CN103447690B - Laser light path beam splitting system and method thereof - Google Patents
Laser light path beam splitting system and method thereof Download PDFInfo
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- CN103447690B CN103447690B CN201210176910.6A CN201210176910A CN103447690B CN 103447690 B CN103447690 B CN 103447690B CN 201210176910 A CN201210176910 A CN 201210176910A CN 103447690 B CN103447690 B CN 103447690B
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- 238000000034 method Methods 0.000 title claims abstract description 32
- 230000010287 polarization Effects 0.000 claims abstract description 88
- 230000003287 optical effect Effects 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 5
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 5
- 230000000644 propagated effect Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 238000009966 trimming Methods 0.000 abstract 3
- 230000000694 effects Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 238000005111 flow chemistry technique Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
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Abstract
The invention discloses a laser light path beam splitting system and a method thereof. The laser light path beam splitting system comprises at least one light beam polarization state trimming device and a beam splitting device. A lens group is clamped on the light beam polarization state trimming device and includes a TFP (thin film polarizer) lens and a reflector. The TFP lens is utilized to split beams and the light beam polarization state trimming device is turned to trim incident light polarization state reflected on the TFP lens, so that two light beam energy after beam splitting is balanced.
Description
[technical field]
The present invention relates to a kind of method of laser optical path beam splitting system and correspondence.
[background technology]
Along with the development of laser technology, Laser Processing more and more becomes a kind of main flow processing mode.Meanwhile, the harsh processing request that materials processing and Excimer lithography, medical and beauty treatment, instrument and sensor market constantly propose, provides space and the environment of growth to Laser Processing.
At present, for multiaxis laser process equipment more than diaxon, for the ease of manipulation, the individual difference reducing each between centers processing quality and reduction production cost etc., laser process equipment usually using a laser instrument as laser source, and carries out light splitting to realize Multi-axis Machining in light path system.The spectroscopic modes of laser process equipment light path system has multiple, mainly different because of optical maser wavelength and actual conditions.Modal spectroscopic modes has spectroscope light splitting, utilize different wave length laser and each crystalloid effect and the modes such as light splitting.
For spectroscope light splitting, after spectroscope can not fully ensure light splitting, the energy of two light path systems reaches balance.Require undemanding laser process equipment for each between centers capacity volume variance, this mode is both economical feasible; But for accurately machined laser process equipment, the fine difference of each between centers energy will have a strong impact on processing quality, and therefore the use of this spectroscopic modes is restricted.
This kind of mode of light splitting for laser and each crystalloid effect, is generally too busy to get away electrical control, also may has the additional structures such as cooling system in addition, such as AOM (Acousto-Optic Modulator) light splitting.This kind of spectroscopic modes need interact with crystal because of laser, and crystal itself can absorption portion laser energy, although there is cooling system to cool crystal, can not eliminate heat affecting completely.Heat affecting makes crystal produce thermal lensing effect and broken beam quality, and thermal effect can have influence on the stability of beam energy after light splitting.Therefore, its effect of this kind of spectroscopic modes is also not ideal.
[summary of the invention]
Based on beam quality after the imbalance of two the light path system laser energies brought after above-mentioned common spectroscopic modes light splitting, light splitting, destroyed and energy stability such as to be affected at the phenomenon, has invented this laser optical path beam splitting system and light-splitting method thereof.
A kind of laser optical path beam splitting system provided by the present invention, it comprises at least one light polarization micromatic setting and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises one the one TFP eyeglass and a catoptron, and described light-dividing device is provided with the 2nd TFP eyeglass.
Wherein, a described TFP eyeglass adopts ZnSe as base material.
Wherein, the optical receiver that corresponding described lens set is arranged also is comprised.
Wherein, this system also comprises some optical polarization eyeglasses.
Wherein, along the direction of propagation of light path, the transformational structure of a polarization state is set before described light polarization micromatic setting.
Corresponding said system, there is provided a kind of laser optical path light-splitting method: first, by the light splitting of laser beam through at least one light polarization micromatic setting and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises one the one TFP eyeglass and a catoptron, and described light-dividing device is provided with the 2nd TFP eyeglass, and wherein light beam is after a described TFP eyeglass, transmitted light is propagated to described 2nd TFP eyeglass, and described reflected light is reflected by described catoptron.
Wherein, light beam after described catoptron reflection, and is absorbed by an optical receiver.
