CN103380301A - Stator element and high-vacuum pump - Google Patents
Stator element and high-vacuum pump Download PDFInfo
- Publication number
- CN103380301A CN103380301A CN2012800094987A CN201280009498A CN103380301A CN 103380301 A CN103380301 A CN 103380301A CN 2012800094987 A CN2012800094987 A CN 2012800094987A CN 201280009498 A CN201280009498 A CN 201280009498A CN 103380301 A CN103380301 A CN 103380301A
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- China
- Prior art keywords
- stator
- connecting sheet
- described stator
- vacuum pump
- high vacuum
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
A stator element for a high-vacuum pump is arranged downstream of the last rotor element in the pumping direction (26). The stator element has a housing element (28), which is connected to a housing (12) of the high-vacuum pump. A plurality of stator webs (32), which are distributed regularly in the circumferential direction, are arranged on an inner surface (30) of the housing element (28).
Description
Technical field
The present invention relates to a kind of stator component for high vacuum pump and a kind of high vacuum pump.
Background technique
At present, a large amount of high vacuum pumps constitute two-stage, and wherein the first order consists of by turbomolecular pump, is connected with molecular pump or gas friction pump at throughput direction on the described first order.Turbomolecular pump has a plurality of rotor element that are arranged in the housing, and wherein each rotor element has a plurality of rotor blades.Be provided with the stator component that is permanently connected with housing between each rotor element, described stator component has a plurality of stator vanes.For example be provided with Hall dimension gram level (Holweck-Stufe) as the molecular pump or the gas friction pump that are connected on the turbomolecular pump.Hall dimension gram level for example has the cylindrical body that is connected with last rotor element on flow direction.Cylindrical body is surrounded by one or more fillets of screw.The conveying cross section of molecular pump or gas friction pump is at this mean-free-path length less than gas to be conveyed.Thus, however gas particles only collides on the wall each other collision basically.
This Hall dimension gram level is for example described in DE19632375, and wherein said Hall dimension gram level has a plurality of columniform elements that arrange concentrically each other, that be connected with last rotor element regularly respectively.Between described columniform element, be provided with the non-rotary element with fillet of screw, so that realize delivering gas in the fillet of screw by the rotation of columniform element.The gas of having carried is imported in the Hall dimension gram level at this by being connected with rotor and carry opening or orifice plate realization in the end rotor element of cylindrical elements of Hall dimension gram grade.Because the hole that gas passes in the plate thus arrives in the Hall dimension gram level, so flow loss occurs, described flow loss causes that thereupon flow reduces.
Summary of the invention
The objective of the invention is, a kind of stator component for high vacuum pump and a kind of high vacuum pump are provided, can realize that by means of it flow improves.
According to the present invention, the solution of described purpose realizes by stator component according to claim 1 or by high vacuum pump according to claim 11.
Directly be arranged on high vacuum pump, the downstream of last rotor element of turbomolecular pump especially at axial throughput direction according to stator component of the present invention.At this, on throughput direction, can also be provided with molecular pump or gas friction pump in the downstream according to stator component of the present invention.Stator component according to the present invention has casing member, described casing member and vacuum pump, especially the housing of turbomolecular pump is connected.Replace casing member self, also can be is connected with housing or by the load-carrying unit of another housing encirclement.Be provided with the stator connecting sheet in the inboard of described casing member or load-carrying unit.At this, the stator connecting sheet is different from each and is arranged on stator vane between the rotor element, preferably only extends in the whole Effective face width of rotor element, and inwardly extends especially columniform rotor hub from the inboard of casing member.Preferably, stator connecting sheet and the conventional stator vane that is arranged between the rotor element inwardly open wide on the contrary.In addition, the stator connecting sheet preferably corresponding to the connecting sheet of the fillet of screw be arranged to tilt or part spiral.Therefore, can realize (aktive) pump action of the active of stator connecting sheet, described pump action reacts on backflow, occurs in conventional stator vane such as it, and promotes in addition the conveying effect.
This set and design proposal by stator vane can realize that already flow improves.Particularly preferably be in mounted stator component at this, the stator connecting sheet surrounds columniform rotor hub, and wherein columniform rotor hub preferably is connected with last rotor element and then similarly rotation.
