CN103502650B - The method for controlling of operation of vacuum pump, vacuum pumping hardware and vacuum pump - Google Patents
The method for controlling of operation of vacuum pump, vacuum pumping hardware and vacuum pump Download PDFInfo
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- CN103502650B CN103502650B CN201280011595.XA CN201280011595A CN103502650B CN 103502650 B CN103502650 B CN 103502650B CN 201280011595 A CN201280011595 A CN 201280011595A CN 103502650 B CN103502650 B CN 103502650B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
- F04D15/0066—Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/03—Torque
- F04C2270/035—Controlled or regulated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/05—Speed
- F04C2270/051—Controlled or regulated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/86—Detection
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides the method for controlling of operation of a kind of vacuum pump at stable exhaust event of can not lacking of proper care, can realize, vacuum pumping hardware and vacuum pump.Vacuum pump has: rotor (21,22); Drive motor (35); Magnetic coupling (50), it transmits the rotatory force of described drive motor to described rotor with the 1st threshold value (Th1) driving torque below.The method for controlling of operation of this vacuum pump is: when described load torque be 2nd threshold value (Th2) less than described 1st threshold value (Th1) below time, increase the rotating speed of described drive motor (35), when described load torque exceed described 2nd threshold value (Th2) and for described 1st threshold value (Th1) below time, reduce the rotating speed of described drive motor (35).
Description
Technical field
The present invention relates to a kind of method for controlling of operation of the vacuum pump, vacuum pumping hardware and the vacuum pump that use magnetic coupling to carry out transmission of drive force.
Background technique
Mechanical booster pump is variable displacement vacuum pump, that is, by make to be configured in two cocoon type rotors in housing all in the opposite direction synchronous axial system gas is carried to relief opening by suction port.In mechanical booster pump, owing to not contacting between two rotors and between each rotor and housing, the mechanical injuries thus caused are considerably less, such as, compared with the vacuum pump that the abrasive action as oily rotary vacuum pump is larger, this mechanical booster pump has the advantage that can reduce and drive institute's energy requirement.
In mechanical booster pump, due to for receive fill two rotors pump chamber in do not need lubricant oil, the vacuum pollution thus caused by lubricant oil is less.In addition, when pump operates, in order to the center of the axle of the rotation phase and each rotor that maintain two rotors all the time exactly, need for making the gear of each rotor synchronous axial system and lubricating for the bearing etc. of the rotating shaft of supporting each rotor.Therefore, in the gear chamber for receiving dress said gear, stockpiling lubricant oil in advance, when pump operates, each portion being lubricated.
But the rising of exhaust ports pressure may make air be revealed to the motor chamber receiving dress motor by housing, or produces the phenomenon of shaft seal leakage of oil.Such problem drives the initial stage at pump, is especially being exhausted vacuum chamber, easily produces when making it become vacuum by barometric pressure.Therefore, there has been proposed following a kind of vacuum pump: divide between enclosure interior and motor chamber, motor is connected by magnetic coupling with rotor, thus guarantee the tightness (such as with reference to following patent documentation 1) between enclosure interior and motor chamber.
Flat No. 6-185483 of [patent documentation 1] Japanese invention Patent Publication No
But, in the mechanical booster pump with magnetic coupling arrangement, when load torque is excessive, then can produce magnetic coupled condition between motor and rotor by the phenomenon (imbalance) removed.When there is imbalance, due to normal pump action can not be carried out, thus needing pump action is temporarily stopped, again pump being restarted afterwards.Therefore, when imbalance occurs repeatedly, need to take a long time to by the bleeding of vent systems (exhaust object).
Summary of the invention
In view of the foregoing, the object of the invention is to, provide a kind of and can not lack of proper care, can realize the method for controlling of operation of the vacuum pump of stable exhaust event, vacuum pumping hardware and vacuum pump.
In order to reach above-mentioned purpose, the vacuum pump involved by a technological scheme of the present invention has: pump housing portion, drive portion, magnetic coupling, controller.
Said pump body has: pump chamber, and it has suction port and relief opening; Rotor, it is configured in above-mentioned pump chamber, is used for gas to carry from above-mentioned suction port to above-mentioned relief opening.
Above-mentioned drive portion has: motor chamber, its adjacent above-mentioned pump chamber; Drive motor, it is configured in above-mentioned pump chamber, is used for driving above-mentioned rotor turns.
Above-mentioned magnetic coupling has partition member, the 1st magnet, the 2nd magnet.Above-mentioned partition member is for dividing above-mentioned pump chamber and said motor room and making both keep tightness.Above-mentioned 1st magnet is arranged on above-mentioned rotor.Above-mentioned 2nd magnet is arranged on above-mentioned drive motor, is connected with above-mentioned 1st magnet magnetic by above-mentioned partition member.Above-mentioned magnetic coupling transmits the rotatory force of above-mentioned drive motor to above-mentioned rotor with the driving torque below the 1st threshold value.
