CN103454299A - Portable microbeam X-ray fluorescence spectrophotometer - Google Patents
Portable microbeam X-ray fluorescence spectrophotometer Download PDFInfo
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- CN103454299A CN103454299A CN2013103562701A CN201310356270A CN103454299A CN 103454299 A CN103454299 A CN 103454299A CN 2013103562701 A CN2013103562701 A CN 2013103562701A CN 201310356270 A CN201310356270 A CN 201310356270A CN 103454299 A CN103454299 A CN 103454299A
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Abstract
The invention discloses a portable microbeam X-ray fluorescence spectrophotometer, comprising a main frame, wherein an X-ray light tube and an X-ray detector are arranged on the main frame; a detected sample is arranged within a detection beam range of the X-ray light tube; the X-ray detector is arranged right above the detected sample; the fluorescence spectrophotometer also comprises an X-ray combined refractor which is used for selectively collecting an X-ray fluorescent light generated by a detected sample micro-cell; the X-ray combined refractor is connected with the lower end of the X-ray detector; the X-ray detector is arranged inside an image space of the X-ray combined refractor; the detected sample is arranged inside an object space of the X-ray combined refractor; the upper end of the X-ray detector is connected with a port for connecting an information collection system; a laser device is also arranged on the main frame; the detected sample is arranged within an irradiation range of the laser device. By adopting the portable microbeam X-ray fluorescence spectrophotometer, the structure is simplified and the size is reduced while the microcell resolution ratio is smaller than 10 microns; the portable microbeam X-ray fluorescence spectrophotometer is convenient to carry.
Description
Technical field
The present invention relates to X-ray detection and imaging field, especially a kind of micro-beam X-ray fluorescence spectrometer.
Background technology
Xray fluorescence spectrometer (XRF, X-Ray Fluorescence) can be under normal pressure to various forms (liquid/solid/powder etc.) sample carry out simply, fast, high resolving power and harmless element quantitative measurment analyze.Numerous industries are had higher requirement (such as requiring microcell resolution to be less than 10 microns) to micro-zone analysis ability, detection sensitivity and the on-the site analysis ability of XRF in recent years, but so light weight, the high resolving power of portable on-the site analysis, high sensitivity micro-beam X-ray fluorescence spectrometer (micro-XRF) become current study hotspot.
Current existing Xray fluorescence spectrometer generally is not equipped with the X-ray focusing device, and microcell resolution is generally dozens or even hundreds of micron, up to now, has no the relevant report that microcell resolution is less than the portable micro-beam X-ray fluorescence spectrometer of 10 microns.Existing people proposes the fluorescence spectrophotometer (patent No.: 201010180956.6) based on X ray kapillary device, because used X ray kapillary device to be focused on, microcell resolution is brought up to tens microns, but complex structure, size are huge, can't realize portablely, and microcell resolution is high not enough; Separately someone proposes a kind of energy-dispersion X-ray fluorescence spectrometer (patent No.: 201010004423.2), the primary X-ray produced with X-ray generator removes to irradiate the secondary target, improved detection sensitivity, but apparatus structure and control device complexity, and microcell resolution is not high.
Summary of the invention
For the complex structure, the size that overcome existing Xray fluorescence spectrometer are huge, deficiency that can't reality is portable, microcell resolution is not high, when the invention provides a kind of microcell resolution and be less than 10 microns, simplified structure, reduce size, portable portable micro-beam X-ray fluorescence spectrometer.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of portable micro-beam X-ray fluorescence spectrometer, comprise body frame, X ray light pipe and X-ray detector are installed on described body frame, test sample is positioned at the detecting light beam scope of described X ray light pipe, described X-ray detector be positioned at described test sample directly over, described fluorescence spectrophotometer also comprises the X ray combination refractor of the XRF for optionally gathering the generation of test sample microcell, described X ray combination refractor is connected with the lower end of described X-ray detector, described X-ray detector is positioned at the image space of X ray combination refractor, described test sample is positioned at the object space of described X ray combination refractor,
The upper end of described X-ray detector is connected with the interface for the link information acquisition system, and laser instrument also is installed on described body frame, and described test sample is positioned at the range of exposures of described laser instrument.
