CN103487362A - Laser particle measurement probe - Google Patents
Laser particle measurement probe Download PDFInfo
- Publication number
- CN103487362A CN103487362A CN201310484490.2A CN201310484490A CN103487362A CN 103487362 A CN103487362 A CN 103487362A CN 201310484490 A CN201310484490 A CN 201310484490A CN 103487362 A CN103487362 A CN 103487362A
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- China
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- catoptron
- light beam
- laser
- ring flange
- measuring sonde
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Abstract
The invention provides a laser particle measurement probe. The laser particle measurement probe is fixedly arranged on a firm shell of a closed container or a vacuum container through a flange plate, the closed container or the vacuum container is isolated from the external environment through the flange plate and window glass on the flange plate, and an optical device, a mechanical component and an electronic device are isolated out of the closed container or the vacuum container so as to prevent the pollution on the internal environment of the measured container; through a beam shaping module, a laser beam is changed into a linear laser beam which is distributed evenly and is 0.5mm-1mm thick. The laser beam is scattered by suspended particles, a condensing lens gathers the scattered laser onto the sensitive surface of a photoelectric converter, and the photoelectric converter changes the gathered light signals into electrical signals for later use. The laser particle measurement probe effectively solves the problems of monitoring the suspended particles inside the vacuum container and the closed container in real time. The laser particle measurement probe is simple in structure and convenient to use, and can be widely used for monitoring the internal environment of an optical transmission channel of a solid laser device in real time.
Description
Technical field
The invention belongs to the optoelectronics field, be specifically related to a kind of laser particle measuring sonde.The Real-Time Monitoring that is particularly useful for suspended particulate substance size and number in vacuum tank or closed container.
Background technology
At present, for the measurement of suspended particulate contaminants, technology comparatively commonly used is the laser particle counter method, be about to the inside that the subsidiary particle measurement probe of laser particle counter is placed in monitored factory building, container etc., and the aspiration pump carried by equipment extracts inner gas with certain pumping speed, when the gas with suspended particulate substance, automatically the size of particle is measured and counted by number system during by device interior.This technology application is comparatively extensive, has on the market more matured product available at present, low price, and precision is high, easy to use.But this kind equipment is not suitable for vacuum tank and closed container is carried out to the monitoring of suspended particulate substance.As in large-scale high power solid-state laser device, the closed container such as transmission line, disk amplifier that numerous spatial filter, Final optical assembly equal vacuum container and filling inert gas are arranged, its inside all is equipped with expensive optical element, and these optical elements need to could move safely for a long time under very high clean environment.On the one hand, the particulate matter be positioned on transmission line can cause diffraction of light and scattering, has increased the energy loss of laser in long Distance Transmission process, and can cause the deteriorated of near-field beam, thereby high power solid-state laser device runnability is descended; On the other hand, because under Irradiation of High, the particulate pollutant that is deposited on optical element surface can induce this optical element that serious damage occurs, thereby brings irremediable loss.Therefore need to monitor in real time the suspended particulate substance of these closed container inner spaces, grasp in time the internal contamination situation in order to provide foundation to clean the processing.But because common laser particle counter needs incessantly from monitored space extracting gases, and laser particle counter can't carry out proper testing from the inner extracting gases of vacuum tank.And if laser particle counter is tested from the inner extracting gases of the transmission line of filling inert gas, need to supplement to inner space incessantly the inert gas of equal number, same concentrations, same purity, not only increase device operating cost, but also can be because inert gas concentration in tester's environment of living in increases threat to life safety.Therefore, common laser particle counter can not meet suspended particulate substance in vacuum tank and closed container is carried out to the purpose of monitoring in real time.And, in the high power solid-state laser device, also require real-time watch device not bring new pollution to monitored environment, prior art obviously can not meet the demand of high power solid-state laser device development.
Summary of the invention
The difficult problem that can not carry out inner space suspended particulate substance monitoring for vacuum tank and closed container in order to overcome prior art; the invention provides a kind of laser particle measuring sonde; can, when protection test environment clean state is not destroyed, realize the Real-Time Monitoring of vacuum tank and closed container inner space suspended particulate substance.
