CN103308733A - Probe and connecting jig - Google Patents

Probe and connecting jig Download PDF

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Publication number
CN103308733A
CN103308733A CN2013100776770A CN201310077677A CN103308733A CN 103308733 A CN103308733 A CN 103308733A CN 2013100776770 A CN2013100776770 A CN 2013100776770A CN 201310077677 A CN201310077677 A CN 201310077677A CN 103308733 A CN103308733 A CN 103308733A
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CN
China
Prior art keywords
probe
outer conductors
spacing
spring
spring portion
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CN2013100776770A
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Chinese (zh)
Inventor
太田宪宏
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Nidec Corp
Nidec Read Corp
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Nidec Corp
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Publication of CN103308733A publication Critical patent/CN103308733A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The invention discloses a probe which don' t damage characteristics of springs abutting against the detecting object and effectively inhibits counterforce of precompression of the probe when the probe is installed on the connecting jig. The invention provides a probe which is electrically connected to the connection point on the detected object and is used for connecting to the connecting jig. The probe is characterized in that the external conductor of the probe is cylinder-shaped, and the inner conductor is conductive and the front end of the inner conductor is inserted into the external conductor from the front end of the external conductor in a projecting manner and is connected to the external conductor. On the circumferential wall of the external conductor has a spiral groove for the spring telescoping axially on the probe. The space of the spiral groove is not limited.

Description

Probe and jockey
Technical field
The present invention relates to for carry out be arranged on detected object on probe that be electrically connected, that in jockey, use and the jockey of tie point.
Background technology
This jockey for example is called as detection anchor clamps or test card, have a plurality of probes, in the future electric current or the electric signal of self-test device etc. offer the tie point that is set in advance on the detected object via described probe, and from tie point detection electric signal, detect the electrical characteristics between tie point accordingly, carry out motion tests such as conduction detection or detection of electrical leakage etc.
As this detected object, various substrates, semiconductor wafer, semi-conductor chip or CSP semiconductor devices (LSI (Large Scale Integration, large scale integrated circuit) etc.) such as (chip size package chip size packages) such as the base plate for packaging of battery lead plate, semiconductor-sealing-purpose of usefulness such as printed circuit board, flexible base, board, ceramic multilayer circuit board, LCD or plasma scope or membrane carrier are for example arranged.
As this existing probe, the device that has patent documentation 1 to put down in writing.In the probe of this patent documentation 1 record, utilize the superfine cylindrical body of electric conductivity to constitute probe, and be formed with flexible in the axial direction spring portion in the peripheral wall surfaces of described cylindrical body.Therefore, this probe is owing to the reacting force that is subjected to from tie point when its leading section is connected to the tie point of detected object (load) compresses spring portion in the axial direction.In addition, by when this probe is installed on jockey, being mounted to the state that spring portion compresses in the axial direction, and utilize the elastic force of spring portion to make the rear end of probe prop up electrode portion, stablize the electric contact state (for example contact resistance etc.) of probe and electrode portion.
[patent documentation 1] TOHKEMY 2011-164028 communique
But, in the probe that above-mentioned patent documentation 1 is put down in writing, exist to be difficult to regulate the precompressed that is accompanied by when being installed on jockey and reacting force, the reacting force of the probe that comes become big problem easily.Because at jockey hundreds of to tens thousand of probes are installed, so if the reacting force of precompressed is excessive, then can resists reacting force and stop the probe holding member of the front that keeps probe to be subjected to the reacting force of precompressed and distortion etc. bad with deviating from.
In addition, in this probe, it is the priority scheduling tendency that the spring performance of spring portion (for example spring constant etc.) has the pass of the axial compression size of pressing force when being connected to the tie point of detected object at probe and spring portion, exists and sets spring constant for the tendency bigger than the spring constant that is suitable for most precompressed.
In addition, in order to dwindle by the reacting force due to the precompressed of probe, can to consider and to dwindle for the axial compression size of the probe that probe is applied precompressed.But, in this structure, because the influence of the deviation of the length of probe, producing deviation in the reduced size that is used for precompressed of each probe, the precompressed of each probe produces deviation.
