CN103389311A - Line scanning phase differential imaging device for optical element phase defect detection - Google Patents
Line scanning phase differential imaging device for optical element phase defect detection Download PDFInfo
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- CN103389311A CN103389311A CN2013103320717A CN201310332071A CN103389311A CN 103389311 A CN103389311 A CN 103389311A CN 2013103320717 A CN2013103320717 A CN 2013103320717A CN 201310332071 A CN201310332071 A CN 201310332071A CN 103389311 A CN103389311 A CN 103389311A
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Abstract
The invention provides a line scanning phase differential imaging device for optical element phase defect detection, which relates to the technical field of optical element detection, and aims to solve the problem that the phase defect inside an optical element in a large solid laser device is difficult to detect. According to the device, a hot spot of a phase defect in a dark field background can be acquired by virtue of linear array CCD (charge coupled device) dark field imaging, and the phase defect can be directly seen. Furthermore, the line scanning phase differential imaging device provided by the invention has an image resolution ratio of 60 million pixels. An optical element can be driven to translate by a line translation table and be quickly scanned, a large optical element with the caliber of 400mm*400mm can be scanned within 30-60 seconds, and the caliber detection can be in a range of 5mm*5mm to 400mm*400mm. The line scanning phase differential imaging device for the optical element phase defect detection is suitable for detection on the phase defect inside an optical element in a large solid laser device.
Description
Technical field
The present invention relates to a kind of line sweep phase differential imaging device.Belong to optical element detection technique field.
Background technology
The large-sized solid laser aid is large-scale, the optical element One's name is legion, and output energy and power are high, are main force's devices of inertial confinement fusion research.Under high power conditions, optic element damage becomes the thorny problem that people must face, so the optical element defect needs strict control.The optical element defect kind is various, and character is different.Angle from the impact of transmission light field, can be divided into amplitude and phase modulation two classes to light field.Modulation and Amplitude Modulation type defect, as assimilate in dust, contamination particle, body etc., the transmitance of major effect optical element distributes; Position phase modulation type defect, as cut, pit, the inhomogeneous impurity of refractive index etc., the distributions of optical thicknesses of major effect optical element., from the angle of defective locations, be divided into surface imperfection and inherent vice, present existing detection method effects on surface defect and the effectively prosecution of amplitude type defect; For the position phase defect of inside, traditional outward appearance and inclusions detect and be difficult to find, thereby have crypticity, and be very harmful, becomes the focus of attention that improves in recent years the optical element load capacity.
Summary of the invention
The present invention is the problem that is difficult to detect for the position phase defect that solves optical element inside in the large-sized solid laser aid.A kind of differential imaging of line sweep phase for optical element position phase defects detection device now is provided.
Be used for the line sweep phase differential imaging device of optical element position phase defects detection, it comprises: line source, line translation stage, imaging lens and line array CCD;
The primary optical axis place straight line of this device is defined as the z axle of three-dimensional cartesian coordinate system, line source, line translation stage, imaging lens and line array CCD are arranged successively along the z axle, the line translation stage is used for fixedly the measured optical unit, line source is parallel and depart from the y axle of three-dimensional cartesian coordinate system, the line translation stage is perpendicular to the z axle, and this line translation stage can be along the x direction of principal axis translation of three-dimensional cartesian coordinate system, imaging lens is fixed on primary optical axis and the optical axis of this imaging lens overlaps with primary optical axis, and the plane, photosurface place of line array CCD is perpendicular to primary optical axis;
The light that line source sends is incident to the measured optical unit on fixing online translation stage, through the light of this measured optical unit transmission, is incident to imaging lens, and this imaging lens focuses on incident light imaging on the photosurface of line array CCD.
Above-mentioned line source is closely arranged and is formed by 200 to 500 optical fiber.
Above-mentioned optical fiber adopts Halogen lamp LED as illuminating source.
The length of above-mentioned line source is identical with the unified length of optical element that needs measurement.