The technical solution adopted for the present invention to solve the technical problems is:
Laser particle measuring sonde of the present invention, be characterized in, described measuring sonde contains laser instrument, light beam shaping module, post lens, catoptron
, catoptron
, catoptron
, catoptron
, collector lens, electrooptical device, ring flange, light beam trap.Wherein, be provided with the installation window glass on described ring flange
, window glass
two logical light windows; Described laser instrument, light beam shaping module, catoptron
, post lens, catoptron
, window glass
, catoptron
, catoptron
, the light beam trap is arranged in order.Laser instrument, light beam shaping module, post lens, catoptron
, catoptron
, collector lens, electrooptical device be positioned at a side of ring flange.Catoptron
, catoptron
, the light beam trap is positioned at the opposite side of ring flange.Ring flange is together with the window glass on two logical light windows of ring flange
, window glass
by closed container or vacuum tank and external environment condition isolation, and by laser instrument, light beam shaping module, post lens, catoptron
, catoptron
, collector lens, electrooptical device be isolated in outside closed container or vacuum tank, avoids polluting the internal environment of monitored container.Simultaneously, on ring flange, window glass is set
the importing, the window glass that are conducive to the linear laser light beam
be conducive to the derivation of scattering laser.The light path of laser particle measuring sonde of the present invention is, is arranged at the laser instrument Emission Lasers of ring flange one side, the linear laser light beam that obtains being evenly distributed after the light beam shaping module shaping, and the linear laser light beam is through catoptron
make the width, linear laser light beam of right-angle steering, post lens adjustment linear laser light beam again through catoptron
do to see through window glass after right-angle steering
enter the opposite side of ring flange; Laser beam passes through catoptron successively
, catoptron
do that right-angle steering is laggard enters the light beam trap, the linear laser light beam is limited in the light beam trap.Work as catoptron
and catoptron
zone line laser beam while having suspended particulate substance on the path of process, linear laser light beam generation scattering, scattering laser sees through window glass
, receive and convert to electric signal by electrooptical device after collector lens is gathered.Also be provided with several pilot holes on described ring flange, for this measuring sonde being fixed on to the solid shell of closed container or vacuum tank.
The described thickness that obtains the linear laser light beam after the light beam shaping module shaping is 0.5 ~ 1mm.
The laser beam that described laser instrument is launched is a kind of of visible ray, infrared light or ultraviolet light.
Described electrooptical device is photomultiplier or photodiode.
Described post lens are simple lens or compound lens.
Described light beam trap is arranged on a side or the opposite side of ring flange.
Described ring flange adopts stainless steel, aluminium alloy, teflon, copper to do.
Described collector lens and catoptron
, catoptron
be positioned at the same side.
In laser particle measuring sonde of the present invention, described ring flange is for being fixed on this measuring sonde the solid shell of closed container or vacuum tank; Ring flange is together with the window glass on ring flange
, window glass
by closed container or vacuum tank and external environment condition isolation, and by laser instrument, light beam shaping module, post lens, catoptron
, catoptron
, collector lens, electrooptical device be isolated in outside closed container or vacuum tank, avoids polluting the internal environment of monitored container; Simultaneously, the window glass on ring flange
also for importing, the window glass of linear laser light beam
derivation for scattering laser; Laser instrument emission is infrared, ultraviolet or visible laser, laser beam after light beam shaping module, become be evenly distributed, linear laser light beam that thickness is 0.5 ~ 1mm; The post lens are for regulating the width of linear laser light beam; The linear laser light beam is by catoptron
guiding enters closed container or vacuum tank inside; Laser beam generation scattering when the inner particulate matter suspended of closed container or vacuum tank passes through the linear laser light beam; Scattering laser gathers and shines the sensitive surface of electrooptical device through collector lens, it is stand-by that electrooptical device is transformed into electric signal output by the light signal of collecting.
The light beam trap is arranged on the light path end, for collecting unnecessary laser.
The invention has the beneficial effects as follows, effectively solved suspended particulate substance quantity and big or small Real-Time Monitoring problem in vacuum tank and closed container.By two window glass on ring flange and ring flange by closed container or vacuum tank and external environment condition isolation, and the main parts size such as laser instrument, light beam shaping module, electrooptical device are isolated in outside closed container or vacuum tank, avoid bringing extra pollution to the internal environment of monitored container.Export incessantly the size and number of the scattering laser strength signal Real-Time Monitoring internal tank suspended particulate substance of suspended particulate contaminants by electrooptical device.The present invention is simple in structure, easy for installation, in the Real-Time Monitoring of the transmission line of large-scale high power solid-state laser device and vacuum tank internal environment, can be used widely.
The accompanying drawing explanation
Fig. 1 is a kind of laser particle measuring sonde structural representation of the present invention;
In figure: 1. laser instrument 2. light beam shaping module 3. post lens 41. catoptrons
42. catoptron
43. catoptron
44. catoptron
5. collector lens 6. electrooptical device 7. ring flange 81. window glass
82. window glass
91. pilot hole
92. pilot hole
10. linear laser light beam 11. light beam trap 12. suspended particles.