Wherein, in the process that laser beam is propagated to described light-dividing device at described light polarization micromatic setting, the polarization state of light beam can be regulated by some optical polarization eyeglasses.
Wherein, if incident beam is horizontal linear polarization or perpendicular linear polarization, the direction of propagation along light beam is added a polarization converted structure and is transformed the light beam into the linearly polarized light beam meeting a TFP eyeglass before described light polarization micromatic setting.
This system and method thereof mainly utilize TFP (Thin Film Polarizers) eyeglass to carry out light splitting to the basic total transmissivity of P-pol light beam and to the basic total reflection function of S-pol light beam to light beam.Further, by rotary light beam polarization state micromatic setting, the incident light polarization state be incident on a TFP eyeglass is finely tuned, finally reach the balance of two beam energies after light splitting.
Under normal circumstances, in order to meet some functional requirement, between light polarization micromatic setting and light-dividing device, multiple catoptron, lens etc. also can be placed not to change the ordinary optical eyeglass that light beam polarization state is basic function.These eyeglasses can affect the light polarization be incident on the 2nd TFP eyeglass more or less.Now, then can be solved by rotating fine-regulating device and add the unbalanced problem of two beam energies after light splitting that these conventional eyeglasses bring.
[accompanying drawing explanation]
In conjunction with embodiment, the inventive method is further described with reference to the accompanying drawings.
Fig. 1 is the light polarization micromatic setting schematic diagram of laser optical path beam splitting system of the present invention and method thereof;
Fig. 2 is the fundamental diagram of laser optical path beam splitting system of the present invention and method thereof;
Fig. 3 is the light polarization transformational structure schematic diagram one of laser optical path beam splitting system of the present invention and method thereof;
Fig. 4 is the light polarization transformational structure schematic diagram two of laser optical path beam splitting system of the present invention and method thereof.
[embodiment]
The invention will be further described in conjunction with the embodiments with reference to the accompanying drawings.
For object of the present invention, technical scheme and advantage are clearly expressed, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only for explaining the present invention, being not intended to limit the present invention.
Embodiments of the invention 1 provide a kind of laser optical path beam splitting system, comprise at least one light polarization micromatic setting 100 and a light-dividing device 200.
Clamping one lens set on light polarization micromatic setting 100, this lens set comprises one the one TFP eyeglass 101 and a catoptron 102, and described light-dividing device is provided with the 2nd TFP eyeglass.
One TFP eyeglass 101 adopts ZnSe as base material, and to reduce the thermal effect in use procedure, simultaneously ZnSe also has the thin plate eyeglass of higher level degree as the eyeglass of base material.
This light polarization micromatic setting 100 also comprises the optical receiver 103 that corresponding lens set is arranged.Because a TFP eyeglass absolutely can not cross 45 ° of linearly polarized light beams by full impregnated, for a TFP eyeglass, incident beam is P-pol light beam, and an optical receiver 103 of therefore corresponding lens set setting, to absorb unnecessary laser.
This beam splitting system also comprises some optical polarization eyeglasses 300.It is arranged between light polarization micromatic setting 100 and light-dividing device 200, and it comprises multiple catoptron, lens etc. not to change the optical mirror slip of the non-basic function of light beam polarization state.Particularly, in order to obtain specific optical path length or meet the hot spot etc. of specifying size, the middle more than one piece that must have is for the reflecting optics of optic path and the lens etc. for expanding, contracting bundle, and the reflective coating that these eyeglasses plate or antireflective coating can make the light beam after optical mirror slip 300 introduce additive phase.Implement in this light splitting procedure in reality, although the 2nd TFP eyeglass on light-dividing device 200 to the transmitance of P-pol light beam FG and to the reflectivity of S-pol light beam FH all more than 98%, both can not be identical.Therefore, if the incident beam be incident on light-dividing device 200 is 45 ° of linearly polarized light beams, two light path system energy complete equipilibriums after light splitting can not be met; In addition, laser is transferred in the process of light-dividing device 200 through light polarization micromatic setting 100, in order to obtain specific optical path length and meet the hot spot etc. of specifying size, the middle more than one piece that must have is for the reflecting optics of optic path and the lens etc. for expanding, contracting bundle, the reflective coating that these eyeglasses plate or antireflective coating can make the light beam after optical mirror slip 300 introduce additive phase, and then affect the polarization state of light beam.This impact makes light beam be incident on light-dividing device 200 with a certain non-45 ° of linear polarization state, is incident to the energy complete equipilibrium that light-dividing device 200 can not ensure two light path systems after light splitting with this state.
