CN103523744A - Two-stage grating positioning method of high-speed precise motion platform - Google Patents
Two-stage grating positioning method of high-speed precise motion platform Download PDFInfo
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- CN103523744A CN103523744A CN201310429648.6A CN201310429648A CN103523744A CN 103523744 A CN103523744 A CN 103523744A CN 201310429648 A CN201310429648 A CN 201310429648A CN 103523744 A CN103523744 A CN 103523744A
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Abstract
The invention discloses a two-stage grating positioning method of a high-speed precise motion platform. The two-stage grating positioning method comprises the following steps of providing position feedback signals by utilizing an incremental grating, and controlling a motor to carry out primary position feeding; switching the position feedback signals; carrying out closed-loop control by utilizing the position feedback signals of an absolute grating. According to the two-stage grating positioning method of the high-speed precise motion platform, by utilizing the combination and switching control of the incremental grating and the absolute grating, the high-precision positioning under the high-speed control of a macro-micro motion platform is realized, and the contradiction between the large-stroke high-speed motion and high-precision positioning of the motion platform is solved.
Description
Technical field
The invention belongs to microelectronic manufacturing technology field, relate in particular to a kind of two-stage grating positioning method of high speed and precision motion platform.
Background technology
The characteristic feature of microelectronics manufacturing equipment is: realize at a high speed the conversion of locating with high acceleration, large stroke reciprocating and frequent start-stop, need to when realizing high speed, High acceleration motion, realize high-accuracy location, the contradiction of precision and speed is the paradox that high-end equipment is manufactured always, is also the technical bottleneck that current microelectronics equipment is manufactured.In existing navigation system, applying feedback tool is more widely increment type grating scale; when carrying out high-speed motion; conventionally can utilize its high response frequency and adopt the grating of low resolution to realize quick location, absolute grating has the characteristic that motion platform position signal can be read in optional position at any time.
That existing technology cannot realize high speed, high acceleration, large stroke motion and precision positioning and deposit.Increment type grating is because increment type grating is when the high-speed motion, the frequency of signals collecting has certain restriction, when high-resolution, its response frequency is not high, therefore only when compared with low-speed motion, increment type grating just may be realized hi-Fix, and increment type grating must return initial point when initial motion, under step loss condition, will make whole measurement result incorrect.Absolute grating has optional position at any time can read motion platform position signal, but under high-speed motion condition, its response frequency also can affect positioning precision.
Summary of the invention
The object of the present invention is to provide a kind of two-stage grating positioning method of high speed and precision motion platform, by combination and the switching controls of increment grating and absolute grating, be intended to solve the large travel high-speed motion of motion platform and the contradiction of hi-Fix, realize the hi-Fix under macro/micromotion platform high-speed motion.
The present invention is achieved in that a kind of two-stage grating positioning method of high speed and precision motion platform comprises the following steps:
By increment grating, provide position feed back signal, control motor and carry out primary position feeding;
Switching position feedback signal;
Adopt the position feed back signal of absolute grating to carry out closed-loop control.
Further, the concrete steps of the two-stage grating positioning method of this high speed and precision motion platform are as follows:
The first step, platform, in motion process, is controlled motor by industrial computer by the signal of telecommunication and is carried out high-speed motion, and position feed back signal is provided by increment grating, controls motor carry out elementary position feeding by the position signalling of closed loop.
Second step, when feeding has originally arrived a predefined error threshold, platform slows down, switching position feedback signal, position feed back signal is transferred to the absolute position signal of absolute grating reading by increment grating.
The 3rd step, platform slows down, and absolute grating is realized high-precision position closed loop by high resolution model and is fed back, and makes platform realize the precision positioning of Subnano-class.
Further, when user needs platform to move to specific displacement L, by industrial computer, input L, and complete corresponding Electric Machine Control; First industrial computer extracts the position signalling L of motor
1compare computing with user's target stroke L, use closed loop control algorithm to carry out motion control to motor, wherein closed loop position signalling is provided by increment grating reading head; Now the increment grating of motor is to carry out closed loop feedback control with high response frequency pattern; Work as L-L
1when the condition of <=δ is set up, namely motor completes just location, starts to switch feedback signal and carries out micromotion and location; If the stroke of micromotion is Δ, and require increment grating position error δ should be less than the stroke Δ of micromotion; During switching, position feed back signal is transferred to the absolute position signal of absolute grating reading by increment grating; Now platform slows down, and absolute grating is realized high-precision position closed loop by high resolution model and fed back, and makes platform realize the precision positioning of Subnano-class, and positioning precision error is controlled in the scope of E.