Above-mentioned controller has detection unit, rotates control device.Above-mentioned detection unit is for detecting the load torque of above-mentioned drive motor.Above-mentioned rotation control device is for controlling the rotating speed of above-mentioned drive motor.Time below the 2nd threshold value that above-mentioned load torque is less than above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor increase, when above-mentioned load torque exceedes above-mentioned 2nd threshold value and is below above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor reduce.
Vacuum pumping hardware involved by a technological scheme of the present invention has the 1st vacuum pump, the 2nd vacuum pump, controller.
Above-mentioned 1st vacuum pump has pump chamber, rotor, drive motor, magnetic coupling.Above-mentioned pump chamber has suction port and relief opening.Above-mentioned rotor configuration is indoor in said pump, for being carried to above-mentioned relief opening by above-mentioned suction port by gas.Above-mentioned magnetic coupling transmits the rotatory force of above-mentioned drive motor to above-mentioned rotor with the driving torque below the 1st threshold value.
Above-mentioned 2nd vacuum pump is for discharging the gas be transported in above-mentioned relief opening.
Above-mentioned controller has detection unit and rotates control device.Above-mentioned detection unit is for detecting the load torque of above-mentioned drive motor.Above-mentioned rotation control device is for controlling the rotating speed of above-mentioned drive motor.Time below the 2nd threshold value that above-mentioned load torque is less than above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor increase, when above-mentioned load torque exceedes above-mentioned 2nd threshold value and is below above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor reduce.
The method for controlling of operation of the vacuum pump involved by a technological scheme of the present invention is: vacuum pump has: rotor; Drive motor; Magnetic coupling, it transmits the rotatory force of above-mentioned drive motor to above-mentioned rotor with the driving torque below the 1st threshold value.
Above-mentioned method for controlling of operation comprises: the load torque detecting said motor,
Time below the 2nd threshold value that above-mentioned load torque is less than above-mentioned 1st threshold value, the rotating speed of above-mentioned drive motor is increased.
When above-mentioned load torque exceedes above-mentioned 2nd threshold value and is below above-mentioned 1st threshold value, the rotating speed of above-mentioned drive motor is reduced.
Accompanying drawing explanation
Fig. 1 is for representing the schematic configuration diagram of the vacuum pumping hardware involved by an embodiment of the invention.
Fig. 2 is for representing the schematic sectional view of the vacuum pump involved by an embodiment of the invention.
Fig. 3 is the sectional view of the concrete structure in the pump housing portion representing above-mentioned vacuum pump.
Fig. 4 is the flow chart of the method for controlling of operation that above-mentioned vacuum pump is described.
Fig. 5 is the sequential chart representing relation between the load torque of above-mentioned vacuum pump and motor rotary speed.
Fig. 6 is an experimental result of the time variations representing the rotation speed change of above-mentioned vacuum pump, air inlet side pressure and exhaust lateral pressure.
Embodiment
Vacuum pump involved by an embodiment of the invention has pump housing portion, drive portion, magnetic coupling, controller.
Said pump body has: pump chamber, and it has suction port and relief opening; Rotor, it is configured in above-mentioned pump chamber, is used for gas to carry from above-mentioned suction port to above-mentioned relief opening.
Above-mentioned drive portion has: motor chamber, its adjacent above-mentioned pump chamber; Drive motor, it is configured in above-mentioned pump chamber, is used for driving above-mentioned rotor turns.
Above-mentioned magnetic coupling has partition member, the 1st magnet, the 2nd magnet.Above-mentioned partition member is for dividing above-mentioned pump chamber and said motor room and making both keep tightness.Above-mentioned 1st magnet is arranged on above-mentioned rotor.Above-mentioned 2nd magnet is arranged on above-mentioned drive motor, is connected with above-mentioned 1st magnet magnetic by above-mentioned partition member.Above-mentioned magnetic coupling transmits the rotatory force of above-mentioned drive motor to above-mentioned rotor with the driving torque below the 1st threshold value.
Above-mentioned controller has detection unit, rotates control device.Above-mentioned detection unit is for detecting the load torque of above-mentioned drive motor.Above-mentioned rotation control device is for controlling the rotating speed of above-mentioned drive motor.Time below the 2nd threshold value that above-mentioned load torque is less than above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor increase, when above-mentioned load torque exceedes above-mentioned 2nd threshold value and is below above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor reduce.
In above-mentioned vacuum pump, drive motor transmits rotatory force with the driving torque below the 1st threshold value to rotor.1st threshold value is equivalent to the driving torque that can make drive motor and rotor synchronous axial system when magnetic coupling is not lacked of proper care.The imbalance of magnetic coupling occurs when the rotating load of rotor exceedes the rotating load of drive motor, such as, drive the initial stage at pump, easily occurs when the pressure (back pressure) of relief opening excessively rises.Above-mentioned vacuum pump sets the 1st threshold value and the 2nd threshold value for the load torque of drive motor, controls the rotating speed of drive motor, thus magnetic coupling can not be made to lack of proper care, realizing stable exhaust event according to the size of the load torque detected.So such as can realize stable exhaust event under air is pressed onto regulation reduced pressure.