In preferred form of implementation, main aspect of the present invention is that the design proposal of stator vane is chosen as, so that reduce, or even avoid restraining the interaction between opposed threaded walls and columniform element in the level in the Hall dimension.According to the present invention, preferably in screw thread, be provided with large conveying cross section, described large conveying cross section promotes pump action, especially promotes pump action in the zone of inner adjacent rotor hub.
Preferably, the stator connecting sheet is in a circumferential direction along the medial expansion of casing member.At this, however the part fillet of screw that each independent stator connecting sheet preferably only extends around the part of circumference.In a circumferential direction, the stator connecting sheet preferably has at least sixth of overall circumference, 1/5 and 1/particularly preferably at least four length especially.Yet at this, the stator connecting sheet always have less than overall circumference 1/2nd, especially less than 1/3rd length.At this, the stator connecting sheet has gradient with respect to longitudinal direction or the throughput direction of pump.
Preferably, the stator connecting sheet has the radial depth greater than the mean-free-path length of gas particles to be conveyed.Especially radial depth is at least 1.2 times, preferred 1.5 times and especially at least 2.5 times of mean-free-path length of gas particles to be conveyed.Therefore, can continue to improve flow.Therefore in a preferred form of implementation, the radial depth of stator connecting sheet is 10mm at least, especially at least 15mm and 20mm at least particularly preferably.At this, the maximum radial degree of depth is maximum 40mm, especially maximum 30mm and maximum 20mm particularly preferably.
In order further to improve flow, by the spacing between height or two the adjacent stator connecting sheets be chosen as large and be preferably depth of blade 30% to 60%, especially 45% to 55%.
In addition preferably, adjacent stator connecting sheet is overlapping with at least 10% to 70%, preferred 20% to 70% and particularly preferably 30% to 60% in a circumferential direction.
In addition preferably, stator component constitutes, so that the opening that enters that owns, is provided with between two adjacent stator connecting sheets is in identical inletpiston.What the gas particles of therefore, leaving from last stator component of turbomolecular pump directly entered into the stator connecting sheet enters of opening.Preferably be at least 10% to 15% the A/F that opening preferably has girth in a circumferential direction that enters in the inletpiston.In a circumferential direction, preferably be provided with at least four, especially six and eight stator connecting sheets particularly preferably.In addition, preferably, the stator connecting sheet has the degree of depth that radially inwardly reduces.Therefore, the degree of depth in the stator connecting sheet preferably reduces along throughput direction.At this, the stator connecting sheet preferably has identical inner diameter, so that the little spacing that remains unchanged of realization and columniform rotor hub.
All of stator component preferred design proposals as described above especially with the various combination form of feature, cause the improvement of flow.
In addition, the present invention relates to a kind of high vacuum pump that especially has turbomolecular pump, wherein as described above, the downstream of last rotor element on throughput direction is provided with the stator component with stator connecting sheet.Particularly preferably be at this, stator component is directly connected on last rotor element, wherein rotor element and according to the stator that is not provided with the routine of turbomolecular pump between the stator component of the present invention especially in the end.In addition preferably, columniform rotor hub is connected with last rotor element, and described rotor hub is surrounded by each stator connecting sheet of stator component or stator component.This columniform rotor hub along with rotation is used for the inboard of each stator connecting sheet of sealing, in order to keep the amount of the gas that flows back to as much as possible little, and assists the conveyer mechanism in contiguous columniform zone.
Description of drawings
Below, elaborate the present invention by means of preferred form of implementation with reference to the accompanying drawings.
Accompanying drawing illustrates:
Fig. 1 illustrates the schematic sectional view according to high vacuum pump of the present invention.
Fig. 2 illustrates a three-dimensional broken away view of the signal according to preferred form of implementation of the present invention of stator component.
Embodiment
In the illustrated embodiment, high vacuum pump has turbomolecular pump 10.Described turbomolecular pump 10 has the rotor 16 that is arranged on the bearing 14 in housing 12.Rotor 16 has a plurality of rotor element 18 that have respectively a plurality of rotor blades.Be provided with stator component 20 between rotor element 18, described stator component is fixed in the housing 12 via track ring 22.Realize gas is carried at throughput direction 26 by pump intake 24 by means of turbomolecular pump 10.
Be connected with casing member 28 with the housing 12 of turbomolecular pump 10.Casing member 28 has stator connecting sheet 32 on the side 30 within it.Stator connecting sheet 32 is set to be directly adjacent to last rotor element on throughput direction 26, so that in the end be not provided with other intermediary element between rotor element 18 and the stator connecting sheet 32, especially be not provided with stator component.
