CN108225620A - A kind of flexible touch sensation sensor with multi-layer structure and preparation method thereof - Google Patents
A kind of flexible touch sensation sensor with multi-layer structure and preparation method thereof Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
Abstract
The present invention relates to flexible artificial electron's skin technology fields, refer in particular to a kind of flexible touch sensation sensor of multilayered structure and preparation method thereof.The present invention develops a double dielectric layer structure；The mode for providing simpler environmental protection prepares AuNPs PDMS laminated films；Upper/lower electrode layer uses and the better PET material of metal adhesion, using MEMS preparation Ag electrodes in PET film, the novel flexible touch sensor improved by material and structure.
Description
Technical field
The present invention relates to flexible artificial electron's skin technology field, refer in particular to a kind of multilayered structure flexible touch sensation sensor and
Its production method.
Background technology
Flexible artificial electron's skin is a kind of novel wearable flexible bionic touch sensor, can realize and imitate people
Class tactilely-perceptible function, the tactile sensing unit that it is formed using the material with ductility and structure fabrication, more precisely
Ground perceives the environmental stimulis such as different pressure, temperature, humidity, thus can be used as Medical Devices of new generation, human body artificial limb and
The important application component of robot skin etc.；Traditional touch sensor is under the action of Tensile stress, it is difficult to have both
High flexibility and good electronic semi-conductor's performance；Although by the unremitting effort of many science researchers, single sensing unit
The performances such as sensitivity, flexible, ductility be highly improved, but when being applied to the larger carrier of surface area,
Still there is bigger difficulty；The manufacture cost for having highly sensitive flexible electronic skin is larger；In recent years, condenser type tactile
Sensor has the characteristics that high sensitivity, larger dynamic range, high spatial resolution and good frequency response, in medical treatment
Product, intelligent robot and wearable consumer electronics field have broad application prospects, thus cause both at home and abroad
The great interest of brainstrust, although capacitance type touch sensor utilizes the solution that can solve to face multi-dimensional force the characteristics of self structure
Coupling problem, but also easily generate parasitic capacitance and meanwhile measuring circuit it is more complicated；Therefore to high flexibility, high-precision and height
The pursuit of sensitivity is always one of hot spot of research；The micro- capacitance structure touch sensor of multilayer can obtain higher flexible
Property, accuracy and sensitivity, tactile sensing field have potential application value.
Micro- capacitance structure in the micro- capacitance structure touch sensor of multilayer can be generally regarded as by upper and lower two electrode layers
It is formed with intermediate dielectric layer.Electrode layer traditionally is generally using metal material, and this design is in the case where external force repeatedly acts on, electricity
Pole layer is easily broken, if applied on large area carrier, metal electrode can be caused excessive, and flexibility and resolution ratio can be big
It is big to reduce；The electrode layer of novel capacitance type touch sensor can be replaced using nonmetallic materials, and (China is specially by Zhang Dongzhi et al.
Sharp application number：201310500417.X) provide a kind of fexible film by the use of carbon nano-tube coextruded film as electrode layer and touch
Feel senser element.The different selection of dielectric layer determines the difference of the indexs such as sensitivity and the measurement range of sensor.Traditional
The method that dielectric layer is filled using solid or gas, but gap is easily generated between electrode layer, sensitivity is relatively low；In recent years
Come, novel material and structure are applied to electrode layer so that the performance of touch sensor has obtained larger promotion, Huang Ying et al.
(Chinese Patent Application No.：201410206998.0) provide a kind of touch sensor by the use of PDMS as dielectric layer；It is novel
Touch sensor；It is from top to bottom upper electrode layer, top electrode, dielectric layer, lower electricity respectively if Fig. 1 is typical multilayered structure
Pole and lower electrode layer.Compared with dimethyl silicone polymer (PDMS) material, polyethylene terephthalate (PET) it is sensitive
Property is low, in terms of tactile sensor array is designed, is more suitable for upper electrode layer and lower electrode layer.
Patent of the present invention provides a kind of flexible touch sensation sensor of multilayered structure and preparation method thereof, develops one pair
Dielectric layer structure；The mode for providing simpler environmental protection prepares AuNPs-PDMS laminated films；Upper/lower electrode layer uses and metal
The better PET material of caking property prepares Ag electrodes using MEMS in PET film, is improved by material and structure new
Type flexible touch sensation sensor will have wide application prospect in artificial electron's dermal region, therefore designs and develop with letter
The high-performance novel touch sensor of either simplex skill is of great significance.