When above-mentioned load torque exceedes above-mentioned 1st threshold value, above-mentioned controller can make above-mentioned drive motor be in free rotary state.
When the load torque detected is more than the 1st threshold value, the possibility of magnetic coupling imbalance is larger.Therefore, in above-mentioned vacuum pump, when the load torque of drive motor is more than the 1st threshold value, intercept the excitation of drive motor, make it be in free rotary state by free-wheel.The de-synchronization state of magnetic coupling can be removed so as early as possible.
Vacuum pumping hardware involved by an embodiment of the invention has the 1st vacuum pump, the 2nd vacuum pump, controller.
Above-mentioned 1st vacuum pump has pump chamber, rotor, drive motor, magnetic coupling.Above-mentioned pump chamber has suction port and relief opening.Above-mentioned rotor configuration is indoor in said pump, for being carried from above-mentioned suction port to above-mentioned relief opening by gas.Above-mentioned magnetic coupling transmits the rotatory force of above-mentioned drive motor to above-mentioned rotor with the driving torque below the 1st threshold value.
Above-mentioned 2nd vacuum pump is for discharging the gas be transported in above-mentioned relief opening.
Above-mentioned controller has detection unit, rotates control device.Above-mentioned detection unit is for detecting the load torque of above-mentioned drive motor.Above-mentioned rotation control device is for controlling the rotating speed of above-mentioned drive motor.Time below the 2nd threshold value that above-mentioned load torque is less than above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor increase, when above-mentioned load torque exceedes above-mentioned 2nd threshold value and is below above-mentioned 1st threshold value, above-mentioned controller makes the rotating speed of above-mentioned drive motor reduce.
In above-mentioned vacuum pumping hardware, the 2nd vacuum pump has the function of the service pump of the back pressure for elimination (alleviation) the 1st vacuum pump.Comparatively typically, the air displacement of the 2nd vacuum pump is less than the air displacement of the 1st vacuum pump.Therefore, the 1st vacuum pump sets the 1st threshold value and the 2nd threshold value for the load torque of drive motor, controls the rotating speed of drive motor according to the size of the load torque detected.Magnetic coupling can be made like this to lack of proper care, realize stable exhaust event.
The method for controlling of operation of the vacuum pump involved by an embodiment of the invention is the method for controlling of operation of following vacuum pump, that is, this vacuum pump has: rotor; Drive motor; Magnetic coupling, it transmits the rotatory force of above-mentioned drive motor to above-mentioned rotor with the driving torque below the 1st threshold value.
Above-mentioned method for controlling of operation comprises the load torque detecting said motor,
Time below the 2nd threshold value that above-mentioned load torque is less than above-mentioned 1st threshold value, the rotating speed of above-mentioned drive motor increases,
When above-mentioned load torque exceedes above-mentioned 2nd threshold value and is below above-mentioned 1st threshold value, the rotating speed of above-mentioned drive motor reduces.
In the method for controlling of operation of above-mentioned vacuum pump, for load torque setting the 1st threshold value and the 2nd threshold value of drive motor, control the rotating speed of drive motor according to the size of the load torque detected.Can magnetic coupling can not be made to lack of proper care, realize stable exhaust event like this.
Below, with reference to accompanying drawing, the specific embodiment of the present invention is described.
Fig. 1 is for representing the structural representation of the vacuum pumping hardware involved by an embodiment of the invention.The vacuum pumping hardware 10 of present embodiment has the 1st vacuum pump 1 and the 2nd vacuum pump 11.
The suction port of the 1st vacuum pump 1 is connected on the C of chamber by vacuum valve V, and the relief opening of the 1st vacuum pump 1 is connected on the suction port of the 2nd vacuum pump 11.1st vacuum pump 1 plays a role as the main pump for discharge side C inner space gas, in the present embodiment, is made up of mechanical booster pump.In addition, the service pump that is exhausted as the back pressure for eliminating the 1st vacuum pump 1 of the 2nd vacuum pump 11 and playing a role.The kind of the 2nd vacuum pump 11 is not particularly limited, and such as, can use rotary pump, but in addition, also can use the dry vacuum pump such as diaphragm pump and vortex pump.
The following describes the concrete structure of the 1st vacuum pump 1.
Fig. 2 is the schematic sectional view of expression the 1st vacuum pump 1.Fig. 3 is the sectional view of the internal structure representing pump housing portion.In the various figures, X-axis direction and Y direction are illustrated respectively in mutually perpendicular both direction in horizontal plane, and Z-direction represents the vertical direction (gravitational direction) vertical with Y direction with X-axis direction.
1st vacuum pump 1 is made up of 1 mechanical booster pump.1st vacuum pump 1 has pump housing portion 2, drive portion 3, rotates transmission unit 4.
