CN103309166A - Movable lens adjustment device and adjustable optical system using same - Google Patents
Movable lens adjustment device and adjustable optical system using same Download PDFInfo
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- CN103309166A CN103309166A CN2012100626317A CN201210062631A CN103309166A CN 103309166 A CN103309166 A CN 103309166A CN 2012100626317 A CN2012100626317 A CN 2012100626317A CN 201210062631 A CN201210062631 A CN 201210062631A CN 103309166 A CN103309166 A CN 103309166A
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- movable lens
- optical system
- lens barrel
- support arm
- adjustable optical
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Abstract
The invention discloses a movable lens adjustment device and an adjustable optical system using the same. The movable lens adjustment device is used for adjusting the position of a movable lens relative to a lens barrel. The movable lens adjustment device comprises a driving element, a lever, a first double-ball bearing and a second double-ball bearing. The lever comprise a body and a supporting seat, wherein the supporting seat is arranged on the lens barrel, and the body is rotatably arranged on the supporting seat and has a first support arm and a second support arm. The first double-ball bearing is connected with the driving element and the first support arm. The second double-ball bearing is connected with the second support arm and the movable lens. According to the invention, through the two double-ball bearings, slipping between the first support arm and the driving element and between the second support arm and the movable lens is avoided during rotation of the lever.
Description
Technical field
The present invention relates to a kind of litho machine equipment, relate in particular to a kind of movable lens adjusting device and use its adjustable optical system.
Background technology
In photoetching projection objective lens, because manufacturing and the rigging error of eyeglass, so that the imaging picture element variation of object lens.In order to address this problem, generally adopt movable lens with manufacturing and the rigging error of compensation eyeglass.
Be in the U.S. Patent Application Publication file of US20080204905 at publication number, movable lens is supported by three uniform flexible blocks, realizes the movement of movable lens by the elastic deformation of flexible block.Be in the Chinese patent application open file of CN200810204974 at application number, movable lens is supported by three uniform leverages, realizes the movement of movable lens by the rotation of lever.
Yet above-mentioned two kinds of technology have certain limitation in realization.US20080204905 realizes the movement of movable lens by the elastic deformation of flexible block, the stroke of its movable lens is limited, is not suitable for the movable lens that has large stroke to move demand.Among the CN200810204974, the movable mirror group is supported by three uniform leverages, the motor-driven bar directly and an end in contact of lever, the other end of lever directly contacts with movable lens.In the rotation process of lever, between motor-driven bar and the lever radial slippage can occur, and also radial slippage can occur between lever and the movable lens.Therefore, in the moving process of movable lens, the play phenomenon can occur, cause adjusting precision not high, thereby be not suitable for the higher movable lens of adjustment precision.
Summary of the invention
The object of the present invention is to provide a kind of movable lens adjusting device and use its adjustable optical system, to improve the disappearance of prior art.
For solving the problems of the technologies described above, movable lens adjusting device provided by the invention is used for adjusting movable lens with respect to the position of lens barrel.Movable lens adjusting device comprises driving element, lever, first pair of ball bearing and second pair of ball bearing.Lever comprises body and supporting seat, and supporting seat is arranged at lens barrel, and body is arranged at supporting seat rotationally, and body has the first support arm and the second support arm.First pair of ball bearing connects driving element and the first support arm.Second pair of ball bearing connects the second support arm and movable lens.
In one embodiment of this invention, driving element is stepper motor.
In one embodiment of this invention, lever also comprises rotating shaft, is arranged at rotationally supporting seat, and connects body.
In one embodiment of this invention, between rotating shaft and the body be wringing fit.
In one embodiment of this invention, lever also comprises without oily lining, is arranged between rotating shaft and the supporting seat.
In one embodiment of this invention, lever also comprises extension spring, and the two ends of extension spring connect respectively body and lens barrel.
The present invention also provides a kind of adjustable optical system, comprises lens barrel, movable lens and at least one movable lens adjusting device.Movable lens is arranged at lens barrel movably.Movable lens adjusting device is used for adjusting movable lens with respect to the position of lens barrel.Movable lens adjusting device comprises driving element, lever, first pair of ball bearing and second pair of ball bearing.Lever comprises body and supporting seat, and supporting seat is arranged at lens barrel, and body is arranged at supporting seat rotationally, and body has the first support arm and the second support arm.First pair of ball bearing connects driving element and the first support arm.Second pair of ball bearing connects the second support arm and movable lens.
