CN102890166B - Inspection contactor and inspection fixture - Google Patents
Inspection contactor and inspection fixture Download PDFInfo
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- CN102890166B CN102890166B CN201210252405.5A CN201210252405A CN102890166B CN 102890166 B CN102890166 B CN 102890166B CN 201210252405 A CN201210252405 A CN 201210252405A CN 102890166 B CN102890166 B CN 102890166B
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- notch part
- inspection
- cartridge
- cylinder portion
- checkpoint
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2844—Fault-finding or characterising using test interfaces, e.g. adapters, test boxes, switches, PIN drivers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2896—Testing of IC packages; Test features related to IC packages
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Geometry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention provides a fine contactor which can respond to micronization and complication of a substrate and provide strong pressing force in inspection time and provide weak pressing force in non-inspection time and an inspection fixture. An inspection contactor which electrically connects a plurality of inspection points of an object to be inspected and a plurality of electrode parts which are arranged on an electrode body of the inspection fixture and are electrically connected with an inspection device which inspects electrical characteristics of the inspection points has a conductive cylindrical component with opening parts at two ends and the front end opening part abutting against the surface of the electrode part, a conductive bar-shaped component which protrudes from the rear end opening part of the cylindrical component, is configured in the inner part of the cylindrical component and the rear end is in contact with the inspection points and a fixed part which electrically connects the cylindrical component with the bar-shaped component, the cylindrical component has a first gap part and a second gap part which forms spiral gaps telescoping in a long axis direction in a wall part of the cylindrical component, and the first or second gap part reaches the limit of contraction when the bar-shaped component abuts against the inspection points and implements inspection.
Description
Technical field
The present invention relates to a kind of inspection fixture be electrically connected with the testing fixture implementing this inspection the checkpoint be set in advance in the check object portion of checked property and the inspection contactor used in inspection fixture.
Background technology
The inspection fixture of inspection contactor is installed via described inspection contactor, for the check object portion that checked property has, inspection position from from testing fixture to regulation provides electric current or electric signal, and detect electric signal from check object portion, carry out the detection of the electrical characteristics in check object portion, the enforcement etc. of motion test accordingly.
As checked property, such as there is the semiconductor device of the battery lead plate of printed circuit substrate, flexible base, board, ceramic multilayer circuit base plate, liquid crystal display or plasma display etc. and the various substrate such as the base plate for packaging of semiconductor-sealing-purpose or membrane type carrier or semiconductor wafer, semi-conductor chip or CSP (chip size packages, Chip size package) etc.
In this manual, these above-mentioned checked properties are referred to as " checked property ", the check object portion be formed on checked property is called " inspection portion ".In addition, the checkpoint being used for the electrical characteristics checking described inspection portion practically can be set on inspection portion, and become conducting state by being crimped on described checkpoint by contactor with inspection portion.
One end of the contactor of this inspection fixture is crimped on the checkpoint in wiring (inspection portion), and the other end is crimped in the electrode section that is electrically connected with base board checking device.In addition, via described inspection fixture, be provided for the curtage of the electrical characteristics measuring wiring from base board checking device, and the electric signal detected from wiring is sent to base board checking device.
This inspection fixture such as can exemplify fixture disclosed in patent documentation 1.In the inspection fixture of patent documentation 1, electric conductivity movable body (contactor) is provided with volute spring.In this inspection fixture, contactor, when being installed on support, utilizing helical spring contraction and is pressed against on conductive part, providing the good contact condition of conductive part and contactor.
In addition, contactor is adjusted to, in order to destroy the oxide film that formed on the surface of checkpoint etc. insulation course and with checkpoint conducting contact, the amount (specified length) making contactor contact with checkpoint coil spring contracts is specified and the pressing force of regulation can be obtained.
Especially, in recent years, because substrate sets a large amount of checkpoints, so in order to corresponding with these checkpoints, also that contactor is rack-mount in large quantities.Therefore, as mentioned above, if the quantity of contactor increases, then the volute spring shunk also increases, and support is born very large power.There is because of the described effect of helical spring power the problem of integrally bending in the support of bearing very large power.
