CN101769969B - Device and method for measuring piezoelectric constant loop and dielectric constant loop of ferroelectric material - Google Patents
Device and method for measuring piezoelectric constant loop and dielectric constant loop of ferroelectric material Download PDFInfo
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Abstract
The invention discloses a device and a method for measuring a piezoelectric constant loop and a dielectric constant loop of a ferroelectric material, which belong to the technical field of test of ferroelectric and piezoelectric materials. The device comprises three parts of test signal output, piezoelectric constant loop test and dielectric constant loop test as well as equipment control and data acquiring and processing. By simultaneously applying a discharge signal and a small alternating current signal of a standard capacitor I in a series loop comprising a sample to be tested and a standard capacitor II, acquiring voltage signals at both ends of the standard capacitor II and a strain signal of the sample to be tested, and carrying out computer software conversion processing to obtain the dielectric constant loop and the piezoelectric constant loop. The invention solves the problem of no instrument for simultaneously measuring the piezoelectric constant loop and the dielectric constant loop in the current domestic ferroelectric and piezoelectric material research and has stable test data, high efficiency, more favorable user-defined performance and expansibility, easy assembly, convenience and practicability.
Description
Technical field
The present invention relates to ferroelectric and the piezoelectric technical field of measurement and test, relate in particular to a kind of apparatus and method of measuring ferroelectric material piezoelectric constant loop line and dielectric constant loop simultaneously.
Background technology
Ferroelectric and piezoelectric is one type of important, that international competition is very fierce hi-tech material, is widely used in high-tech sectors such as information, laser, navigation and biologies.Because it has higher power photoelectric transformation efficiency and good performance Modulatory character, thereby at the ignition trigger device of automobile, the control of Aero-Space adaptive wing, small motor and MEMS (MEMS), all be unable to do without ferroelectric and piezoelectric.For the ferroelectric material of perovskite structure, the measurement of its electrical property and sign mainly comprise the ferroelectric hysteresis loop (polarization intensity-electric field loop line) of big test signal and strain loop line (strain-electric field loop line); Piezoelectric constant loop line (the piezoelectric strain constant d that also comprises simultaneously little test signal
33-DC electric field loop line) and dielectric constant loop (ε
33-DC electric field loop line).
The measurement of little test signal loop line is the piezoelectric constant and the specific inductive capacity of an additional little AC signal test ferroelectric material in the measuring process of big DC test signal loop line, and the line period of going forward side by side is measured to form loop line.For the strain measurement that the little AC signal under certain Dc bias electric field situation causes, current measuring methods comprises laser interferance method, optical Fiber Method, differential transformer displace etc.For the higher AC signal of frequency, optical Fiber Method is more effective.
The piezoelectric constant loop line of little test signal is compared the ferroelectric hysteresis loop and the strain loop line of big test signal with dielectric constant loop, can characterize the performance parameter of ferroelectric piezoelectric and the situation of change in the use thereof better; Piezoelectric constant loop line and the dielectric constant loop of measuring ferroelectric material simultaneously are also very meaningful.In addition, in the fatigue study process relevant with the ferroelectric material reliability, the variation of measuring piezoelectric property parameters and dielectric properties parameter under the small-signal simultaneously is quite important for disclosing the electric failure mechanism of ferroelectric muscle power.
The present domestic test macro that does not also have synchronism detection piezoelectric constant loop line and dielectric constant loop.
Summary of the invention
The objective of the invention is the problem that exists to the present ferroelectric material technical field of measurement and test described in the background technology, proposed a kind of apparatus and method of measuring ferroelectric material piezoelectric constant loop line and dielectric constant loop simultaneously.
Said device comprises test signal output, piezoelectric constant loop line and dielectric constant loop measurement and device control and three parts of data acquisition process; It is characterized in that; Said test signal output is made up of direct current signal output and AC signal output, wherein:
The direct current signal output comprises dc high-voltage source, oscillograph and switch, and dc high-voltage source links to each other with computing machine with oscillograph respectively, and links to each other with standard capacitance one (201) through switch;
The AC signal output comprises AC power and transformer, and AC power links to each other with transformer with computing machine respectively, and transformer links to each other with standard capacitance one;
Said piezoelectric constant loop line and dielectric constant loop measure portion comprise standard capacitance one, standard capacitance two (203), testing sample and Fibre Optical Sensor; Standard capacitance two is connected in circuit with testing sample and is constituted test circuit; Standard capacitance one is parallelly connected with this test circuit, and Fibre Optical Sensor links to each other with testing sample;
Said device control and data acquisition process partly comprise lock-in amplifier and computing machine, and lock-in amplifier links to each other with standard capacitance two, Fibre Optical Sensor and computing machine respectively.