In addition, in recent years, along with the technology raising of LSI, miniaturization propelling and the LSI detection of LSI develop to thin spaceization or big quantification with pad, more complicated or the microization of detected object substrate, be set in object-point on the substrate and form narrowlyer or littler, therefore, probe forms carefullyyer.Therefore, even require a large amount of fine probes also can realize being electrically connected of leading section and tie point reliably.
For this reason, problem to be solved by this invention is to provide a kind of spring performance of not damaging when probe is connected to the tie point of detected object, and can be suppressed at probe and the jockey of reacting force of the precompressed of the probe when being installed on jockey effectively.
Summary of the invention
In order to address the above problem, the invention that first mode of the present invention is put down in writing provide a kind of for be arranged on detected object on tie point be electrically connected, in jockey institute's use probe, it is characterized in that possessing: outer conductors, it has electric conductivity, and has the form of tubular; Inner conductor, it has electric conductivity, with its leading section from the front of described outer conductors outstanding and thereafter the end do not insert in the described outer conductors and with described outer conductors from the outstanding mode of the rear end side of described outer conductors and be electrically connected, and its leading section is connected to described tie point and the electrical connection of described detected object; And fixed part, it is electrically connected described outer conductors and is fixing with described inner conductor, wherein, be formed with the axially flexible spring portion at described probe that utilizes that spiral helicine breach forms at the perisporium of described outer conductors, the spacing of the spiral helicine breach of described spring portion is fixing.Tubular described herein not only refers to physically strict tubular, also comprises tubular roughly.
The probe that the invention that second mode is put down in writing provides a kind of as first mode to put down in writing, wherein, the spacing of the spiral helicine breach of described spring portion forms axially and gradually becoming big or diminish along described probe.
The invention of Third Way record provides probe a kind of as that first mode is put down in writing, and wherein, the spacing of the spiral helicine breach of described spring portion forms the different group more than at least two of described spacing.
The invention of cubic formula record provides a kind of probe as the Third Way record, and wherein, described group forms the different big young waiter in a wineshop or an inn of a spacing group.
The invention that the 5th mode is put down in writing provides a kind of jockey that has used the probe of putting down in writing as the arbitrary mode in first to fourth mode, it is characterized in that possessing: as the arbitrary mode in first to fourth mode put down in writing as described in probe; Electrode portion, the rearward end of the described outer conductors of described probe is connected to described electrode portion and is electrically connected; The first probe holding member, it is provided with first through hole, peristome in the inner face of described first through hole or a side opposite with described detected object is provided with abutting part, and and described electrode portion between described outer conductors is held at the described axially state of compression, the part of front end one side of the described inner conductor of wherein said probe is to run through to described detected object one side-prominent mode and to remain in described first through hole, and the end of front end one side of the described outer conductors of described probe is connected to described abutting part; The second probe holding member, it is provided with second through hole, and the part of rear end one side of wherein said probe runs through and remains in described second through hole; And the electrode holding member, it keeps described electrode portion.
According to the invention that first mode is put down in writing, the spacing of spiral helicine breach is fixing, is therefore pressed and spring portion when shrinking the breach crumple in the narrow position spring portion of spacing at probe.Therefore, the apparent number of turn of spring portion reduces, and spring constant raises.The probe that can provide spring constant and amount of contraction correspondingly to change is provided.In addition, because spring constant so correspondingly changes with amount of contraction, remain in when keeping body the different probe of spring constant when detecting so can be provided at probe.
According to the invention that second mode is put down in writing, the spacing of breach forms along axially the becoming big gradually or diminish of probe, and therefore can easily adjust the length of correspondingly bringing into play the spring portion of function with the amount of contraction of probe.
According to the invention of Third Way record, the spacing of breach forms the different group more than at least two of spacing, therefore can with become with spring section that the amount of contraction of probe is correspondingly brought into play function at least two with on adjust.