Now, must can be solved by rotating fine-regulating device 100 and add the unbalanced problem of two beam energies after light splitting that these conventional eyeglasses bring.
This beam splitting system also comprises polarization converted structure, before being arranged on light polarization micromatic setting 100, for the incident beam that polarization state is horizontal linear polarization or perpendicular linear polarization, the light beam through this device will change at 45 ° or-45 ° of linearly polarized light beams, as shown in Figure 3.
For circularly polarized light, polarization converted structure to be set according to the concrete condition of laser instrument inside light path.
Based on above-mentioned laser optical path beam splitting system, embodiment 2 correspondence provides a kind of laser optical path light-splitting method.
First, by the light splitting of laser beam through at least one light polarization micromatic setting 100 and a light-dividing device 200, clamping one lens set on light polarization micromatic setting 100, this lens set comprises one the one TFP eyeglass 101 and a catoptron 102, described light-dividing device is provided with the 2nd TFP eyeglass, wherein light beam is after one the one TFP eyeglass 101, and transmitted light BD propagates to the 2nd TFP eyeglass, and reflected light BC is reflected by catoptron 102.
In enforcement this method process, first the light beam polarization state of light path system must be judged. be 45 ° or-45 ° of linearly polarized light beams for the light beam entering light polarization micromatic setting 100, then directly light beam can be incorporated into light path system light splitting light polarization micromatic setting 100 realizing the inventive method, as shown in Figure 1.
But light beam absolutely can not cross 45 ° of linearly polarized light beams by full impregnated because of a TFP eyeglass, and for a TFP eyeglass, incident beam is P-pol light beam, therefore, assorted, astigmatism receiver 103 must be increased to absorb unnecessary laser.
It is significant to note that, the plane of incidence of the TFP eyeglass 101 on light polarization micromatic setting 100, the beam reflection transmission namely in Fig. 1 form the polarization direction that ABC plane must be parallel to incident beam; Brewster angle is necessary for for its incident angle of light beam be incident on a TFP eyeglass 101.Material because of TFP eyeglass is ZnSe, and to be 2.41, GuBrewsterJiao to the refractive index n of 9.4um wavelength laser be for it:
θ
Brewster＝tan
-1n＝67.5°
Implement in this light splitting procedure in reality, although the 2nd TFP eyeglass on light-dividing device 200 to the transmitance of P-pol light beam and to the reflectivity of S-pol light beam all more than 98%, both can not be identical.Therefore, if the incident beam be incident on light-dividing device 200 is 45 ° of linearly polarized light beams, two light path system energy complete equipilibriums after light splitting can not be met; In addition, laser is transferred in the process of light-dividing device 200 through light polarization micromatic setting 100, the middle more than one piece that must have is for the eyeglass of optic path or for meeting the optical mirror slip 300 that some functional requirement increases, and the meeting change more or less of these eyeglasses transfers to the polarization state of 45 ° of linearly polarized lights on light-dividing device 200.
Based on above two facts, we must finely tune light polarization micromatic setting 100, the incident light making to be incident on light-dividing device 200 is incident with certain polarization state 45 ° of-β, as shown in Figure 2, and the balance of two light path system energy after supposing to meet light splitting completely under this polarization state.Under this polarization state, 45 ° of-β linear polarization incident light components 9 by the 2nd TFP lens transmission, are supposed through e1 as P-pol light beam, and e2, e1 are much larger than e2 in reflection; 45 ° of-β linear polarization incident light components 10, are supposed to reflect E1, through E2, E1 much larger than E2 by the 2nd TFP lens reflecting as S-pol light beam.Then must have:
e1+E2＝e2+E1
Such as, toward clockwise direction fine setting light polarization micromatic setting 100 α degree, then now for light polarization micromatic setting 100, the plane of incidence 6 of its TFP eyeglass 101 and the polarization direction angle of 45 ° of linear polarization incident lights 4 are α.So, 45 ° of linear polarization incident light components 5 are as S-pol light beam, and the overwhelming majority will be reflected onto on assorted, astigmatism receiver 3 and sponge, and 45 ° of linear polarization incident light components 7 are incident on light-dividing device 200 as the transmission of P-pol light beam.Time between fine setting light polarization micromatic setting 100 and light-dividing device 200 without any optical mirror slip, then 45 ° of linear polarization incident light components 7 are 45 ° of-β linearly polarized lights, namely
α＝β
When having optical mirror slip between fine setting light polarization micromatic setting 100 and light-dividing device 200, then
β＝α+γ
The positive and negative of γ angle depends on optical mirror slip 300 how to affect the light beam polarization state be incident on light-dividing device 200.In this example, if introduce polarization clockwise, then positive sign is got; Counterclockwise introducing polarization, then get negative sign.