The capacitance of said standard capacitance one is 4 μ F-10 μ F, withstand voltage 2000V.
Measure the method for ferroelectric material piezoelectricity and dielectric constant loop, it is characterized in that, may further comprise the steps:
Step 1: dc high-voltage source gives standard capacitor one charging, the test circuit two ends of forming through this capacitor discharge to testing sample and standard capacitance two then;
Simultaneously, AC power provides little sinusoidal test signal and puts on test circuit through transformer;
Step 2: gather standard capacitance two voltage signals through lock-in amplifier;
Gather the testing sample strain and be converted into voltage signal through Fibre Optical Sensor, and use lock-in amplifier that voltage signal is gathered;
Step 3: above-mentioned signal is input in the computing machine, through the image and the data file of computing output piezoelectric constant loop line and dielectric constant loop.
The about 1 μ F of the capacitance of said standard capacitance two is much larger than the electric capacity of testing sample.
Per step of DC voltage that said dc high-voltage source produces is spaced apart 50V-200V, and the application time of DC voltage is 2s-8s.
Said AC power comprises AC signal generator and ac signal amplifiers.
Said AC signal generator produces alternating voltage 1V-5V, and frequency is 100Hz-2kHz, and amplifying the back voltage range through ac signal amplifiers is 10V-200V.
The Measuring Time cycle of said piezoelectric constant loop line or dielectric constant loop is 500s-800s.
The Sawyer-Tower circuit is adopted in the measurement of said specific inductive capacity.
The invention has the beneficial effects as follows:
1. adopt relatively simply and measure piezoelectric constant loop line and dielectric constant loop by testing sample and normal linearity capacitances in series built-up circuit.
2. applying through standard capacitance one of high direct voltage realized, prevented the influence of big voltage to little test signal like this, played protective effect simultaneously.
3. applying through transformer of little alternating voltage realizes, prevented the influence of big DC voltage to AC power like this, played protective effect.
4. adopt the strain of fiber sensor measuring ferroelectric material, under the high-frequency test signal, realized real-time measurement.
5. piezoelectric constant loop line and dielectric constant loop are tested mutually and are not disturbed, but the while image data can change through software real-time comparative analysis sample piezoelectricity and dielectric properties parameter.
Description of drawings
Fig. 1: the structured flowchart of measurement mechanism;
Fig. 2: metering circuit synoptic diagram;
Fig. 3: device control and data acquisition process process synoptic diagram;
Fig. 4 a: the piezoelectric constant loop line of the ferroelectric ceramics sample that measures simultaneously in the embodiment of the invention;
Fig. 4 b: the dielectric constant loop of the ferroelectric ceramics sample that measures simultaneously in the embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing, preferred embodiment is elaborated.Should be emphasized that following explanation only is exemplary, rather than in order to limit scope of the present invention and application thereof.
The present invention provides a kind of method of testing and proving installation of measuring ferroelectric material piezoelectric constant loop line and dielectric constant loop simultaneously; The source program of this apparatus control system uses the Labview programming; Through VISA Long-distance Control dc high-voltage source (Trek) and lock-in amplifier (Stanford Research System 830), carry out data acquisition through DAQ simultaneously; Software section uses two DAQ, triggers two stages in trigger pip and wait respectively and carries out data acquisition, can realize signal monitoring and signal acquisition process respectively; Program is through measuring piezoelectric constant and specific inductive capacity at sampled point, and preserves ascii data file and loop line figure automatically; On the interface, show simultaneously piezoelectric constant, dielectric constant values and two loop lines.
Specimen is used PIC151 (PI Ceramics, Lederhose, Germany) ceramics sample, thickness of sample d=1mm, electrode area S=0.7854cm
2, the experiment test cycle is 500s-800s.
Shown in Figure 1 for measuring the proving installation of ferroelectric material piezoelectric constant loop line and dielectric constant loop simultaneously, comprise test signal output 1, piezoelectric constant and dielectric constant loop measure portion 2 and device control and data acquisition process part 3.
Wherein, the dc high-voltage source 101 of test signal output 1 connects oscillograph 102 and switch 103 respectively; Device guarantees the correct and experiment safety of signal through oscillograph 102 monitoring dc high-voltage sources 101 signals.AC power (104) comprises AC signal generator and ac signal amplifiers; AC signal generator provides little AC signal by computer control and amplifies through ac signal amplifiers; Put in the test circuit through producing new AC signal behind the transformer, as shown in Figure 2.
