CN103353483B - Double-drive structure of stepping shaft of ultrasonic scanning microscope - Google Patents
Double-drive structure of stepping shaft of ultrasonic scanning microscope Download PDFInfo
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- CN103353483B CN103353483B CN201310283739.3A CN201310283739A CN103353483B CN 103353483 B CN103353483 B CN 103353483B CN 201310283739 A CN201310283739 A CN 201310283739A CN 103353483 B CN103353483 B CN 103353483B
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- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000004579 marble Substances 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
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Abstract
The invention discloses a double-drive structure of a stepping shaft of an ultrasonic scanning microscope and an adjusting method for double-drive pulse parameter matching, wherein the double-drive structure comprises a left drive unit, a right drive unit, a front support beam, a rear support beam and an X-direction cross beam, the front support beam and the rear support beam are respectively butted with the left drive unit and the right drive unit at the front side and the rear side, and the X-direction cross beam is connected with the left drive unit and the right drive unit.
Description
Technical field
The present invention relates to the drives structure of ultrasonic scanning microscope stepping axle, the two of especially a kind of ultrasonic scanning microscope stepping axle drive structure and two method of adjustment of driving pulse parameter coupling.
Background technology
Common planer-type framework drive pattern: driven by one-sided integrated module or ball screw arrangement, obvious drawback is that speed is low, running precision resolution is not high, and easily causes the torsional deformation of planer-type framework; Driven by one-sided linear electric motors, drawback not only easily causes the torsional deformation of planer-type framework, more makes easily to produce larger vibration in equipment high-speed cruising, directly has influence on the instability of scanning accuracy.
Summary of the invention
The object of this invention is to provide the two of a kind of ultrasonic scanning microscope stepping axle and drive structure and two method of adjustment of driving pulse parameter coupling, effectively can promote two sweep velocity and scanning accuracy of driving step-by-step system, realize a kind of prolongable function.
For achieving the above object, the present invention adopts following technical scheme:
The two of a kind of ultrasonic scanning microscope stepping axle drive structure, it is characterized in that, comprise: pedestal, left driver element, right driver element, front support beam, rear support beam and X are to crossbeam, wherein, rear support beam docks left driver element 1 and right driver element at rear side, front support beam docks left driver element and right driver element in front side, X connects left driver element 1 and right driver element to crossbeam, and left driver element and right drive unit drives X move forward and backward to crossbeam.Pedestal can adopt marble pedestal.
Wherein, described left driver element comprises: the left stand be connected and fixed with pedestal, the left U-shaped seat, left guide piece and the left drive unit that are connected and fixed with left stand, wherein, left guide piece is arranged on left U-shaped seat, and left drive unit is connected to crossbeam with left guide piece and X respectively; Described right driver element comprises: the right stand be connected and fixed with pedestal, the right U-shaped seat, right guide piece and the right drive unit that are connected and fixed with right stand, wherein, right guide piece is arranged on right U-shaped seat, and right drive unit is connected to crossbeam with right guide piece and X respectively.Wherein left stand, right stand can adopt marble stand.
Wherein, the consisting of of described left driver element: the left socle be connected and fixed with left U-shaped seat, the left line slideway auxiliary be connected and fixed to crossbeam and left socle with X respectively form left guide piece; The left linear motor stator electric be connected and fixed with left socle, the left linear motor rotor be connected and fixed to crossbeam with X form left drive unit.Consisting of of described right driver element: the right support be connected and fixed with right U-shaped seat, the right line slideway auxiliary be connected and fixed to crossbeam and right support with X respectively form right guide piece; The right linear motor stator electric be connected and fixed with right support, the right linear motor rotor be connected and fixed to crossbeam with X form right drive unit.The linear electric motors that left drive unit and right drive unit adopt are preferably iron-core-free form, and power of pausing when can eliminate high precision operation impact, does not produce suction simultaneously, do not produce side component to line slideway auxiliary.
Wherein, on left U-shaped seat, two sides array distribution has set screw I, and on right U-shaped seat, two sides array distribution has set screw II, for carrying out adjustment parallel each other to left socle with right support.