On the other hand, reduce the power be applied on support, will study and reduce helical spring elastic force, but volute spring can not provide desired pressing force when shrinking specified length, there is contactor and the checkpoint not problem of conducting contact by enough pressing forces.
(prior art file)
Patent documentation 1: Japanese Unexamined Patent Publication 2003-215160 publication
Summary of the invention
(inventing problem to be solved)
The invention provides a kind of miniaturization that can tackle substrate and complicated and strong pressing force can be provided when checking and the fine contactor of weak pressing force can be provided when non-inspection and use the inspection fixture of this contactor.
(means of dealing with problems)
A first aspect of the present invention provides a kind of will become inspected object and the inspection fixture that is electrically connected with the testing fixture of the electrical characteristics checked between described checkpoint of the checked property with multiple checkpoint, it is characterized in that possessing: the electrode body possessing the multiple electrode section be electrically connected with described testing fixture; By the inspection contactor that described electrode section is electrically connected with described checkpoint; And keep the holder of described inspection contactor, wherein, described inspection contactor possesses: two ends have peristome and the cartridge of electric conductivity that abuts with the surface of described electrode section of front end opening; Give prominence to from the open rearward end portion of described cartridge and be configured in the inside of described cartridge and the bar-like member of electric conductivity that contacts with described checkpoint of rear end; And by the fixed part that described cartridge is electrically connected with described bar-like member, described holder possesses: first plate-shaped member with the first bullport that described front end opening is guided to described electrode body; And there is the second plate-shaped member of the second bullport guided to described checkpoint the rear end of described bar-like member, described cartridge has: have with the front end opening of the surface contact of described electrode section and the leading section of described bar-like member be contained in inner top cylinder portion; Be formed as the diameter identical with described top cylinder portion and be connected with described top cylinder portion and be formed in the first notch part of the spiral helicine breach that long axis direction stretches in the wall portion of described cartridge; Be formed as the diameter identical with described first notch part and cylinder portion in being connected with described first notch part; Be formed as the diameter identical with described middle cylinder portion and be connected with described middle cylinder portion and be formed on long axis direction the second notch part of flexible spiral helicine breach in the wall portion of described cartridge; And be formed as the diameter identical with described second notch part and be connected with described second notch part and possess the doffing portion of described fixed part, any one in described first notch part or described second notch part to abut with described checkpoint at described bar-like member and implements to reach when checking the limit of contraction.
A second aspect of the present invention provides a kind of inspection fixture as described in above-mentioned first aspect, it is characterized in that, described first notch part is different with the pitch of the spiral of described second notch part.
A third aspect of the present invention provides a kind of inspection fixture as described in above-mentioned first or second aspect, it is characterized in that, the gap width of described first notch part is different from the gap width of described second notch part.
A fourth aspect of the present invention provides a kind of inspection contactor be electrically connected with the multiple electrode section possessed in the electrode body of inspection fixture the multiple checkpoint becoming the checked property of inspected object, described electrode section is electrically connected with the testing fixture of the electrical characteristics checked between described checkpoint, and described inspection contactor possesses: the outside cylindrical shell becoming the electrode tip that front end opening abuts with described electrode section; And to give prominence to from the open rearward end portion of described outside cylindrical shell and be connected with the internal electrical of described outside cylindrical shell and configure coaxially and become the inside cartridge that rearward end is crimped on the electric conductivity of the inspection end described checkpoint, described outside cylindrical shell has: the top cylinder portion, outside with the front end opening becoming described electrode tip; With top cylinder portion, described outside same diameter and front end opening to be connected with the open rearward end portion in top cylinder portion, described outside and on side face, to possess the first notch part of the tubular of the spiral helicine breach formed on long axis direction; With described first notch part same diameter and in the outside be connected with described first notch part cylinder portion; With cylinder portion same diameter in described outside and be connected with cylinder portion in described outside and on side face, possess the second notch part of the tubular of the spiral helicine breach formed on long axis direction; And with described second notch part same diameter and be connected with described second notch part and possess the doffing portion, outside of fixed part, described inside cartridge has: have and become the described doffing portion, inner side checking the rearward end of end; And be configured in the fixed part of described outside inner barrel, wherein, described outside cylindrical shell is electrically connected with described inside cartridge and fixes by described fixed part, and described first notch part is different from the pitch of the spiral of described second notch part.