According to the invention of the cubic formula record, spacing is formed by an a big young waiter in a wineshop or an inn different group, the spring portion of (precompressed) usefulness when therefore the spring portion that forms spacing narrow is as non-detection the, and the spring portion that uses when spacing formed widely spring portion as detection.
According to the invention that the 5th mode is put down in writing, a kind of spring performance of not damaging the probe when probe is connected to the tie point of detected object can be provided, and can be suppressed at the jockey of reacting force of the precompressed of the probe when being installed on jockey effectively.
Description of drawings
Fig. 1 is the cut-away section front view of schematic configuration that expression has the jockey of probe of the present invention.
Fig. 2 is the fragmentary cross-sectional view of the schematic configuration of expression probe of the present invention.Represent outer conductors with the side section, and represent inner conductor with side view.
Fig. 3 has the side view of schematic configuration of the outer conductors of probe for expression.
Fig. 4 is the fragmentary cross-sectional view of the structure of front end one side of expression probe of the present invention.
Fig. 5 is the fragmentary cross-sectional view of the structure of rear end one side of expression probe of the present invention.
(description of reference numerals)
10 ... jockey; 12 ... the first probe holding member
12h ... through hole; 121 ... abutting part; 14 ... the second probe retaining member; 14h ... through hole
15 ... electrode portion; 16 ... the electrode holding member; 20 ... probe; 22 ... outer conductors
22s ... spring portion; 26 ... fixed part; 30 ... detected material; 30d1～30dn ... tie point
Embodiment
Jockey of the present invention and probe, the detected object portion that has at detected object, from pick-up unit electric power or electric signal are provided to the detection position of stipulating, are tie point, and detect electric signal via described tie point from detected object portion, can detect or carry out motion test to the electrical characteristics of detected object portion accordingly.Other is, in each following accompanying drawing, the interval between the thickness of each parts, length, shape, the parts etc. to have been carried out amplification easily and suitably in order understanding, to be dwindled, distortion, simplification etc.
The schematic configuration of＜jockey＞
The following schematic configuration that the jockey of the probe that has used first embodiment of the present invention is described with reference to Fig. 1.Jockey 10 possesses: the first probe holding member 12, the second probe holding member 14, electrode portion (not shown) and electrode holding member 16.The first and second probe holding members 12,14 plate-shaped members by insulativity such as resin or potteries constitute.In the embodiment of Fig. 1, the first and second probe holding members 12,14 remain the distance that separates regulation by bar-shaped holding components 11 and around being installed on the distance piece 11s around it, but also can a plurality of plate-shaped members are stacked for not vacating the space between the first probe holding member 12 and the second probe holding member 14.
Be formed with a plurality of through hole 12h at the first probe holding member 12, will be inserted in wherein the position that the leading section of maintained probe 20 also is directed to regulation.Be formed with a plurality of through hole 14h at the second probe holding member 14, the rearward end of maintained probe 20 is directed to electrode portion with being inserted in wherein also.Because the distance between the tie point becomes fine and becomes very little along with detected object, so the interval between the internal diameter of each through hole 12h, 14h and adjacent through hole 12h, the 14h is also very little.
The rearward end of probe 20 and electrode portion holding member 16 keep the surface of detected object one side of the electrode described later portion 15 of (fixing) to connect.In the present embodiment, for example, electrode portion is made of the end of the lead 18 that is fixed in electrode holding member 16, and described lead 18 is connected in not shown pick-up unit.In addition, in Fig. 1, for the simplification of drawing, only represented a part of probe 20.
In addition, though non-special restriction, but as shown in Figure 1, when the detection of detected object, below jockey 10 the configuration detection object, be detected material 30 (for example substrate), and jockey 10 is descended and make the leading section of probe 20 be contacted with tie point, for example 30dn of regulation, the electrical characteristics of carrying out detected object portion accordingly detect.
The structure of＜probe＞
Below, the structure of the probe 20 of present embodiment is described with reference to Fig. 2 and Fig. 3.Described probe 20 as shown in Figure 2, constitute possess outer conductors 22, inner conductor 24 and fixed part 26.