Further, this pair drives structure and also comprises: left positioning unit, right positioning unit, and wherein, left positioning unit is arranged in left driver element, right positioning unit is arranged in right driver element.Left positioning unit can comprise left linear grating adjusting gear, and right positioning unit can comprise right linear grating adjusting gear, wherein,
Left linear grating adjusting gear comprises: be fixed on left read head seat from X to crossbeam, be installed on left read head seat left grating reading head, be installed on the left grating scale liner plate of left socle and be bonded and fixed to the left grating scale of left grating scale liner plate; Left grating reading head relies on the elongated slot on left read head seat to carry out straight-line displacement, to regulate the sideshake value between left grating reading head and left grating scale;
Right linear grating adjusting gear comprises: be fixed on right read head seat from X to crossbeam, be installed on right read head seat right grating reading head, be installed on the right grating scale liner plate of right support and be bonded and fixed to the right grating scale of right grating scale liner plate; Right grating reading head relies on the elongated slot on right read head seat to carry out straight-line displacement, to regulate the sideshake value between right grating reading head and right grating scale.
Wherein, on left grating scale liner plate, array distribution has set screw III, on right grating scale liner plate, array distribution has set screw IV, with X to crossbeam for measuring basis, manually half step distance moves X to crossbeam, for carrying out the adjustment of linearity value in effective travel to left grating scale liner plate and right grating scale liner plate, simultaneously for adjusting parallel parameter between left grating scale liner plate with right grating scale liner plate span.
Further, this Dual Drive structure also comprises mechanical stop limiter, and mechanical stop limiter, by being individually fixed in left socle and the limit base on right support and the buffer stopper that is connected with limit base is formed, plays ultimate protection when moving cell runs.
The present invention also provides a kind of two two methods of adjustment of driving pulse parameter coupling of driving structure of ultrasonic scanning microscope stepping axle, wherein, the moving cell that stepping axle dual linear motor drives is that X is to crossbeam, X to crossbeam across connection left line slideway auxiliary and right line slideway auxiliary as back and forth running guiding, by left positioning unit and right positioning unit feed back to configuration display on pulse difference as adjustment reference, concrete steps are as follows:
Step one: with plane on pedestal for measuring basis, to the measurement tabular value checking supporting the upper plane of left stand of left U-shaped seat, the upper plane of the right stand of supports right U-shaped seat and carry out the high parameter such as equidirectional;
Step 2: with plane on pedestal for measuring basis, to the measurement tabular value checking carrying out the high parameter such as equidirectional between the effective length that left socle middle guide installs groove face, right support middle guide installs groove face;
Step 3: left line slideway and right line slideway can acted as reference mutual guide rails, when left line slideway is decided to be basic rack, debug process means routinely: first by after the linearity index centering of left line slideway, then centering as auxiliary guide rail right line slideway and be decided to be basic rack left line slideway between depth of parallelism index; Maybe when right line slideway is decided to be basic rack, debug process means routinely: first by after the linearity index centering of right line slideway, then centering as auxiliary guide rail left line slideway and be decided to be basic rack right line slideway between depth of parallelism index;
Step 4: move by manually carrying out half step distance in effective travel to X to crossbeam, simultaneously with reference to configure on display through pulse difference that left and right linear grating adjusting gear feeds back, first by the set screw II of two sides array distribution on the set screw I of two sides array distribution on left U-shaped seat and right U-shaped seat, coarse regulation parallel is each other carried out between left socle with right support; Then corresponding auxiliary guide rail pointwise is carried out and the adjustment of depth of parallelism value between basic rack, realize two coupling requirement of driving pulse display difference.
Wherein, to the parallel parameter adjustment between left socle with right support span, to left socle middle guide install orientation between effective length that groove face and right support middle guide install groove face and etc. the measurement tabular value of high parameter verify, all can debug process means routinely to parallel parameter adjustment between grating scale liner plate with grating scale liner plate span and be ensured.
The invention has the beneficial effects as follows: adopt bilateral to drive, avoid one-sided driving easily to produce the problems such as torsional deformation when planer-type framework runs; Adopt stacked system to form high-order planer-type architecture mode, easily ensure the accuracy requirement of vital part processing, in turn ensure that the rigid requirements of overall architecture; Be equipped with the quantity demand that multiple method of adjustment and metering system can meet performance index completely; Two method of adjustment of driving pulse parameter coupling is a kind of effective breakthrough, gives prominence to and is embodied in when parameter matching can remove electrical control compensation way to (synchronism deviation≤20um) in confining spectrum; High-order planer-type architecture mode is also the development trend that product specification promotes in addition.