Pump housing portion 2 has the 1st housing 20 for the formation of pump chamber 23.1st housing 20 has the not shown suction port 201 of vacuum chamber of connection and the relief opening 202 of the pump-unit be connected thereafter (such as rotary pump).Suction port 201 is communicated with pump chamber 23 respectively with relief opening 202.Pump chamber 23 is by the 1st housing 20 and be arranged on the 1st housing 20 both sides and make pump chamber 23 keep bubble-tight partition wall 24,25 to delimit (formation).
Pump housing portion 2 has a pair rotor 21,22.Rotor 21,22 has the rotating shaft 210,220 extended with parastate along Y direction respectively.As shown in Figure 3, rotor 21,22 has the cross section of cocoon type, mutual neighbor configuration and being housed in pump chamber 23.Between this rotor 21,22, between rotor the 21,22 and the 1st housing 20, between rotor 21,22 and partition wall 24,25, maintain a little gap (such as 0.02 ~ 0.04mm) respectively.
Rotating shaft 210,220 is each passed through partition wall 24,25, in the one end part of rotating shaft 210,220 motor chamber 33 in drive portion 3.Further, the other end of rotating shaft 210,220 is arranged in the gear chamber 43 of rotating transmission unit 4.
Drive portion 3 has and is arranged on partition wall 24 and keeps bubble-tight 2nd housing 30.Motor chamber 33 is formed in the inside of the 2nd housing 30.Partition wall 24 by motor chamber 33 side be respectively arranged with for supporting shaft 210,220 rotate bearing 31 and shaft seal 32.
Motor chamber 33 is communicated with pump chamber 23 by the 1st exhaust passageway P1.Thus, motor chamber 33 can realize exhaust by the 1st exhaust passageway P1, when vacuum pump 1 operates, is consistent with the pressure in pump chamber 23.In the present embodiment, the 1st exhaust passageway P1 passes partition wall 24 along Y direction.
Drive portion 3 has the drive motor 35 for making the rotating shaft 210 of rotor 21 rotate.Drive motor 35 is fixed on the 2nd housing 30, and has the live axle 350 be connected with rotating shaft 210 by magnetic coupling 50.Drive motor 35 is such as made up of DC brushless electric machine, is controlled revolution or the rotational velocity of live axle 350 by controller described later.
Magnetic coupling 50 has: inner circumferential side magnet 51, and it in the form of a ring and be fixed on rotating shaft 210 around; Outer circumferential side magnet 52, it in the form of a ring and be fixed on live axle 350 is around connected by the magnetic between this magnet 51,52 and rotating shaft 210 and live axle 350 is interconnected.
Inner circumferential side magnet 51 is configured on the peripheral part of support unit 53, and this support unit 53 is fixed on the top of rotating shaft 210, and outer circumferential side magnet 52 is configured in the inner peripheral portion of support unit 54, and this support unit 54 is fixed on live axle 350.Inner circumferential side magnet 51 and outer circumferential side magnet 52 are oppositely disposed across partition member 55.The peripheral portion of partition member 55 keeps hermetic being fixed on the annular convex 30a on the inner peripheral surface being formed at the 2nd housing 30.The motor chamber 33 being configured with inner circumferential side magnet 51 and the atmospheric air chamber 34 being configured with outer circumferential side magnet 52 are separated by partition member 55.
Rotate transmission unit 4 and have the 3rd housing 40 be hermetic arranged on partition wall 25, gear chamber 43 is formed in the inside of the 3rd housing 40.Partition wall 25 by gear chamber 43 side be respectively arranged with for supporting shaft 210,220 rotate bearing 45 and shaft seal 46.
3rd housing 40 is for the formation of gear chamber 43, and this gear chamber 43 makes the gear mechanism of the mutual reverse synchronous axial system of rotor 21,22 for receiving dress.Said gear mechanism has: synchromesh gear 41, and it is fixed on the end of rotating shaft 210; Synchromesh gear 42, it is fixed on the end of rotating shaft 220.Like this, when namely rotating shaft 210 makes it rotate centered by its rotation axis in motor 35 drive shaft, the rotatory force of motor 35 passes to another the i.e. rotating shaft 220 in rotating shaft by synchromesh gear 41,42.Now, rotating shaft 220 and rotating shaft 210 reverse rotation.
The lubricant oil G for oilgear mechanism is retained in gear chamber 43.Being fixed with the oil mixing board 47 for stirring lubricant oil G on the top of synchromesh gear 41,42, being come to the supply such as synchromesh gear 41,42 and bearing 45 lubricant oil G by the rotation of synchromesh gear 41,42.Thus suitably rotate while making rotor 21,22 maintain its relative position.3rd housing 40 is provided with the window 44 of the amount retained for confirming the lubricant oil G in gear chamber 43.Further, gear chamber 43 being provided with sealing plate 48, its objective is to prevent dispersing because of the lubricant oil G caused by the rotation of synchromesh gear 41,42.Sealing plate 48 is roughly writing board shape and is arranged on partition wall 25, to cover the top of synchromesh gear 41,42.