Further, described X-ray detector is installed at the middle part of described body frame, and a side of described body frame is installed the first semi-girder, and described X ray light pipe is installed on described the first semi-girder, the opposite side of described body frame is installed the second semi-girder, and described laser instrument is installed on described the second semi-girder.
Further again, described fluorescence spectrophotometer also comprises for placing the sample stage of described test sample, described sample stage be positioned at described X-ray detector under.
Further, the rear side of described body frame is fixedly connected with the upper end of the 3rd semi-girder, and the lower end of described the 3rd semi-girder removably is connected with described sample stage.
Described sample stage is arranged on three-dimensional adjusting mechanism.
Described information acquisition system comprises embedded digital signal processing module and message output module, and described interface is connected with described embedded digital signal processing module, and described embedded digital signal processing module is connected with described message output module.
Technical conceive of the present invention is: X ray combination refractor is a kind of New X ray focusing device based on refraction effect, its theoretical focused spot size can reach nanometer scale, actual test gained focused spot size is usually at several microns, and have advantages of that but size is little, manufacture craft is simple, the good batch machining of robustness, simultaneously due to it based on refraction effect, therefore when being focused on, X-ray beam do not need the light path of turning back, therefore formed sniffer or apparatus structure are compact, size is little, lightweight, are applicable to making the portable instrument device.
Adopt X ray combination refractor as focus device, utilize characteristics that its focal beam spot is little to increase substantially the microcell resolution of Xray fluorescence spectrometer; Utilizing it is the characteristics of Dispersive Devices, and the glimmering pass that can gather selectively specific wavelength according to its object-image relation is conveyed into X-ray detector, has realized that single device has the function of focusing and wavelength selection concurrently.Structurally, acquisition system is connected with main part by a general-purpose interface, both can connect embedded micro treatment module and carry out on-the site analysis, also can connect ordinary PC and carry out conventional analysis.Sample stage links into an integrated entity with main part or separates by body frame, forms Portable desk type spectrometer or handhold portable formula spectrometer to adapt to different on-the site analysis occasions.
Beneficial effect of the present invention is mainly manifested in: 1, adopt the focus device of X ray combination refractor as Xray fluorescence spectrometer, reach higher microcell resolution; 2, X ray combination refractor is Dispersive Devices, by its object-image relation, can select the XRF of specific wavelength to be analyzed; 3, X ray combination refractor is based on refraction effect work, when being focused on, X-ray beam do not need the light path of turning back, therefore formed sniffer or apparatus structure are compact, size is little, lightweight, is applicable to making the portable instrument device, can realize on-the site analysis.
The accompanying drawing explanation
Fig. 1 is the structural representation of a kind of portable micro-beam X-ray fluorescence spectrometer based on X ray combination refractor of the present invention, wherein, 1 is body frame, and 2 is the X ray light pipe, and 3 is X ray combination refractor, 4 is sample, 5 is sample stage, and 6 is laser instrument, and 7 is acquisition system, 8 is X-ray detector, and 9 is interface.
Fig. 2 is the structural representation of prior art micro-beam X-ray fluorescence spectrometer, wherein, 1 ' be X ray CCD, 2 ' be the X ray light pipe, 3 ' be the first X ray kapillary focus device, 4 ' be sample, 5 ' be sample stage, 6 ' be PC, 7 ' be acquisition system, 8 ' be X-ray detector, 9 ' be the second X ray kapillary focus device.
Fig. 3-1 and Fig. 3-2nd, vertical view and the front elevation of the body frame of a kind of portable micro-beam X-ray fluorescence spectrometer based on X ray combination refractor of the present invention, wherein, 1-1 is the first semi-girder, and 1-2 is the second semi-girder, and 1-3 is the 3rd semi-girder.
