CN103380301B - Stator component and high-vacuum pump - Google Patents
Stator component and high-vacuum pump Download PDFInfo
- Publication number
- CN103380301B CN103380301B CN201280009498.7A CN201280009498A CN103380301B CN 103380301 B CN103380301 B CN 103380301B CN 201280009498 A CN201280009498 A CN 201280009498A CN 103380301 B CN103380301 B CN 103380301B
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- CN
- China
- Prior art keywords
- stator
- sheet
- stator component
- connects
- component
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
A kind of stator component for high-vacuum pump is arranged on last rotor elements downstream on conveying direction (26).Stator component has casing member (28), and described casing member is connected with the housing (12) of high-vacuum pump.The inner side (30) of casing member (28) is provided with multiple stator arranged the most evenly distributedly and connects sheet (32).
Description
Technical field
The present invention relates to a kind of stator component for high-vacuum pump and a kind of high-vacuum pump.
Background technology
At present, a large amount of high-vacuum pumps are configured to two-stage, and wherein the first order passes through turbomolecular pump structure
Becoming, connecting in the conveying direction in the described first order has molecular pump or gas friction pump.Turbine
Molecular pump has multiple setting rotor elements in the housing, and the most each rotor elements has many
Individual rotor blade.The stator department being permanently connected with housing it is provided with between each rotor elements
Part, described stator component has multiple stator vane.As dividing of being connected on turbomolecular pump
Sub-pump or gas friction pump are such as provided with Hall dimension gram level (Holweck-Stufe).Hall dimension gram
Level such as has the cylinder being connected with last rotor elements in the flowing direction.Cylinder
Body is surrounded by one or more fillets of screw.The conveying cross section of molecular pump or gas friction pump is at this
Mean-free-path length less than gas to be conveyed.Thus, gas particles is the most only collided
On wall however the most impinging one another.
This Hall dimension gram level is such as described in the DE 19 632 375, and wherein said Hall is tieed up
Gram level have multiple that arrange the most concentrically, respectively fixedly with last rotor elements
The cylindrical element connected.It is provided with between the element of described cylinder and there is the fillet of screw
Non-rotary element so that realize delivering gas to screw thread by the rotation of cylindrical element
In circle.The gas carried is imported in Hall dimension gram level at this by being connected with rotor and
The opening in last rotor elements of the cylindrical elements of carrying Hall dimension gram level or hole
Plate realizes.Because gas arrives in Hall dimension gram level there through the hole in plate, so there is stream
Dynamic loss, described flow loss causes flow to reduce therewith.
Summary of the invention
It is an object of the present invention to provide a kind of stator component for high-vacuum pump and a kind of height
Vacuum pump, is capable of flow by means of it and improves.
According to the present invention, the solution of described purpose by according to the present invention for fine vacuum
The stator component of pump or realized by the high-vacuum pump according to the present invention, described stator component is defeated
Sending and be arranged on last rotor elements downstream on direction, described stator component has can be with described
The casing member that the housing of high-vacuum pump connects, and be arranged on the inner side of described casing member
Stator connect sheet, described stator connect sheet have more than gas particles to be conveyed average from
By the radial depth of Cheng Changdu；Described high-vacuum pump has: have the rotor of multiple rotor elements
And according to the present invention, be arranged between rotor elements and be fixed on described shell via track ring
Stator component in body.
Stator component according to the present invention be directly arranged on axial conveying direction high-vacuum pump,
The especially downstream of last rotor elements of turbomolecular pump.Here, exist in the conveying direction
The downstream of the stator component according to the present invention can also be provided with molecular pump or gas friction pump.Root
According to the stator component of the present invention there is casing member, described casing member and vacuum pump, especially
The housing of turbomolecular pump connects.Replace casing member self, it is also possible to be connected with housing
Or the load-carrying unit surrounded by another housing.On the inner side of described casing member or load-carrying unit
It is provided with stator and connects sheet.Here, stator connect sheet be different from each be arranged on rotor elements it
Between stator vane, the most only in the whole effective width of rotor elements extend, and from
The inner side of casing member inwardly extends especially cylindrical rotor hub.Preferably, stator connects sheet
And the stator vane that routine is arranged between rotor elements the most inwardly opens wide.Additionally, stator
Connect sheet preferably correspond to the fillet of screw be arranged to connecting sheet to tilt or part helix shape.
Therefore, it is possible to realize (aktive) pump action that stator connects the active of sheet, described pumping
Effect reacts on backflow, as it occurs in conventional stator blade, and promotes defeated in addition
Send effect.
This set and design by stator vane are capable of flow already and improve.?
