CN103528575B - 三维amrmems三轴磁力计结构以及磁力计 - Google Patents
三维amrmems三轴磁力计结构以及磁力计 Download PDFInfo
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- CN103528575B CN103528575B CN201310492897.XA CN201310492897A CN103528575B CN 103528575 B CN103528575 B CN 103528575B CN 201310492897 A CN201310492897 A CN 201310492897A CN 103528575 B CN103528575 B CN 103528575B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C17/00—Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
- G01C17/02—Magnetic compasses
- G01C17/28—Electromagnetic compasses
- G01C17/32—Electron compasses
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CN201310492897.XA CN103528575B (zh) | 2013-10-18 | 2013-10-18 | 三维amrmems三轴磁力计结构以及磁力计 |
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CN201310492897.XA CN103528575B (zh) | 2013-10-18 | 2013-10-18 | 三维amrmems三轴磁力计结构以及磁力计 |
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CN103528575A CN103528575A (zh) | 2014-01-22 |
CN103528575B true CN103528575B (zh) | 2017-07-11 |
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CN201310492897.XA Active CN103528575B (zh) | 2013-10-18 | 2013-10-18 | 三维amrmems三轴磁力计结构以及磁力计 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104176698B (zh) * | 2014-08-27 | 2016-02-03 | 上海华虹宏力半导体制造有限公司 | 集成mems器件及其制作方法 |
CN105527589B (zh) * | 2014-09-29 | 2019-02-19 | 硕英股份有限公司 | 磁力计 |
CN104485415B (zh) * | 2014-12-25 | 2018-03-06 | 上海华虹宏力半导体制造有限公司 | 各向异性磁阻结构 |
CN104900801A (zh) * | 2015-04-23 | 2015-09-09 | 美新半导体(无锡)有限公司 | 一种反铁磁钉扎各向异性磁电阻(amr)传感器 |
CN105070825B (zh) * | 2015-08-11 | 2017-10-27 | 上海华虹宏力半导体制造有限公司 | 平衡z轴灵敏度和稳定性的3轴各向异性磁阻及其制备方法 |
CN109752677A (zh) * | 2019-01-10 | 2019-05-14 | 东南大学 | 一种双电桥式薄膜磁阻传感器 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102116851A (zh) * | 2009-12-10 | 2011-07-06 | 意法半导体股份有限公司 | 以mems技术制造的半导体材料的集成三轴磁力计 |
CN103261905A (zh) * | 2010-12-23 | 2013-08-21 | 意法半导体股份有限公司 | 集成磁阻传感器,特别是三轴磁阻传感器及其制造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4984408B2 (ja) * | 2005-03-17 | 2012-07-25 | ヤマハ株式会社 | 磁気センサおよびその製法 |
US7509748B2 (en) * | 2006-09-01 | 2009-03-31 | Seagate Technology Llc | Magnetic MEMS sensors |
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- 2013-10-18 CN CN201310492897.XA patent/CN103528575B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102116851A (zh) * | 2009-12-10 | 2011-07-06 | 意法半导体股份有限公司 | 以mems技术制造的半导体材料的集成三轴磁力计 |
CN103261905A (zh) * | 2010-12-23 | 2013-08-21 | 意法半导体股份有限公司 | 集成磁阻传感器,特别是三轴磁阻传感器及其制造方法 |
Non-Patent Citations (1)
Title |
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各向异性磁电阻传感器Barber电极的优化设计;陈雁等;《传感器与微***》;20061231;第25卷(第12期);第62-64页 * |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140626 |
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Effective date of registration: 20140626 Address after: 201203 Shanghai Zhangjiang hi tech park Zuchongzhi Road No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai Guo Shou Jing Road, Pudong New Area Zhangjiang hi tech Park No. 818 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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