CN103470852A - Microfluid valve gear based on electrowetting technology - Google Patents
Microfluid valve gear based on electrowetting technology Download PDFInfo
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- CN103470852A CN103470852A CN2013104159313A CN201310415931A CN103470852A CN 103470852 A CN103470852 A CN 103470852A CN 2013104159313 A CN2013104159313 A CN 2013104159313A CN 201310415931 A CN201310415931 A CN 201310415931A CN 103470852 A CN103470852 A CN 103470852A
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Abstract
The invention discloses a microfluid valve gear based on electrowetting technology. The microfluid valve gear comprises an upper substrate, a lower substrate and a microfluid interlayer. The microfluid interlayer is positioned between the upper substrate and the lower substrate. An upper conducting layer (13) and a lower conducting layer (14) are respectively arranged on one side of the upper substrate (11) and the lower substrate (12) close to the microfluid interlayer (10), an upper dewatering dielectric layer (15) is arranged on a lower surface of the upper conducting layer (13), and a lower dewatering dielectric layer (16) is arranged on an upper surface of the lower conducting layer (14). The microfluid interlayer (10) is made of porous spongy material. The outer surface and the interior structure surface of the microfulid interlayer (10) are both covered by a medium dewatering dielectric layer (17). Voltage is applied between the microfluid interlayer and a certain substrate, so that waterborne fluid between the substrate and the interlayer is filtered to the other side of the interlayer by the aid of electrowetting property. Correspondingly, voltage is applied between the other substrate and the interlayer, so that the waterborne fluid can be filtered back to the original side, and accordingly a dynamic and adjustable fluid valve function can be achieved.
Description
Technical field
The present invention relates to a kind of microfluidic valve device, particularly a kind of based on surperlight type Graphene microfluidic valve device.
Background technique
The characteristics such as electrowetting technology is the novel micro-fluidic technologies of research of being used widely in recent years, and it has low in energy consumption, fast response time, device architecture is simple, volume is little.Novel microfluidic valve based on electrowetting technology also has reliable in action simultaneously, responds fast and is easy to the advantages such as continuous control, possesses excellent using value.But at present main electrowetting microfluidic valve relies on the micromechanics electronic technology, there is the comparatively micromechanical structure of complex precise, the processing technology complexity, especially when relating to the controlling of heterogeneous fluid, to filtration, the obstruct of particular fluid and can to reply operation be all the main bugbear faced at present.
Summary of the invention
Technical problem: technical problem to be solved by this invention is to provide a kind of electrowetting microfluidic valve device, and this device can accurately be realized the filtration of heterogeneous fluid, intercepts and can reply operation, and not needing to prepare complicated micromechanics electronic unit.
Technological scheme: a kind of microfluidic valve device based on electrowetting technology of the present invention comprises upper substrate, infrabasal plate and the microfluid interlayer between upper and lower base plate, described upper substrate and infrabasal plate are being respectively arranged with conductive layer, lower conductiving layer near microfluid interlayer one side, the lower surface of conductive layer is provided with the hydrophobic medium layer on described, at the upper surface of lower conductiving layer, is provided with lower hydrophobic medium layer; Described microfluid interlayer is the spongy material of porous; The outer surface of described microfluid interlayer and internal structure surface all are coated with the middle hydrophobic medium layer of one deck.
Described upper hydrophobic medium layer, lower hydrophobic medium layer and middle hydrophobic medium layer are the hydrophobic medium layer that is greater than 90 ° with the aqueous fluids wrapping angle.
Described microfluid interlayer is the spongy Graphene of porous.
Beneficial effect: compared with prior art, electrowetting microfluidic valve device of the present invention does not rely on complicated micromechanics electronic unit, take full advantage of the super-hydrophobicity of microfluid interlayer and lipophile preferably, can realize the filtration of oily fluid, the obstruct of aqueous fluids, and oiliness and the multiple functions such as separating of water-based fluid-mixing.In addition, by between microfluid interlayer and certain substrate, applying voltage, can make to be positioned at the opposite side that aqueous fluids in the middle of this substrate and interlayer is filled into interlayer by electro-wetting property; Correspondingly, between another substrate and interlayer, apply voltage, can make aqueous fluids filter back an initial side, thereby realize dynamically adjustable fluid valve function.Graphene possesses excellent electric conductivity, can be prepared into the electrode material of microfluidic valve, and through the spongy Graphene block material of hydrophobic medium layer modified, light weight and the wetting operating conditions of satisfied electricity, can realize dynamically controlling microfluid.