For the incident beam that polarization state is horizontal linear polarization or perpendicular linear polarization, by increasing a polarization converted structure before light polarization micromatic setting 100, as shown in Figure 3, the light beam through this device will change at 45 ° or-45 ° of linearly polarized light beams.
For circularly polarized light, polarization converted structure to be designed according to the concrete condition of laser instrument inside light path.
Claims (9)
1. a laser optical path beam splitting system, it is characterized in that: comprise at least one light polarization micromatic setting and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises one the one TFP eyeglass and a catoptron, and described light-dividing device is provided with the 2nd TFP eyeglass.
2. laser optical path beam splitting system according to claim 1, is characterized in that: a described TFP eyeglass adopts ZnSe as base material.
3. laser optical path beam splitting system according to claim 1 and 2, is characterized in that: also comprise the optical receiver that corresponding described lens set is arranged.
4. laser optical path beam splitting system according to claim 1, is characterized in that: this system also comprises some optical polarization eyeglasses.
5. laser optical path beam splitting system according to claim 1, is characterized in that: along the direction of propagation of light path, arranges the transformational structure of a polarization state before described light polarization micromatic setting.
6. a laser optical path light-splitting method, it is characterized in that: first, by the light splitting of laser beam through at least one light polarization micromatic setting and a light-dividing device, clamping one lens set on described light polarization micromatic setting, this lens set comprises one the one TFP eyeglass and a catoptron, and described light-dividing device is provided with the 2nd TFP eyeglass, and wherein light beam is after a described TFP eyeglass, transmitted light is propagated to described 2nd TFP eyeglass, and described reflected light is reflected by described catoptron.
7. laser optical path light-splitting method according to claim 6, is characterized in that: light beam after described catoptron reflection, and is absorbed by an optical receiver.
8. the laser optical path light-splitting method according to claim 6 or 7, is characterized in that: in the process that laser beam is propagated to described light-dividing device at described light polarization micromatic setting, can be regulated the polarization state of light beam by some optical polarization eyeglasses.
9. laser optical path light-splitting method according to claim 6, it is characterized in that: if incident beam is horizontal linear polarization or perpendicular linear polarization, the direction of propagation along light beam is added a polarization converted structure and is transformed the light beam into the linearly polarized light beam meeting a TFP eyeglass before described light polarization micromatic setting.
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| CN102252975A (en) * | 2011-03-25 | 2011-11-23 | 西北大学 | Forward degenerate four-wave mixing based isotope detection method with ultrahigh sensitivity |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007058921A (en) * | 2005-08-22 | 2007-03-08 | Funai Electric Co Ltd | Optical pickup apparatus |
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Patent Citations (8)
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|---|---|---|---|---|
| CN1426236A (en) * | 2001-12-12 | 2003-06-25 | 大億科技股份有限公司 | Triple prism type projection display device |
| CN1485647A (en) * | 2002-09-27 | 2004-03-31 | Jds尤尼费斯公司 | Wave length selective laser beam divider |
| CN2938491Y (en) * | 2006-08-11 | 2007-08-22 | 北京国科世纪激光技术有限公司 | Multi-wavelength laser of coaxial light generation |
| CN101382664A (en) * | 2008-10-23 | 2009-03-11 | 高秀敏 | Polarization state non-uniform distribution light beam generating method and apparatus thereof |
| CN201576164U (en) * | 2009-11-13 | 2010-09-08 | 惠州市华阳多媒体电子有限公司 | Micro projector used for 3D display |
| CN101825703A (en) * | 2010-01-25 | 2010-09-08 | 华北电力大学（保定） | Improved pulsed laser distance measurement device and laser distance measurement method utilizing same |
| CN201754204U (en) * | 2010-06-22 | 2011-03-02 | 深圳市大族激光科技股份有限公司 | Laser splitting device and laser processing device |
| CN102252975A (en) * | 2011-03-25 | 2011-11-23 | 西北大学 | Forward degenerate four-wave mixing based isotope detection method with ultrahigh sensitivity |
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Address after: 518000 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's CNC Technology Co.,Ltd. Address before: 518000 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. |