Piezoelectric constant and dielectric constant loop measure portion 2 mainly are composed in series by testing sample 202 and standard capacitance 2 203, and be as shown in Figure 2.The dielectric constant loop measurement is directly used the importation of lock-in amplifier 301 that the voltage signal at standard capacitance 2 203 two ends is gathered and is carried out analog to digital conversion, and the sample electric weight equates with the standard capacitance carried charge, and Q=CV, so C
xV
x=C
oV
o, C wherein
oAnd V
oBe respectively the electric capacity and the voltage of standard capacitance two, C
xAnd V
xBe respectively the electric capacity and the voltage of testing capacitance, C
oValue is much larger than C
xLock-in amplifier is parallelly connected with standard capacitance two, and its voltage equals V
oSo, C
x=C
oV
o/ V
x, therefore only need to survey V through lock-in amplifier
oCollect computing machine and read numerical value; Just can calculate the capacitance values of sample and then record the specific inductive capacity of sample; Will be under different Dc bias electric fields (DC electric field of this discontinuity forms periodically triangular wave electric field) specific inductive capacity of recording collect computing machine, thereby measure the dielectric constant loop of ferroelectric material.
The piezoelectric constant loop line is gathered the strain signal of testing sample 202 and is converted into the importation that voltage signal outputs to lock-in amplifier 301 through Fibre Optical Sensor 204, and is as shown in Figure 2.The AC field that strain value S and the testing sample that obtains applied is compared the piezoelectric constant that can obtain sample.
Will be under different Dc bias electric fields (DC electric field of this discontinuity forms periodically triangular wave electric field) piezoelectric constant of recording collect computing machine, thereby measure the piezoelectric constant loop line of ferroelectric material.
Direct current signal output generation per step of DC voltage is spaced apart 50V-200V.The application time of DC voltage is 2s-8s.A go-and-return measurement time cycle is 500s-800s.Producing the test waveform signal is that the type triangular wave is got on rank.
The AC signal output produces alternating voltage 1V-5V, frequency is 100Hz-2kHz.Amplifying the back voltage range through AC amplifier is 10V-200V.It is sinusoidal wave producing the test waveform signal.
Data acquisition is through using lock-in amplifier; The voltage signal that collects from Fibre Optical Sensor in voltage signal that the test voltage signal of dc high-voltage source, dielectric constant loop are collected in measuring and the piezoelectric constant loop line is gathered from three analog input channels respectively simultaneously, and is as shown in Figure 3.
The actual measurement process is: the direct supply test signal that dc high-voltage source (Trek) 101 produces is input to computing machine 302; Put on simultaneously on the standard capacitance 1, after-applied on the circuit of forming by testing sample 202 and standard capacitance 2 203 through standard capacitance one 201 discharges again.The voltage at standard capacitance 2 203 two ends is changed through the importation of lock-in amplifier 301 and is input to computing machine 302; Simultaneously Fibre Optical Sensor 204 is surveyed and is exchanged strains, and after signal is converted into voltage signal, changes through the importation of lock-in amplifier 301 and be input to computing machine 302; At last data are carried out software processes, obtain data such as piezoelectric constant, specific inductive capacity, and obtain piezoelectric constant loop line and dielectric constant loop, measurement result is as shown in Figure 4.
The above; Be merely the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, the technician who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (9)
1. measure the device of ferroelectric material piezoelectric constant loop line and dielectric constant loop; Comprise test signal output, piezoelectric constant loop line and dielectric constant loop measurement and device control and three parts of data acquisition process; It is characterized in that; Said test signal output is made up of direct current signal output and AC signal output, wherein:
The direct current signal output comprises dc high-voltage source, oscillograph and switch, and dc high-voltage source links to each other with computing machine with oscillograph respectively, and links to each other with standard capacitance one (201) through switch;
The AC signal output comprises AC power and transformer, and AC power links to each other with transformer with computing machine respectively, and transformer links to each other with standard capacitance one;
Said piezoelectric constant loop line and dielectric constant loop measure portion comprise standard capacitance one, standard capacitance two (203), testing sample and Fibre Optical Sensor; Standard capacitance two is connected in circuit with testing sample and is constituted test circuit; Standard capacitance one is parallelly connected with this test circuit, and Fibre Optical Sensor links to each other with testing sample;
Said device control and data acquisition process partly comprise lock-in amplifier and computing machine, and lock-in amplifier links to each other with standard capacitance two, Fibre Optical Sensor and computing machine respectively.