Outer conductors 22 has electric conductivity, and has the roughly form of tubular (being form cylindraceous in the present embodiment).The inner conductor 24 elongated roughly parts of bar-shaped (be cylindric in present embodiment) for having electric conductivity are provided with the abutment end 24a of the tip shape of the tie point that is connected to detected object at its leading section.Described inner conductor 24 with its leading section from the front of outer conductors 22 outstanding and thereafter the end be not inserted in the outer conductors 22 from the outstanding mode of the rear end side of outer conductors 22, and be electrically connected with outer conductors 22.Fixed part 26 is fixed up outer conductors 22 and inner conductor 24.In the present embodiment, outer conductors 22 and being electrically connected of inner conductor 24 are that both contact site and fixed part 26 of generation carries out when utilizing inner conductor 24 is inserted in outer conductors 22 in.
Outer conductors 22 has the front end tube 22f of portion, the rear end tube 22r of portion and the 22s of spring portion as shown in Figure 2.Be formed with the axially flexible 22s of spring portion at probe 20 at the perisporium cylindraceous of outer conductors 22.About the 22s of spring portion, the breach that is formed on the roughly spiral fashion (more specifically, for elongated leaf spring is rolled into spiral helicine shape) on the perisporium of outer conductors 22 by setting has formed the 22s of spring portion.In the embodiment of Fig. 2, formed a 22s of spring portion at the substantial middle place of probe 20, but also the 22s of spring portion can be formed on a plurality of positions, but must have a spring portion with aftermentioned breach pitch characteristics at least.
The spacing of the spring 22s of portion below is described.Fig. 3 is the side view of expression outer conductors 22, is the key diagram that the spacing of spring of the present invention portion is described.In addition, in this Fig. 3, be Reference numeral s with the width means of the breach of the 22s of spring portion, the breach s of the 22s of spring portion and the spring band between the breach s are expressed as Reference numeral w.In addition, the spacing of the 22s of spring portion is described gap width s is combined with spring band w and is expressed as Reference numeral x.In Fig. 3, be formed with four springs as the 22s of spring portion, mark Reference numeral x1 to x4 as its spacing according to order, the width of described breach mark Reference numeral s1 to s4, spring band mark Reference numeral w1 to w4.In addition, the spring of described spring portion is unqualified, has adopted four for the purpose of for convenience of explanation.
First embodiment of＜outer conductors＞
First embodiment of outer conductors 22 below is described.In first embodiment of outer conductors 22, spacing x forms change gradually greatly along the axial of probe 20 (outer conductors 22) or diminishes.Particularly, become gradually under the earth formation situation in spacing, form the length with spacing x1＞spacing x2＞spacing x3＞spacing x4.In the case, the width of breach also forms s1＞s2＞s3＞s4.By so forming, the spacing x1 that is the 22s of spring portion at first brings into play function as spring to the spacing x4 of spring portion, but according to the amount of contraction of the 22s of spring portion become as the spacing x1 of the 22s of spring portion to spacing x3, spacing x1 and spacing x2, be to have only the spacing x1, tail off gradually as the part of spring performance function then, and spring constant increases.In addition, in the case, also can form spring band w1＞spring band w2＞spring band w3＞spring band w4 because of the problem of spring permanance.
Under the situation of the spring that the spacing x in forming first embodiment gradually changes, will spacing x do not form and become big or diminish, as long as gradually change in the total length of the spring portion 22 of probe 20, it is mutually the same then also can to form adjacent spacing x.Particularly, for example spacing can be formed relation as x1＞x2=x3＞x4.In addition, in these cases, when probe 20 is remained in jockey, the spring of whole spacing x of the 22s of spring portion on the whole, as spring, bring into play function as the 22s of spring portion of little spring constant, and amount of contraction increases along with being connected to check point, begin to lose spring function from the narrow spring of spacing x, and gradually as the 22s of spring portion of big spring constant performance function.
The spacing x of the outer conductors 22 of first embodiment for example can form 50 μ～300 μ m.The width s of breach for example can form 25 μ～60 μ m.Spring band w can form 15 μ～200 μ m.No matter adopt any one permanance that all can adjust the 22s of spring portion or as the pressing force of probe 20.
