CN103424991A - Silicon wafer linear exchange device and method - Google Patents
Silicon wafer linear exchange device and method Download PDFInfo
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- CN103424991A CN103424991A CN201210153116XA CN201210153116A CN103424991A CN 103424991 A CN103424991 A CN 103424991A CN 201210153116X A CN201210153116X A CN 201210153116XA CN 201210153116 A CN201210153116 A CN 201210153116A CN 103424991 A CN103424991 A CN 103424991A
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Abstract
The invention relates to the field of lithography device, and especially relates to a silicon wafer linear exchange device and a method adopting the device. The method and device are used for delivering materials between a workbench and an external device. The device comprises a guide rail, a first slide block and a second slide block arranged on the guide rail, a first mechanical arm connected with the first slide block through a mechanical arm connection connector; and a second mechanical arm connected with the second slide block. The first and second slide blocks can perform staggered reciprocating movements along the guide rail. The first and second mechanical arms are positioned in two different movement planes which are parallel. The invention adopts an avoidance design, such that the first and second mechanical arms move in two parallel planes, such that the two sets of mechanical arms run from opposite directions. When the first mechanical arm exchange silicon wafer with the work bench, the second mechanical arm simultaneously carries out silicon wafer exchange with a manipulator. When the exchange is finished, the two sets of mechanical arms perform reverse movements simultaneously, and next exchange is carried out. Therefore, half of movement exchange time is reduced.
Description
Technical field
The present invention relates to the lithographic equipment field, relate in particular to a kind of silicon chip straight line switch and method.
Background technology
Silicon chip transmission system is applied in numerous semiconductor equipments such as lithographic equipment, the external material interface as these equipment, carry out the pre-service of material, it must be reliable and efficient, and can provide certain material transferring precision, just refer to that silicon chip transmission system can keep certain precision to send worktable to the attitude of appointment material, can greatly reduce like this worktable and find the time of silicon chip reference marker under alignment system, more very be transmitted upper slice after, alignment system need not pass through the working table movement passing marker, directly just can capture of labels, greatly improved the work efficiency of this kind equipment, improved productive rate, cost-saving.
Generally speaking can built-in prealignment equipment during transmission system design, bias and deflection to silicon chip are corrected, but this repeatable accuracy is difficult to keep after material is transmitted to worktable, two key factors are arranged, in the shock frame of first worktable in machine, and transmission system is usually outside shock frame, the drift of vibroshock makes worktable and transmission system with certain frequency relative motion, it two is that silicon chip after prealignment normally is responsible for transmitting to worktable by mechanical arm, general mechanical arm is all to use commercial robot, but precision is very low, generally can only reach 100um, so just make the silicon chip after prealignment introduce a larger deviations after by robot, being transferred to worktable.
For the former generally by arrange the secondary prealignment device by worktable at when handing-over dynamic compensation, but design for the latter mechanical arm (being silicon chip straight line switch) that single-degree-of-freedom can the two-way simultaneous motion, solve.
At present, the action that silicon chip straight line switch adopts the Single Mechanical arm successively to complete film releasing and get sheet step by step more, or the action that adopts double mechanical arms to interlock film releasing and got sheet, can not reach action simultaneously, work efficiency is lower, and some adopts the photo-etching machine silicon chip switch of cross guide rail can reach two mechanical arms and moves simultaneously, but it is excessive to take up room, the drive unit needed is also larger, and the precision of device is also lower.
Therefore, how providing a kind of work efficiency and high silicon chip straight line switch and method of precision that can improve the exchange of silicon chip straight line is this area staff technical matters urgently to be resolved hurrily.
Summary of the invention
The object of the present invention is to provide a kind of silicon chip straight line switch and method, to solve existing silicon chip straight line switch inefficiency, problem that precision is low.
