CN213835520U - Driving structure of cathode baffle - Google Patents
Driving structure of cathode baffle Download PDFInfo
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- CN213835520U CN213835520U CN202022674415.0U CN202022674415U CN213835520U CN 213835520 U CN213835520 U CN 213835520U CN 202022674415 U CN202022674415 U CN 202022674415U CN 213835520 U CN213835520 U CN 213835520U
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- baffle
- connecting rod
- cathode baffle
- cathode
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Abstract
The utility model provides a drive structure of cathode baffle, including driving actuating cylinder, hinge structure, cavity and cathode baffle, the both ends of cathode baffle are rotatable the installing on the cavity respectively, the one end of cathode baffle is linked with the one end of linking the structure mutually, hinge structure's the other end is articulated with the piston rod that drives actuating cylinder, it can drive the cathode baffle through hinge structure and do the rotatory motion of opening and shutting to drive actuating cylinder. The utility model discloses holistic drive structure only need set up a set of can realize opening and shutting and the control of opening and shutting of negative pole baffle in limited space, also guarantees the function of negative pole baffle simultaneously, still great saving cavity space, reduced the cost of equipment.
Description
Technical Field
The utility model relates to a vacuum coating machine field, in particular to drive structure of vacuum coating machine's negative pole baffle.
Background
Along with the development of vacuum coating technology, various novel film systems such as multi-element composite coatings and multi-layer composite coatings appear, so that coating equipment is required to be provided with multiple groups of cathodes, the multiple groups of cathodes can work simultaneously, and the multiple groups of cathodes can work simultaneously to improve the coating production efficiency in industrial production.
At present, in mainstream coating equipment used in large-scale industrial production, a baffle is designed to be an opening-closing type baffle, and an opening-closing driving structure of the opening-closing type baffle in the prior art is very complex, so that the space occupied by the opening-closing type baffle in a cavity is large, and the cost of the equipment is increased.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a simple structure, can save cavity space, reduce equipment cost's drive structure of vacuum coating machine's negative pole baffle.
In order to achieve the above object, the present invention provides the following technical solutions:
the utility model provides a drive structure of cathode baffle, is including driving actuating cylinder, hinge structure, cavity and cathode baffle, the both ends of cathode baffle are rotatable the installation respectively on the cavity, the one end of cathode baffle is linked mutually with the one end of linking the structure, hinge structure's the other end is articulated with the piston rod that drives actuating cylinder, it can drive the cathode baffle through hinge structure and do the rotation motion of opening and shutting.
Furthermore, the hinge structure comprises a first hinge part and a second hinge part, the cathode baffle comprises a left cathode baffle and a right cathode baffle, the lower end of the first hinge part is hinged to the left cathode baffle, and the lower end of the second hinge part is hinged to the right cathode baffle.
Furthermore, the first hinge portion comprises a first connecting rod and a second connecting rod, and the lower end of the first connecting rod is fixedly connected with the upper end of the second connecting rod through a first connection groove and a first screw.
Furthermore, a plurality of first mounting holes are formed in the front end face of the left cathode baffle and used for being hinged to a second connecting rod, and the second connecting rod is mounted on the first mounting holes through a first gasket and a first bolt.
Further, the second hinge portion comprises a third connecting rod and a fourth connecting rod, and the lower end of the third connecting rod is fixedly connected with the upper end of the fourth connecting rod through a second connection groove and a second screw.
Furthermore, a plurality of second mounting holes are formed in the front end face of the right cathode baffle and used for being hinged to a fourth connecting rod, and the fourth connecting rod is mounted on the second mounting holes through a second gasket and a second bolt.
Further, the driving cylinder comprises a piston rod, a corrugated pipe metal mechanical sealing element, a cylinder barrel, a cylinder top cover, a first sealing part and a second sealing part, the piston rod is mounted in the cylinder barrel through the corrugated pipe metal mechanical sealing element, the piston rod can move up and down in the cylinder barrel, the cylinder top cover is arranged at the top of the cylinder barrel, the first sealing part is mounted on the cylinder top cover, the second sealing part is mounted in the cylinder top cover, the first sealing part and the second sealing part are used for sealing the cylinder top cover, and the corrugated pipe metal mechanical sealing element is used for sealing the piston rod in the cylinder barrel.
Furthermore, the lower end of the piston rod is hinged with the upper ends of the third connecting rod and the first connecting rod respectively.
The utility model has the advantages that:
the utility model discloses a drive actuating cylinder and pass through hinge structure and connect negative pole baffle, when negative pole baffle is opened to needs, drive actuating cylinder drive hinge structure and descend to open the negative pole baffle, when needs closed negative pole baffle, then drive actuating cylinder drive hinge structure and rise, thereby close the negative pole baffle, the utility model discloses holistic drive structure only need set up a set of can realize opening and shutting and the control of opening and shutting of negative pole baffle in limited space, also guarantees the function of negative pole baffle simultaneously, still great saving cavity space, reduced the cost of equipment.