Second embodiment of＜outer conductors＞
Second embodiment of outer conductors 22 below is described.In second embodiment, the spacing x of the 22s of spring portion is formed by the different group more than two of spacing.Particularly, for example, spacing x1 forms identical spacing with spacing x2, and spacing x3 forms the spacing different with spacing x1 with spacing x4.In the case, two groups have been formed, namely second group of first group of spacing x1 and spacing x2 and spacing x3 and spacing x4.In the case, if first group gap length is formed longer than second group gap length, then become the 22s of spring portion for probe 20 and shrink the breach that makes second group and disappear, and have only first group spring performance function.By so setting spacing for each group, can set for according to the amount of contraction of probe 20 and bring into play group as the function of spring.In addition, in these cases, when probe 20 is remained in jockey, first group of spring with second group brought into play function under little amount of contraction, and under the situation that amount of contraction increases being connected to check point, second group spring is not brought into play function, and has only first group to bring into play function as spring.
The spacing x of described second embodiment, gap width s or spring band w can the mode identical with above-mentioned first embodiment adjust, set.
The 3rd embodiment of＜outer conductors＞
The 3rd embodiment of outer conductors 22 below is described.In the 3rd embodiment, the spacing x of the 22s of spring portion gradually changes, and is formed by the different group of spacing, is situation about forming with the condition of first embodiment and second embodiment combination.Particularly, for example, be the 22s of spring portion by 10 spacing x (x1, x2 ... x9, x10) under the situation about forming, by situation about forming such as the such spacing size sequence of x1=x2=x3＞x4＞x5＞x6＞x7＞x8=x9=x10.In the case, probe 20 is also according to amount of contraction, the spring of the group of spacing x8=x9=x10 at first stops to bring into play function, secondly, the spring of the spring of spacing x7, the spring of spacing x=6, spacing x=5, the spring of spacing x=4 stop to bring into play function in order, be retracted under the last situation, the spring of spacing x1=x2=x3 stops to bring into play function.Under situation about so setting, also as described above, spring constant changes and the performance function according to the amount of contraction of probe 20.In addition, about each numerical value of the situation of the 3rd embodiment, can adjust the numerical value of first embodiment and be used.
Fixed part 26 is electrically connected outer conductors 22 and is fixing with inner conductor 24.Therefore, flexible along with the 22s of spring portion of outer conductors 22, inner conductor 24 is mobile in the axial direction with outer conductors 22.In addition, position about the rearward end that is inserted in the inner conductor 24 in the outer conductors 22, be set at when in that inner conductor 24 is pushed rear end one side the 22s of spring portion being compressed in the axial direction, described rearward end does not project to outside mode from the rear end of outer conductors 22.
In the present embodiment, for fixed part 26, for example adopted fixing based on electric-fusion, but can adopt other welding such as laser welding, riveted and fixed, based on the various structures such as fixing of bonding agent.
The size of probe 20 and each several part thereof below is described in addition.Probe 20 for example is set at about 2～12mm, and the external diameter of probe 20 and outer conductors 22 is set at for example about 30～100 μ m.The total length of outer conductors 22 for example is set at about 1～10mm, and its internal diameter is set at for example about 20～80 μ m.The total length of inner conductor 24 for example is set at about 1～10mm, and the mode that its external diameter can slide in outer conductors 22 with inner conductor 24 is set at the value of the internal diameter that is slightly less than outer conductors 22.
As the material of outer conductors 22, can use the pipe etc. (for example electroforming pipe etc.) of nickel for example or nickel alloy.In addition, except the end face of the end face of the leading section of outer conductors 22 and rearward end, side face also can carry out insulation-coated as required.As the material of inner conductor 24, can enumerate for example tungsten, carbon tool steel (SK material) or beryllium copper etc.
In addition, the shape as shape, the especially abutment end of the leading section 24a of inner conductor 24 for example can form tip shape as shown in Figure 2.This front end shape also can form spherical or flat condition except tip shape.In addition, also can to form the front end of inner conductor 24 be abutment end to the shape of the leading section of inner conductor 24 becomes eccentric mode with respect to central shaft.