(effect of invention)
According to of the present invention above-mentioned first and fourth aspect, owing to the bar-like member of electric conductivity being configured in coaxially the inside of the cartridge possessing the two spiral helicine notch parts in place and being electrically connected and fixing, so these cartridges and bar-like member play a role as an inspection contactor.The notch part be arranged on cartridge is formed on cartridge, and plays the effect of the elastic of shrinking on long axis direction.That is, described inspection contactor only includes cartridge, bar-like member and fixed part and is formed.Therefore, compared with the helical spring inspection contactor of use, can number of parts be reduced, and form inspection contactor simply.
In addition, described inspection contactor provides a kind of can provide strong pressing force when checking and provide the fine contactor of weak pressing force when non-inspection and use the inspection fixture of described contactor.
According to above-mentioned second aspect of the present invention, because the first notch part is different from the screw pitch of the second notch part, thus when can produce inspection easily and non-inspection time the difference of pressing force.
According to the above-mentioned third aspect of the present invention, because the first notch part is different from the gap width of the second notch part, thus when can produce inspection easily and non-inspection time the difference of pressing force.
Accompanying drawing explanation
Fig. 1 is the summary construction diagram representing inspection fixture of the present invention.
Fig. 2 is the summary section of inspection contactor of the present invention.
Fig. 3 is the summary section of the cartridge of inspection contactor of the present invention.
Fig. 4 is the summary section of the bar-like member of inspection contactor of the present invention.
Fig. 5 is the summary section of the installment state representing inspection contactor of the present invention.
The summary section of operating state when Fig. 6 is the inspection representing inspection fixture of the present invention.
(description of reference numerals)
1: inspection fixture; 2: inspection contactor; 21: cartridge; 22: bar-like member
23: fixed part; 3: holder; 31: the first plate-shaped members; 31h: the first bullport
32: the second plate-shaped members; 32h: the second bullport; 4: electrode body; 41: electrode section
5: wire; 8: checked property; 81: checkpoint
Embodiment
The following describes for implementing the preferred embodiment of the present invention.
Fig. 1 is the summary construction diagram of the first embodiment representing inspection fixture of the present invention.Inspection fixture 1 of the present invention possesses: multiple contactor 2; These contactors 2 are remained the holder 3 of spininess shape: support described holder 3 and there is the electrode body 4 contacting with each contactor 2 and become the electrode section 41 of conducting state; And be electrically connected and extended wire portion 5 from electrode section 41.
In addition, in FIG, illustrate three contactors as multiple contactor 2 and illustrate three corresponding respectively wire portions 5, but they are not limited to three, and can determine accordingly with the checkpoint be set in check object.
The invention is characterized in: utilize and be formed in the function this point of the notch part performance on the cartridge of electric conductivity as elastic, by changing the elastic property being arranged on the notch part at least two places, can be provided in contact required in inspection and the crimp force for contacting with electrode section 41 all the time.
By forming inspection contactor like that as representative of the present invention, the miniaturization of substrate and complicated can be tackled, and can number of parts be reduced and simplify, large contact can also be provided when checking to checkpoint and in non-inspection time provide little contact to holder.
The following describes the inspection contactor 2 used in inspection fixture of the present invention.Fig. 2 is the summary section of inspection contactor 2 of the present invention.
Check the one end with contactor 2 and checkpoint conducting contact, and the other end and electrode section described later 41 conducting contact, accordingly checkpoint is electrically connected with electrode section.
Described inspection contactor 2 has cartridge 21 and bar-like member 22 (with reference to Fig. 2).
Cartridge 21 has peristome 21a, 21b at two ends, and the front end opening 21a of a side abuts with the surface of electrode section 41.Described cartridge 21 can be formed with the material of electric conductivity, such as, copper, nickel or their alloy can be utilized to be formed.
Fig. 3 is the summary section of cartridge of the present invention.
Described cartridge 21 as shown in Figure 3, has top cylinder portion 21c, the first notch part 21d, middle cylinder portion 21e, the second notch part 21f and doffing portion 21g.
