CN103526156A - 成膜装置及成膜装置用传送托盘 - Google Patents

成膜装置及成膜装置用传送托盘 Download PDF

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Publication number
CN103526156A
CN103526156A CN201310263451.XA CN201310263451A CN103526156A CN 103526156 A CN103526156 A CN 103526156A CN 201310263451 A CN201310263451 A CN 201310263451A CN 103526156 A CN103526156 A CN 103526156A
Authority
CN
China
Prior art keywords
substrate
delivery tray
deposition system
film deposition
driven roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310263451.XA
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English (en)
Chinese (zh)
Inventor
饭尾逸史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of CN103526156A publication Critical patent/CN103526156A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B65G13/06—Roller driving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H01L21/6723—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one plating chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201310263451.XA 2012-07-05 2013-06-27 成膜装置及成膜装置用传送托盘 Pending CN103526156A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-151666 2012-07-05
JP2012151666A JP2014015633A (ja) 2012-07-05 2012-07-05 成膜装置、及び成膜装置用搬送トレイ

Publications (1)

Publication Number Publication Date
CN103526156A true CN103526156A (zh) 2014-01-22

Family

ID=49928498

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310263451.XA Pending CN103526156A (zh) 2012-07-05 2013-06-27 成膜装置及成膜装置用传送托盘

Country Status (4)

Country Link
JP (1) JP2014015633A (ko)
KR (1) KR101511179B1 (ko)
CN (1) CN103526156A (ko)
TW (1) TW201404914A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110257793A (zh) * 2019-07-04 2019-09-20 深圳市捷佳伟创新能源装备股份有限公司 倾斜运输托盘的镀膜设备
CN110352481A (zh) * 2017-03-08 2019-10-18 朗姆研究公司 无螺栓衬底支撑件组件

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7041702B2 (ja) * 2020-03-05 2022-03-24 キヤノントッキ株式会社 基板ホルダ、基板処理装置及び成膜装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100564577C (zh) * 2005-01-05 2009-12-02 三星移动显示器株式会社 用于传送托盘的装置
CN102031486A (zh) * 2009-09-29 2011-04-27 株式会社日立高新技术 有机el器件制造装置及有机el器件制造方法以及成膜装置及成膜方法
JP2012072478A (ja) * 2010-09-30 2012-04-12 Canon Tokki Corp 成膜装置
US20120112406A1 (en) * 2010-11-09 2012-05-10 Canon Kabushiki Kaisha Sheet conveying apparatus and image forming apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100567681B1 (ko) * 2003-01-06 2006-04-07 이근종 가구용 서랍안내레일
JP4331707B2 (ja) * 2004-12-16 2009-09-16 三星モバイルディスプレイ株式會社 整列システム、垂直型トレイ移送装置及びこれを具備した蒸着装置
JP2006191039A (ja) * 2005-01-05 2006-07-20 Samsung Sdi Co Ltd トレイ移送装置
CN101641272B (zh) * 2007-04-16 2011-11-16 株式会社爱发科 输送机和成膜装置及其维护方法
KR101288599B1 (ko) * 2007-05-29 2013-07-22 엘지디스플레이 주식회사 기판 이송 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100564577C (zh) * 2005-01-05 2009-12-02 三星移动显示器株式会社 用于传送托盘的装置
CN102031486A (zh) * 2009-09-29 2011-04-27 株式会社日立高新技术 有机el器件制造装置及有机el器件制造方法以及成膜装置及成膜方法
JP2012072478A (ja) * 2010-09-30 2012-04-12 Canon Tokki Corp 成膜装置
US20120112406A1 (en) * 2010-11-09 2012-05-10 Canon Kabushiki Kaisha Sheet conveying apparatus and image forming apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110352481A (zh) * 2017-03-08 2019-10-18 朗姆研究公司 无螺栓衬底支撑件组件
CN110352481B (zh) * 2017-03-08 2023-04-28 朗姆研究公司 无螺栓衬底支撑件组件
CN110257793A (zh) * 2019-07-04 2019-09-20 深圳市捷佳伟创新能源装备股份有限公司 倾斜运输托盘的镀膜设备

Also Published As

Publication number Publication date
TW201404914A (zh) 2014-02-01
KR20140005761A (ko) 2014-01-15
JP2014015633A (ja) 2014-01-30
KR101511179B1 (ko) 2015-04-10

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Application publication date: 20140122