Accompanying drawing explanation
Fig. 1 is that before ultrasonic scanning microscope stepping axis mechanism, the optical axis measures intention;
Fig. 2 is that after ultrasonic scanning microscope stepping axis mechanism, the optical axis measures intention;
Fig. 3 is left driver element 1 broken section (A-A) schematic diagram;
Fig. 4 is right driver element 2 broken section (B-B) schematic diagram;
Fig. 5 is left positioning unit 3 broken section (C-C) schematic diagram;
Fig. 6 is right positioning unit 4 broken section (D-D) schematic diagram;
Fig. 7 is that left linear grating adjusting gear axle measures intention;
Fig. 8 is that right linear grating adjusting gear axle measures intention;
Fig. 9 is that left socle 9 axle measures intention;
Figure 10 is that right support 15 axle measures intention.
Embodiment
Below in conjunction with accompanying drawing, clear, complete description is carried out to technical scheme of the present invention.
As shown in Figure 1 and Figure 2, ultrasonic scanning microscope stepping axle provided by the invention two drive structure and comprise: pedestal 8, left driver element 1, right driver element 2, front support beam 7, rear support beam 6 and X are to crossbeam 5, wherein, rear support beam 6 docks left driver element 1 and right driver element 2 at rear side, front support beam 7 docks left driver element 1 and right driver element 2 in front side, X connects left driver element 1 and right driver element 2 to crossbeam 5, and left driver element 1 and right driver element 2 drive X to move forward and backward to crossbeam 5.Wherein, pedestal can adopt marble pedestal.This pair drives structure and also comprises: left positioning unit 3, right positioning unit 4, and wherein, left positioning unit 3 is arranged in left driver element 1, right positioning unit 4 is arranged in right driver element 2.In addition, this pair drives structure and also comprises mechanical stop limiter, and mechanical stop limiter, by being individually fixed in left socle 9 and the limit base 30 on right support 15 and the buffer stopper 29 that is connected with limit base 30 is formed, plays ultimate protection when moving cell runs.
As shown in Figure 3, Figure 4, described left driver element 1 comprises: the left stand 14 be connected and fixed with pedestal 8, the left U-shaped seat 13, left guide piece and the left drive unit that are connected and fixed with left stand 14, wherein, left guide piece is arranged on left U-shaped seat 13, and left drive unit is connected to crossbeam 5 with left guide piece and X respectively; Described right driver element 2 comprises: the right stand 20 be connected and fixed with pedestal 8, the right U-shaped seat 19, right guide piece and the right drive unit that are connected and fixed with right stand 20, wherein, right guide piece is arranged on right U-shaped seat 19, and right drive unit is connected to crossbeam 5 with right guide piece and X respectively.Wherein left stand 14, right stand 20 can adopt marble stand.
Wherein, the consisting of of described left driver element 1: the left socle 9 be connected and fixed with left U-shaped seat 13, the left line slideway auxiliary 12 be connected and fixed to crossbeam 5 and left socle 9 with X respectively form left guide piece; The left linear motor stator electric 10 be connected and fixed with left socle 9, the left linear motor rotor 11 be connected and fixed to crossbeam 5 with X form left drive unit.Consisting of of described right driver element 2: the right support 15 be connected and fixed with right U-shaped seat 19, the right line slideway auxiliary 18 be connected and fixed to crossbeam 5 and right support 15 with X respectively form right guide piece; The right linear motor stator electric 16 be connected and fixed with right support 15, the right linear motor rotor 17 be connected and fixed to crossbeam 5 with X form right drive unit.The linear electric motors that left drive unit and right drive unit adopt are iron-core-free form, and power of pausing when can eliminate high precision operation impact, does not produce suction simultaneously, do not produce side component to line slideway auxiliary.
Wherein, as shown in Figure 2, on left U-shaped seat 13, two sides array distribution has set screw I13-1, and on right U-shaped seat 19, two sides array distribution has set screw II19-1, for carrying out adjustment parallel each other to left socle 9 with right support 15.