The structure of＜jockey＞
Secondly, the structure of the detail portion of jockey 10 is described with reference to Fig. 4 and Fig. 5.As shown in Figure 4, peristome in the inner face of the through hole 12h of the first probe holding member 12 or a side opposite with detected object, the end face of leading section 22a that is provided with the outer conductors 22 of probe 20 is wanted the abutting part (in the structure of Fig. 4, the stage portion on the boundary portion of internal diameter varies) 121 of butt.Probe 20 is when the leading section 24a of side conductor 24 runs through through hole 12h from the opposite side of detected object towards detected object one side within it, and the end face of the leading section 22a of outer conductors 22 is connected to abutting part 121.So, when the end face of outer conductors 22 is connected to abutting part 121, the leading section 24a of inner conductor 24 via through hole 12h from the surface of detected object one side of the first probe holding member 12 with regulation to stretch out size outstanding.
On the other hand, constitute rearward end 22b rearward end, outer conductors 22 of probe 20, run through the through hole 14h of the second probe holding member 14 as illustrated in fig. 5 and be guided, and be connected to the electrode portion 15 that is kept by electrode holding member 16 and be electrically connected.
The abutting part 121 of the first probe holding member 12 and the interval between the electrode portion 15 are set at the little size quantity of compressing as the precompressed of stipulating of length that is in the outer conductors 22 of free state probe of following time 20 than the 22s of spring portion.Therefore, when probe 20 is installed on jockey 10, become outer conductors 22 has been compressed the precompressed size of regulation in the axial direction between abutting part 121 and electrode portion 15 state.At this moment, the 22s of spring portion of outer conductors 22 is compressed in the axial direction.Accordingly, the rearward end 22b of outer conductors 22 presses on electrode portion 15 and is subjected to precompressed with the pressing force of regulation, makes the rearward end 22b of outer conductors 22 and the stabilization that is electrically connected of electrode portion 15.
The spring constant of the spring that outer conductors 22 forms for the total length at the 22s of spring portion with respect to the spring performance of compression displacement under this preloading condition synthetic.In addition, about the spring constant of the 22s of spring portion under this preloading condition, because the 22s of spring portion is connected to check point and shrinks, a part of spring of the 22s of spring portion is lost its function, so it is littler to be set to the spring constant of the 22s of spring portion when detecting.That is to say that the spring constant under preloading condition is set to littler than the spring constant of detected state (being connected to the state of check point), can prevent the bad of the first probe holding member 12 distortion etc. because of the reacting force of precompressed.At this, the size that outer conductors 22 is compressed for precompressed (precompressed reduced size) is set to for example about 10～100 μ m.Load setting when in addition, precompressed is compressed is for for example about 0.05～0.5gf.
When the detection of detected materials such as substrate, jockey 10 is descended and make the leading section 24a of probe 20 be connected to the tie point of the regulation in the object portions such as wiring of detected material.In addition, if jockey 10 is further descended, then the inner conductor 24 of probe 20 can be boosted and be entered in the through hole 12h of the first probe holding member 12.At this moment, the inner conductor of probe 20 24 is owing to be fixed together with outer conductors 22, so second 22s of spring portion of outer conductors 22 axially is being compressed along with pushing of inner conductor 24, and inner conductor 24 is pushed in the outer conductors 22.
If outer conductors 22 is pushed into, then the gap width s of the 22s of spring portion diminishes gradually according to this amount that is pushed into, and begins to lose spring function from the spacing x that gap width s sets for a short time.Therefore, spring constant becomes big gradually.In addition, this detection reduced size is set at for example about 30～200 μ m.In addition, when detecting, put on the load setting of leading section 24a of probe 20 for for example about 1～10gf.
Its result can provide a kind of and not damage spring performance when probe 20 is connected to the tie point 30d1 of detected material 30, and can be suppressed at probe 20 and the jockey 10 of reacting force of the precompressed of the probe 20 when being installed on jockey 10 effectively.