Embodiment
Below in conjunction with accompanying drawing, the present invention is done to specific descriptions.
Fig. 1 is a kind of laser particle measuring sonde structural representation of the present invention.In Fig. 1, laser particle measuring sonde of the present invention, contain laser instrument 1, light beam shaping module 2, post lens 3, catoptron
41, catoptron
42, catoptron
43, catoptron
44, collector lens 5, electrooptical device 6, ring flange 7, light beam trap 11; Wherein, be provided with two logical light windows on described ring flange 7, on two logical light windows, be separately installed with window glass
81 and window glass
82.; Described laser instrument 1, light beam shaping module 2, catoptron
41, post lens 3, catoptron
42, window glass
81, catoptron
43, catoptron
44, light beam trap 11 is arranged in order; Laser instrument 1, light beam shaping module 2, post lens 3, catoptron
41, catoptron
42, collector lens 5, electrooptical device 6 are positioned at a side of ring flange 7; Catoptron
43, catoptron
44, light beam trap 11 is positioned at the opposite side of ring flange 7; Its light path is, is arranged at laser instrument 1 Emission Lasers of ring flange one side, the linear laser light beam 10 that obtains being evenly distributed after light beam shaping module 2 shapings, and linear laser light beam 10 is through catoptron
41 make right-angle steering, post lens 3 regulates the width of linear laser light beams 10, linear laser light beam 10 again through catoptron
42 do to see through window glass after right-angle steering
81 arrive the opposite side of ring flange 7; Linear laser light beam 10 passes through catoptron in turn
43, catoptron
44 do that right-angle steering is laggard enters light beam trap 11, and linear laser light beam 10 is limited in light beam trap 11; Work as catoptron
43 and catoptron
while on the path of 10 processes of linear laser light beam of 44 zone line, having suspended particle 12, scattering occurs in linear laser light beam 10, and scattering laser sees through window glass
82, after gathering, collector lens 5 receives and converts to electric signal by electrooptical device 6; Ring flange 7 is isolated in vacuum tank or closed container outside by laser instrument 1, electrooptical device 6, the secondary pollution that effectively blocking-up may bring internal environment; Also be provided with pilot hole on described ring flange 7, for this measuring sonde being fixed on to the solid shell of closed container or vacuum tank.
In the present embodiment, light beam trap 11 is positioned at catoptron
43, catoptron
the same side of 44; Be provided with eight pilot holes, pilot hole on described ring flange 7
91, pilot hole
the 92nd, wherein two, for this measuring sonde being fixed on to the solid shell of closed container or vacuum tank.
In the present embodiment, laser instrument 1 Emission Lasers, the linear laser light beam 10 be evenly distributed after light beam shaping module 2 shapings, thickness is 0.5mm, linear laser light beam 10 is through catoptron
41 make width, the catoptron of right-angle steering, post lens 3 adjusting laser beams 10
42 remake after right-angle steering and see through window glass
81 arrive the opposite side of ring flange 7; Linear laser light beam 10 passes through catoptron successively
43, catoptron
44 do that right-angle steering is laggard enters light beam trap 11, and linear laser light beam 10 is limited in light beam trap 11.Work as catoptron
43 and catoptron
while on the path of 10 processes of linear laser light beam of 44 zone line, having suspended particle 12, linear laser light beam generation scattering, scattering laser sees through window glass
82, after gathering, collector lens received by electrooptical device 6 and to convert electric signal to stand-by.
The laser beam that described laser instrument is launched is visible ray.
Described electrooptical device is photomultiplier.
Described post lens are simple lens.
Described light beam trap is arranged on ring flange one side.
Described ring flange adopts stainless steel to make.
Embodiment 2
The present embodiment is identical with the basic structure of embodiment 1, and difference is that the described linear laser light beam thickness obtained after the light beam shaping module shaping is 1mm.The laser beam that laser instrument is launched is infrared light.Electrooptical device is photodiode.The post lens are compound lens.The light beam trap is arranged on the opposite side of ring flange.Ring flange adopts aluminium alloy to make.Be provided with 12 pilot holes on ring flange, for this measuring sonde being fixed on to the solid shell of closed container or vacuum tank.
The present embodiment is identical with the basic structure of embodiment 1, and difference is that the described linear laser light beam thickness obtained after the light beam shaping module shaping is 0.8mm.The laser beam that laser instrument is launched is ultraviolet light.Electrooptical device is photodiode.The post lens are compound lens.Ring flange adopts teflon to make.Be provided with 16 pilot holes on ring flange, for this measuring sonde being fixed on to the solid shell of closed container or vacuum tank.
The present embodiment is identical with the basic structure of embodiment 1, and difference is that described ring flange adopts copper to do.