For solving the problems of the technologies described above, the invention provides a kind of silicon chip straight line switch, between worktable and external device (ED), transmitting material, it is characterized in that, comprise guide rail; Be arranged at the first slide block, the second slide block on described guide rail, described first, second slide block can be done staggered to-and-fro movement along described guide rail; The first mechanical arm, described the first mechanical arm connects described the first slide block by the mechanical arm adaptor; And second mechanical arm, described the second mechanical arm connects described the second slide block, and described the first mechanical arm, the second mechanical arm are in two different plane of movement that are parallel to each other.
Preferably, on described first, second slide block, be respectively equipped with driving mechanism, described driving mechanism is linear electric motors.
Preferably, described silicon chip straight line switch also comprises that one for preventing particulate matter that described first, second mechanical arm produces at the motion process sealing unit to external diffusion.
Preferably, described sealing unit comprises the sealing unit pedestal, on described sealing unit pedestal, along described first, second manipulator motion direction, is provided with two bar-shaped troughs, and described first, second mechanical arm is arranged in described bar-shaped trough and moves along bar-shaped trough; Magnetic seal is inhaled bar, is installed on described sealing unit pedestal towards described guide rail one side; Two sealing guide blocks, connect respectively described the first mechanical arm, the second mechanical arm, and be close to described magnetic seal and inhale bar, and described sealing guide block is provided with groove, and described the first mechanical arm, the second mechanical arm are provided with the through hole matched with described groove; Diaphragm seal, from the groove of described sealing guide block with pass and be adsorbed in described magnetic seal in through hole corresponding mechanical arm and inhale on bar; Described the first mechanical arm, the second mechanical arm drive described sealing guide block and inhale between bar and described diaphragm seal and move at described magnetic seal, and keep the diaphragm seal of described sealing guide block both sides to be adsorbed in all the time described magnetic seal suction bar.
Preferably, the sheet metal that described diaphragm seal is thickness 0.1mm ~ 0.3mm.
Preferably, also be provided with sealing polyurethane pad between described diaphragm seal and described sealing guide block.
Preferably, described sealing unit also comprises the lower seal plate, and described lower seal plate is connected in described sealing unit pedestal, is positioned under described guide rail.
Preferably, described silicon chip straight line switch also comprises that RZ is to regulon, described RZ comprises register pin, pedestal, two groups of passing screws to regulon, described register pin is positioned the main body of described straight line switch on described pedestal, described passing screw is located at described pedestal, and the main body that an end supports described straight line switch is rotated its central shaft around described register pin.
Preferably, described silicon chip straight line switch also comprises RX, RY, Z-direction adjustment structure, and described RX, RY, Z-direction are adjusted structure and be comprised of three groups of threaded adjustment structures.
Preferably, described first, second mechanical arm adopts the design of sheet fork, and is respectively equipped with a pair of ceramic sucker with vacuum suction chamber.
Preferably, the inside cabling of described silicon chip straight line switch adopts drag chain structure.
The present invention also provides a kind of silicon chip straight line switching method, adopts silicon chip straight line switch as above, and workflow is as follows:
The first step the first mechanical arm, the second mechanical arm are all at " unloading piece " station;
Second step the first manipulator motion, to " getting sheet " station, is got sheet from external device (ED);
The 3rd step the first mechanical arm returns to " unloading piece " station, waits for to worktable upper slice, and the second manipulator motion is to " " station, get sheet from worktable in work;
The 4th step the second mechanical arm returns to " unloading piece " station, waits for that the exterior mechanical hand gets sheet from it, and the first manipulator motion is to " work " station, to sheet under worktable;
The 5th step the first mechanical arm returns to " unloading piece " station, and the exterior mechanical hand is got sheet from the second mechanical arm.
The present invention adopts and keeps away the barrier design, make described first, second mechanical arm two different plane motions that are parallel to each other, realize that two groups of mechanical arms split, in the first mechanical arm and worktable handing-over silicon chip, the second mechanical arm carries out the silicon chip handing-over with mechanical arm simultaneously, after above handing-over completes, and two groups of mechanical arm counter motions simultaneously, carry out next handing-over, reduce the motion is devolved on time of half.