This is particularly preferably in mounted stator component, and stator connects sheet and surrounds cylindrical turning
Sub-hub, wherein cylindrical rotor hub preferably connect with last rotor elements so that in the same manner as
Rotate.
In preferred form of implementation, the present invention main point is that, the design of stator vane
Scheme Choice is so that reduce, or even avoids in Hall dimension gram level at opposite screw thread
Interaction between wall and the element of cylinder.According to the invention it is preferred to be provided with in screw thread
Big conveying cross section, described big conveying cross section promotes pump action, especially inner
The region of adjacent rotor hub promotes pump action.
Preferably, stator connects sheet in a circumferential direction along the medial expansion of casing member.Here,
Each single stator connects the part that sheet preferably but only around the part of circumference extends
The fillet of screw.In a circumferential direction, stator connect sheet preferably have overall circumference 1/6,
Especially at least 1/5th and the length of particularly preferably 1/4.But it is here, fixed
Son connects sheet and always has 1/2nd less than overall circumference, the length of especially less than 1/3rd
Degree.Here, stator connects sheet has gradient relative to longitudinal direction or the conveying direction of pump.
Preferably, stator connection sheet has long more than the mean free path of gas particles to be conveyed
The radial depth of degree.Especially radial depth is the mean-free-path length of gas particles to be conveyed
At least 1.2 times, preferably 1.5 times and especially at least 2.5 times.Therefore, it is possible to continue to change
Influent stream amount.In a preferred form of implementation, stator connect sheet radial depth be therefore to
Few 10mm, especially at least 15mm and particularly preferably at least 20mm.Here, maximum diameter
It is maximum 40mm, especially maximum 30mm and the most maximum 20mm to the degree of depth.
In order to improve flow further, connected between sheet by height or two adjacent stators
Spacing be chosen as big and preferably the 30% to 60% of depth of blade, especially 45% to
55%.
It is furthermore preferred that adjacent stator connect sheet in a circumferential direction with at least 10% to
70%, preferably 20% to 70% and particularly preferred 30% to 60% overlap.
It is furthermore preferred that stator component is configured to so that all, at two adjacent stators
Connect the opening that enters being provided with between sheet and be in identical inletpiston.Therefore, from turbo-molecular
The gas particles left in last stator component of pump enters directly into stator and connects sheet
Enter in opening.The entrance opening being preferably in an inletpiston is in circumference side
The most preferably have girth at least 10% to 15% A/F.In a circumferential direction,
It is preferably provided with at least four, especially six and particularly preferred eight stators and connects sheet.Additionally,
Preferably, stator connection sheet has the degree of depth radially-inwardly reduced.Therefore, connect at stator
The degree of depth in sheet preferably reduces along conveying direction.Preferably have identical here, stator connects sheet
Interior diameter so that realize the little spacing constant with the holding of cylindrical rotor hub.
The preferred design all as described above of stator component, especially with feature not
Same combining form, causes the improvement of flow.
Additionally, the present invention relates to a kind of high-vacuum pump especially with turbomolecular pump, Qi Zhongru
Described above, the downstream of last rotor elements in the conveying direction is provided with to have determines
Son connects the stator component of sheet.Here it is preferred, in particular, that stator component is directly connected to finally
On one rotor elements, the most especially at last rotor elements with according to the stator of the present invention
The conventional stator of turbomolecular pump it is not provided with between element.It is furthermore preferred that cylinder
Rotor hub is connected with last rotor elements, and described rotor hub is by stator component or stator component
Each stator connect sheet surround.This it is used for sealing each along with the cylindrical rotor hub rotated
Individual stator connects the inner side of sheet, in order to the amount of the gas that holding is flowed back to is the least and auxiliary
Help the conveyer mechanism in adjacent subcylindrical region.
Accompanying drawing explanation
Below, the present invention is elaborated by means of preferred form of implementation with reference to the accompanying drawings.
Accompanying drawing illustrates:
Fig. 1 illustrates the schematic sectional view of the high-vacuum pump according to the present invention.
Fig. 2 illustrates that a signal according to the preferred form of implementation of the present invention of stator component is stood
Body broken away view.
Detailed description of the invention
In the illustrated embodiment, high-vacuum pump has turbomolecular pump 10.Described turbo-molecular
Pump 10 has the rotor 16 being arranged on bearing 14 in housing 12.Rotor 16 has many
The individual rotor elements 18 being respectively provided with multiple rotor blade.It is provided with between rotor elements 18
Stator component 20, described stator component is fixed in housing 12 via track ring 22.By
Realize on conveying direction 26, carried gas by pump intake 24 in turbomolecular pump 10.