Above-mentioned imaging lens is biconvex lens.
Above-mentioned line array CCD gathers image with the line sampling rate of 120Hz.
Line sweep phase for optical element position phase defects detection differential imaging device of the present invention, adopt line array CCD details in a play not acted out on stage, but told through dialogues imaging, obtains the speck of the position phase defect under the details in a play not acted out on stage, but told through dialogues background, makes a phase defect directly as seen.Line sweep phase for optical element position phase defects detection differential imaging device of the present invention reaches 6,000 ten thousand pixels to the resolution of image simultaneously.Drive the optical element translation by the line translation stage and carry out rapid scanning, can be in 30 to 60 seconds, the massive optics of 400*400mm bore is completed in scanning, and detection bore scope can reach 5*5 to 400*400mm.The present invention is applicable to the position phase defects detection of optical element inside in the large-sized solid laser aid.
Description of drawings
Fig. 1 is the side view for the line sweep phase differential imaging apparatus structure of optical element position phase defects detection.
Fig. 2 is the vertical view for the line sweep phase differential imaging apparatus structure of optical element position phase defects detection.
Embodiment
Embodiment one: see figures.1.and.2 and illustrate present embodiment, the described differential imaging of line sweep phase for optical element position phase defects detection of present embodiment device, it comprises: line source 1, line translation stage 2, imaging lens 3 and line array CCD 4;
The primary optical axis place straight line of this device is defined as the z axle of three-dimensional cartesian coordinate system, line source 1, line translation stage 2, imaging lens 3 and line array CCD 4 are arranged successively along the z axle, line translation stage 2 is used for fixedly the measured optical unit, line source 1 is parallel and depart from the y axle of three-dimensional cartesian coordinate system, line translation stage 2 is perpendicular to the z axle, and this line translation stage 2 can be along the x direction of principal axis translation of three-dimensional cartesian coordinate system, imaging lens 3 is fixed on primary optical axis and the optical axis of this imaging lens 3 overlaps with primary optical axis, and the plane, photosurface place of line array CCD 4 is perpendicular to primary optical axis;
The light that line source 1 sends is incident to the measured optical unit on fixing online translation stage 2, through the light of this measured optical unit transmission, is incident to imaging lens 3, and this imaging lens 3 focuses on incident light imaging on the photosurface of line array CCD 4.
Adopt line array CCD details in a play not acted out on stage, but told through dialogues imaging, obtain the speck of the position phase defect under the details in a play not acted out on stage, but told through dialogues background, make a phase defect directly as seen.
During device work, the measured optical unit is placed on line translation stage 2, and line translation stage 2 drives the measured optical unit translation motion.
Embodiment two: present embodiment is that the described differential imaging of line sweep phase for optical element position phase defects detection of embodiment one device is described further, and in present embodiment, line source 1 is closely arranged and formed by 200 to 500 optical fiber.
The described line source 1 of present embodiment is the linear array of Xiao's special type light source, it comprises the optical fiber that the 200-500 root is identical and closely arrange, have the following advantages: 1) bore of optical fiber source is little, can be considered pointolite, and the angle of divergence is little, optical fiber is closely arranged, can provide width suitable line illuminated field, this is that the details in a play not acted out on stage, but told through dialogues imaging is desired, is conducive to reduce background signal intensity, improves signal to noise ratio (S/N ratio); 2) on optical fiber axis, point to angle be easy to accurate control substantially by illumination for the center intensity of light source, can throw light on and point to angle by adjustment, obtains best defect contrast.
Embodiment three: present embodiment is that the described differential imaging of line sweep phase for optical element position phase defects detection of embodiment two device is described further, and in present embodiment, optical fiber adopts Halogen lamp LED as illuminating source.
Present embodiment adopts Halogen lamp LED as illuminating source, and the volume of described Halogen lamp LED is little, and luminescence efficiency is up to 17-33lm/W, colour temperature is stable, and light decay is less than 5%, long service life, can be effectively and coupling fiber, for optical fiber provides that intensity is high, colour temperature stable, safe and reliable light source.