The accompanying drawing explanation
The schematic perspective view of the silicon chip straight line switch that Fig. 1 is one embodiment of the invention;
The structural representation of the silicon chip straight line switch that Fig. 2 is one embodiment of the invention;
The cross-sectional schematic that Fig. 3 is Fig. 2;
The sealing unit structural representation of the silicon chip straight line switch that Fig. 4 is one embodiment of the invention;
The stereographic map of the sealing unit structure of the silicon chip straight line switch that Fig. 5 is one embodiment of the invention;
The structural upright schematic diagram of the regulon structure of the silicon chip straight line switch that Fig. 6 is one embodiment of the invention;
The structural drawing of upper and lower mechanical arm of the silicon chip straight line switch that Fig. 7 is one embodiment of the invention;
The silicon chip straight line switch station layout that Fig. 8 is one embodiment of the invention.
In figure: the 101-guide rail, 102-the first slide block, 103-the second slide block, 104-the first mechanical arm, 104a-mechanical arm adaptor, 104b-the first mechanical arm sheet fork, 105-the second mechanical arm, 105b-the second mechanical arm sheet fork, the 106-worktable, the 107-drag chain structure, the 108-sealing unit, 108a-sealing unit pedestal, 108b-seals guide block, the 108c-magnetic seal is inhaled bar, the 108d-diaphragm seal, 108e-lower seal plate, 109-RZ is to regulon, the 109a-register pin, the 109b-pedestal, 109c-passes screw, 109d-threaded adjustment structure, 111-8 cun substrate, 112-12 cun substrate, 120-" work " station, 121-" unloading piece " station, 122-" gets sheet " station.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
Silicon chip straight line switch provided by the invention, between worktable and external device (ED), transmitting material, its structure as depicted in figs. 1 and 2, comprises guide rail 101, particularly, described guide rail 101 is single wide cut line slideway; Be arranged at the first slide block 102, the second slide block 103 on described guide rail 101, described first, second slide block 102,103 can be done staggered to-and-fro movement along described guide rail 101; The first mechanical arm 104, described the first mechanical arm 104 connects described the first slide block 102 by mechanical arm adaptor 104a; And second mechanical arm 105, described the second mechanical arm 105 connects described the second slide block 103, and described the first mechanical arm 104, the second mechanical arm 105 are in two different plane of movement that are parallel to each other.Particularly, worktable 106 is for receiving external device (ED), the external device (ED) here refers to the silicon chip that transmission system is transmitted, and described silicon chip is moved to exposure region carry out lithography operations, described the first mechanical arm 104, the second mechanical arm 105 is respectively in two different planes that are parallel to each other, along described guide rail 101 directions (being Y-direction in the present embodiment), doing rectilinear motion, particularly, described first, the second slide block 102, be respectively equipped with driving mechanism on 103, described driving mechanism is linear electric motors, adopt single wide cut line slideway to be led, by its precision of grating pair, measured, precision in the 800mm stroke can reach 2 μ m.Please refer to Fig. 3, described mechanical arm adaptor 104a connects described the first mechanical arm 104, described the first mechanical arm 104 is suspended on described the second mechanical arm 105, make described first, the second mechanical arm 104, 105 form up and down, left right-alternative arrangement form, thereby can be so that the mechanical organ compact in design in described silicon chip straight line switch, can utilize all spaces that utilize, in the space of 90mm*70mm, two groups of moving cells of layout, be described first, the second slide block 102, 103, described first, the second slide block 102, 103 adopt consistent structure, back-to-back layout, thereby can save to the full extent size, and the mutually noninterfere of realization motion, relative motion simultaneously, complete fluctuating plate simultaneously, the first mechanical arm 104 joins silicon chips with worktable 106 when, the second mechanical arm 105 carries out the silicon chip handing-over with mechanical arm simultaneously, after having joined, two groups of mechanical arms 104, 105 counter motions simultaneously, join next time, thereby reduce the motion is devolved on time of half, effectively increase work efficiency.In addition, the design of single-degree-of-freedom can be so that the loss of accuracy after prealignment be minimum.