Top cylinder portion 21c has the front end opening 21a with the surface contact of electrode section 41, and holds the leading section 22a of bar-like member 22 described later in inside.Described top cylinder portion 21c is a part for cartridge 21, has shape all equal with cartridge 21 in external diameter and internal diameter.
First notch part 21d is formed the diameter identical with top cylinder portion 21c and is connected with top cylinder portion 21c, is to be formed in spiral helicine breach flexible on long axis direction in the wall portion of cartridge 21.Described first notch part 21d owing to being formed on the wall of cartridge 21, so become shape all equal with cartridge 21 in external diameter and internal diameter.
Middle cylinder portion 21e is formed the diameter identical with the first notch part 21d and is connected with the first notch part 21d.Described middle cartridge unit 21e is a part for cartridge 21, has shape all equal with cartridge 21 in external diameter and internal diameter.
Second notch part 21f is formed the diameter identical with middle cylinder portion 21e and is connected with middle cylinder portion 21e, is to be formed in spiral helicine breach flexible on long axis direction in the wall portion of cartridge 21.Described second notch part 21f owing to being formed on the wall of cartridge 21, so become shape all equal with cartridge 21 in external diameter and internal diameter.
Doffing portion 21g is formed the diameter identical with the second notch part 21f and is connected with the second notch part 21f.Doffing portion 21g possesses for being fixed with cartridge 21 and the fixed part 23 be electrically connected by bar-like member 22 described later.Described doffing portion 21g is a part for cartridge 21, and has shape all equal with cartridge 21 in external diameter and internal diameter.In addition, described doffing portion 21g has open rearward end portion 21b.
Cartridge 21 is described above, and have top cylinder portion 21c, the first notch part 21d, middle cylinder portion 21e, the second notch part 21f and doffing portion 21g, various piece constitutes cartridge 21.
First notch part 21d (during inspection) when bar-like member 22 to abut with checkpoint and implements to check reaches the limit of contraction.This state making the space of being caused by the breach be formed on the first notch part 21d become this breach (space) because of the contraction of the first notch part 21d to disappear, makes the first notch part 21d reach the limit of contraction.Reach the first notch part 21d of the limit of contraction because no longer occur further to shrink, play the function same with top cylinder portion 21c, middle cylinder portion 21e or doffing portion 21g so become.
As mentioned above, when checking, although the first notch part 21d reaches the limit of contraction, the second notch part 21f does not reach the limit of contraction.This is because, when bar-like member 22 abuts with checkpoint, by the surplus making the second notch part 21f have contraction, the contraction of the second notch part 21f can be utilized to absorb the height tolerance of checkpoint (projection).
When bar-like member 22 does not abut with checkpoint (during non-inspection), inspection contactor 2 be in the state that keeps by holder 3 described later, therefore become the state that the first notch part 21d and the second notch part 21f shrinks.Now, the first notch part 21d is in the state near the limit being retracted to contraction, and the second notch part 21f becomes a small amount of state of shrinking.
That is, when non-inspection, the first notch part 21d significantly shrinks, and the second notch part 21f shrinks on a small quantity.When checking, the first notch part 21d shrinks no longer further (because reaching shrinkage limit), and only has the second notch part 21f to shrink.
First notch part 21d and the second notch part 21f is described above, different with function during non-inspection when checking, and in order to have this function difference, is formed as the mode that the pitch of spiral is different.In Fig. 3 of the summary section of a kind of embodiment of expression cartridge, the screw pitch d1 of the first notch part 21d and the screw pitch d2 of the second notch part 21f is formed differently.
In described Fig. 3, short with the screw pitch d1 becoming the first notch part 21d, and the mode of the spiral segment distance of the second notch part 21f is relatively formed.In addition, in figure 3, the width forming the wall of the first notch part 21d is formed with identical length with the width of the wall forming the second notch part 21f.In addition, the width of these spirals is not particularly limited, as long as the function that can play the first notch part 21d and the second notch part 21f then can adjust arbitrarily.