In one embodiment of this invention, adjustable optical system also comprises the support shell fragment, and movable lens is arranged at lens barrel by supporting shell fragment.
In one embodiment of this invention, lens barrel is hollow form, and movable lens is positioned at lens barrel, supports shell fragment and is located on lens barrel and movable lens.
In one embodiment of this invention, adjustable optical system also comprises preloaded spring, is arranged to support in the shell fragment, and an end of preloaded spring compresses movable lens.
In one embodiment of this invention, the quantity of movable lens adjusting device is three, equably around the lens barrel setting.
Movable lens adjusting device provided by the invention, driving element link and movable lens link at lever all adopt two ball bearing structures, avoid lever in rotation process, sliding phenomenon occurs between its first support arm and driving element and the second support arm and the movable lens, and then eliminate the play phenomenon that in the axial adjustment process of movable lens, occurs, improve and adjust precision.
Description of drawings
Fig. 1 is the schematic diagram of the adjustable optical system of a preferred embodiment of the present invention;
Fig. 2 is the schematic diagram of lens barrel among Fig. 1;
Fig. 3 is movable lens and the connection diagram that supports shell fragment among Fig. 1;
Fig. 4 is the front cut-away view of Fig. 1;
Fig. 5 is the enlarged diagram of movable lens adjusting device among Fig. 4;
Fig. 6 is the lever principle schematic diagram of a preferred embodiment of the present invention.
Embodiment
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand fully purpose of the present invention, feature and effect.
Fig. 1 is the schematic diagram of the adjustable optical system of a preferred embodiment of the present invention.Fig. 2 is the schematic diagram of lens barrel among Fig. 1.Fig. 3 is movable lens and the connection diagram that supports shell fragment among Fig. 1.Please refer to Fig. 1～Fig. 3.In the present embodiment, adjustable optical system 1 comprises lens barrel 10, movable lens 11, supports shell fragment 12, the first fixture 13, the second fixture 14, preloaded spring 15 and movable lens adjusting device 16.Movable lens 11 is arranged at lens barrel 10 movably by supporting shell fragment 12.The first fixture 13 and the second fixture 14 will support respectively shell fragment 12 and be connected to movable lens 11 and lens barrel 10.Preloaded spring 15 is positioned at and supports shell fragment 12.Movable lens adjusting device 16 is used for adjusting movable lens 11 with respect to the position of lens barrel 10.Yet the present invention does not impose any restrictions this.
In the present embodiment, lens barrel 10 is bases that total is installed, for movable lens 11 provides reference for installation.At this, lens barrel 10 can be hollow form, for example is hollow circular cylinder, and can form corresponding accommodation space 100 on its circumference side, to hold the part-structure of movable lens adjusting device 16.In addition, the upper surface at lens barrel 10 also can form a plurality of the first fixed orifices 101.Yet the present invention does not impose any restrictions the concrete form of lens barrel 10.
In the present embodiment, movable lens 11 can be arranged at the hollow bulb of lens barrel 10.Particularly, movable lens 11 can comprise ring-type fixed part 110 and eyeglass body 111.Eyeglass body 111 can be inlayed in the inner around the inner ring surface of ring-type fixed part 110.In addition, the upper surface of ring-type fixed part 110 can form a plurality of the second fixed orifices 1100 and a plurality of guideposts 1101.Yet the present invention does not impose any restrictions this.
In the present embodiment, support shell fragment 12 and also can be ring-type, be located on lens barrel 10 and movable lens 11.Particularly, the upper surface of support shell fragment 12 can form respectively a plurality of the 3rd fixed orifices 120 and a plurality of the 4th fixed orifices 121.The first fixed orifice 101 of the second fixed orifice 1100, the four fixed orifices 121 corresponding lens barrels 10 of the 3rd fixed orifice 120 corresponding movable lens 11.The first fixture 13 can be arranged in the 3rd fixed orifice 120 and the second fixed orifice 1100 successively, supports shell fragment 12 and movable lens 11 to connect.The second fixture 14 can be arranged in the first fixed orifice 101 and the 4th fixed orifice 121 successively, with fixed support shell fragment 12 and lens barrel 10.At this, can have respectively screw thread in the first fixed orifice 101 and the 4th fixed orifice 121, the second fixture 14 can be screw, with fixed support shell fragment 12 and lens barrel 10.Yet the present invention does not impose any restrictions this.In other embodiments, support between shell fragment 12 and the lens barrel 10 and also can fix by engaging mode.