Preferably, as depicted in figs. 1 and 2, described silicon chip straight line switch also comprises that one for preventing particulate matter that described first, second mechanical arm 104,105 produces at the motion process sealing unit 108 to external diffusion, please refer to Fig. 4 and Fig. 5, described sealing unit 108 comprises sealing unit pedestal 108a, described sealing unit pedestal 108a is upper is provided with two bar-shaped trough (not shown)s along described first, second mechanical arm 104,105 direction of motion, and described first, second mechanical arm 104,105 is arranged in described bar-shaped trough and moves along bar-shaped trough; Magnetic seal is inhaled bar 108c, is installed on described sealing unit pedestal 108a towards described guide rail 101 1 sides; Two sealing guide block 108b, connect respectively described the first mechanical arm 104, the second mechanical arm 105, and be close to described magnetic seal and inhale bar 108c, described sealing guide block 108b is provided with groove, and described the first mechanical arm 104, the second mechanical arm 105 are provided with the through hole matched with described groove; Diaphragm seal 108d, from the groove of described sealing guide block 108b with pass and be adsorbed in described magnetic seal in through hole corresponding mechanical arm and inhale on bar 108c; Described the first mechanical arm 104, the second mechanical arm 105 drive described sealing guide block 108b and inhale between bar 108c and described diaphragm seal 108d and move at described magnetic seal, and keep the diaphragm seal 108d of described sealing guide block 108b both sides to be adsorbed in all the time described magnetic seal suction bar 108c.Preferably, the sheet metal that described diaphragm seal 108d is thickness 0.1mm ~ 0.3mm, the best is 0.2mm.Like this, described diaphragm seal 108d adopts metal material that described diaphragm seal 108d can be adsorbed by described magnetic seal suction bar 108c, thickness can not be blocked up can not be excessively thin, to guarantee after described diaphragm seal 108d passes from described groove and through hole that certain flexural deformation can occur inhales the surface of bar 108c to be close to described magnetic seal, again can be because of spending thin affect sealing effectiveness and serviceable life.Preferably, surface of contact and the plane, sealing unit pedestal 108a place of described two sealing guide block 108b and diaphragm seal 108d are angled, and this angle is less than 90 degree.In addition, also be provided with sealing polyurethane pad between described diaphragm seal 108d and described sealing guide block 108b, make described diaphragm seal 108d friction rapidly through described through hole the time little, and substantially do not produce pollution, prevent that fricative contamination particle from leaking, and do not affect kinematic accuracy and the speed of described first, second mechanical arm 104,105, preferably, described sealing unit 108 also comprises lower seal plate 108e, described lower seal plate 108e is connected in described sealing unit pedestal 108a, is positioned under described guide rail 101.Described sealing unit 108 is built in described silicon chip straight line switch, does not show in appearance its structure.
Preferably, as depicted in figs. 1 and 2, described silicon chip straight line switch also comprises that RZ is to regulon 109, particularly, please refer to Fig. 6, described RZ comprises register pin 109a, pedestal 109b, two groups of passing screw 109c to regulon 109, described register pin 109a is positioned the main body of described straight line switch on described pedestal 109b, described passing screw 109c is located at described pedestal 109b, the main body that one end supports described straight line switch is rotated its central shaft around described register pin 109a, thereby carries out RZ to adjusting.Preferably, described silicon chip straight line switch also comprises RX, RY, Z-direction adjustment structure, and described RX, RY, Z-direction are adjusted structure and be comprised of three groups of threaded adjustment structure 109d.Described RX, RY, Z-direction are adjusted structure described first, second mechanical arm 104,105 are carried out to the adjustment of 3 degree of freedom, realize thus the silicon chip center is placed into to any desired position, adopt above-mentioned RZ to adjust structure to regulon 109 and RX, RY, Z-direction, adapted to the possible inherent variability of described worktable 106, anchor point that can silicon chip is last is placed on the arbitrfary point of claimed range by free position.