Gear chamber 43 is connected with motor chamber 33 by the 2nd exhaust passageway P2.Gear chamber 43 can be made like this to realize exhaust by the 2nd exhaust passageway P2, when vacuum pump 1 operates, be consistent with the pressure in motor chamber 33 and pump chamber 23.
In the present embodiment, the 2nd exhaust passageway P2 makes gear chamber 43 be connected with motor chamber 33 by the 3rd housing 40, partition wall 25, the 1st housing 20 and partition wall 24.2nd exhaust passageway P2 is formed primarily of primary path portion P21 and connecting path portion P22, and this primary path portion P21 is along Y direction through partition wall 24,25, and this connecting path portion P22 is formed on the 3rd housing 40.In addition, also primary path portion P21 and motor chamber 33 can be interconnected by also forming identical connecting path portion on the 2nd housing 30.
1st vacuum pump 1 also has controller 60.Controller 60 has: detection unit 61, and it is for detecting the load torque of drive motor 35; Rotate control device 62, it is for controlling the rotating speed of drive motor 35.Controller 60 is comparatively typically made up of the computer with operational part, memory section etc., such as, can be combined into one with drive portion 3.
Detection unit 61 is for detecting the load torque of the drive motor 35 making rotor 21 rotate by magnetic coupling 50.The detecting method of load torque is not particularly limited, and can adopt the known method of people.Such as, by measuring the both end voltage of detection coil, can detect the load torque of drive motor 35, this detection coils connected in series is connected on the field coil of the stator of winding drive motor 35.
Rotate control device 62 for controlling the rotating speed of drive motor 35.The controlling method of rotating speed is not particularly limited, and comparatively typically, controls rotating speed by the induction electromotive force controlling motor.In the present embodiment, rotate control device 62 and there is frequency variator.The form of this frequency variator is also not particularly limited, such as, can adopt PWM(pulse duration modulation).
Controller 60 controls the rotating speed of drive motor 35 according to the Output rusults of detection unit 61.Namely, when the load torque of drive motor 35 be 2nd threshold value (Th2) less than the 1st threshold value (Th1) below time, controller 60 makes the rotating speed of drive motor 35 increase, in addition, when the load torque of drive motor 35 more than the 2nd threshold value (Th2) and be the 1st threshold value (Th1) below time, controller 60 makes the rotating speed of drive motor 35 reduce.
Here, the 1st threshold value (Th1) is the maximum drive torque of the drive motor 35 when rotor 21 can be rotated when not making magnetic coupling 50 that imbalance occurs.The imbalance of magnetic coupling 50 represents that inner circumferential side magnet 51 is connected with the magnetic of outer circumferential side magnet 52 and is removed, and can not make the state of the live axle 350 of drive motor 35 and rotating shaft 210 synchronous axial system of rotor 21.
1st threshold value is at the consideration magnetic coupling forces of magnetic coupling 50, the air displacement [Pa/m of the 1st vacuum pump 1
3/ s], the air displacement [Pa/m of the 2nd vacuum pump 11
3/ s], the basis of the operating pressure of the 1st vacuum pump 1 etc. determines.That is, change due to the rotating speed of load torque (imbalance moment of torsion) Yin Mada, the back pressure (pressure of exhaust side) of pump etc. when imbalance produces, therefore on the basis considering above-mentioned each condition, set the 1st threshold value (Th1).In the present embodiment, the 1st threshold value (Th1) is 0.8Nm.
2nd threshold value (Th2) is set to be less than the suitable value of the 1st threshold value (Th1).When the load torque of drive motor 35 be the 2nd threshold value (Th2) below time, controller 60 makes the rotating speed of drive motor 35 increase, when above-mentioned load torque more than the 2nd threshold value (Th2) and be the 1st threshold value (Th1) below time, controller 60 makes the rotating speed of drive motor 35 reduce.That is, in the present embodiment, by reducing the rotating speed of drive motor 35 with the 2nd threshold value (Th2) less than the 1st threshold value (Th1) for benchmark, reliably can prevent the imbalance of magnetic coupling 50, realizing stable exhaust event.2nd threshold value (Th2) can suitably set, and in the present embodiment, the 2nd threshold value (Th2) is 0.55Nm.
2nd threshold value (Th2) can be the rated torque of drive motor 35.Can effectively drive drive motor 35 thus, reduce power consumption.In addition, 2nd threshold value (Th2) is not limited to and is set to the value identical with the rated torque of drive motor 35, such as, on the basis considering the variation of the load torque under rated speed, the 2nd threshold value (Th2) can be set as the value of being a bit larger tham above-mentioned rated torque.