Fig. 4-1 and Fig. 4-2nd, the front elevation of two-dimension focusing X-ray compound refractive lens and vertical view.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to Fig. 1～Fig. 4, a kind of portable micro-beam X-ray fluorescence spectrometer, comprise body frame 1, X ray light pipe 2 and X-ray detector 8 are installed on described body frame 1, test sample 4 is positioned at the detecting light beam scope of described X ray light pipe 2, described X-ray detector 8 be positioned at described test sample 4 directly over, described fluorescence spectrophotometer also comprises the X ray combination refractor 3 of the XRF for optionally gathering the generation of test sample microcell, described X ray combination refractor 3 is connected with the lower end of described X-ray detector 8, described X-ray detector 8 is positioned at the image space of X ray combination refractor 3, described test sample 4 is positioned at the object space of described X ray combination refractor 3,
The upper end of described X-ray detector 8 is connected with the interface 9 for the link information acquisition system, on described body frame 1, laser instrument 6 also is installed, and described test sample 4 is positioned at the range of exposures of described laser instrument 6.
Further, described X-ray detector 8 is installed at the middle part of described body frame 1, one side of described body frame 1 is installed the first semi-girder 1-1, the described X ray light pipe 2 of the upper installation of described the first semi-girder 1-1,1 opposite side of described body frame is installed the second semi-girder 1-2, the described laser instrument 6 of the upper installation of described the second semi-girder 1-2.
Further again, described fluorescence spectrophotometer also comprises the sample stage 5 for placing described test sample, described sample stage 5 be positioned at described X-ray detector 8 under.
Further, the rear side of described body frame 1 is fixedly connected with the upper end of the 3rd semi-girder 1-3, and the 1-3 lower end of described the 3rd semi-girder removably is connected with described sample stage 5.
Described sample stage 5 is arranged on three-dimensional adjusting mechanism.Realize the three-dimensional regulation of sample stage.
Described information acquisition system comprises embedded digital signal processing module and message output module, and described interface is connected with described embedded digital signal processing module, and described embedded digital signal processing module is connected with described message output module.
The portable micro-beam X-ray fluorescence spectrometer of the present embodiment, comprise three relatively independent parts (as shown in Figure 1): the main part of core is based on the XRF detection system of X ray combination refractor, the information acquisition system be connected by interface with main part, the sample stage that can separate with main part.
Described main part comprises X ray light pipe 2, X-ray detector 8, is placed in the X ray combination refractor 3 of X-ray detector 8 light path front ends, and the laser system of microcell is surveyed in calibration, by a body frame 1, is fixed as one.
Described X ray light pipe, as the probe source of Xray fluorescence spectrometer, function is to launch the X-ray detection light beam, irradiates the test sample surface.
Described X-ray detector, as the XRF information detector, function is the XRF that detection X-ray detection light and test sample interact and produce.
Described X ray combination refractor, can realize the two-dimension focusing to X-ray beam, as specific XRF collection and forwarder, function is to utilize its focus characteristics, the specific XRF that optionally the collected specimens microcell generates, and be conveyed into X-ray detector.
Described laser system, comprise laser instrument 6, and as the illuminator of Xray fluorescence spectrometer, function is surveyed the microcell calibration to sightless XRF detection system.
Described body frame 1, comprise body frame center and 3 semi-girders that stretch away from the body frame center, body frame center one end connects X-ray detector, and the other end connects X ray combination refractor, to guarantee the fluorescence information that X ray combination refractor collects, directly enters X-ray detector.Described X-ray detector other end link information acquisition interface.
Described the first semi-girder stretched away from body frame connects the X ray light pipe, and the X ray light pipe is launched the X-ray detection light beam that carries out fluorescence analysis, directive test sample surface; Described the second semi-girder stretched away from body frame, fixing semiconductor laser on the second semi-girder, by Optical System Design, make it irradiate the detection microcell of test sample as visible light source; Described the 3rd semi-girder stretched away from body frame, as mechanical connecting device, realization is connected or separates with sample stage.
Described information acquisition system, the information analysis disposal system as Xray fluorescence spectrometer, be connected with X-ray detector by the information acquisition interface, comprises embedded digital signal processing module and message output module; Described embedded processing module, can adopt PC to substitute in portable less demanding occasion; Described message output module, can be screen display or printout or screen display and printout the two have concurrently.
Described sample stage, as an objective table that various dimensions are adjustable, realize the position adjustments to test sample, so that Xray fluorescence spectrometer is aimed at detection to the specific microcell of test sample.Described sample stage, can be connected or separate with Xray fluorescence spectrometer by described body frame, connection status, the small sample that is positioned over sample stage for need is analyzed and is detected, released state, Xray fluorescence spectrometer is transformed into handheld instrument, for the local microcell of large-scale infrangibility sample, is analyzed and detects.
