyser (1) by after piezoelectric ceramics controller (2) collection amplification;
4). Frequency Response Analyser (1), by the swept-frequency signal comparing output and foil gauge (4) voltage signal detected, draws the dynamic frequency response Bode diagram of the quick deflecting mirror of piezoelectric ceramics automatically.
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| CN104199186B (en) * | 2014-09-16 | 2016-09-28 | 中国科学院光电技术研究所 | A kind of piezoelectric tilt mirror high-voltage drive with object frequency characteristic compensation function |
| CN105423885B (en) * | 2015-11-10 | 2018-01-05 | 中国科学院长春光学精密机械与物理研究所 | The displacement detector and detection method of built-in strain sheet type piezoelectric ceramic |
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| CN201159847Y (en) * | 2008-03-05 | 2008-12-03 | 重庆工学院 | Time-sharing piezo-electricity self-perception actuator |
| CN102128995A (en) * | 2010-12-24 | 2011-07-20 | 上海电机学院 | Device and method for real-time online identifying piezoelectric parameters of piezoelectric ceramic |
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| US8525509B2 (en) * | 2007-12-04 | 2013-09-03 | Headway Technologies, Inc. | Low cost simplified spectrum analyzer for magnetic head/media tester |
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|---|---|---|---|---|
| CN201159847Y (en) * | 2008-03-05 | 2008-12-03 | 重庆工学院 | Time-sharing piezo-electricity self-perception actuator |
| CN102128995A (en) * | 2010-12-24 | 2011-07-20 | 上海电机学院 | Device and method for real-time online identifying piezoelectric parameters of piezoelectric ceramic |
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| 压力传感器频率响应的分析;柳兆荣 等;《力学学报》;19801031(第4期);第363-372 * |
| 用干涉法测量压电陶瓷的动态频率响应特性;吴新民 等;《红外与激光工程》;20020630;第31卷(第3期);第257-260页 * |
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