In addition, in the present embodiment, also can have screw thread in the 3rd fixed orifice 120, and the second fixed orifice 1100 can only be common through hole, the first fixture 13 can be the threaded double-screw bolt of bottom tool accordingly.Preloaded spring 15 is sheathed on the first fixture 13, does up and down micro-displacement so that movable lens 11 can support shell fragment 12 relatively.Particularly, preloaded spring 15 namely is in compressive state under preset state, and its upper end can be positioned at the step surface place on double-screw bolt top, and the lower end can directly compress movable lens 11, to guarantee the stability of movable lens 11 when axially (that is, above-below direction) moves.At this, the size of pretightning force then depends on the rigidity of compression distance and the preloaded spring 15 of preloaded spring 15, and the present invention does not impose any restrictions this.
In the present embodiment, support shell fragment 12 and also pilot hole 122 can be set, the guidepost 1101 of corresponding movable lens 11 with when movable lens 11 moves vertically, forms a guide effect to movable lens 11.Yet the present invention does not impose any restrictions this.
In the present embodiment, the number of movable lens adjusting device 16 can be three, arranges around lens barrel 10 equably, so that movable lens 11 is formed three strong points.At this, the accommodation space 100 that movable lens adjusting device 16 can be distinguished on corresponding lens barrel 10 sides arranges.In addition, three movable lens adjusting devices 16 can be done to adjust synchronously to the position of movable lens 11, in the adjustment of axial location, also can adjust independently the position of movable lens 11 to realize movable lens 11, with realize movable lens 11 levels to tilt adjustments.The present invention does not impose any restrictions the number of movable lens adjusting device 16.
Below will the concrete structure of movable lens adjusting device 16 be described specifically with the adjustment principle.Please refer to Fig. 4～Fig. 6.Fig. 4 is the front cut-away view of Fig. 1.Fig. 5 is the enlarged diagram of movable lens adjusting device among Fig. 4.Fig. 6 is the lever principle schematic diagram of a preferred embodiment of the present invention.
In the present embodiment, movable lens adjusting device 16 comprises driving element 160, lever 161, first pair of ball bearing 162 and second pair of ball bearing 163.
In the present embodiment, driving element 160 can be stepper motor, for the movement of movable lens 11 provides power resources.Yet the present invention does not impose any restrictions this.In other embodiments, driving element 160 also can be cylinder.
In the present embodiment, lever 161 can comprise body 1610, supporting seat 1611, rotating shaft 1612, without oily lining 1613 and extension spring 1614.Supporting seat 1611 can be arranged at lens barrel 10, and rotating shaft 1612 is arranged at supporting seat 1611 rotationally, and connects body 1610, so that body 1610 relative supporting seats 1611 are rotatable.At this, be wringing fit between rotating shaft 1612 and the body 1610, namely gapless in addition, can arrange without oily lining 1613 between rotating shaft 1612 and the supporting seat 1611.Since without oily lining 1613 have low friction, need not to lubricate, the advantages such as gapless, high duplication, low hysteresis, therefore, can guarantee that rotating shaft 1612 does the gapless rotation.Yet the present invention does not impose any restrictions this.
In the present embodiment, the two ends of extension spring 1614 can connect respectively the body 1610 and lens barrel 10 of lever 161, to give all the time 161 1 pretightning forces of lever, improve the stability of whole movable lens adjusting device 16.Particularly, in practical operation, the two ends of extension spring 1614 can connect respectively a fixed connecting base 1615, and the fixed connecting base 1615 of an end is fixed in the body 1610 of lever 161,1615 of the fixed connecting bases of the other end are fixed in a web joint 1616, and this web joint 1616 is fixed in the sidewall of lens barrel 10.Yet the present invention does not impose any restrictions this.In other embodiments, the two ends of extension spring 1614 can directly connect the body 1610 and lens barrel 10 of lever 161.
In the present embodiment, the body 1610 of lever 161 has the first support arm 1617 and the second support arm 1618.At this, the first support arm 1617 can be the long-armed of lever 161, and the second support arm 1618 can be the galianconism of lever 161.Yet the present invention does not impose any restrictions this.When practical operation, the user is self-defining according to demand.