In addition, when the load torque of drive motor 35 is more than the 1st threshold value (Th1), controller 60 makes drive motor 35 be in free rotary state.When the load torque detected is more than the 1st threshold value, the possibility of magnetic coupling imbalance is larger.Therefore, in above-mentioned vacuum pump, when the load torque of drive motor is more than the 1st threshold value, cut off the excitation of drive motor, make it be in free rotary state by free-wheel.The de-synchronization state of magnetic coupling can be removed so ahead of time.
Below the action of the vacuum pumping hardware 10 of present embodiment is described.
Inside with reference to Fig. 1, chamber C is barometric pressure, and vacuum valve V is in open mode.In this condition, the 1st vacuum pump 1 and the 2nd vacuum pump 11 are driven simultaneously.
In the 1st vacuum pump 1, motor 35 operates, and by magnetic coupling 50, rotating shaft 210 is rotated together with live axle 350, thus drives the rotor 21 in pump chamber 23 to rotate.The rotatory force of rotating shaft 210 is rotating the rotating shaft 220 being delivered to rotor 22 in transmission unit 4, thus makes rotor 22 reverse rotation synchronous with rotor 21.Pump housing portion 2 is made to carry out the pump action of following regulation by the rotation of this rotor 21,22: the gas sucked by suction port 201 is discharged to relief opening 202.
Now, controller 60 makes drive motor 35 rotate with the 1st threshold value (Th1) driving torque below, transmits rotatory force by magnetic coupling 50 to rotor 21.1st threshold value (Th1) is equivalent to the driving torque that drive motor 35 and rotor 21 synchronous axial system do not occur can make when lacking of proper care at magnetic coupling 50.
Along with the reduction of the pressure of pump chamber 23, motor chamber 33 and gear chamber 43 is made to realize decompression by the 1st and the 2nd exhaust passageway P1, P2.Make the differential pressure between the motor chamber 33 of pump chamber 23 and adjacent pump chamber 23 and gear chamber 43 diminish thus, thus can prevent the reduction because of the pump performance caused by the pressure leakage in pump chamber 23.
When the 1st vacuum pump 1 drives, the 2nd vacuum pump 11 is driven all the time.2nd vacuum pump 11 for eliminating the back pressure of the 1st vacuum pump 1, that is, is exhausted the gas being transported to relief opening 202.
In the initial start stage of vacuum pumping hardware 10, the 1st vacuum pump 1 is exhausted the chamber C be under barometric pressure.Therefore, it is possible to make the pressure at relief opening 202 place of the 1st vacuum pump 1 reach more than barometric pressure.Now, although the back flow of gas in pump chamber 23 is to motor chamber 33, but separate due to partition member 55 pairs of motor chamber 33 sides of magnetic coupling 50 and drive motor 35 side and make it to keep tightness, therefore the lubricant oil being used in shaft seal etc. can not flow out to drive motor 35 side, thus can prevent oil leak from arriving outside pump.
In addition, in the initial start stage of vacuum pumping hardware 10, because the back pressure of the 1st vacuum pump 1 is comparatively large, thus make the rotating load of rotor 21 be greater than the rotating load of drive motor 35, thus easily make magnetic coupling 50 produce imbalance.In order to head it off, controller 60 controls the rotating speed of drive motor 35 as follows.
Fig. 4 represents that controller 60 controls the control flow chart of drive motor 35.Fig. 5 is the sequential chart of the example representing the load torque of drive motor 35 and the time variations of rotating speed.
Controller 60 measures the load torque (step 1) of drive motor 35 according to the Output rusults of detection unit 61.Afterwards, when the load torque determined be more than the 3rd threshold value (Th3) the 2nd threshold value (Th2) below time, the increase of the acceleration control and rotating speed that perform drive motor 35 by controller 60 controls (step 2,3,4).Here, the 3rd threshold value (Th3) is less than the 2nd threshold value (Th2), the value that load torque detected when being equivalent to lack of proper care than magnetic coupling 50 is large.The value of the 3rd threshold value (Th3) is not particularly limited, such as, be 0.13Nm.
When the load torque of drive motor 35 be more than the 3rd threshold value (Th3) the 2nd threshold value (Th2) below time, rotating speed is increased, thus under the prerequisite of imbalance preventing magnetic coupling 50, the air displacement of the 1st vacuum pump 1 can be improved.In the present embodiment, the rotating speed of drive motor 35 is controlled in the scope of 0 ~ 3500rpm.
In Figure 5, interval D1, D2 correspond to time when reaching maximum (top) speed to it from drive motor 35 starts.Due at this time point, the load torque of drive motor 35 does not also reach the 2nd threshold value (Th2), thus drives drive motor 35 with maximum (top) speed.
In addition, the air displacement due to the 2nd vacuum pump 11 is less than the air displacement of the 1st vacuum pump 1, and thus make the back pressure of the 1st vacuum pump 1 increase gradually, the load torque of drive motor 35 also rises thereupon gradually.When the load torque of drive motor 35 more than the 2nd threshold value (Th2) and be the 1st threshold value (Th1) below time, performed the control (step 2,5,6, interval D3) that drive motor 35 rotating speed is reduced by controller 60.Thus the imbalance of magnetic coupling 50 can be prevented, stably proceed the exhaust event caused by the rotation of rotor 21.