Preferably, please refer to Fig. 1, Fig. 3 and Fig. 7, described first, second mechanical arm 104,105 adopts the design of sheet fork, be that described first, second mechanical arm 104,105 is respectively equipped with first, second mechanical arm sheet fork 104b, 105b, and be respectively equipped with a pair of ceramic sucker with vacuum suction chamber, described first, second mechanical arm sheet fork 104b, 105b can carry the silicon chip of two kinds of specifications of 12 cun substrates 112 and 8 cun substrates 111, described ceramic sucker also is based on this application and has carried out Design of Compatibility, with the Production requirement of the silicon chip that meets two kinds of different sizes.
Preferably; as depicted in figs. 1 and 2; the inside cabling of described silicon chip straight line switch adopts drag chain structure 107; preferably, adopt the described drag chain structure 107 of toilet's special use, can reduce the friction between each mechanical part; built-in mechanical part is played to protection and traction; and the every joint of drag chain can be opened, and is easy for installation and maintenance, reach the impact of cable friction is dropped to minimum purpose.
The present invention also provides a kind of silicon chip straight line switching method, adopts silicon chip straight line switch as above, its station layout as shown in Figure 8, in figure, 120 are depicted as " work " station, 121 are depicted as " unloading piece " station, 122 are depicted as " getting sheet " station.
Workflow is as follows:
The first step the first mechanical arm, the second mechanical arm are all at " unloading piece " station;
Second step the first manipulator motion, to " getting sheet " station, is got sheet from external device (ED);
The 3rd step the first mechanical arm returns to " unloading piece " station, waits for to worktable upper slice, and the second manipulator motion is to " " station, get sheet from worktable in work;
The 4th step the second mechanical arm returns to " unloading piece " station, waits for that the exterior mechanical hand gets sheet from it, and the first manipulator motion is to " work " station, to sheet under worktable;
The 5th step the first mechanical arm returns to " unloading piece " station, and the exterior mechanical hand is got sheet from the second mechanical arm.
An action cycle completes, and waits for the next work period.
In sum, silicon chip straight line switch of the present invention and method adopt keeps away the barrier design, by first, the second mechanical arm 104, stagger in interval between 105, mechanical arm adaptor 104a is suspended to the first mechanical arm 104 on the second mechanical arm 105, realize first, the second mechanical arm 104, 105 split, when the first mechanical arm 104 and worktable join silicon chip, the second mechanical arm 105 carries out the silicon chip handing-over with mechanical arm simultaneously, after above handing-over completes, first, the second mechanical arm 104, 105 counter motions simultaneously, carry out next handing-over, reduce the motion is devolved on time of half, improved work efficiency.
Obviously, those skilled in the art can carry out various changes and modification and not break away from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention also is intended to comprise these changes and modification interior.
Claims (12)
1. a silicon chip straight line switch, between worktable and external device (ED), transmitting material, is characterized in that, comprises
Guide rail;
Be arranged at the first slide block, the second slide block on described guide rail, described first, second slide block can be done staggered to-and-fro movement along described guide rail;
The first mechanical arm, described the first mechanical arm connects described the first slide block by the mechanical arm adaptor; And
The second mechanical arm, described the second mechanical arm connects described the second slide block, and described the first mechanical arm, the second mechanical arm are in two different plane of movement that are parallel to each other.
2. silicon chip straight line switch as claimed in claim 1, is characterized in that, on described first, second slide block, is respectively equipped with driving mechanism, and described driving mechanism is linear electric motors.
3. silicon chip straight line switch as claimed in claim 1, is characterized in that, described silicon chip straight line switch also comprises that one for preventing particulate matter that described first, second mechanical arm produces at the motion process sealing unit to external diffusion.