Embodiment four: present embodiment is that the described differential imaging of line sweep phase for optical element position phase defects detection of embodiment one or two device is described further, in present embodiment, the length of line source 1 is more than or equal to the unified length of the measured optical unit.
Embodiment five: present embodiment is that the described differential imaging of line sweep phase for optical element position phase defects detection of embodiment one device is described further, and in present embodiment, imaging lens 3 is biconvex lens.
The center of the optical axis alignment detected element of imaging lens 3; Line source sees through in the optical element process, position phase defect can change normal optical propagation direction, position phase defect role and small lens are similar, utilize biconvex lens, contraposition phase defect becomes real image at linear array CCD4 image planes place, can effectively control aberration, obtain the position phase defect intensity image of high s/n ratio.
Embodiment six: present embodiment is that the described differential imaging of line sweep phase for optical element position phase defects detection of embodiment one device is described further, and in present embodiment, line array CCD 4 gathers image with the line sampling rate of 120Hz.The fibre core of optical fiber is enough little, overlooks and can be considered pointolite, and as shown in Figure 2, the sensing of this pointolite and z axle clamp angle are α.Place the measured optical unit on line translation stage 2 and drive the optical element translation motion.
The character that is used for the line sweep phase differential imaging device of optical element position phase defects detection:
1, for the phase-type defect, can produce strong response signal, opposite, the amplitude type defect can be in the large space angle after scattered light, its response signal can be submerged in background signal, and the phase-type flaw indication can be highlighted, and shows as the speck under the details in a play not acted out on stage, but told through dialogues background in image;
If 2 α increase, all response signals all weaken, but phase-type defect response signal reduces slowlyer than background signal;
3, the ratio of position phase defect response signal intensity and background signal intensity, namely defect contrast and α have definite analytic relationship, have a suitable α value and best defect contrast.
Utilize these character can carry out the phase-type defects detection, obtain the speck of the position phase defect under the details in a play not acted out on stage, but told through dialogues background, make a phase defect directly as seen, employing is based on the signal to noise ratio (S/N ratio) partitioning algorithm, can calculate easily the information such as a coordinate position of phase defect and area, realize the detection assessment to the position phase defect of optical element.
Claims (6)
1. be used for the line sweep phase differential imaging device of optical element position phase defects detection, it is characterized in that, it comprises: line source (1), line translation stage (2), imaging lens (3) and line array CCD (4);
the primary optical axis place straight line of this device is defined as the z axle of three-dimensional cartesian coordinate system, line source (1), line translation stage (2), imaging lens (3) and line array CCD (4) are arranged successively along the z axle, line translation stage (2) is used for fixedly the measured optical unit, line source (1) is parallel and depart from the y axle of three-dimensional cartesian coordinate system, line translation stage (2) is perpendicular to the z axle, and this line translation stage (2) can be along the x direction of principal axis translation of three-dimensional cartesian coordinate system, imaging lens (3) is fixed on primary optical axis, and the optical axis of this imaging lens (3) overlaps with primary optical axis, the plane, photosurface place of line array CCD (4) is perpendicular to primary optical axis,
The light that line source (1) sends is incident to the measured optical unit on fixing online translation stage (2), light through this measured optical unit transmission is incident to imaging lens (3), and this imaging lens (3) focuses on incident light imaging on the photosurface of line array CCD (4).
2. the differential imaging of the line sweep phase for optical element position phase defects detection device according to claim 1, is characterized in that, line source (1) is closely arranged and formed by 200 to 500 optical fiber.
3. the differential imaging of the line sweep phase for optical element position phase defects detection device according to claim 2, is characterized in that, optical fiber adopts Halogen lamp LED as illuminating source.
4. the differential imaging of the line sweep phase for optical element position phase defects detection device according to claim 1 and 2, is characterized in that, the length of line source (1) is identical with the unified length of optical element that needs measurement.