Invention content
The purpose of the present invention is to provide a kind of flexible touch sensation sensor with multi-layer structure and preparation method thereof, (1)
PET film is selected, using MEMS manufacture crafts, using Ag targets, to be splashed as upper electrode layer and lower electrode layer using by magnetic control
Penetrate technology plated electrode in PET film；(2) in the glass substrate crossed in silanization treatment, PDMS film is prepared.Or as excellent
Choosing, can select on the lower electrode layer PET film for preparing electrode, prepare PDMS film；(3) it does not use conventional that PDMS is thin
Film is immersed in the method in gold plating solution, but gold plating solution Direct Uniform is added drop-wise on PDMS film, on PDMS film
Au nano-particle of the addition with high-k forms first Jie of the AuNPs-PDMS laminated films as capacitance type sensor
Electric layer；(4) the spin coating PI on the AuNPs-PDMS prepared forms PI films, as the second dielectric layer, carries out taking off membrane operations.
Or preferably, if in the preparation that double dielectric layers are carried out on PET film, there is no need to take off membrane operations.(5) acrylate is utilized
Glue will take off double dielectric layer films that film obtains and be assembled into the PET film (lower electrode layer) with Ag electrodes, another in PI film over-assembles
One PET film (upper electrode layer) with Ag electrodes.Or preferably, in PI film over-assemble upper electrode layers.
Technical solution is used by the present invention solves its critical issue：A kind of softness haptic perception sensing with multi-layer structure
Device and preparation method thereof, as shown in Figure 2：It is characterized in that：Including from top to bottom PET upper electrode layers, top electrode, PI dielectric layers,
AuNPs-PDMS laminated films dielectric layer, lower electrode, PET lower electrode layers；Laminated film makes of the mode of simpler environmental protection
Go out AuNPs-PDMS laminated films, the first dielectric layer as capacitance type sensor；Second dielectric of the PI films as sensor
Layer；PET material is selected as upper electrode layer and lower electrode layer；Levels electricity using silver as material is manufactured by magnetron sputtering technique
Pole.
Dielectric layer of the present invention using AuNPs-PDMS laminated films as capacitance type sensor, groundwork mechanism are：
Using gold nano and the two-fold advantage of PDMS, when the external force of application acts on the PET electrode layers on upper strata, flexible multi-layered micro- capacitive junctions
Structure sensor is compressed, and is occurred the variation of relative displacement Δ L between upper and lower silver electrode, is changed so as to cause capacitance；With PET
Upper electrode layer and lower electrode layer for material not only provide good ductility, but also viscous between PET film and metal electrode
Attached intensity is preferable, so as to which metal electrode be avoided to be deposited directly on AuNPs-PDMS laminated film dielectric layers, prevents because heat is followed
The influence of ring and crackle is caused to generate.
As priority, the upper and lower electrode layer is pet layer, and thickness is 25~100um.
The upper and lower electrode material is Cu, Ag or Au, and thickness is 8~10nm.
The material selection AuNPs-PDMS of the first medium layer, thickness 2-10nm.
The material selection PI of the second dielectric layer, thickness 2-10nm.
Compared with traditional touch sensor, the present invention has following excellent in terms of flexible touch sensation sensor overall performance is improved
Gesture：
The present invention does not use conventional method, does not impregnate PDMS film when preparing AuNPs-PDMS laminated films
In gold plating solution, but gold plating solution Direct Uniform is added drop-wise on PDMS film, addition is with Gao Jie on PDMS film
The Au nano-particles of electric constant, form AuNPs-PDMS laminated films, and this method is more environmentally-friendly, simple.In addition, develop one
A double dielectric layer structures by the use of AuNPs-PDMS laminated films as first medium layer, make full use of that PDMS's and AuNPs is dual
Advantage, second dielectric layer of the PI films as sensor；Upper/lower electrode layer use with the better PET film of metal adhesion, into
Row magnetron sputtering, forms electrode in PET film in advance, avoids the Direct precipitation metal electrode on dielectric layer, prevents because of heat
The influence of cycle and crackle is caused to generate；The present invention is compatible with traditional basic technology, varies without other existing lifes
Equipment is produced, suitable for large-scale production.