4. silicon chip straight line switch as claimed in claim 3, is characterized in that, described sealing unit comprises
The sealing unit pedestal, be provided with two bar-shaped troughs along described first, second manipulator motion direction on described sealing unit pedestal, and described first, second mechanical arm is arranged in described bar-shaped trough and moves along bar-shaped trough;
Magnetic seal is inhaled bar, is installed on described sealing unit pedestal towards described guide rail one side;
Two sealing guide blocks, connect respectively described the first mechanical arm, the second mechanical arm, and be close to described magnetic seal and inhale bar, and described sealing guide block is provided with groove, and described the first mechanical arm, the second mechanical arm are provided with the through hole matched with described groove;
Diaphragm seal, from the groove of described sealing guide block with pass and be adsorbed in described magnetic seal in through hole corresponding mechanical arm and inhale on bar;
Described the first mechanical arm, the second mechanical arm drive described sealing guide block and inhale between bar and described diaphragm seal and move at described magnetic seal, and keep the diaphragm seal of described sealing guide block both sides to be adsorbed in all the time described magnetic seal suction bar.
5. silicon chip straight line switch as claimed in claim 4, is characterized in that the sheet metal that described diaphragm seal is thickness 0.1mm ~ 0.3mm.
6. silicon chip straight line switch as claimed in claim 4, is characterized in that, between described diaphragm seal and described sealing guide block, also is provided with sealing polyurethane pad.
7. silicon chip straight line switch as claimed in claim 4, is characterized in that, described sealing unit also comprises the lower seal plate, and described lower seal plate is connected in described sealing unit pedestal, is positioned under described guide rail.
8. silicon chip straight line switch as claimed in claim 1, it is characterized in that, described silicon chip straight line switch also comprises that RZ is to regulon, described RZ comprises register pin, pedestal, two groups of passing screws to regulon, described register pin is positioned the main body of described straight line switch on described pedestal, described passing screw is located at described pedestal, and the main body that an end supports described straight line switch is rotated its central shaft around described register pin.
9. silicon chip straight line switch as claimed in claim 1, is characterized in that, described silicon chip straight line switch also comprises RX, RY, Z-direction adjustment structure, and described RX, RY, Z-direction are adjusted structure and be comprised of three groups of threaded adjustment structures.
10. silicon chip straight line switch as claimed in claim 1, is characterized in that, described first, second mechanical arm adopts the design of sheet fork, and is respectively equipped with a pair of ceramic sucker with vacuum suction chamber.
11. silicon chip straight line switch as claimed in claim 1, is characterized in that, the inside cabling of described silicon chip straight line switch adopts drag chain structure.
12. a silicon chip straight line switching method, is characterized in that, adopts silicon chip straight line switch as described as any one in claim 1～11, workflow is as follows:
The first step the first mechanical arm, the second mechanical arm are all at " unloading piece " station;
Second step the first manipulator motion, to " getting sheet " station, is got sheet from external device (ED);
The 3rd step the first mechanical arm returns to " unloading piece " station, waits for to worktable upper slice, and the second manipulator motion is to " " station, get sheet from worktable in work;
The 4th step the second mechanical arm returns to " unloading piece " station, waits for that the exterior mechanical hand gets sheet from it, and the first manipulator motion is to " work " station, to sheet under worktable;
The 5th step the first mechanical arm returns to " unloading piece " station, and the exterior mechanical hand is got sheet from the second mechanical arm.
