CN103526156A - 成膜装置及成膜装置用传送托盘 - Google Patents
成膜装置及成膜装置用传送托盘 Download PDFInfo
- Publication number
- CN103526156A CN103526156A CN201310263451.XA CN201310263451A CN103526156A CN 103526156 A CN103526156 A CN 103526156A CN 201310263451 A CN201310263451 A CN 201310263451A CN 103526156 A CN103526156 A CN 103526156A
- Authority
- CN
- China
- Prior art keywords
- substrate
- delivery tray
- deposition system
- film deposition
- driven roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/06—Roller driving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/6723—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one plating chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-151666 | 2012-07-05 | ||
JP2012151666A JP2014015633A (ja) | 2012-07-05 | 2012-07-05 | 成膜装置、及び成膜装置用搬送トレイ |
Publications (1)
Publication Number | Publication Date |
---|---|
CN103526156A true CN103526156A (zh) | 2014-01-22 |
Family
ID=49928498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310263451.XA Pending CN103526156A (zh) | 2012-07-05 | 2013-06-27 | 成膜装置及成膜装置用传送托盘 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2014015633A (ko) |
KR (1) | KR101511179B1 (ko) |
CN (1) | CN103526156A (ko) |
TW (1) | TW201404914A (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110257793A (zh) * | 2019-07-04 | 2019-09-20 | 深圳市捷佳伟创新能源装备股份有限公司 | 倾斜运输托盘的镀膜设备 |
CN110352481A (zh) * | 2017-03-08 | 2019-10-18 | 朗姆研究公司 | 无螺栓衬底支撑件组件 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7041702B2 (ja) * | 2020-03-05 | 2022-03-24 | キヤノントッキ株式会社 | 基板ホルダ、基板処理装置及び成膜装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100564577C (zh) * | 2005-01-05 | 2009-12-02 | 三星移动显示器株式会社 | 用于传送托盘的装置 |
CN102031486A (zh) * | 2009-09-29 | 2011-04-27 | 株式会社日立高新技术 | 有机el器件制造装置及有机el器件制造方法以及成膜装置及成膜方法 |
JP2012072478A (ja) * | 2010-09-30 | 2012-04-12 | Canon Tokki Corp | 成膜装置 |
US20120112406A1 (en) * | 2010-11-09 | 2012-05-10 | Canon Kabushiki Kaisha | Sheet conveying apparatus and image forming apparatus |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100567681B1 (ko) * | 2003-01-06 | 2006-04-07 | 이근종 | 가구용 서랍안내레일 |
JP4331707B2 (ja) * | 2004-12-16 | 2009-09-16 | 三星モバイルディスプレイ株式會社 | 整列システム、垂直型トレイ移送装置及びこれを具備した蒸着装置 |
JP2006191039A (ja) * | 2005-01-05 | 2006-07-20 | Samsung Sdi Co Ltd | トレイ移送装置 |
CN101641272B (zh) * | 2007-04-16 | 2011-11-16 | 株式会社爱发科 | 输送机和成膜装置及其维护方法 |
KR101288599B1 (ko) * | 2007-05-29 | 2013-07-22 | 엘지디스플레이 주식회사 | 기판 이송 장치 |
-
2012
- 2012-07-05 JP JP2012151666A patent/JP2014015633A/ja active Pending
-
2013
- 2013-04-08 TW TW102112355A patent/TW201404914A/zh unknown
- 2013-04-10 KR KR20130039170A patent/KR101511179B1/ko not_active IP Right Cessation
- 2013-06-27 CN CN201310263451.XA patent/CN103526156A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100564577C (zh) * | 2005-01-05 | 2009-12-02 | 三星移动显示器株式会社 | 用于传送托盘的装置 |
CN102031486A (zh) * | 2009-09-29 | 2011-04-27 | 株式会社日立高新技术 | 有机el器件制造装置及有机el器件制造方法以及成膜装置及成膜方法 |
JP2012072478A (ja) * | 2010-09-30 | 2012-04-12 | Canon Tokki Corp | 成膜装置 |
US20120112406A1 (en) * | 2010-11-09 | 2012-05-10 | Canon Kabushiki Kaisha | Sheet conveying apparatus and image forming apparatus |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110352481A (zh) * | 2017-03-08 | 2019-10-18 | 朗姆研究公司 | 无螺栓衬底支撑件组件 |
CN110352481B (zh) * | 2017-03-08 | 2023-04-28 | 朗姆研究公司 | 无螺栓衬底支撑件组件 |
CN110257793A (zh) * | 2019-07-04 | 2019-09-20 | 深圳市捷佳伟创新能源装备股份有限公司 | 倾斜运输托盘的镀膜设备 |
Also Published As
Publication number | Publication date |
---|---|
TW201404914A (zh) | 2014-02-01 |
KR20140005761A (ko) | 2014-01-15 |
JP2014015633A (ja) | 2014-01-30 |
KR101511179B1 (ko) | 2015-04-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140122 |