Being permanently connected with last rotor element 18 constitutes columniform rotor hub 38, so that rotor hub 38 is with rotor 16 rotations.Stator connecting sheet 32 surrounds rotor hub 38.
In the illustrated embodiment, casing member 28 has flange 34, via described flange casing member 28 is connected with the housing 12 of turbomolecular pump by means of bolt 36.
In the illustrated embodiment, be provided with evenly distributedly six stator connecting sheets (Fig. 2) on the inboard 30 of casing member 28.The stator connecting sheet 32 that tilts corresponding to the part fillet of screw extends at about 1/4th to 1/3rd of whole girth respectively, and wherein adjacent stator connecting sheet 32 is overlapping with about 55% respectively.
The stator connecting sheet has radial depth t(Fig. 1), described radial depth is greater than the mean-free-path length of gas particles to be conveyed.In the illustrated embodiment, degree of depth t is 10mm to 20mm.In the preferred form of implementation that illustrates, degree of depth t reduces along throughput direction.Therefore, the degree of depth t in the zone that directly is adjacent to last rotor element of stator connecting sheet 32
1Than the degree of depth t in the farther zone of last rotor element
2Darker.Each stator connecting sheet 32 gradient or orientation to each other is chosen as so that two adjacent stator vanes 32 pass through height h(Fig. 2) be at least 30% to 60% of depth of blade t.
Between two adjacent stator connecting sheets, consist of respectively and enter opening 40.Preferably, all enter opening 40 and are arranged in common inletpiston, and described common inletpiston is directly connected on last rotor element 18 on the throughput direction 26.In a circumferential direction, enter 10% to 15% the A/F that opening 40 has whole girth.
Claims (13)
1. stator component that is used for high vacuum pump, described stator component is arranged on last rotor element (18) downstream at throughput direction (26), and described stator component has
The casing member (28) that can be connected with the housing (12) of described high vacuum pump (10), and
Be arranged on the stator connecting sheet (32) on the inboard (30) of described casing member (28).
2. stator component according to claim 1, it is characterized in that, described stator connecting sheet (32) in a circumferential direction along described inboard (30) stretch and preferably have at least sixth of overall circumference, especially 1/5 and 1/particularly preferably at least four but preferably less than 1/2nd, especially less than 1/3rd length.
3. stator component according to claim 1 and 2, it is characterized in that, described stator connecting sheet (32) has the radial depth (t) greater than the mean-free-path length of gas particles to be conveyed, at least 1.2 times, preferred 1.5 times and particularly preferably 2.5 times of the mean-free-path length of the gas that wherein said radial depth (t) is especially to be conveyed.
4. according to claim 1 to one of 3 described stator components, it is characterized in that, described stator connecting sheet (32) has at least 10mm, preferred at least 15mm and the radial depth of 20mm (t) at least particularly preferably, and the wherein said maximum radial degree of depth (t) is less than 40mm, preferably less than 30mm and particularly preferably less than 20mm.
5. according to claim 1 to one of 4 described stator components, it is characterized in that the height (h) that passes through between two adjacent stator connecting sheets (32) is 30% to 60%, preferred 45% to 55% of described depth of blade (t).
6. according to claim 1 to one of 5 described stator components, it is characterized in that adjacent stator connecting sheet (32) is overlapping with 10% to 70%, preferred 20% to 70% and particularly preferably 30% to 60% in a circumferential direction.
7. according to claim 1 to one of 6 described stator components, it is characterized in that all openings (40) that enter that are arranged between the adjacent stator connecting sheet (32) are arranged in identical inletpiston.
8. according to claim 1 to one of 7 described stator components, it is characterized in that, be provided with in a circumferential direction at least four, preferably at least six and at least eight stator connecting sheets (32) particularly preferably.
9. according to claim 1 to one of 8 described stator components, it is characterized in that, be arranged at least 10% to 15% the A/F that opening (40) has overall circumference in a circumferential direction that enters between the described stator connecting sheet (32).
10. according to claim 1 to one of 9 described stator components, it is characterized in that the described radial depth (t) of described stator connecting sheet (32) radially reduces along throughput direction.
11. a high vacuum pump, turbomolecular pump especially, it has:
Has the rotor (16) of a plurality of rotor element (18) and according to claim 1 to stator component one of 10 described, be arranged on last rotor element (18) downstream at throughput direction (26).