The present invention is by combination and the switching controls of increment type grating and absolute grating, realize the hi-Fix under macro/micromotion platform high-speed motion, solve the large travel high-speed motion of motion platform and the contradiction of hi-Fix, realized the hi-Fix under macro/micromotion platform high-speed motion.
Accompanying drawing explanation
Fig. 1 is the flow chart of the two-stage grating positioning method of the high speed and precision motion platform that provides of the embodiment of the present invention.
Fig. 2 is the fundamental diagram of the two-stage grating positioning method of the high speed and precision motion platform that provides of the embodiment of the present invention.
Fig. 3 is the grating signal processing figure that the embodiment of the present invention provides.
In figure: L, movement travel L1, increment grating positioning real time position P, absolute grating location real time position Δ, micromotion stroke E, final positioning precision δ,
Increment grating position error δ < Δ.
The specific embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Fig. 1 shows the flow process of the two-stage grating positioning method of a kind of high speed and precision motion platform that present case provides.For convenience of explanation, only show the part relevant to present case.
The present invention is achieved in that a kind of two-stage grating positioning method of high speed and precision motion platform comprises the following steps:
By increment grating, provide position feed back signal, control motor and carry out primary position feeding;
Switching position feedback signal;
Adopt the position feed back signal of absolute grating to carry out closed-loop control.
Further, the concrete steps of the two-stage grating positioning method of this high speed and precision motion platform are as follows:
The first step, platform, in motion process, is controlled motor by industrial computer by the signal of telecommunication and is carried out high-speed motion, and position feed back signal is provided by increment grating, controls motor carry out elementary position feeding by the position signalling of closed loop.
Second step, when feeding has originally arrived a predefined error threshold, platform slows down, switching position feedback signal, position feed back signal is transferred to the absolute position signal of absolute grating reading by increment grating.
The 3rd step, platform slows down, and absolute grating is realized high-precision position closed loop by high resolution model and is fed back, and makes platform realize the precision positioning of Subnano-class.
Below in conjunction with drawings and the specific embodiments, application principle of the present invention is further described.
As shown in Figure 1, a kind of two-stage grating positioning method of high speed and precision motion platform comprises the following steps:
S101: provide position feed back signal by increment grating, control motor and carry out primary position feeding;
S102: switching position feedback signal;
S103: adopt the position feed back signal of absolute grating to carry out closed-loop control.
As shown in Figure 2, the concrete steps of the two-stage grating positioning method of this high speed and precision motion platform are as follows:
The first step, platform, in motion process, is controlled motor by industrial computer by the signal of telecommunication and is carried out high-speed motion, and position feed back signal is provided by increment grating, controls motor carry out elementary position feeding by the position signalling of closed loop.
Second step, when feeding has originally arrived a predefined error threshold, platform slows down, switching position feedback signal, position feed back signal is transferred to the absolute position signal of absolute grating reading by increment grating.
The 3rd step, platform slows down, and absolute grating is realized high-precision position closed loop by high resolution model and is fed back, and makes platform realize the precision positioning of Subnano-class.
Fig. 3 is the grating signal processing figure that the embodiment of the present invention provides, as shown in the figure, a kind of two-stage grating positioning method of high speed and precision motion platform is achieved in that when user needs platform to move to specific displacement L, by industrial computer, input L, and complete corresponding Electric Machine Control.First industrial computer extracts the position signalling L of motor
1compare computing with user's target stroke L, use closed loop control algorithm to carry out motion control to motor, wherein closed loop position signalling is provided by increment grating reading head.Now the increment grating of motor is to carry out closed loop feedback control with high response frequency pattern.Work as L-L
1when the condition of <=δ (δ is increment grating position error) is set up, namely motor completes just location, starts to switch feedback signal and carries out micromotion and location.If the stroke of micromotion is Δ, and require increment grating position error δ should be less than the stroke Δ of micromotion.During switching, position feed back signal is transferred to the absolute position signal of absolute grating reading by increment grating.Now platform slows down, and absolute grating is realized high-precision position closed loop by high resolution model and fed back, and makes platform realize the precision positioning of Subnano-class, and positioning precision error is controlled in the scope of E.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (3)
1. a two-stage grating positioning method for high speed and precision motion platform, is characterized in that, the two-stage grating positioning method of described high speed and precision motion platform comprises the following steps: by increment grating, provide position feed back signal, control motor and carry out primary position feeding; Switching position feedback signal; Adopt the position feed back signal of absolute grating to carry out closed-loop control.