Further, when the load torque of drive motor 35 is more than the 1st threshold value (Th1), controller 60 is judged as that drive motor 35 is in overload state, sends error signal as required, and drive motor 35 is shut down (step 8).
When by carrying out drive motor 35 rotating speed reduce control and make load torque become the 2nd threshold value (Th2) below time, controller 60 again performs drive motor 35 rotating speed rise control (step 2 ~ 4, interval D4).Then, by performing control same as described above, thus by the 1st and the 2nd vacuum pump 1,11, chamber 1 is exhausted (interval D5, D6).
Interval D7 represents that the time of imbalance occurs magnetic coupling 50 when the rotating speed carrying out drive motor 35 reduces to control.When the load torque of drive motor 35 be the 3rd threshold value (Th3) below time, controller 60 judges that magnetic coupling 50 is lacked of proper care, and stops powering to drive motor 35, thus makes live axle 350 be in free rotary state (step 3,7).Thus the de-synchronization state of magnetic coupling 50 can be removed ahead of time.Then, increased by the rotating speed again being performed drive motor 35 by controller 60 and control, thus restart the exhaust event carrying out chamber 1.After chamber C reaches goal pressure, controller 60 makes drive motor 35 continue to be driven, and maintains goal pressure to make chamber C.In addition, when making pump shut down, controller 60 makes to stop to the power supply of drive motor 35.
As mentioned above, adopt above-mentioned present embodiment, the load torque according to drive motor 35 controls rotating speed, can prevent the imbalance of magnetic coupling 50, and can proceed exhaust event.Thus chamber C can be made to reach goal pressure ahead of time.In addition, vacuum exhaust can be carried out by the 1st vacuum pump 1 couple of chamber C, make it become goal pressure from barometric pressure.
Fig. 6 is a measurement result of the rotation speed change of the drive motor 35 represented when reaching goal pressure to it from the startup of the 1st vacuum pump 1.The time variations of the pressure (P1) of suction port 201 and the pressure (P2) of relief opening 202 also has expression in figure 6.The vacuum chamber C of internal volume 20L is used to measure.As shown in Figure 6, present embodiment is adopted magnetic coupling 50 can be made not lack of proper care, realize stable exhaust event.
Embodiments of the present invention are illustrated above, but the present invention is not limited thereto, various distortion can be carried out according to technological thought of the present invention.
Such as, in the above-described embodiment, when the rotating speed of the drive motor 35 of control the 1st vacuum pump 1, for load torque setting 1st ~ 3 threshold values (Th1 ~ Th3) of drive motor 35, but the quantity of the size of threshold value, set threshold value is not limited to above-mentioned example, suitably can change it.
In addition, in the above-described embodiment, use mechanical booster pump as the 1st vacuum pump 1, but be not limited thereto, the present invention also goes for other dry vacuum pumps such as multi-stage roots pump and vortex pump.
[description of reference numerals]
1: the 1 vacuum pump; 2: pump housing portion; 3: drive portion; 10: vacuum pumping hardware; 11: the 2 vacuum pumps; 21,22: rotor; 23: pump chamber; 35: drive motor; 50: magnetic coupling; 51: inner circumferential side magnet; 52: outer circumferential side magnet; 55: partition member; 60: controller; 61: detection unit; 62: rotate control device; 201: suction port; 202: relief opening.
Claims (5)
1. a vacuum pump, has pump housing portion, drive portion, magnetic coupling, controller, it is characterized in that,
Described pump housing portion has:
Pump chamber, it has suction port and relief opening;
Rotor, it is configured in described pump chamber, for gas is carried to described relief opening by described suction port,
Described drive portion has:
Motor chamber, its adjacent described pump chamber;
Drive motor, it is configured in the atmospheric air chamber adjacent with described motor chamber, for driving described rotor turns,
Described magnetic coupling has:
Partition member, it is for dividing described atmospheric air chamber and described motor chamber and making both keep tightness;
1st magnet, it is arranged on described rotor;
2nd magnet, it is arranged on described drive motor, is connected with described 1st magnet magnetic by described partition member,
Described magnetic coupling transmits the rotatory force of described drive motor to described rotor with the driving torque below the 1st threshold value,
Described controller has:
Detection unit, it is for detecting the load torque of described drive motor;
Rotate control device, it is for controlling the rotating speed of described drive motor,
Below the 2nd threshold value that described load torque is less than described 1st threshold value and for more than 3rd threshold value less than described 2nd threshold value time, described controller makes the rotating speed of described drive motor increase, when described load torque exceedes described 2nd threshold value and is below described 1st threshold value, described controller makes the rotating speed of described drive motor reduce, when described load torque is less than described 3rd threshold value, described controller makes described drive motor be in free rotary state.