12. high vacuum pump according to claim 11 is characterized in that, described stator component, especially described stator connecting sheet (32) directly are contiguous on described last rotor element (18).
13. according to claim 11 or 12 described high vacuum pumps, it is characterized in that, described high vacuum pump is connected last rotor element (18) on throughput direction (26) with columniform rotor hub (38), described rotor hub is surrounded by the especially described stator connecting sheet of described stator component (32).
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE202011002809.7 | 2011-02-17 | ||
| DE2020110028097 | 2011-02-17 | ||
| DE202011002809U DE202011002809U1 (en) | 2011-02-17 | 2011-02-17 | Stator element and high vacuum pump |
| PCT/EP2012/052122 WO2012110378A1 (en) | 2011-02-17 | 2012-02-08 | Stator element and high-vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103380301A true CN103380301A (en) | 2013-10-30 |
| CN103380301B CN103380301B (en) | 2016-08-17 |
Family
ID=45569659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280009498.7A Active CN103380301B (en) | 2011-02-17 | 2012-02-08 | Stator component and high-vacuum pump |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2676034A1 (en) |
| JP (1) | JP2014505833A (en) |
| CN (1) | CN103380301B (en) |
| DE (1) | DE202011002809U1 (en) |
| WO (1) | WO2012110378A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6241222B2 (en) * | 2013-01-22 | 2017-12-06 | 株式会社島津製作所 | Vacuum pump |
| EP4155549A1 (en) * | 2022-11-14 | 2023-03-29 | Pfeiffer Vacuum Technology AG | Vacuum pump with improved suction capacity of the holweck pump stage |
| EP4379216A1 (en) * | 2024-04-22 | 2024-06-05 | Pfeiffer Vacuum Technology AG | Turbomolecular vacuum pump with compact design |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3531942A1 (en) * | 1984-09-17 | 1986-04-30 | Japan Atomic Energy Research Institute, Tokio/Tokyo | Rotary pump |
| DE29717079U1 (en) * | 1997-09-24 | 1997-11-06 | Leybold Vakuum GmbH, 50968 Köln | Compound pump |
| DE19632874A1 (en) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Friction vacuum pump |
| WO2009153874A1 (en) * | 2008-06-19 | 2009-12-23 | 株式会社島津製作所 | Turbo-molecular pump |
| CN101952602A (en) * | 2008-01-15 | 2011-01-19 | 厄利孔莱博尔德真空技术有限责任公司 | Turbo molecular pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19632375A1 (en) | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gas friction pump |
| FR2859250B1 (en) * | 2003-08-29 | 2005-11-11 | Cit Alcatel | VACUUM PUMP |
-
2011
- 2011-02-17 DE DE202011002809U patent/DE202011002809U1/en not_active Expired - Lifetime
-
2012
- 2012-02-08 CN CN201280009498.7A patent/CN103380301B/en active Active
- 2012-02-08 JP JP2013553870A patent/JP2014505833A/en active Pending
- 2012-02-08 WO PCT/EP2012/052122 patent/WO2012110378A1/en active Application Filing
- 2012-02-08 EP EP12703107.8A patent/EP2676034A1/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3531942A1 (en) * | 1984-09-17 | 1986-04-30 | Japan Atomic Energy Research Institute, Tokio/Tokyo | Rotary pump |
| DE19632874A1 (en) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Friction vacuum pump |
| DE29717079U1 (en) * | 1997-09-24 | 1997-11-06 | Leybold Vakuum GmbH, 50968 Köln | Compound pump |
| CN101952602A (en) * | 2008-01-15 | 2011-01-19 | 厄利孔莱博尔德真空技术有限责任公司 | Turbo molecular pump |
| WO2009153874A1 (en) * | 2008-06-19 | 2009-12-23 | 株式会社島津製作所 | Turbo-molecular pump |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012110378A1 (en) | 2012-08-23 |
| DE202011002809U1 (en) | 2012-06-12 |
| CN103380301B (en) | 2016-08-17 |
| JP2014505833A (en) | 2014-03-06 |
| EP2676034A1 (en) | 2013-12-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Cologne, Germany Patentee after: LEYBOLD Co. Ltd. Address before: Cologne, Germany Patentee before: Oerlikon Leybold Vacuum GmbH |