2. the two-stage grating positioning method of high speed and precision motion platform as claimed in claim 1, is characterized in that, the two-stage grating positioning method concrete steps of described high speed and precision motion platform are as follows:
The first step, platform, in motion process, is controlled motor by industrial computer by the signal of telecommunication and is carried out high-speed motion, and position feed back signal is provided by increment grating, controls motor carry out elementary position feeding by the position signalling of closed loop;
Second step, when feeding has arrived predefined error threshold originally, platform slows down, switching position feedback signal, position feed back signal is transferred to the absolute position signal of absolute grating reading by increment grating;
The 3rd step, platform slows down, and absolute grating is realized high-precision position closed loop by high resolution model and is fed back, and makes platform realize the precision positioning of Subnano-class.
3. the two-stage grating positioning method of high speed and precision motion platform as claimed in claim 1, is characterized in that, when user needs platform to move to specific displacement L, by industrial computer, inputs L, and completes corresponding Electric Machine Control; First industrial computer extracts the position signalling L of motor
1compare computing with user's target stroke L, use closed loop control algorithm to carry out motion control to motor, wherein closed loop position signalling is provided by increment grating reading head; Now the increment grating of motor is to carry out closed loop feedback control with high response frequency pattern; Work as L-L
1when the condition of <=δ is set up, namely motor completes just location, starts to switch feedback signal and carries out micromotion and location; If the stroke of micromotion is Δ, and require increment grating position error δ should be less than the stroke Δ of micromotion; During switching, position feed back signal is transferred to the absolute position signal of absolute grating reading by increment grating; Now platform slows down, and absolute grating is realized high-precision position closed loop by high resolution model and fed back, and makes platform realize the precision positioning of Subnano-class, and positioning precision error is controlled in the scope of E.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103978392A (en) * | 2014-05-20 | 2014-08-13 | 广东工业大学 | Micro-feeding device with adjustable rigidity frequency based on mobile support |
| CN110057392A (en) * | 2019-05-31 | 2019-07-26 | 中国航发湖南动力机械研究所 | Calibration system for current vortex sensor |
| CN112548598A (en) * | 2020-12-03 | 2021-03-26 | 佛山市华道超精科技有限公司 | Mode switching rigid-flexible coupling motion platform and control method |
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| CN201325768Y (en) * | 2008-09-28 | 2009-10-14 | 江苏天奇物流***工程股份有限公司 | Accurately locating device of fork lifter |
| CN102629122A (en) * | 2012-04-17 | 2012-08-08 | 中国科学院光电技术研究所 | Long-stroke high-speed dual-drive nano positioning system |
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| CN1921026A (en) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子***技术有限公司 | Micromotion platform with X-Y-theta three degree of freedom |
| CN101261455A (en) * | 2008-04-17 | 2008-09-10 | 上海微电子装备有限公司 | Device and method for photo-etching machine focusing system performance evaluation |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103978392A (en) * | 2014-05-20 | 2014-08-13 | 广东工业大学 | Micro-feeding device with adjustable rigidity frequency based on mobile support |
| CN103978392B (en) * | 2014-05-20 | 2016-08-24 | 广东工业大学 | Micro-feeding device based on the mobile rigidity frequency-adjustable supported |
| CN110057392A (en) * | 2019-05-31 | 2019-07-26 | 中国航发湖南动力机械研究所 | Calibration system for current vortex sensor |
| CN112548598A (en) * | 2020-12-03 | 2021-03-26 | 佛山市华道超精科技有限公司 | Mode switching rigid-flexible coupling motion platform and control method |
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