As shown in Figure 5-Figure 8, left positioning unit 3 comprises left linear grating adjusting gear, and right positioning unit 4 comprises right linear grating adjusting gear, wherein,
Left linear grating adjusting gear comprises: be fixed on left read head seat 23 from X to crossbeam 5, be installed on left read head seat 23 left grating reading head 24, be installed on the left grating scale liner plate 22 of left socle 9 and be bonded and fixed to the left grating scale 21 of left grating scale liner plate 22; Left grating reading head 24 relies on the elongated slot 23-1 on left read head seat 23 to carry out straight-line displacement, and to regulate the sideshake value between left grating reading head 24 and left grating scale 21, the sideshake value after adjustment is 0.7 ~ 0.9mm;
Right linear grating adjusting gear comprises: be fixed on right read head seat 27 from X to crossbeam 5, be installed on right read head seat 27 right grating reading head 28, be installed on the right grating scale liner plate 26 of right support 15 and be bonded and fixed to the right grating scale 25 of right grating scale liner plate 26; Right grating reading head 28 relies on the elongated slot 27-1 on right read head seat 27 to carry out straight-line displacement, and to regulate the sideshake value between right grating reading head 28 and right grating scale 25, the sideshake value after adjustment is 0.7 ~ 0.9mm.
Wherein, on left grating scale liner plate 22, array distribution has set screw III22-1, on right grating scale liner plate 26, array distribution has set screw IV26-1, with X to crossbeam 5 for measuring basis, manually half step distance moves X to crossbeam 5, for carrying out the adjustment of linearity value in effective travel to left grating scale liner plate 22 and right grating scale liner plate 26, linearity value≤10um in effective travel after adjustment, simultaneously for adjusting parallel parameter between left grating scale liner plate 22 with right grating scale liner plate 26 span.
With reference to figure 9, Figure 10, the present invention also provides a kind of two two methods of adjustment of driving pulse parameter coupling of driving structure of ultrasonic scanning microscope stepping axle, wherein, the moving cell that stepping axle dual linear motor drives is that X is to crossbeam 5, X to crossbeam 5 across connection left line slideway auxiliary 12 and right line slideway auxiliary 18 as back and forth running guiding, by left positioning unit 3 and right positioning unit 4 feed back to configuration display on pulse difference as adjustment reference, concrete steps are as follows:
Step one: with plane on pedestal 8 for measuring basis, to the measurement tabular value checking supporting the upper plane 14-1 of left stand 14 of left U-shaped seat 13, the upper plane 20-1 of the right stand 20 of supports right U-shaped seat 19 and carry out the high parameter such as equidirectional;
Step 2: with plane on pedestal 8 for measuring basis, to the measurement tabular value checking carrying out the high parameter such as equidirectional between the effective length that left socle 9 middle guide installs groove face 9-1, right support 15 middle guide installs groove face 15-1;
Step 3: left line slideway 12-1 and right line slideway 18-1 can acted as reference mutual guide rail, when left line slideway 12-1 is decided to be basic rack, debug process means routinely: first by after the linearity index centering of left line slideway 12-1, linearity index≤5um after centering, again centering as auxiliary guide rail right line slideway 18-1 and be decided to be basic rack left line slideway 12-1 between depth of parallelism index, the depth of parallelism index≤10um after centering; Maybe when right line slideway 18-1 is decided to be basic rack, debug process means routinely: first by after the linearity index centering of right line slideway 18-1, linearity index≤5um after centering, again centering as auxiliary guide rail left line slideway 12-1 and be decided to be basic rack right line slideway 18-1 between depth of parallelism index, the depth of parallelism index≤10um after centering;
Step 4: move by manually carrying out half step distance in effective travel to X to crossbeam 5, simultaneously with reference to configure on display through pulse difference that left and right linear grating adjusting gear feeds back, first by the set screw II19-1 of two sides array distribution on the set screw I13-1 of two sides array distribution on left U-shaped seat 13 and right U-shaped seat 19, coarse regulation parallel is each other carried out, its depth of parallelism index≤50um between left socle 9 with right support 15; Then corresponding auxiliary guide rail pointwise is carried out and the adjustment of depth of parallelism value between basic rack, realize two coupling requirement of driving pulse display difference, wherein, twoly drive pulse display difference≤20um.
Wherein, to the parallel parameter adjustment between left socle 9 with right support 15 span, to left socle 9 middle guide install orientation between effective length that groove face 9-1 and right support 15 middle guide install groove face 15-1 and etc. the measurement tabular value of high parameter verify, all can debug process means routinely to parallel parameter adjustment between grating scale liner plate 22 with grating scale liner plate 26 span and be ensured.