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| CN201210153116.XA CN103424991B (en) | 2012-05-15 | 2012-05-15 | A kind of silicon wafer linear exchange device and method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016188371A1 (en) * | 2015-05-24 | 2016-12-01 | 上海微电子装备有限公司 | Silicon wafer transportation system |
| CN107210258A (en) * | 2015-03-25 | 2017-09-26 | 株式会社日立国际电气 | The manufacture method of substrate board treatment and semiconductor device |
| CN107877927A (en) * | 2017-11-06 | 2018-04-06 | 终结号（深圳）科技有限公司 | The automatic feed mechanism and bag box machine and method of a kind of bag box machine |
| CN109216250A (en) * | 2018-10-19 | 2019-01-15 | 清华大学 | wafer transfer mechanism |
| CN109677928A (en) * | 2019-01-11 | 2019-04-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Robot device |
| CN111383971A (en) * | 2018-12-29 | 2020-07-07 | 江苏鲁汶仪器有限公司 | Vacuum conveying piece device |
| CN112053984A (en) * | 2020-09-28 | 2020-12-08 | 中国科学院光电技术研究所 | Automatic many sizes silicon chip transmission device of handing-over |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226878A (en) * | 2007-01-15 | 2008-07-23 | 大日本网目版制造株式会社 | Substrate processing apparatus and substrate processing method |
| EP2298959A1 (en) * | 2008-06-06 | 2011-03-23 | Ulvac, Inc. | Film formation apparatus |
-
2012
- 2012-05-15 CN CN201210153116.XA patent/CN103424991B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226878A (en) * | 2007-01-15 | 2008-07-23 | 大日本网目版制造株式会社 | Substrate processing apparatus and substrate processing method |
| EP2298959A1 (en) * | 2008-06-06 | 2011-03-23 | Ulvac, Inc. | Film formation apparatus |
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| CN107210258A (en) * | 2015-03-25 | 2017-09-26 | 株式会社日立国际电气 | The manufacture method of substrate board treatment and semiconductor device |
| CN107210258B (en) * | 2015-03-25 | 2020-06-12 | 株式会社国际电气 | Substrate processing apparatus and method for manufacturing semiconductor device |
| CN106292194A (en) * | 2015-05-24 | 2017-01-04 | 上海微电子装备有限公司 | Silicon chip transmission system |
| CN106292194B (en) * | 2015-05-24 | 2018-03-30 | 上海微电子装备（集团）股份有限公司 | Silicon chip transmission system |
| TWI644768B (en) * | 2015-05-24 | 2018-12-21 | 大陸商上海微電子裝備（集團）股份有限公司 | Silicon transfer system |
| US10254661B2 (en) | 2015-05-24 | 2019-04-09 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Silicon wafer transportation system |
| WO2016188371A1 (en) * | 2015-05-24 | 2016-12-01 | 上海微电子装备有限公司 | Silicon wafer transportation system |
| CN107877927B (en) * | 2017-11-06 | 2024-03-12 | 终结号（深圳）科技有限公司 | Automatic feeding method of box packing machine |
| CN107877927A (en) * | 2017-11-06 | 2018-04-06 | 终结号（深圳）科技有限公司 | The automatic feed mechanism and bag box machine and method of a kind of bag box machine |
| CN109216250A (en) * | 2018-10-19 | 2019-01-15 | 清华大学 | wafer transfer mechanism |
| CN109216250B (en) * | 2018-10-19 | 2024-05-17 | 清华大学 | Wafer transmission mechanism |
| CN111383971A (en) * | 2018-12-29 | 2020-07-07 | 江苏鲁汶仪器有限公司 | Vacuum conveying piece device |
| CN109677928A (en) * | 2019-01-11 | 2019-04-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Robot device |
| CN112799283B (en) * | 2019-10-28 | 2022-04-15 | 上海微电子装备（集团）股份有限公司 | Substrate temperature stabilizing device and method and photoetching system |
| CN112799283A (en) * | 2019-10-28 | 2021-05-14 | 上海微电子装备（集团）股份有限公司 | Substrate temperature stabilizing device and method and photoetching system |
| CN112053984A (en) * | 2020-09-28 | 2020-12-08 | 中国科学院光电技术研究所 | Automatic many sizes silicon chip transmission device of handing-over |
| CN114888983A (en) * | 2022-05-31 | 2022-08-12 | 杭州中为光电技术有限公司 | Automatic chamfering and cleaning integrated equipment for silicon wafers |
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| Publication number | Publication date |
|---|---|
| CN103424991B (en) | 2015-09-30 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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