Drawings
Fig. 1 is a partial cross-sectional view of the present invention;
fig. 2 is a partial cross-sectional view of the hinge structure and cathode baffle of the present invention;
fig. 3 is a sectional view of the driving cylinder of the present invention.
Detailed Description
The invention is further explained below with reference to the drawings:
as shown in fig. 1 to 3, a driving structure of a cathode baffle includes a driving cylinder 1, a hinge structure 2, a cavity 3 and a cathode baffle 4, two ends of the cathode baffle 4 are respectively rotatably mounted on the cavity 3, one end of the cathode baffle 4 is linked with one end of the link structure 2, the other end of the hinge structure 2 is hinged to a piston rod of the driving cylinder 1, and the driving cylinder 1 can drive the cathode baffle 4 to rotate to open and close through the hinge structure 2.
The utility model discloses a drive actuating cylinder 1 and connect negative pole baffle 4 through hinge structure 2, when negative pole baffle 4 is opened to needs, drive actuating cylinder 1 and drive hinge structure 2 and descend to open negative pole baffle 4, when needs closed negative pole baffle 4, then drive actuating cylinder 1 and drive hinge structure 2 and rise, thereby close negative pole baffle 4, the utility model discloses holistic drive structure only need set up a set of can realize opening and shutting of negative pole baffle 4 and the control of opening and shutting of negative pole baffle 4 in limited space, also guarantees negative pole baffle 4's function simultaneously, still great saving cavity space, reduced the cost of equipment.
In this embodiment, the hinge structure includes a first hinge portion and a second hinge portion, the cathode baffle includes a left cathode baffle 41 and a right cathode baffle 42, a lower end of the first hinge portion is hinged to the left cathode baffle 41, and a lower end of the second hinge portion is hinged to the right cathode baffle 42.
In this embodiment, the first hinge portion includes a first connecting rod 211 and a second connecting rod 212, and a lower end of the first connecting rod 211 is fixedly connected to an upper end of the second connecting rod 212 through a first connecting slot 213 and a first screw 214. The first hinge part is divided into two sections, one section is the first connecting rod 211, the other end is the second connecting rod 212, and the lower end of the first connecting rod 211 is fixedly connected with the upper end of the second connecting rod 212 through the first connecting groove 213 and the first screw 214, so that the installation of the first connecting part is greatly facilitated.
In this embodiment, the front end surface of the left cathode baffle 41 is provided with a plurality of first mounting holes 411, the first mounting holes 411 are used for being hinged to the second connecting rod 212, and the second connecting rod 212 is mounted on the first mounting holes 411 through a first gasket and a first bolt 216. A plurality of first mounting holes 411 are provided so that the opening and closing angle of the left cathode barrier 41 can be conveniently adjusted.
In this embodiment, the second hinge portion includes a third connecting rod 221 and a fourth connecting rod 222, and a lower end of the third connecting rod 221 and an upper end of the fourth connecting rod 222 are fixedly connected through a second connecting slot 223 and a second screw 224.
In this embodiment, a plurality of second mounting holes 412 are disposed on the front end surface of the right cathode baffle, the second mounting holes 412 are used for being hinged to the fourth connecting rod 222, and the fourth connecting rod 222 is mounted on the second mounting holes 412 through a second gasket and a second bolt 226.
In this embodiment, the driving cylinder includes a piston rod 11, a bellows metal mechanical seal 12, a cylinder barrel 13, a cylinder top cover 14, a first sealing portion 15, and a second sealing portion 16, the piston rod 11 is installed in the cylinder barrel 13 through the bellows metal mechanical seal 12, the piston rod 11 can move up and down in the cylinder barrel 13, the cylinder top cover 14 is disposed at the top of the cylinder barrel 13, the first sealing portion 15 is installed on the cylinder top cover 14, the second sealing portion 16 is installed in the cylinder top cover 14, the first sealing portion 15 and the second sealing portion 16 are used for sealing the cylinder top cover 14, and the bellows metal mechanical seal 12 is used for sealing the piston rod 11 in the cylinder barrel 13. In the embodiment, the metal mechanical sealing element 12 of the corrugated pipe has the characteristics of high strength, good flexibility, light weight and the like, and because the piston rod 11 moves linearly and the oil seal structure is generally used for sealing in rotation, the metal mechanical sealing element 12 of the corrugated pipe has the advantages of more stable performance and more durability compared with the sealing structure for sealing the piston rod.
In this embodiment, the lower end of the piston rod 11 is hinged to the upper ends of the third link 221 and the first link 211, respectively.