The accompanying drawing explanation
Fig. 1 is the schematic perspective view of electrowetting microfluidic valve device of the present invention;
Fig. 2 be electrowetting microfluidic valve device of the present invention when OFF state, filter the schematic diagram of oily fluid;
Fig. 3 be electrowetting microfluidic valve device of the present invention when OFF state, intercept the schematic diagram of aqueous fluids;
Fig. 4 be electrowetting microfluidic valve device of the present invention when ON state, filter the schematic diagram of aqueous fluids.
Above figure comprises: microfluid interlayer 10, upper substrate 11, infrabasal plate 12, upper conductive layer 13, lower conductiving layer 14, upper hydrophobic medium layer 15, lower hydrophobic medium layer 16, middle hydrophobic medium layer 17, spongy Graphene 18, oily fluid 19, aqueous fluids 20.
Embodiment
Below in conjunction with accompanying drawing, the present invention is done further and explains.
Microfluidic valve device of the present invention, comprise microfluid interlayer and upper and lower two substrates; This microfluid interlayer is to be made by block porous material; This microfluid interlayer outer surface and porous inner structure surface all are coated with one deck hydrophobic medium layer, and its material can be fluoropolymer, as teflon; This microfluid interlayer has lipophile and super-hydrophobicity, shows as with the oily fluid wrapping angle and is less than 90 °, with the aqueous fluids wrapping angle, is greater than 150 °; These upper and lower two substrates are distributed in respectively the both sides of microfluid interlayer; This upper and lower base plate is respectively having a conductive layer near interlayer one side surface, and conductive layer surface all uniform fold has the hydrophobic medium layer.Utilize lipophile and the hydrophoby of microfluid interlayer, can realize the filtration of oily fluid, the obstruct of aqueous fluids, and oiliness and the functions such as separating of water-based fluid-mixing.In addition, by between microfluid interlayer and certain substrate, applying voltage, can make to be positioned at the opposite side that aqueous fluids in the middle of this substrate and interlayer is filled into interlayer by electro-wetting property; Correspondingly, between another substrate and interlayer, apply voltage, can make aqueous fluids filter back an initial side, thereby realize dynamically adjustable fluid valve function.
Wherein, the microfluid interlayer is made by spongy grapheme material.
According to following embodiment, can better understand the present invention.Yet, those skilled in the art will readily understand, the described concrete material proportion of embodiment, process conditions and result thereof be only for the present invention is described, and should also can not limit the present invention described in detail in claims.
Be illustrated in figure 1 the schematic perspective view of electrowetting microfluidic valve device, a kind of electrowetting microfluidic valve device, comprise upper substrate 11, infrabasal plate 12 and the microfluid interlayer 10 between upper and lower base plate.Upper substrate 11 is provided with hydrophobic medium layer 15 in the side near microfluid interlayer 10.Infrabasal plate 12 is provided with lower hydrophobic medium layer 16 in the side near microfluid interlayer 10.Be provided with conductive layer 13 between upper substrate 11 and upper hydrophobic medium layer 15.Be provided with lower conductiving layer 14 between infrabasal plate 12 and lower hydrophobic medium layer 16.The core component of microfluid interlayer 10 is spongy Graphenes 18, and there is the middle hydrophobic medium layer 17 of one deck on spongy Graphene 18 outer surfaces and inner structure surface all uniform fold.