In addition, in description of the present embodiment, about the spacing x of the 22s of spring portion of outer conductors 22 or the width s of breach, illustrated to have width or the length bigger than the big person of reference numbers for the little person of reference numbers, but vice versa.
The method for making example of＜outer conductors＞
Secondly, the method for making example of the outer conductors 22 of probe 20 is described.At first, form Gold plated Layer at the outer peripheral face of core of regulation, and then form nickel coating thereon, make the electroforming pipe accordingly.As core, for example can using, external diameter is metal wire or the resin thread of 5 μ m to 300 μ m.As metal wire, can use for example SUS(stainless steel) line; As resin thread, can use for example synthetic resin such as nylon resin or polyvinyl resin line.In addition, the thickness of Gold plated Layer is for example about 0.1 μ m to 1 μ m, and the thickness of nickel coating is for example about 5 μ m to 50 μ m.The length of electroforming pipe is from the viewpoints such as easiness of conveyance operation, for example is preferably below the 50cm, but is not limited to this, also can not cut off and makes continuously.
Then, the outer peripheral face at the nickel coating of electroforming pipe forms dielectric film.Dielectric film is also brought into play function as resist in the formation of the groove of regulation described later.The thickness of described dielectric film is for example about 2 μ m to 50 μ m.As dielectric film, for example, also can use fluorine coating or silicone material to form.
Then, in the many places of dielectric film its part is removed with spiral fashion, formed spiral grooves accordingly.At this moment, also can by in the many places of insulation course with its part with circle-shaped removal, be used for the peripheral groove of electroforming pipe by the severing of part unit and form.At the part place that has formed these grooves, expose nickel coating.When forming this groove, can adopt the method that the dielectric film illuminating laser beam is removed dielectric film.In the case, make core in upwards rotation of week, and meanwhile with the position of laser beam direct irradiation in groove, and utilize this irradiation to remove dielectric film.This spiral helicine shape forms as the 22s of spring portion, and this spiral helicine shape forms the unfixed shape of predefined spacing (for example spring portion of first to the 3rd embodiment).
Then, use dielectric film as mask, the nickel coating that will expose via groove carries out the etching removal and Gold plated Layer is exposed.At this moment, because have Gold plated Layer between nickel coating and the core, so the nickel etching liquid arrives core can prevent etching the time.
Then, carry out ultrasonic and clean, remove the Gold plated Layer of exposing via groove.Then, apply tension force at the two ends of core and it is extended, it is out of shape in the mode that its sectional area diminishes.Its sectional area diminishes if core extends, and the Gold plated Layer that then is coated on the outer peripheral face of center material is peeled off and stayed the inboard of electroforming pipe from described outer peripheral face, and forms the space between core and Gold plated Layer.Then, if extract core, then the electroforming pipe is separated into each part unit by peripheral groove, obtains to have a plurality of outer conductors 22 of the 22s of spring portion.In addition, this spring 22s of portion can be formed with the shape of predefined spring portion.
The like this nickel coating of the outer conductors 22 that forms with cylindrical pipe of conductive material is formed with insulation course in the periphery of this nickel coating.In this method for making example, form dielectric film, and as required used as be resist film, but dielectric film is not necessity, so when etching, also can use resist film.

Claims (5)

  1. One kind for be arranged on detected object on tie point probe that be electrically connected, that in jockey, use, it is characterized in that possessing:
    Outer conductors, it has electric conductivity, and has the form of tubular;
    Inner conductor, it has electric conductivity, with its leading section from the front of described outer conductors outstanding and thereafter the end be not inserted in the described outer conductors and with described outer conductors from the outstanding mode of the rear end side of described outer conductors and be electrically connected, and its leading section is connected to described tie point and the electrical connection of described detected object; And
    Fixed part, it is electrically connected described outer conductors and is fixing with described inner conductor,
    Wherein, be formed with the axially flexible spring portion at described probe that utilizes that spiral helicine breach forms at the perisporium of described outer conductors,
    The spiral helicine spacing of described spring portion is fixing.
  2. 2. probe as claimed in claim 1, wherein, the spiral helicine spacing of described spring portion forms axially increasing gradually or reduce along described probe.