Description of the drawings
Fig. 1 exemplary capacitive touch sensor schematic diagrames.
Fig. 2 is the flexible touch sensation sensor structure diagram of multilayered structure of the present invention.
In figure：1- upper electrode layers, 2- top electrodes, 3- dielectric layers, electrode under 4-, 5- lower electrode layers, 6-PET films, 7-Ag
Electrode, 8-PI films, 9-AuNPs-PDMS laminated films, 10-Ag electrodes, 11-PET films
Specific embodiment：
A kind of flexible touch sensation sensor preparation method of multilayered structure of the present invention includes the following steps：
1. prepare Ag electrodes；
2. prepare PDMS film；
3. prepare AuNPs-PDMS films；
4. prepare PI films；
5. assemble capacitance type sensor.
Embodiment 1：
1. capacitance electrode up and down is manufactured by magnetron sputtering technique；One：At room temperature, power supply is opened, opens inflation
Valve begins to speak to place PET film, and close cavity closes charge valve, and target used is silver-colored target.Two：Open vacuum meter, mechanical pump, solenoid valve
30s is taken out, opens molecular pump, closes solenoid valve.Recirculated water is opened, V1 valves is opened and is evacuated to 20Pa hereinafter, opening Ar valves, be evacuated to 4.0Pa
Hereinafter, close V1 valves.Three：Open Ar steel cylinders, molecular switchable pump.Vacuum meter is closed, opens flow indication, valve control is tuned into
14sccm.Four：G valves are turned down, adjust pressure：2.2Pa opens target baffle.Radio-frequency power supply is opened, opens stepping electrode, main story.Five：
Pre-sputtering 2min waits for each parameter stability, adjusts G valves, pressure：0.5Pa.Without magnetron sputtering technique parameter：Vacuum pressure is
3.5x10-3Pa；Operating pressure is 0.5Pa；Ar flows used are 14sccm；Power is 100W；Sputtering time is 15min.
2. at room temperature, being cleaned to glass substrate, and silanization treatment is carried out to glass substrate；By glass substrate
It is put into glass culture dish, trim,ethylchlorosilane is added dropwise, covers culture dish lid；After 15min, a certain amount of deionized water is added in
Clean glass substrate；Glass substrate is placed in air dry oven, processing is dried.
3. prepare PDMS film；At room temperature, by silicon rubber host agent and silicon rubber curing agent with mass ratio 10:1 ratio is mixed
It closes, is uniformly mixed using magnetic stirring apparatus；Vacuumizing and defoaming processing 1-1.5h is carried out to mixed material；In silanization
In processed glass substrate, the sticky dropping liquids of PDMS through vacuum defoamation are added dropwise, glass substrate is put into sol evenning machine and is carried out
Glass substrate is placed 70 DEG C -80 DEG C later and dried on platform, PDMS film is cured 2h by spin coating.
4. prepare the first dielectric layer；First, at room temperature, the HAuCl of 1g is weighed4Crystalline solid adds in the C of 100mL2H6O,
Obtain the HAuCl of 0.01g/mL4Solution takes the HAuCl of appropriate 0.01g/mL4Solution is uniformly added drop-wise on PDMS film, close
Envelope, avoid light place 48h.Secondly, KHCO is weighed3Powder 1g is placed and is dissolved in the deionized water of 5mL, prepares to obtain 0.2g/mL
KHCO3Solution.Glucose 1g is weighed, measures the deionized water of 50mL, obtains the glucose solution of concentration 0.02g/mL.Respectively
Measure the HAuCl of 0.01g/mL4The KHCO of the glucose solution 10mL, 0.2g/mL of solution 10mL, 0.02g/mL3Solution 5mL, and
Mixing.Mixed solution is directly added drop-wise on the PDMS film that the HAuCl4 solution treatments through 0.01g/mL cross, seals, keep away
Light reaction for 24 hours, eventually forms AuNPs-PDMS films.