2. the device of measurement ferroelectric material piezoelectric constant loop line according to claim 1 and dielectric constant loop is characterized in that, the capacitance of said standard capacitance one is 4 μ F-10 μ F, withstand voltage 2000V.
3. measure the method for ferroelectric material piezoelectricity and dielectric constant loop, it is characterized in that, may further comprise the steps:
Step 1: dc high-voltage source gives standard capacitance one charging, the test circuit two ends of forming through this capacitor discharge to testing sample and standard capacitance two then;
Simultaneously, AC power provides little sinusoidal test signal and puts on test circuit through transformer;
Step 2: gather standard capacitance two voltage signals through lock-in amplifier;
Gather the testing sample strain and be converted into voltage signal through Fibre Optical Sensor, and use lock-in amplifier that voltage signal is gathered;
Step 3: above-mentioned signal is input in the computing machine, through the image and the data file of computing output piezoelectric constant loop line and dielectric constant loop.
4. the method for measurement ferroelectric material piezoelectric constant loop line according to claim 3 and dielectric constant loop is characterized in that, the about 1 μ F of the capacitance of said standard capacitance two is much larger than the electric capacity of testing sample.
5. the method for measurement ferroelectric material piezoelectric constant loop line according to claim 3 and dielectric constant loop is characterized in that, per step of DC voltage that said dc high-voltage source produces is spaced apart 50V-200V, and the application time of DC voltage is 2s-8s.
6. the method for measurement ferroelectric material piezoelectric constant loop line according to claim 3 and dielectric constant loop is characterized in that said AC power comprises AC signal generator and ac signal amplifiers.
7. the method for measurement ferroelectric material piezoelectric constant loop line according to claim 6 and dielectric constant loop; It is characterized in that; Said AC signal generator produces alternating voltage 1V-5V, and frequency is 100Hz-2kHz, and amplifying the back voltage range through ac signal amplifiers is 10V-200V.
8. the method for measurement ferroelectric material piezoelectric constant loop line according to claim 3 and dielectric constant loop is characterized in that the Measuring Time cycle of said piezoelectric constant loop line or dielectric constant loop is 500s-800s.
9. the method for measurement ferroelectric material piezoelectric constant loop line according to claim 3 and dielectric constant loop is characterized in that, the Sawyer-Tower circuit is adopted in the measurement of said specific inductive capacity.
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| CN102323495B (en) * | 2011-05-27 | 2013-07-03 | 清华大学 | Device and method for measuring polarization reversal curve of ferroelectric material |
| CN102662111B (en) * | 2012-05-25 | 2014-10-15 | 电子科技大学 | Piezoelectric coefficient detection method |
| CN104101792A (en) * | 2013-04-11 | 2014-10-15 | 中国科学院上海硅酸盐研究所 | Ferroelectric material ferroelectricity and ferroelasticity measuring system and method under force field, electric field and thermal field |
| CN109212320B (en) * | 2017-06-30 | 2020-09-22 | 北京航空航天大学 | Device and method for measuring dielectric constant of composite material under stress action |
| CN109443230B (en) * | 2018-12-17 | 2021-01-12 | 东莞理工学院 | Piezoelectric ceramic measuring system based on image processing |
| CN110244112A (en) * | 2019-06-19 | 2019-09-17 | 佛山科学技术学院 | A kind of measuring device and measuring method of time domain dielectric material polarization transient state |
| CN111044579A (en) * | 2020-01-01 | 2020-04-21 | 中国海洋大学 | Self-sensing piezoelectric patch circuit and piezoelectric patch excitation and echo signal calculation method |
| CN113419118B (en) * | 2021-04-23 | 2022-08-09 | 西安交通大学 | Device and method for measuring piezoelectric coefficient under uniaxial depression of ferroelectric crystal |
| CN113176455A (en) * | 2021-04-23 | 2021-07-27 | 西安交通大学 | Device and method for measuring piezoelectric performance parameters of ferroelectric crystal under strong electric field |
| CN113740685A (en) * | 2021-09-23 | 2021-12-03 | 南京尚华电力科技有限公司 | Ring main unit partial discharge detection method based on coupling capacitance technology |
| CN115327233B (en) * | 2022-09-06 | 2024-02-09 | 乌镇实验室 | Piezoelectric resonance impedance measurement system |
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