It is connected with the housing 12 of turbomolecular pump 10 and has casing member 28.Casing member 28 exists
There is on 30 inside it stator and connect sheet 32.Stator connects sheet 32 and is set to be directly adjacent to
Last rotor elements on conveying direction 26 so that at last rotor elements 18
With stator connects and is not provided with other intermediary element between sheet 32, is especially not provided with stator component.
Be permanently connected the rotor hub being configured to cylindrical with last rotor elements 18
38 so that rotor hub 38 rotates together with rotor 16.Stator connects sheet 32 and surrounds rotor hub
38。
In the illustrated embodiment, casing member 28 has flange 34, will via described flange
Casing member 28 is connected with the housing 12 of turbomolecular pump by means of bolt 36.
In the illustrated embodiment, the inner side 30 of casing member 28 is provided with evenly distributedly
Six stators connect sheet (Fig. 2).The stator tilted corresponding to partial threads circle connects sheet 32
Extend on about 1st/to three/4th of whole girth respectively, the most adjacent stator
Connect sheet 32 overlapping with about 55% respectively.
Stator connects sheet and has radial depth t (Fig. 1), and described radial depth is more than to be conveyed
The mean-free-path length of gas particles.In the illustrated embodiment, degree of depth t be 10mm extremely
20mm.In the preferred form of implementation illustrated, degree of depth t reduces along conveying direction.Therefore,
Stator connects degree of depth t in the region being directly adjacent to last rotor elements of sheet 321Than away from
Degree of depth t in the region that last rotor elements is farther2Deeper.Each stator connects sheet 32
Gradient or orthoselection to each other are so that two adjacent stator vanes 32 by height
Degree h (Fig. 2) is at least the 30% to 60% of depth of blade t.
Connect at two adjacent stators and between sheet, respectively constituted entrance opening 40.Preferably, institute
Having entrance opening 40 to be positioned in common inletpiston, described common inletpiston is directly connected to
On last rotor elements 18 on conveying direction 26.In a circumferential direction, entrance is opened
Mouth 40 has the A/F of the 10% to 15% of whole girth.
Claims (17)
1., for a stator component for high-vacuum pump, described stator component is in conveying direction (26)
On be arranged on last rotor elements (18) downstream, described stator component has
The casing member (28) being connected with the housing (12) of described high-vacuum pump (10), with
And
The stator being arranged on the inner side (30) of described casing member (28) connects sheet (32),
It is characterized in that, described stator connects sheet (32) to be had more than gas particles to be conveyed
The radial depth (t) of mean-free-path length.
Stator component the most according to claim 1, it is characterised in that described stator connects
Sheet (32) stretches along described inner side (30) in a circumferential direction.
Stator component the most according to claim 2, it is characterised in that described stator connects
Sheet (32) has the length of 1st/6 of overall circumference.
Stator component the most according to claim 2, it is characterised in that described stator connects
Sheet (32) has the length less than 1/2nd of overall circumference.
Stator component the most according to any one of claim 1 to 4, it is characterised in that institute
State that radial depth (t) is the mean-free-path length of gas to be conveyed at least 1.2 times.
Stator component the most according to any one of claim 1 to 4, it is characterised in that institute
State stator connection sheet (32) and there is the radial depth (t) of at least 10mm, described in maximum of which
Radial depth (t) is less than 40mm.
Stator component the most according to any one of claim 1 to 4, it is characterised in that two
It is described radial depth (t) by height (h) that individual adjacent stator connects between sheet (32)
30% to 60%.
Stator component the most according to any one of claim 1 to 4, it is characterised in that phase
Adjacent stator connects sheet (32) and overlaps with 10% to 70% in a circumferential direction.
Stator component the most according to any one of claim 1 to 4, it is characterised in that institute
The entrance opening (40) being arranged between adjacent stator connection sheet (32) is had to be positioned at identical entering
In mouth plane.
Stator component the most according to any one of claim 1 to 4, it is characterised in that
It is provided with at least four stator in a circumferential direction and connects sheet (32).
11. stator components according to any one of claim 1 to 4, it is characterised in that
The entrance opening (40) being arranged between described stator connection sheet (32) has in a circumferential direction
The A/F of the 10% to 15% of overall circumference.
12. stator components according to any one of claim 1 to 4, it is characterised in that
Described stator connects the described radial depth (t) of sheet (32) and reduces along conveying direction.
13. 1 kinds of high-vacuum pumps, it has:
There is the rotor (16) of multiple rotor elements (18) and according in claim 1 to 12
Described in any one, be arranged under last rotor elements (18) on conveying direction (26)
The stator component of trip.