5. prepare the second dielectric layer；At room temperature, by the AuNPs-PDMS films prepared, sol evenning machine spin coating PI is utilized
Sticky dropping liquid cures 6h at room temperature, forms PI films.By sharp mouth tweezers or thin blade by double-layer compound film from sheet glass
It strips down.Using acrylic adhesive, double dielectric layer films that film obtains will be taken off and be assembled into PET film (the lower electricity with Ag electrodes
Pole layer), in another PET film (upper electrode layer) with Ag electrodes of PI films over-assemble.
Embodiment 2：
1. capacitance electrode up and down is manufactured by magnetron sputtering technique；One：At room temperature, power supply is opened, opens inflation
Valve begins to speak to place PET film, and close cavity closes charge valve.Two：It opens vacuum meter, mechanical pump, solenoid valve and takes out 30s, open molecule
Pump closes solenoid valve.Recirculated water is opened, V1 valves is opened and is evacuated to 20Pa hereinafter, opening Ar valves, is evacuated to 4.0Pa hereinafter, closing V1 valves.
Three：Open Ar steel cylinders, molecular switchable pump.Vacuum meter is closed, opens flow indication, valve control is tuned into 14sccm.Four：G valves are turned down, are adjusted
Save pressure：2.2Pa opens target baffle.Radio-frequency power supply is opened, opens stepping electrode, main story.Five：Pre-sputtering 2min waits for each parameter
Stablize, adjust G valves, pressure：0.5Pa.Without magnetron sputtering technique parameter：Vacuum pressure：3.5x10-3Pa；Operating pressure：0.5Pa；
Ar flows：14sccm；Power：100W；Sputtering time：15min.
2. prepare PDMS film；At room temperature, by silicon rubber host agent and silicon rubber curing agent with mass ratio 10:1 ratio is mixed
It closes, is uniformly mixed using magnetic stirring apparatus；Vacuumizing and defoaming processing 1-1.5h is carried out to mixed material；With Ag
The sticky dropping liquids of PDMS of vacuum defoamation are added dropwise on the PET film (lower electrode layer) of electrode, puts it into and spin coating is carried out in sol evenning machine, it
It is dried afterwards at 70 DEG C -80 DEG C and PDMS film curing 2h is carried out on platform.
3. prepare the first dielectric layer；First, at room temperature, the HAuCl of 1g is weighed4Crystalline solid adds in the C of 100mL2H6O,
Obtain the HAuCl of 0.01g/mL4Solution takes the HAuCl of appropriate 0.01g/mL4Solution is uniformly added drop-wise on PDMS film, close
Envelope, avoid light place 48h.Secondly, KHCO is weighed3Powder 1g is placed and is dissolved in the deionized water of 5mL, prepares to obtain 0.2g/mL
KHCO3 solution.Glucose 1g is weighed, measures the deionized water of 50mL, obtains the glucose solution of concentration 0.02g/mL.Respectively
Measure the HAuCl of 0.01g/mL4The KHCO of the glucose solution 10mL, 0.2g/mL of solution 10mL, 0.02g/mL3Solution 5mL, and
Mixing.Mixed solution is directly added drop-wise on the PDMS film that the HAuCl4 solution treatments through 0.01g/mL cross, seals, keep away
Light reaction for 24 hours, eventually forms AuNPs-PDMS films.
4. prepare the second dielectric layer；At room temperature, on the AuNPs-PDMS films prepared, sol evenning machine spin coating PI is utilized
Sticky dropping liquid cures 6h at room temperature, forms PI films, has the upper electrode layer PET film of Ag electrodes in PI films over-assemble.
Claims (7)
1. a kind of flexible touch sensation sensor with multi-layer structure, it is characterised in that：The flexible touch sensation sensor is included by upper
Electrode under PET upper electrode layers, top electrode, PI dielectric layers, AuNPs-PDMS laminated films dielectric layer, lower electrode, PET under
Layer；First dielectric layer of the AuNPs-PDMS laminated films as sensor；Second dielectric layer of the PI films as sensor；It utilizes
The two-fold advantage of gold nano and PDMS, when the external force of application acts on PET upper electrode layers, flexible multi-layered touch sensor is pressed
It contracts, the variation of relative displacement Δ L occurs between upper/lower electrode, change so as to cause capacitance；Using PET as the top electrode of material
Layer and lower electrode layer not only provide good ductility, but also the adhesion strength between PET film and metal electrode is preferable, so as to
Metal electrode is avoided to be deposited directly on AuNPs-PDMS laminated film dielectric layers, prevents from causing to split because of the influence of thermal cycle
Line generates.