The present invention adopts bilateral to drive, and avoids one-sided driving easily to produce the problems such as torsional deformation when planer-type framework runs; Adopt stacked system to form high-order planer-type architecture mode, easily ensure the accuracy requirement of vital part processing, in turn ensure that the rigid requirements of overall architecture; Be equipped with the quantity demand that multiple method of adjustment and metering system can meet performance index completely; Two method of adjustment of driving pulse parameter coupling is a kind of effective breakthrough, gives prominence to and is embodied in when parameter matching can remove control and compensation mode to (synchronism deviation is less than 20um) in confining spectrum; High-order planer-type architecture mode is also the development trend that product specification promotes in addition.
Obviously; embodiment described above is only the present invention's part embodiment, instead of whole embodiments, based on the embodiment in the present invention; those of ordinary skill in the art, in the every other embodiment not having to obtain under creative work prerequisite, belong to the scope of protection of the invention.
Claims (4)
1. the two of a ultrasonic scanning microscope stepping axle drive structure, it is characterized in that, comprise: pedestal (8), left driver element (1), right driver element (2), front support beam (7), rear support beam (6) and X are to crossbeam (5), wherein, rear support beam (6) docks left driver element (1) and right driver element (2) at rear side, front support beam (7) docks left driver element (1) and right driver element (2) in front side, X connects left driver element (1) and right driver element (2) to crossbeam (5), left driver element (1) and right driver element (2) drive X to move forward and backward to crossbeam (5),
Described left driver element (1) comprising: the left stand (14) be connected and fixed with pedestal (8), the left U-shaped seat (13) be connected and fixed with left stand (14), left guide piece and left drive unit, wherein, left guide piece is arranged on left U-shaped seat (13), and left drive unit is connected to crossbeam (5) with left guide piece and X respectively;
Described right driver element (2) comprising: the right stand (20) be connected and fixed with pedestal (8), the right U-shaped seat (19) be connected and fixed with right stand (20), right guide piece and right drive unit, wherein, right guide piece is arranged on right U-shaped seat (19), and right drive unit is connected to crossbeam (5) with right guide piece and X respectively;
Consisting of of described left driver element (1): the left socle (9) be connected and fixed with left U-shaped seat (13), the left line slideway auxiliary (12) be connected and fixed to crossbeam (5) and left socle (9) with X respectively form left guide piece; The left linear motor stator electric (10) be connected and fixed with left socle (9), the left linear motor rotor (11) be connected and fixed to crossbeam (5) with X form left drive unit;
Consisting of of described right driver element (2): the right support (15) be connected and fixed with right U-shaped seat (19), the right line slideway auxiliary (18) be connected and fixed to crossbeam (5) and right support (15) with X respectively form right guide piece; The right linear motor stator electric (16) be connected and fixed with right support (15), the right linear motor rotor (17) be connected and fixed to crossbeam (5) with X form right drive unit;
Left U-shaped seat (13) upper two sides array distribution has set screw I(13-1), right U-shaped seat (19) upper two sides array distribution has set screw II(19-1), for carrying out adjustment parallel each other to left socle (9) with right support (15);
Left positioning unit (3), right positioning unit (4), wherein, left positioning unit (3) is arranged in left driver element (1), right positioning unit (4) is arranged in right driver element (2);
Left positioning unit (3) comprises left linear grating adjusting gear, and right positioning unit (4) comprises right linear grating adjusting gear, wherein,
Left linear grating adjusting gear comprises: be fixed on left read head seat (23) from X to crossbeam (5), be installed on left read head seat (23) left grating reading head (24), be installed on the left grating scale liner plate (22) of left socle (9) and be bonded and fixed to the left grating scale (21) of left grating scale liner plate (22); Left grating reading head (24) relies on the elongated slot (23-1) on left read head seat (23) to carry out straight-line displacement, to regulate the sideshake value between left grating reading head (24) and left grating scale (21);
Right linear grating adjusting gear comprises: be fixed on right read head seat (27) from X to crossbeam (5), be installed on right read head seat (27) right grating reading head (28), be installed on the right grating scale liner plate (26) of right support (15) and be bonded and fixed to the right grating scale (25) of right grating scale liner plate (26); Right grating reading head (28) relies on the elongated slot (27-1) on right read head seat (27) to carry out straight-line displacement, to regulate the sideshake value between right grating reading head (28) and right grating scale (25);
The upper array distribution of left grating scale liner plate (22) has set screw III(22-1), the upper array distribution of right grating scale liner plate (26) has set screw IV(26-1), with X to crossbeam (5) for measuring basis, manually half step distance moves X to crossbeam (5), for carrying out the adjustment of linearity value in effective travel to left grating scale liner plate (22) and right grating scale liner plate (26), simultaneously for adjusting parallel parameter between left grating scale liner plate (22) with right grating scale liner plate (26) span.