This upper substrate 11 adopts the requirement of materials to comprise with infrabasal plate 12: high, heat-resisting cold-resistant, the oil resistance of mechanical strength, water resistence, the good transparency.In practical application, equal one of each self-forming fluid chamber independently between upper substrate 11 and infrabasal plate 12 and microfluid interlayer 10, thereby the design generation effect that this invention is proposed.This upper electrode layer 13 and lower electrode layer 14 are made by the electrically conducting transparent material, as Indium Tin Oxid.In the present embodiment, upper electrode layer 13 and lower electrode layer 14 play the effect of ground connection, spongy Graphene 18 plays the effect that drives signal that applies, both also exchangeable uses, apply the driving signal to upper electrode layer 13 or lower electrode layer 14, and spongy Graphene 18 is applied to ground signalling.Be somebody's turn to do upper hydrophobic medium layer 15, lower hydrophobic medium layer 16 and middle hydrophobic medium layer 17 are made by transparent material, as the transparent amorphous fluoropolymer of single layer of hydrophobic, or, at transparent inorganic or this fluoropolymer of organic dielectric layer surface deposition, utilize AF1600 in the present invention.
As Fig. 2 is Fig. 1 shown device when the OFF state, filter the schematic diagram of oily fluid.Because middle hydrophobic medium layer 17 and the wrapping angle of oily fluid are less than 90 ° usually, in conjunction with the vesicular texture of spongy Graphene 18, produced oil-wet behavior preferably, can effectively play the effect of filtration, make oily fluid penetrate smoothly microfluid interlayer 10.
As Fig. 3 is Fig. 1 shown device when the OFF state, intercept the schematic diagram of aqueous fluids.Because middle hydrophobic medium layer 17 and the wrapping angle of aqueous fluids are greater than 90 ° usually, vesicular texture in conjunction with spongy Graphene 18, produce desirable superhydrophobic characteristic, played the effect that intercepts aqueous fluids, utilized surface tension of liquid to produce micro-valve function.
As Fig. 4 is Fig. 1 shown device when the ON state, filter the schematic diagram of aqueous fluids.Apply voltage between spongy Graphene 18 and upper electrode layer 13, by electrowetting effect, can overcome the surface tension that aqueous fluids is stronger, thereby make microfluidic valve be converted to the state of unlatching by the state of closing, make aqueous fluids penetrate microfluid interlayer 10.
Compared with prior art, electrowetting microfluidic valve device of the present invention adopts microfluid interlayer 10 to make micro-valve.This micro-valve does not rely on complicated micromechanics electronics processing technology, only relies on oleophylic and the superhydrophobic characteristic of porous material, realizes the filtration of oily fluid, the obstruct of aqueous fluids, and oiliness and the multiple functions such as separating of water-based fluid-mixing.In addition, by between microfluid interlayer 10 and certain substrate, applying voltage, can make to be positioned at the opposite side that aqueous fluids in the middle of this substrate and interlayer is filled into interlayer by electro-wetting property, and after between another substrate and interlayer, applying voltage, can make aqueous fluids filter back an initial side, thereby realize dynamically adjustable fluid valve function.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (3)
1. the microfluidic valve device based on electrowetting technology, it is characterized in that this device comprises upper substrate, infrabasal plate and the microfluid interlayer between upper and lower base plate, described upper substrate (11) and infrabasal plate (12) are being respectively arranged with upper conductive layer (13), lower conductiving layer (14) near microfluid interlayer (10) one sides, the lower surface of conductive layer (13) is provided with upper hydrophobic medium layer (15) on described, at the upper surface of lower conductiving layer (14), is provided with lower hydrophobic medium layer (16); Described microfluid interlayer (10) is the spongy material of porous; The outer surface of described microfluid interlayer (10) and internal structure surface all are coated with the middle hydrophobic medium layer (17) of one deck.
2. the microfluidic valve device based on electrowetting technology according to claim 1 is characterized in that: described upper hydrophobic medium layer (15), lower hydrophobic medium layer (16) and middle hydrophobic medium layer (17) the hydrophobic medium layer for being greater than 90 ° with the aqueous fluids wrapping angle.