First notch part 21d and the second notch part 21f is described above, when checking and non-inspection time the amount of contraction (contracted length) that can shrink different, be formed as the mode that function is different accordingly.That is, amount of contraction during non-inspection is by the impact of the first notch part 21d and the second notch part 21f, and amount of contraction when checking only is subject to the impact of the second notch part 21f because the first notch part 21d is in shrinkage limit.Therefore, the gap width of the second notch part 21f is formed wider than the gap width of the first notch part 21d.By being formed in this wise, when non-inspection, the first notch part 21d and the second notch part 21f shrinks, and only has the second notch part 21f to shrink further when checking.
In the above description, describe when bar-like member 22 is connected to checkpoint and implements to check, reach the situation of the limit of the contraction of the first notch part 21d, but also can replace the first notch part 21d ground, make the second notch part 21f reach the limit of contraction.In the present invention, as long as any one in the first notch part 21d or the second notch part 21f reaches the limit of contraction.
Cartridge 21 of the present invention is described above, has top cylinder portion 21c, the first notch part 21d, middle cylinder portion 21e, the second notch part 21f and doffing portion 21g, and in order to manufacture this cartridge 21, can adopt following manufacture method.
(1) heart yearn (not shown) of the hollow bulb forming cartridge first, is prepared.In addition, for described heart yearn, that use the desired thickness of the internal diameter of regulation cartridge, that there is electric conductivity heart yearn (such as, diameter 30 μm, stainless steel (SUS)).
(2) then, above apply photoresist coating at heart yearn (stainless steel wire) and cover the side face of described heart yearn.Part desired by described photoresist is exposed/developed/heats and form spiral helicine mask.Now, such as, heart yearn can be made to rotate along central shaft, and utilize laser to carry out exposure to form spiral helicine mask.In order to form cartridge of the present invention, the mask at two places for the formation of the first notch part and the second notch part is formed on assigned position.
(3) then, nickel plating is implemented to described heart yearn.Now, because heart yearn is electric conductivity, so the position not forming photoresist mask is by nickel plating.
(4) then, photoresist mask is removed, pull-out heart yearn, the cartridge of the length desired by formation.After heart yearn is pulled out completely, cylindrical shell can certainly be cut off.
Fig. 4 is the summary section representing bar-like member of the present invention.
Bar-like member 22 is the parts of the electric conductivity that rearward end 22b contacts with checkpoint.Bar-like member 22 has elongated shape, and such as can be formed as cylindrical shape or drum.Described bar-like member 22 can be given prominence to from the open rearward end portion 21b of cartridge 21 and be configured in cartridge 21 inside.
The leading section 22a of bar-like member 22 can be configured in the inside of cartridge 21, but is preferably configured in the top cylinder portion 21c of cartridge 21.The leading section 22a of bar-like member 22 is inner owing to being configured in top cylinder portion 21c, so the part of through first notch part 21d and the second notch part 21f, has the function of the guiding device stretched as these notch parts.The leading section 22a of bar-like member 22 can be adjusted to the mode do not abutted with electrode body 4 described later.
The rearward end 22b of bar-like member 22 directly abuts with checkpoint.The shape of described rearward end 22b is not particularly limited, and can select the shapes such as crown shape, sharp shape or triangular pyramid shape.The rearward end 22b of bar-like member 22 can give prominence to from the open rearward end portion 21b of cartridge 21, and the outstanding length of described rearward end 22b can be set at least longer than the thickness of the second plate-shaped member 32 of holder 3 described later.
Bar-like member 22 can be formed with the material of electric conductivity, such as, can adopt copper (Cu), nickel (Ni) or their alloy etc.
Cartridge 21 is electrically connected with bar-like member 22 by fixed part 23.Fixed part 23 can be formed on the doffing portion 21g of cartridge 21, and the rearward end 22b towards bar-like member 22 is arranged.Described fixed part 23 such as can exemplify the methods such as compression, laser bonding, arc welding or bonding agent, as long as cartridge 21 can be electrically connected with bar-like member 22 and the shape of cartridge 21 and bar-like member 22 can not be made to have the fixing means of large distortion just can adopt.
Inspection fixture 1 possesses the holder 3 keeping inspection contactor 2.
Holder 3 can be formed by insulating material.Holder 3 has the first plate-shaped member 31, and described first plate-shaped member 31 has the first bullport 31h guided to the electrode section 41 of electrode body 4 described later by the front end opening 21a of cartridge 21.Holder 3 has the second plate-shaped member 32, and described second plate-shaped member 32 has the second bullport 32h guided to checkpoint by the rearward end 22b of bar-like member 22.