2. a kind of flexible touch sensation sensor with multi-layer structure as described in claim 1, it is characterised in that：The PET
The thickness of upper and lower electrode layer is 25~100um.
3. a kind of flexible touch sensation sensor with multi-layer structure as described in claim 1, it is characterised in that：It is described it is upper,
Lower electrode material is Cu, Ag or Au, and thickness is 8~10nm.
4. a kind of flexible touch sensation sensor with multi-layer structure as described in claim 1, it is characterised in that：Described
The thickness of AuNPs-PDMS laminated films is 2-10nm.
5. a kind of flexible touch sensation sensor with multi-layer structure as described in claim 1, it is characterised in that：The PI films
Thickness be 2-10nm.
6. a kind of production method of flexible touch sensation sensor with multi-layer structure as described in claim 1, which is characterized in that
It is as follows：
(1) PET film is selected as upper electrode layer and lower electrode layer, using MEMS manufacture crafts, using metal targets, using logical
Cross magnetron sputtering technique plated electrode in PET film；
(2) in the glass substrate crossed in silanization treatment, PDMS film is prepared；
(3) the conventional method being immersed in PDMS film in gold plating solution is not used, but gold plating solution Direct Uniform is dripped
It is added on PDMS film, it is compound to form AuNPs-PDMS for Au nano-particle of the addition with high-k on PDMS film
First dielectric layer of the film as sensor；
(4) the spin coating PI on the AuNPs-PDMS prepared forms PI films, as the second dielectric layer, carries out taking off membrane operations；
(5) using acrylic adhesive, double dielectric layer films that film obtains will be taken off and be assembled into lower electrode layer PET film with electrode,
In another upper electrode layer PET film with electrode of PI films over-assemble.
7. a kind of production method of flexible touch sensation sensor with multi-layer structure as described in claim 1, which is characterized in that
It is as follows：
(1) PET film is selected as upper electrode layer and lower electrode layer, using MEMS manufacture crafts, using metal targets, using logical
Cross magnetron sputtering technique plated electrode in PET film；
(2) in the lower electrode layer PET film for preparing electrode, PDMS film is prepared；
(3) the conventional method being immersed in PDMS film in gold plating solution is not used, but gold plating solution Direct Uniform is dripped
It is added on PDMS film, it is compound to form AuNPs-PDMS for Au nano-particle of the addition with high-k on PDMS film
First dielectric layer of the film as capacitance type sensor；
(4) the spin coating PI on the AuNPs-PDMS prepared forms PI films, as the second dielectric layer；
(5) in PI film over-assembles upper electrode layer PET film with electrode.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109870254A (en) * | 2019-03-01 | 2019-06-11 | 厦门大学 | A kind of sliding touch sensor of the condenser type of high sensitivity |
| CN111533081A (en) * | 2020-05-18 | 2020-08-14 | 吉林大学 | Composite flexible pressure sensor based on bionic microstructure and preparation method thereof |
| CN111855029A (en) * | 2020-07-24 | 2020-10-30 | 京东方科技集团股份有限公司 | Flexible pressure sensor, preparation method thereof and electronic device |
| CN113217313A (en) * | 2021-04-22 | 2021-08-06 | 北京航空航天大学杭州创新研究院 | Response actuating device, preparation method and application |
| CN114485376A (en) * | 2021-11-03 | 2022-05-13 | 上海海事大学 | Preparation method of low-temperature flexible strain sensor |
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| CN111855029A (en) * | 2020-07-24 | 2020-10-30 | 京东方科技集团股份有限公司 | Flexible pressure sensor, preparation method thereof and electronic device |
| CN111855029B (en) * | 2020-07-24 | 2022-10-04 | 京东方科技集团股份有限公司 | Flexible pressure sensor, preparation method thereof and electronic device |
| CN113217313A (en) * | 2021-04-22 | 2021-08-06 | 北京航空航天大学杭州创新研究院 | Response actuating device, preparation method and application |
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| CN114485376A (en) * | 2021-11-03 | 2022-05-13 | 上海海事大学 | Preparation method of low-temperature flexible strain sensor |
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