3. the microfluidic valve device based on electrowetting technology according to claim 1 and 2, it is characterized in that: described microfluid interlayer (10) is the spongy Graphene (18) of porous.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105329836A (en) * | 2014-07-22 | 2016-02-17 | 中国科学院微电子研究所 | Microfluidic channel, lateral laminar flow detection device and microfluidic valve |
| CN106886090A (en) * | 2017-01-25 | 2017-06-23 | 东南大学 | A kind of miniature dynamic ager |
| WO2018024020A1 (en) * | 2016-08-01 | 2018-02-08 | 京东方科技集团股份有限公司 | Fingerprint recognition means and manufacturing method therefor, and display device |
| CN109806803A (en) * | 2019-02-28 | 2019-05-28 | 南京理工大学 | A kind of microfluid mixing device and its control method with electrowetting threshold gate |
| CN110645408A (en) * | 2019-11-08 | 2020-01-03 | 广州大学 | Electrowetting-driven liquid drop micro-valve liquid circulation control device |
| WO2020215725A1 (en) * | 2019-04-24 | 2020-10-29 | 宿迁海沁节能科技有限公司 | Valve for blocking reflux of heat and cold in semiconductor thermoelectric refrigeration |
| CN113495355A (en) * | 2021-04-06 | 2021-10-12 | 哈尔滨工业大学（深圳） | Electrowetting liquid lens based on composite dielectric layer with infiltrated surface and manufacturing method |
| CN114289087A (en) * | 2015-10-27 | 2022-04-08 | 伯克利之光生命科技公司 | Microfluidic devices with optimized electrowetting surfaces and related systems and methods |
| US11964275B2 (en) | 2015-10-27 | 2024-04-23 | Berkeley Lights, Inc. | Microfluidic apparatus having an optimized electrowetting surface and related systems and methods |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105329836B (en) * | 2014-07-22 | 2017-09-22 | 中国科学院微电子研究所 | Microfluidic channel, lateral laminar flow detection device and microfluidic valve |
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| CN114289087B (en) * | 2015-10-27 | 2024-03-26 | 伯克利之光生命科技公司 | Microfluidic devices with optimized electrowetting surfaces and related systems and methods |
| US11964275B2 (en) | 2015-10-27 | 2024-04-23 | Berkeley Lights, Inc. | Microfluidic apparatus having an optimized electrowetting surface and related systems and methods |
| CN114289087A (en) * | 2015-10-27 | 2022-04-08 | 伯克利之光生命科技公司 | Microfluidic devices with optimized electrowetting surfaces and related systems and methods |
| WO2018024020A1 (en) * | 2016-08-01 | 2018-02-08 | 京东方科技集团股份有限公司 | Fingerprint recognition means and manufacturing method therefor, and display device |
| US10402618B2 (en) | 2016-08-01 | 2019-09-03 | Boe Technology Group Co., Ltd. | Fingerprint identification apparatus and manufacturing method thereof, display device |
| CN106886090A (en) * | 2017-01-25 | 2017-06-23 | 东南大学 | A kind of miniature dynamic ager |
| CN106886090B (en) * | 2017-01-25 | 2020-04-21 | 东南大学 | Miniature dynamic color matching device |
| CN109806803A (en) * | 2019-02-28 | 2019-05-28 | 南京理工大学 | A kind of microfluid mixing device and its control method with electrowetting threshold gate |
| CN109806803B (en) * | 2019-02-28 | 2022-02-18 | 南京理工大学 | Microfluid mixing device with electrowetting valve and control method thereof |
| WO2020215725A1 (en) * | 2019-04-24 | 2020-10-29 | 宿迁海沁节能科技有限公司 | Valve for blocking reflux of heat and cold in semiconductor thermoelectric refrigeration |
| CN110645408A (en) * | 2019-11-08 | 2020-01-03 | 广州大学 | Electrowetting-driven liquid drop micro-valve liquid circulation control device |
| CN113495355A (en) * | 2021-04-06 | 2021-10-12 | 哈尔滨工业大学（深圳） | Electrowetting liquid lens based on composite dielectric layer with infiltrated surface and manufacturing method |
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Application publication date: 20131225 |