  3. 3. probe as claimed in claim 1, wherein, the spiral helicine spacing of described spring portion forms the different group more than at least two of described spacing.
  4. 4. probe as claimed in claim 3, wherein, described group forms the different big young waiter in a wineshop or an inn of a spacing group.
  5. 5. one kind has been used as each the jockey of probe in the claim 1 to 4, it is characterized in that possessing:
    As each the described probe in the claim 1 to 4;
    Electrode portion, the rearward end of the described outer conductors of described probe is connected to described electrode portion and is electrically connected;
    The first probe holding member, it is provided with first through hole, be provided with abutting part at the inner face of described first through hole or the peristome of an opposite side with described detected object, and and described electrode portion between described outer conductors is held in state along described axial compression, wherein, the part of front end one side of the described inner conductor of described probe is to run through to described detected object one side-prominent mode and to remain in described first through hole, and the end of front end one side of the described outer conductors of described probe is connected to described abutting part;
    The second probe holding member, it is provided with second through hole, and the part of rear end one side of wherein said probe runs through and remains in described second through hole; And
    The electrode holding member, it keeps described electrode portion.
CN2013100776770A 2012-03-13 2013-03-12 Probe and connecting jig Pending CN103308733A (en)

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CN104515880A (en) * 2013-10-08 2015-04-15 日本电产理德股份有限公司 Inspecting jig, electrode portion, probe and manufacturing method of inspecting jig
CN105115410A (en) * 2015-09-10 2015-12-02 沈阳中科韦尔腐蚀控制技术有限公司 Crimping type measurement electrode device in electric field matrix thickness measuring system
CN105222990A (en) * 2015-10-13 2016-01-06 广州万孚生物技术股份有限公司 Light-emitting component measurement jig
CN105675120A (en) * 2016-04-26 2016-06-15 中国电子科技集团公司第二十六研究所 Wafer frequency test device
CN106603005A (en) * 2016-11-30 2017-04-26 浙江创盛光能源有限公司 Grounding voltage withstand insulation integrated testing method of photovoltaic component
CN106847720A (en) * 2015-12-04 2017-06-13 瑞萨电子株式会社 The manufacture method of semiconductor device
CN106932616A (en) * 2015-12-31 2017-07-07 旺矽科技股份有限公司 Probe structure and probe device
TWI630391B (en) * 2016-12-28 2018-07-21 東捷科技股份有限公司 Jig with retractable probe
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CN104515880A (en) * 2013-10-08 2015-04-15 日本电产理德股份有限公司 Inspecting jig, electrode portion, probe and manufacturing method of inspecting jig
CN104280581B (en) * 2014-10-30 2018-01-30 通富微电子股份有限公司 Test syringe needle and semiconductor test tool
CN104280581A (en) * 2014-10-30 2015-01-14 南通富士通微电子股份有限公司 Testing needle head and semiconductor testing jig
CN105115410A (en) * 2015-09-10 2015-12-02 沈阳中科韦尔腐蚀控制技术有限公司 Crimping type measurement electrode device in electric field matrix thickness measuring system
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CN105222990A (en) * 2015-10-13 2016-01-06 广州万孚生物技术股份有限公司 Light-emitting component measurement jig
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CN105675120A (en) * 2016-04-26 2016-06-15 中国电子科技集团公司第二十六研究所 Wafer frequency test device
CN106603005A (en) * 2016-11-30 2017-04-26 浙江创盛光能源有限公司 Grounding voltage withstand insulation integrated testing method of photovoltaic component
CN110036300A (en) * 2016-11-30 2019-07-19 日本电产理德股份有限公司 Contact terminal, gauging fixture and check device
CN110036300B (en) * 2016-11-30 2020-03-06 日本电产理德股份有限公司 Contact terminal, inspection jig, and inspection device
TWI630391B (en) * 2016-12-28 2018-07-21 東捷科技股份有限公司 Jig with retractable probe

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KR20130105326A (en) 2013-09-25
TW201337274A (en) 2013-09-16

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