14. high-vacuum pumps according to claim 13, it is characterised in that described stator component
Directly it is contiguous on described last rotor elements (18).
15. high-vacuum pumps according to claim 14, it is characterised in that described stator connects
Sheet (32) is directly contiguous on described last rotor elements (18).
16. according to the high-vacuum pump according to any one of claim 13 to 15, it is characterised in that
Described high-vacuum pump is by last rotor elements (18) on conveying direction (26) and cylinder
The rotor hub (38) of shape connects, and described rotor hub is surrounded by described stator component.
17. high-vacuum pumps according to claim 16, it is characterised in that described rotor hub by
Described stator connects sheet (32) and surrounds.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE202011002809.7 | 2011-02-17 | ||
| DE2020110028097 | 2011-02-17 | ||
| DE202011002809U DE202011002809U1 (en) | 2011-02-17 | 2011-02-17 | Stator element and high vacuum pump |
| PCT/EP2012/052122 WO2012110378A1 (en) | 2011-02-17 | 2012-02-08 | Stator element and high-vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103380301A CN103380301A (en) | 2013-10-30 |
| CN103380301B true CN103380301B (en) | 2016-08-17 |
Family
ID=45569659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280009498.7A Active CN103380301B (en) | 2011-02-17 | 2012-02-08 | Stator component and high-vacuum pump |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2676034A1 (en) |
| JP (1) | JP2014505833A (en) |
| CN (1) | CN103380301B (en) |
| DE (1) | DE202011002809U1 (en) |
| WO (1) | WO2012110378A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6241222B2 (en) * | 2013-01-22 | 2017-12-06 | 株式会社島津製作所 | Vacuum pump |
| EP4155549A1 (en) * | 2022-11-14 | 2023-03-29 | Pfeiffer Vacuum Technology AG | Vacuum pump with improved suction capacity of the holweck pump stage |
| EP4379216A1 (en) * | 2024-04-22 | 2024-06-05 | Pfeiffer Vacuum Technology AG | Turbomolecular vacuum pump with compact design |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3531942A1 (en) * | 1984-09-17 | 1986-04-30 | Japan Atomic Energy Research Institute, Tokio/Tokyo | Rotary pump |
| DE29717079U1 (en) * | 1997-09-24 | 1997-11-06 | Leybold Vakuum GmbH, 50968 Köln | Compound pump |
| DE19632874A1 (en) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Friction vacuum pump |
| WO2009153874A1 (en) * | 2008-06-19 | 2009-12-23 | 株式会社島津製作所 | Turbo-molecular pump |
| CN101952602A (en) * | 2008-01-15 | 2011-01-19 | 厄利孔莱博尔德真空技术有限责任公司 | Turbo molecular pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19632375A1 (en) | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gas friction pump |
| FR2859250B1 (en) * | 2003-08-29 | 2005-11-11 | Cit Alcatel | VACUUM PUMP |
-
2011
- 2011-02-17 DE DE202011002809U patent/DE202011002809U1/en not_active Expired - Lifetime
-
2012
- 2012-02-08 CN CN201280009498.7A patent/CN103380301B/en active Active
- 2012-02-08 JP JP2013553870A patent/JP2014505833A/en active Pending
- 2012-02-08 WO PCT/EP2012/052122 patent/WO2012110378A1/en active Application Filing
- 2012-02-08 EP EP12703107.8A patent/EP2676034A1/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3531942A1 (en) * | 1984-09-17 | 1986-04-30 | Japan Atomic Energy Research Institute, Tokio/Tokyo | Rotary pump |
| DE19632874A1 (en) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Friction vacuum pump |
| DE29717079U1 (en) * | 1997-09-24 | 1997-11-06 | Leybold Vakuum GmbH, 50968 Köln | Compound pump |
| CN101952602A (en) * | 2008-01-15 | 2011-01-19 | 厄利孔莱博尔德真空技术有限责任公司 | Turbo molecular pump |
| WO2009153874A1 (en) * | 2008-06-19 | 2009-12-23 | 株式会社島津製作所 | Turbo-molecular pump |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012110378A1 (en) | 2012-08-23 |
| DE202011002809U1 (en) | 2012-06-12 |
| CN103380301A (en) | 2013-10-30 |
| JP2014505833A (en) | 2014-03-06 |
| EP2676034A1 (en) | 2013-12-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Cologne, Germany Patentee after: LEYBOLD Co. Ltd. Address before: Cologne, Germany Patentee before: Oerlikon Leybold Vacuum GmbH |