In the present embodiment, first pair of ball bearing 162 connects driving element 160 and 1617, the second pairs of ball bearings of the first support arm, 163 connections the second support arm 1618 and movable lens 11.Particularly, first pair of ball bearing 162 can comprise two first ball bearing bodies 1620 and head rod 1621.Head rod 1621 is arranged in the internal face of two the first ball bearing bodies 1620, and connects the driving shaft of driving element 160, to move axially under the driving of driving element 160.At this, the bearing seat of first pair of ball bearing 162, namely the outside wall surface of the first ball bearing body 1620 then is connected in the first support arm 1617.
Similarly, in the present embodiment, second pair of ball bearing 163 comprises two the second ball bearing bodies 1630 and the second connecting link 1631.Because second pair of ball bearing 163 has identical structure with first pair of ball bearing 162, therefore do not repeat them here.
In the present embodiment, when the first support arm 1617 of driving element 160 activation lever 161 moved vertically, the second support arm 1618 of lever 161 namely drove movable lens 11 and moves axially thereupon, to realize the adjustment of movable lens 11 positions.At this, rotation by first pair of ball bearing 162 and second pair of ball bearing 163, can avoid lever 161 in rotation process, between its first support arm 1617 and driving element 160 and the second support arm 1618 and the movable lens 11 radial slippage occur, adjust precision thereby improve.
In sum, the movable lens adjusting device that preferred embodiment of the present invention provides, driving element link and movable lens link at lever all adopt two ball bearing structures, avoid lever in rotation process, sliding phenomenon occurs between its first support arm and driving element and the second support arm and the movable lens, and then eliminate the play phenomenon that in the axial adjustment process of movable lens, occurs, improve and adjust precision.
More than describe preferred embodiment of the present invention in detail.The ordinary skill that should be appreciated that this area need not creative work and just can design according to the present invention make many modifications and variations.Therefore, all in the art technician all should be in the determined protection domain by claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (16)
1. a movable lens adjusting device is used for adjusting movable lens with respect to the position of lens barrel, it is characterized in that, described movable lens adjusting device comprises:
Driving element;
Lever comprises body and supporting seat, and described supporting seat is arranged at described lens barrel, and described body is arranged at described supporting seat rotationally, and described body has the first support arm and the second support arm;
First pair of ball bearing connects described driving element and described the first support arm; And
Second pair of ball bearing connects described the second support arm and described movable lens.
2. movable lens adjusting device according to claim 1 is characterized in that, described driving element is stepper motor.
3. movable lens adjusting device according to claim 1 is characterized in that, described lever also comprises rotating shaft, is arranged at rotationally described supporting seat, and connects described body.
4. movable lens adjusting device according to claim 3 is characterized in that, is wringing fit between described rotating shaft and the described body.
5. movable lens adjusting device according to claim 3 is characterized in that, described lever also comprises without oily lining, is arranged between described rotating shaft and the described supporting seat.
6. movable lens adjusting device according to claim 1 is characterized in that, described lever also comprises extension spring, and the two ends of described extension spring connect respectively described body and described lens barrel.
7. an adjustable optical system is characterized in that, comprising:
Lens barrel;
Movable lens is arranged at described lens barrel movably; And
At least one movable lens adjusting device is used for adjusting described movable lens with respect to the position of described lens barrel, and described movable lens adjusting device comprises:
Driving element;
Lever comprises body and supporting seat, and described supporting seat is arranged at described lens barrel, and described body is arranged at described supporting seat rotationally, and described body has the first support arm and the second support arm;
First pair of ball bearing connects described driving element and described the first support arm; And
Second pair of ball bearing connects described the second support arm and described movable lens.
8. adjustable optical system according to claim 7 is characterized in that, described adjustable optical system also comprises the support shell fragment, and described movable lens is arranged at described lens barrel by described support shell fragment.
9. adjustable optical system according to claim 8 is characterized in that, described lens barrel is hollow form, and described movable lens is positioned at described lens barrel, and described support shell fragment is located on lens barrel and described movable lens.
10. adjustable optical system according to claim 8 is characterized in that, described adjustable optical system also comprises preloaded spring, is arranged in the described support shell fragment, and an end of described preloaded spring compresses described movable lens.
11. adjustable optical system according to claim 7 is characterized in that, the quantity of described movable lens adjusting device is three, equably around described lens barrel setting.