The above description is not intended to limit the technical scope of the present invention, and any modifications, equivalent changes and modifications made to the above embodiments according to the technical spirit of the present invention are all within the scope of the technical solution of the present invention.
Claims (8)
1. A driving structure of a cathode baffle is characterized in that: including driving actuating cylinder, hinge structure, cavity and negative pole baffle, the both ends of negative pole baffle are rotatable installation respectively on the cavity, the one end of negative pole baffle is linked mutually with the one end of linking the structure, hinge structure's the other end is articulated with the piston rod that drives actuating cylinder, it can drive the negative pole baffle through hinge structure and do the rotation motion of opening and shutting.
2. The driving structure of a cathode baffle according to claim 1, wherein: the hinge structure comprises a first hinge part and a second hinge part, the cathode baffle comprises a left cathode baffle and a right cathode baffle, the lower end of the first hinge part is hinged to the left cathode baffle, and the lower end of the second hinge part is hinged to the right cathode baffle.
3. The driving structure of a cathode baffle according to claim 2, wherein: the first hinge part comprises a first connecting rod and a second connecting rod, and the lower end of the first connecting rod is fixedly connected with the upper end of the second connecting rod through a first connecting groove and a first screw.
4. The driving structure of a cathode baffle according to claim 3, wherein: the front end face of the left cathode baffle is provided with a plurality of first mounting holes, the first mounting holes are used for being hinged to a second connecting rod, and the second connecting rod is mounted on the first mounting holes through a first gasket and a first bolt.
5. The driving structure of a cathode baffle according to claim 2, wherein: the second hinge part comprises a third connecting rod and a fourth connecting rod, and the lower end of the third connecting rod is fixedly connected with the upper end of the fourth connecting rod through a second connecting groove and a second screw.
6. The driving structure of a cathode baffle according to claim 5, wherein: the front end face of the right cathode baffle is provided with a plurality of second mounting holes, the second mounting holes are used for being hinged to a fourth connecting rod, and the fourth connecting rod is mounted on the second mounting holes through a second gasket and a second bolt.
7. The driving structure of a cathode baffle according to claim 5, wherein: the driving cylinder comprises a piston rod, a corrugated pipe metal mechanical sealing element, a cylinder barrel, a cylinder top cover, a first sealing part and a second sealing part, the piston rod is installed in the cylinder barrel through the corrugated pipe metal mechanical sealing element, the piston rod can do lifting motion in the cylinder barrel, the cylinder top cover is arranged at the top of the cylinder barrel, the first sealing part is installed on the cylinder top cover, the second sealing part is installed in the cylinder top cover, the first sealing part and the second sealing part are used for sealing the cylinder top cover, and the corrugated pipe metal mechanical sealing element is used for sealing the piston rod in the cylinder barrel.
8. The driving structure of a cathode baffle according to claim 7, wherein: the lower end of the piston rod is hinged with the upper ends of the third connecting rod and the first connecting rod respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022674415.0U CN213835520U (en) | 2020-11-18 | 2020-11-18 | Driving structure of cathode baffle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022674415.0U CN213835520U (en) | 2020-11-18 | 2020-11-18 | Driving structure of cathode baffle |
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| Publication Number | Publication Date |
|---|---|
| CN213835520U true CN213835520U (en) | 2021-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022674415.0U Active CN213835520U (en) | 2020-11-18 | 2020-11-18 | Driving structure of cathode baffle |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113879859A (en) * | 2021-10-08 | 2022-01-04 | 扬州科博新材料有限公司 | Low molecular weight polyethylene is loading attachment for powder |
| CN114752894A (en) * | 2022-04-14 | 2022-07-15 | 东莞市华升真空镀膜科技有限公司 | Deposition source baffle mechanism and coating equipment with same |
-
2020
- 2020-11-18 CN CN202022674415.0U patent/CN213835520U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113879859A (en) * | 2021-10-08 | 2022-01-04 | 扬州科博新材料有限公司 | Low molecular weight polyethylene is loading attachment for powder |
| CN114752894A (en) * | 2022-04-14 | 2022-07-15 | 东莞市华升真空镀膜科技有限公司 | Deposition source baffle mechanism and coating equipment with same |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 523000 Room 401 and 501, building 5, No.2 mashanmiao Road, baihuadong, Dalingshan Town, Dongguan City, Guangdong Province Patentee after: Guangdong Huasheng Nanotechnology Co.,Ltd. Address before: 523000 Room 401 and 501, building 5, No.2 mashanmiao Road, baihuadong, Dalingshan Town, Dongguan City, Guangdong Province Patentee before: DONGGUAN HUASHENG VACUUM PLATED FILM TECHNOLOGY CO.,LTD. |
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| CP01 | Change in the name or title of a patent holder |