2. the two of a kind of ultrasonic scanning microscope stepping axle according to claim 1 drive structure, it is characterized in that, also comprise mechanical stop limiter, mechanical stop limiter is by being individually fixed in left socle (9) and the limit base (30) on right support (15) and the buffer stopper (29) that is connected with limit base (30) is formed.
3. the two of a kind of ultrasonic scanning microscope stepping axle according to claim 1 drive structure, and it is characterized in that, the linear electric motors that left drive unit and right drive unit adopt are iron-core-free form.
4. two two methods of adjustment of driving pulse parameter coupling of driving structure of a kind of ultrasonic scanning microscope stepping axle according to claim 1, concrete steps are as follows:
Step one: with the upper plane of pedestal (8) for measuring basis, to supporting the upper plane (14-1) of left stand (14) of left U-shaped seat (13), the upper plane (20-1) of the right stand (20) of supports right U-shaped seat (19) carries out the equidirectional measurement tabular value of high parameter that waits and verifies;
Step 2: with the upper plane of pedestal (8) for measuring basis, verifies carrying out the equidirectional measurement tabular value of high parameter that waits between the effective length that left socle (9) middle guide installs groove face (9-1), right support (15) middle guide installs groove face (15-1);
Step 3: left line slideway (12-1) and right line slideway (18-1) can acted as reference mutual guide rails, when left line slideway (12-1) is decided to be basic rack, debug process means routinely: first by after the linearity index centering of left line slideway (12-1), then centering as auxiliary guide rail right line slideway (18-1) and be decided to be basic rack left line slideway (12-1) between depth of parallelism index; Maybe when right line slideway (18-1) is decided to be basic rack, debug process means routinely: first by after the linearity index centering of right line slideway (18-1), then centering as auxiliary guide rail left line slideway (12-1) and be decided to be basic rack right line slideway (18-1) between depth of parallelism index;
Step 4: move by manually carrying out half step distance in effective travel to X to crossbeam (5), simultaneously with reference to configure on display through pulse difference that left and right linear grating adjusting gear feeds back, first by the set screw I(13-1 of two sides array distribution on left U-shaped seat (13)) go up the set screw II(19-1 of two sides array distribution with right U-shaped seat (19)), carry out coarse regulation parallel each other between left socle (9) with right support (15); Then corresponding auxiliary guide rail pointwise is carried out and the adjustment of depth of parallelism value between basic rack, realize two coupling requirement of driving pulse display difference.
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|---|---|---|---|---|
| CN1701925A (en) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | H type air floating workbench with synchronization driving of bilateral linear motor |
| CN101963763A (en) * | 2010-08-03 | 2011-02-02 | 哈尔滨工业大学 | Double-driving double-bridge table changing station-based double-workpiece table high-accuracy exchange device |
| CN102059573A (en) * | 2010-11-10 | 2011-05-18 | 西安交通大学 | Modeling method for dual-driving synchronous electromechanical coupling characteristic of walking beam type gantry machine tool |
| CN102411032A (en) * | 2011-07-18 | 2012-04-11 | 中国航空工业集团公司北京航空制造工程研究所 | Industrial scale ultrasonic automatic scanning and imaging detection device |
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| JP3093054B2 (en) * | 1992-09-22 | 2000-10-03 | 川崎重工業株式会社 | Method and apparatus for automatically adjusting sensitivity of ultrasonic flaw detector |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1701925A (en) * | 2005-07-22 | 2005-11-30 | 北京航空航天大学 | H type air floating workbench with synchronization driving of bilateral linear motor |
| CN101963763A (en) * | 2010-08-03 | 2011-02-02 | 哈尔滨工业大学 | Double-driving double-bridge table changing station-based double-workpiece table high-accuracy exchange device |
| CN102059573A (en) * | 2010-11-10 | 2011-05-18 | 西安交通大学 | Modeling method for dual-driving synchronous electromechanical coupling characteristic of walking beam type gantry machine tool |
| CN102411032A (en) * | 2011-07-18 | 2012-04-11 | 中国航空工业集团公司北京航空制造工程研究所 | Industrial scale ultrasonic automatic scanning and imaging detection device |
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