With the Xray fluorescence spectrometer (as shown in Figure 2) of prior art, compare, the present invention has cut 1 X-ray focusing device on transmission channel, and X ray combination refractor is micro structural component, itself size and weight are more much smaller than X ray kapillary focus device.Because not line focus of the X-ray beam sent from X-ray tube, no longer need X ray CCD monitoring X ray microbeam hot spot, therefore cut X ray CCD simultaneously, use laser calibration system illumination fluorescence excitation zone instead, the calibration system laser instrument adopts semiconductor laser, be fixed on body frame and can carry out angular adjustment, increasing hardly size and the weight of Xray fluorescence spectrometer.Therefore, micro-beam X-ray fluorescence spectrometer of the present invention can meet light weight, portable requirement.
Claims (6)
1. a portable micro-beam X-ray fluorescence spectrometer, comprise body frame, X ray light pipe and X-ray detector are installed on described body frame, test sample is positioned at the detecting light beam scope of described X ray light pipe, described X-ray detector be positioned at described test sample directly over, it is characterized in that: described fluorescence spectrophotometer also comprises the X ray combination refractor of the XRF for optionally gathering the generation of test sample microcell, described X ray combination refractor is connected with the lower end of described X-ray detector, described X-ray detector is positioned at the image space of X ray combination refractor, described test sample is positioned at the object space of described X ray combination refractor,
The upper end of described X-ray detector is connected with the interface for the link information acquisition system, and laser instrument also is installed on described body frame, and described test sample is positioned at the range of exposures of described laser instrument.
2. portable micro-beam X-ray fluorescence spectrometer as claimed in claim 1, it is characterized in that: described X-ray detector is installed at the middle part of described body frame, one side of described body frame is installed the first semi-girder, described X ray light pipe is installed on described the first semi-girder, the opposite side of described body frame is installed the second semi-girder, and described laser instrument is installed on described the second semi-girder.
3. portable micro-beam X-ray fluorescence spectrometer as claimed in claim 1 or 2 is characterized in that: described fluorescence spectrophotometer also comprises for placing the sample stage of described test sample, described sample stage be positioned at described X-ray detector under.
4. portable micro-beam X-ray fluorescence spectrometer as claimed in claim 3, it is characterized in that: the rear side of described body frame is fixedly connected with the upper end of the 3rd semi-girder, and the lower end of described the 3rd semi-girder removably is connected with described sample stage.
5. portable micro-beam X-ray fluorescence spectrometer as claimed in claim 3, it is characterized in that: described sample stage is arranged on three-dimensional adjusting mechanism.
6. portable micro-beam X-ray fluorescence spectrometer as claimed in claim 3, it is characterized in that: described information acquisition system comprises embedded digital signal processing module and message output module, described interface is connected with described embedded digital signal processing module, and described embedded digital signal processing module is connected with described message output module.
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Cited By (5)
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| CN108318516A (en) * | 2018-04-23 | 2018-07-24 | 浙江工业大学 | A kind of micromation X-ray array combination refractor integrated package |
| CN108344758A (en) * | 2018-01-11 | 2018-07-31 | 北京师范大学 | A kind of portable micro-beam X-ray fluorescence spectrometer and application method of capillary focusing |
| CN108417288A (en) * | 2018-04-23 | 2018-08-17 | 浙江工业大学 | A kind of production method of micromation X-ray array combination refractor integrated package |
| CN108459037A (en) * | 2018-04-23 | 2018-08-28 | 浙江工业大学 | Microbeam X-ray fluorescence analytical method based on X-ray array combination refractor |
| CN108709899A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on X-ray array combination refractor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108459037A (en) * | 2018-04-23 | 2018-08-28 | 浙江工业大学 | Microbeam X-ray fluorescence analytical method based on X-ray array combination refractor |
| CN108709899A (en) * | 2018-04-23 | 2018-10-26 | 浙江工业大学 | MICRO-BEAM XRF ANALYSIS system based on X-ray array combination refractor |
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