5. the differential imaging of the line sweep phase for optical element position phase defects detection device according to claim 1, is characterized in that, imaging lens (3) is biconvex lens.
6. the differential imaging of the line sweep phase for optical element position phase defects detection device according to claim 1, is characterized in that, line array CCD (4) gathers image with the line sampling rate of 120Hz.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106018414A (en) * | 2016-05-17 | 2016-10-12 | 浙江大学 | Quantitative detection method for surface defects of optical element with high-order curved surface |
| CN108195849A (en) * | 2018-01-23 | 2018-06-22 | 南京理工大学 | Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic |
| CN108802056A (en) * | 2018-08-23 | 2018-11-13 | 中国工程物理研究院激光聚变研究中心 | Optical element phase-type defectoscopy device and detection method |
| CN116358842A (en) * | 2023-06-02 | 2023-06-30 | 中国科学院长春光学精密机械与物理研究所 | Method and device for detecting surface defects of large-caliber optical element based on mechanical arm |
| CN108827975B (en) * | 2018-09-07 | 2023-10-20 | 中国工程物理研究院激光聚变研究中心 | CCD array imaging device |
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| US6327033B1 (en) * | 1999-06-21 | 2001-12-04 | International Business Machines Corporation | Detection of phase defects on photomasks by differential imaging |
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| KR20050104958A (en) * | 2004-04-30 | 2005-11-03 | 매그나칩 반도체 유한회사 | Apparatus for detecting phase error of a phase shift mask |
| CN1715870A (en) * | 2005-04-21 | 2006-01-04 | 华南师范大学 | Phase object scan imaging method and its treating device |
| CN103217437A (en) * | 2013-03-13 | 2013-07-24 | 中国科学院上海光学精密机械研究所 | Optical element defect scanning device |
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2013
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Patent Citations (5)
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| US6327033B1 (en) * | 1999-06-21 | 2001-12-04 | International Business Machines Corporation | Detection of phase defects on photomasks by differential imaging |
| WO2004027830A2 (en) * | 2002-09-20 | 2004-04-01 | Kla-Tencor Technologies Corporation | Method and system detecting phase defects in phptomasks and wafers |
| KR20050104958A (en) * | 2004-04-30 | 2005-11-03 | 매그나칩 반도체 유한회사 | Apparatus for detecting phase error of a phase shift mask |
| CN1715870A (en) * | 2005-04-21 | 2006-01-04 | 华南师范大学 | Phase object scan imaging method and its treating device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106018414A (en) * | 2016-05-17 | 2016-10-12 | 浙江大学 | Quantitative detection method for surface defects of optical element with high-order curved surface |
| CN106018414B (en) * | 2016-05-17 | 2018-11-30 | 浙江大学 | The quantitative detecting method of high-order curved surface optical element surface defect |
| CN108195849A (en) * | 2018-01-23 | 2018-06-22 | 南京理工大学 | Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic |
| CN108802056A (en) * | 2018-08-23 | 2018-11-13 | 中国工程物理研究院激光聚变研究中心 | Optical element phase-type defectoscopy device and detection method |
| CN108802056B (en) * | 2018-08-23 | 2024-02-06 | 中国工程物理研究院激光聚变研究中心 | Optical element phase type defect measuring device and detecting method |
| CN108827975B (en) * | 2018-09-07 | 2023-10-20 | 中国工程物理研究院激光聚变研究中心 | CCD array imaging device |
| CN116358842A (en) * | 2023-06-02 | 2023-06-30 | 中国科学院长春光学精密机械与物理研究所 | Method and device for detecting surface defects of large-caliber optical element based on mechanical arm |
| CN116358842B (en) * | 2023-06-02 | 2023-08-01 | 中国科学院长春光学精密机械与物理研究所 | Method and device for detecting surface defects of large-caliber optical element based on mechanical arm |
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Application publication date: 20131113 |