12. adjustable optical system according to claim 7 is characterized in that, described driving element is stepper motor.
13. adjustable optical system according to claim 7 is characterized in that, described lever also comprises rotating shaft, is arranged at rotationally described supporting seat, and connects described body.
14. adjustable optical system according to claim 13 is characterized in that, is wringing fit between described rotating shaft and the described body.
15. adjustable optical system according to claim 13 is characterized in that, described lever also comprises without oily lining, is arranged between described rotating shaft and the described supporting seat.
16. adjustable optical system according to claim 7 is characterized in that, described lever also comprises extension spring, and the two ends of described extension spring connect respectively described body and described lens barrel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210062631.7A CN103309166B (en) | 2012-03-09 | 2012-03-09 | Movable lens adjusting device and apply its adjustable optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210062631.7A CN103309166B (en) | 2012-03-09 | 2012-03-09 | Movable lens adjusting device and apply its adjustable optical system |
Publications (2)
| Publication Number | Publication Date |
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| CN103309166A true CN103309166A (en) | 2013-09-18 |
| CN103309166B CN103309166B (en) | 2016-03-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210062631.7A Active CN103309166B (en) | 2012-03-09 | 2012-03-09 | Movable lens adjusting device and apply its adjustable optical system |
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| Country | Link |
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| CN (1) | CN103309166B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103676081A (en) * | 2013-12-19 | 2014-03-26 | 丹阳丹耀光学有限公司 | Gluing early-curing centering device |
| CN108398761A (en) * | 2018-03-28 | 2018-08-14 | 中国科学院光电技术研究所 | Three-dimensional dynamic adjusting and locking mechanism |
| CN105807384B (en) * | 2014-12-29 | 2019-02-01 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
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| US20040146082A1 (en) * | 1997-07-22 | 2004-07-29 | Armen Kroyan | Laser spectral engineering for lithographic process |
| CN1851557A (en) * | 2006-06-02 | 2006-10-25 | 中国科学院光电技术研究所 | Two-dimensional scanning precision laser exposure system |
| CN201081770Y (en) * | 2007-09-21 | 2008-07-02 | 上海微电子装备有限公司 | Movable lens adjusting device |
| CN101464554A (en) * | 2008-12-30 | 2009-06-24 | 上海微电子装备有限公司 | Micro-regulating mechanism for movable lens |
| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
| US20100245847A1 (en) * | 2004-06-29 | 2010-09-30 | Carl Zeiss Smt Ag | Positioning unit and alignment device for an optical element |
| US20110102917A1 (en) * | 2008-07-01 | 2011-05-05 | Konica Minolta Opto, Inc. | Drive mechanism, drive device, and lens drive device |
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2012
- 2012-03-09 CN CN201210062631.7A patent/CN103309166B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040146082A1 (en) * | 1997-07-22 | 2004-07-29 | Armen Kroyan | Laser spectral engineering for lithographic process |
| US20100245847A1 (en) * | 2004-06-29 | 2010-09-30 | Carl Zeiss Smt Ag | Positioning unit and alignment device for an optical element |
| CN1851557A (en) * | 2006-06-02 | 2006-10-25 | 中国科学院光电技术研究所 | Two-dimensional scanning precision laser exposure system |
| CN201081770Y (en) * | 2007-09-21 | 2008-07-02 | 上海微电子装备有限公司 | Movable lens adjusting device |
| US20110102917A1 (en) * | 2008-07-01 | 2011-05-05 | Konica Minolta Opto, Inc. | Drive mechanism, drive device, and lens drive device |
| CN101464554A (en) * | 2008-12-30 | 2009-06-24 | 上海微电子装备有限公司 | Micro-regulating mechanism for movable lens |
| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103676081A (en) * | 2013-12-19 | 2014-03-26 | 丹阳丹耀光学有限公司 | Gluing early-curing centering device |
| CN103676081B (en) * | 2013-12-19 | 2016-08-17 | 丹阳丹耀光学有限公司 | Gluing just solidifies centralising device |
| CN105807384B (en) * | 2014-12-29 | 2019-02-01 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN108398761A (en) * | 2018-03-28 | 2018-08-14 | 中国科学院光电技术研究所 | Three-dimensional dynamic adjusting and locking mechanism |
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| CN103309166B (en) | 2016-03-30 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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