2. vacuum pump according to claim 1, is characterized in that,
When described load torque exceedes described 1st threshold value, described controller makes described drive motor be in free rotary state.
3. the vacuum pump according to claims 1 or 2, is characterized in that,
Described 2nd threshold value is the rated torque of described drive motor.
4. a vacuum pumping hardware, has the 1st vacuum pump, the 2nd vacuum pump, controller, it is characterized in that,
Described 1st vacuum pump has:
Pump chamber, it has suction port and relief opening;
Rotor, it is configured in described pump chamber, for being carried to described relief opening by described suction port by gas;
Drive motor;
Magnetic coupling, it transmits the rotatory force of described drive motor to described rotor with the driving torque below the 1st threshold value,
Described 2nd vacuum pump for discharging the gas being transported to described relief opening,
Described controller has:
Detection unit, it is for detecting the load torque of described drive motor;
Rotate control device, it is for controlling the rotating speed of described drive motor,
Below the 2nd threshold value that described load torque is less than described 1st threshold value and for more than 3rd threshold value less than described 2nd threshold value time, described controller makes the rotating speed of described drive motor increase, when described load torque exceedes described 2nd threshold value and is below described 1st threshold value, described controller makes the rotating speed of described drive motor reduce, when described load torque is less than described 3rd threshold value, described controller makes described drive motor be in free rotary state.
5. a method for controlling of operation for vacuum pump, described vacuum pump has: rotor; Drive motor; Magnetic coupling, it transmits the rotatory force of described drive motor to described rotor with the driving torque below the 1st threshold value, it is characterized in that,
Detect the load torque of described motor,
Below the 2nd threshold value that described load torque is less than described 1st threshold value and for more than 3rd threshold value less than described 2nd threshold value time, the rotating speed of described drive motor is increased, when described load torque exceedes described 2nd threshold value and is below described 1st threshold value, the rotating speed of described drive motor is reduced, when described load torque is less than described 3rd threshold value, described controller makes described drive motor be in free rotary state.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-053902 | 2011-03-11 | ||
| JP2011053902 | 2011-03-11 | ||
| PCT/JP2012/001452 WO2012124277A1 (en) | 2011-03-11 | 2012-03-02 | Vacuum pump, vacuum exhaust device, and method for operating vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103502650A CN103502650A (en) | 2014-01-08 |
| CN103502650B true CN103502650B (en) | 2016-04-27 |
Family
ID=46830370
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280011595.XA Active CN103502650B (en) | 2011-03-11 | 2012-03-02 | The method for controlling of operation of vacuum pump, vacuum pumping hardware and vacuum pump |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20130343912A1 (en) |
| JP (1) | JP5684894B2 (en) |
| KR (1) | KR101548842B1 (en) |
| CN (1) | CN103502650B (en) |
| DE (1) | DE112012001192B4 (en) |
| TW (1) | TWI516677B (en) |
| WO (1) | WO2012124277A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014102591A1 (en) * | 2014-02-27 | 2015-08-27 | Rausch & Pausch Gmbh | Method of conveying hydraulic fluid and electro-hydraulic motor-pump unit therefor |
| CN107208641B (en) * | 2015-01-15 | 2019-05-31 | 阿特拉斯·科普柯空气动力股份有限公司 | Method for controlling compressor/vacuum pump speed |
| FR3054005B1 (en) * | 2016-07-13 | 2018-08-24 | Pfeiffer Vacuum | METHOD OF PRESSURE DESCENT IN A LOADING AND UNLOADING SAS AND ASSOCIATED PUMP GROUP |
| JP6458225B2 (en) * | 2017-03-24 | 2019-01-30 | 大東工業株式会社 | Magnet gear pump and manufacturing method thereof |
| FR3076582B1 (en) * | 2018-01-09 | 2020-01-24 | Pfeiffer Vacuum | DRY TYPE VACUUM PUMP AND METHOD FOR CONTROLLING A SYNCHRONOUS VACUUM PUMP MOTOR |
| JP7430035B2 (en) * | 2019-05-09 | 2024-02-09 | 株式会社アルバック | Vacuum exhaust equipment and its operating method |
| EP4172012B1 (en) * | 2020-06-24 | 2024-02-28 | Pierburg Pump Technology GmbH | Motor vehicle vacuum pump |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE112012001192B4 (en) | 2016-12-15 |
| KR20130114732A (en) | 2013-10-17 |
| DE112012001192T5 (en) | 2013-12-19 |
| US20130343912A1 (en) | 2013-12-26 |
| TW201237272A (en) | 2012-09-16 |
| WO2012124277A1 (en) | 2012-09-20 |
| CN103502650A (en) | 2014-01-08 |
| JP5684894B2 (en) | 2015-03-18 |
| TWI516677B (en) | 2016-01-11 |
| KR101548842B1 (en) | 2015-08-31 |
| JPWO2012124277A1 (en) | 2014-07-17 |
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