First bullport 31h of the first plate-shaped member 31 is formed the through hole on the thickness direction of the first plate-shaped member 31 with identical diameter, and the external diameter of described through hole can be formed to have the diameter slightly larger than the external diameter of the top cylinder portion 21c of cartridge 21.Utilize described first bullport 31h, the front end opening 21a of cartridge 21 can be guided to the electrode section 41 of the regulation be arranged in electrode body 4.
The thickness of the first plate-shaped member 31 is preferably formed shorter than the length of top cylinder portion 21c.This contacts with the first plate-shaped member 31 in order to avoid the first flexible notch part 21d and weares and teares.
Second plate-shaped member 32 can be configured to and the first plate-shaped member 31 has the interval of regulation and has the second bullport 32h that the rearward end 22b for the bar-like member 22 by inspection contactor 2 guides to checkpoint.The sufficient length that the rearward end 22b that the thickness of the second plate-shaped member 32 can be adjusted to the bar-like member 22 when checking can abut with checkpoint.
Second bullport 32h can be formed to have identical diameter through on the thickness direction of the second plate-shaped member 32, and is formed as having the external diameter large and less than the external diameter of cartridge 21 than the external diameter of bar-like member 22.By forming the second bullport 32h in this wise, when inspection contactor 2 is inserted holder 3, inspection is with the open rearward end portion 21b of the cartridge 21 of contactor 2 clamped by the surface of the second plate-shaped member 32 and electrode body 4, and the rearward end 22b becoming the bar-like member 22 making inspection contactor 2 is from the outstanding state of the second plate-shaped member 32.
Second plate-shaped member 32 can be configured to the interval L that distance electrode section 41 has regulation, and the interval L of described regulation can be set as the mode shorter than the length of the long axis direction of cartridge under no load condition 21.The difference of the length of the interval L of described regulation and the natural length of cartridge 21 becomes the amount of contraction of the first notch part 21d and the second notch part 21f.In addition, utilize the interval L of described regulation, the first notch part 21d can be set to become be retracted to contraction the limit near the state of degree, and the second notch part 21f can be configured to a small amount of state of shrinking.In addition, when inspection abuts with checkpoint with the bar-like member 22 of contactor 2, cartridge 21 becomes the length shorter than the interval L of regulation.Now, the first notch part 21d reaches shrinkage limit, and the second notch part 21f shrinks.
By being formed in this wise, when inspection contactor 2 is installed in holder 3, first notch part 21d of cartridge 21 and the second notch part 21f shrinks and becomes energy accumulating state, and cartridge 21 is installed with the state pressing electrode section 41 and the second plate-shaped member 32 respectively.
In Figure 5, the second bullport 32h is represented as the through hole with identical diameter, but also can adopt the through hole formed by two holes with configuration two various outer diameters on the same axis (upper hole and lower opening, not shown).In the case, upper hole has the diameter slightly larger than the external diameter of cartridge 21 and is configured in the electrode section side of the second plate-shaped member 32, and lower opening has the diameter little and slightly larger than the external diameter of bar-like member 22 than the external diameter of cartridge 21 and be configured in the side, checkpoint of the second plate-shaped member 32.
By forming upper hole and lower opening in this wise, when inspection contactor 2 is inserted from the first bullport 31h and is arranged on holder 3, utilize the external diameter of open rearward end portion 21b of cartridge 21 and the different of the diameter of lower opening, cartridge 21 can be configured to engage and only have the mode that bar-like member 22 is given prominence to from the second bullport 32h.
In the embodiment shown in Fig. 5, the first plate-shaped member 31 and the second plate-shaped member 32 are configured to the interval with regulation, but also can arrange the 3rd plate-shaped member (not shown) between the first plate-shaped member 31 and the second plate-shaped member 32.Described 3rd plate-shaped member can the plate-shaped member of stacked more than or two, and can be configured in the space produced by described interval.In the case, such as, the 3rd plate-shaped member also can be formed by stacked multiple plate-shaped members identical with the first plate-shaped member 31.In addition, as long as the through hole be formed on the 3rd plate-shaped member has the through size of the cartridge 21 of inspection contactor 2, its section configuration is not particularly limited.