The present embodiment is identical with the basic structure of embodiment 1, and difference is described collector lens and catoptron
and catoptron
be positioned at the same side.
Claims (8)
1. a laser particle measuring sonde, it is characterized in that: described measuring sonde contains laser instrument (1), light beam shaping module (2), post lens (3), catoptron
(41), catoptron
(42), catoptron
(43), catoptron
(44), collector lens (5), electrooptical device (6), ring flange (7), light beam trap (11); Wherein, the upper setting of described ring flange (7) is equipped with window glass
(81), window glass
(82) two logical light windows; Described laser instrument (1), light beam shaping module (2), catoptron
(41), post lens (3), catoptron
(42), window glass
(81), catoptron
(43), catoptron
(44), light beam trap (11) is arranged in order; Laser instrument (1), light beam shaping module (2), post lens (3), catoptron
(41), catoptron
(42), collector lens (5), electrooptical device (6) are positioned at a side of ring flange (7); Catoptron
(43), catoptron
(44), light beam trap (11) is positioned at the opposite side of ring flange (7); Its light path is, is arranged at laser instrument (1) Emission Lasers of ring flange (7) one sides, the linear laser light beam (10) that obtains being evenly distributed after light beam shaping module (2) shaping, and linear laser light beam (10) is through catoptron
(41) make right-angle steering, post lens (3) and regulate the width of linear laser light beams (10), linear laser light beam (10) again through catoptron
(42) do to see through window glass after right-angle steering
(81) enter the opposite side of ring flange (7); Linear laser light beam (10) passes through catoptron successively
(43), catoptron
(44) do that right-angle steering is laggard enters light beam trap (11), linear laser light beam (10) is limited in light beam trap (11); Work as catoptron
and catoptron (43)
(44) the linear laser light beam (10) of zone line while having suspended particle (12) on the path of process, scattering occurs in linear laser light beam (10), scattering laser sees through window glass
(82), after gathering, collector lens (5) receives and converts to electric signal by electrooptical device (6).
2. laser particle measuring sonde according to claim 1, it is characterized in that: the thickness of the described linear laser light beam obtained after light beam shaping module (2) shaping is 0.5mm ~ 1mm.
3. laser particle measuring sonde according to claim 1, it is characterized in that: the laser beam that described laser instrument (1) is launched is a kind of of visible ray, infrared light or ultraviolet light.
4. laser particle measuring sonde according to claim 1, it is characterized in that: described electrooptical device (6) is photomultiplier or photodiode.
5. laser particle measuring sonde according to claim 1, it is characterized in that: described post lens (3) are simple lens or compound lens.
6. laser particle measuring sonde according to claim 1, it is characterized in that: described light beam trap (11) is arranged on a side or the opposite side of ring flange (7).
7. laser particle measuring sonde according to claim 1, is characterized in that: described ring flange (7) employing stainless steel, aluminium alloy, teflon, copper work.
8. laser particle measuring sonde according to claim 1, is characterized in that: described collector lens (5) and catoptron
and catoptron (43)
(44) be positioned at the same side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310484490.2A CN103487362B (en) | 2013-10-16 | 2013-10-16 | A kind of laser particle measurement probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310484490.2A CN103487362B (en) | 2013-10-16 | 2013-10-16 | A kind of laser particle measurement probe |
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| Publication Number | Publication Date |
|---|---|
| CN103487362A true CN103487362A (en) | 2014-01-01 |
| CN103487362B CN103487362B (en) | 2015-09-23 |
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|---|---|---|---|
| CN201310484490.2A Active CN103487362B (en) | 2013-10-16 | 2013-10-16 | A kind of laser particle measurement probe |
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| Country | Link |
|---|---|
| CN (1) | CN103487362B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113776441A (en) * | 2021-09-01 | 2021-12-10 | 江苏仕邦柔性电子研究院有限公司 | Nanofiber membrane film thickness measuring device |
| CN115047509A (en) * | 2022-08-16 | 2022-09-13 | 之江实验室 | Ionizing radiation detection method and device based on suspended particles |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113776441A (en) * | 2021-09-01 | 2021-12-10 | 江苏仕邦柔性电子研究院有限公司 | Nanofiber membrane film thickness measuring device |
| CN115047509A (en) * | 2022-08-16 | 2022-09-13 | 之江实验室 | Ionizing radiation detection method and device based on suspended particles |
| CN115047509B (en) * | 2022-08-16 | 2023-01-06 | 之江实验室 | Ionizing radiation detection method and device based on suspended particles |
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| Publication number | Publication date |
|---|---|
| CN103487362B (en) | 2015-09-23 |
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