Electrode body 4 possesses the multiple electrode section 41 be electrically connected with testing fixture.The electrode section 41 that described electrode body 4 possesses is configured to the mode corresponding with each inspection contactor 2.Described electrode section 41 crimps with the front end opening 21a of cartridge 21 and becomes conducting state.
Electrode section 41 is formed with thin wire, and the surface of the section and electrode body 4 that are configured to described wire in Figure 5 becomes conplane mode.The section of described wire becomes electrode section 41, and crimps with the front end opening 21a of cartridge 21.
It is more than the explanation of the structure of the inspection fixture 1 of the first embodiment of the present invention.
The following describes to assemble inspection fixture 1, inspection contactor 2 is arranged on the situation in holder 3.
When holder 3 being arranged on inspection fixture 1, first, inspection contactor 2 is inserted holder 3.When inspection contactor 2 is inserted holder 3, check that the rearward end 22b of the bar-like member 22 using contactor 2 is through the first bullport 31h.Then, described rearward end 22b is made to insert and through from the second guiding port 32h through the second bullport 32h.
The inspection contactor 2 inserting holder 3 utilizes the open rearward end portion 21b of cartridge 21 and is locked in holder 3.The front end opening 21a of the cartridge 21 and rearward end 22b of bar-like member 22 is configured to from the first bullport 31h and the second bullport 32h respectively to mode protruding outside.
If inspection contactor 2 is inserted holder 3, then the first plate-shaped member 31 abuts to electrode body 4, makes the front end opening 21a of cartridge 21 press to the electrode section 41 of regulation and connect.Now, because cartridge 21 is crimped in electrode section 41, so each the first notch part 21d and the second notch part 21f shrinks and becomes energy accumulating state.Now, the first notch part 21d be in be retracted to contraction the limit near the state in stage, and the second notch part 21f becomes the state of only shrinking on a small quantity.
Like this, the inspection fixture 1 with inspection contactor 2 is completed.
Below, the situation (during inspection) using inspection fixture 1 in inspection is described.
Fig. 6 is the summary section of the state when checking representing the inspection fixture employing inspection contactor.
When checking, be arranged on by inspection fixture 1 on testing fixture (not shown), wire 5 is electrically connected with the control module of testing fixture.
Testing fixture such as possesses the mobile unit of the plummer movement on xyz direction of principal axis respectively making carrying checked property 8, be crimped on the mode on multiple checkpoints 81 of checked property 8 with the rearward end 22b of the bar-like member 22 making the inspection contactor 2 of regulation, make objective table move on xyz direction of principal axis and check.
When testing fixture is can make the rearward end 22b of desired inspection contactor 2 mode be connected on the checkpoint 81 of regulation carry out the location of objective table, just to make the mode of the rearward end 22b of each inspection contactor 2 and each checkpoint 81 conducting contact move.
Now, if desired rearward end 22b is connected to the checkpoint 81 of regulation, then first, because rearward end 22b becomes the state be crimped, so the first notch part 21d of cartridge 21 and the second notch part 21f shrinks.In the case, the first notch part 21d before the amount of contraction limit reaches shrinkage limit, and the second notch part 21f shrinks.
Therefore, when non-inspection, the first notch part 21d and the second notch part 21f works, and when checking, the second notch part 21f works.That is, when non-inspection, the load be applied on the second plate-shaped member 32 of holder 3 is produced by the first notch part 21d and the second notch part 21f, therefore can be arranged to the load less than load when checking.Can check time strong pressing force is provided and in non-inspection time weak pressing force is provided.
Claims (4)
1. will become inspected object and the inspection fixture that is electrically connected with the testing fixture of the electrical characteristics checked between described checkpoint of the checked property with multiple checkpoint, it is characterized in that possessing:
Possesses the electrode body of the multiple electrode section be electrically connected with described testing fixture;
By the inspection contactor that described electrode section is electrically connected with described checkpoint; And
Keep the holder of described inspection contactor,
Wherein, described inspection contactor possesses:
Two ends have opening and the cartridge of electric conductivity that abuts with the surface of described electrode section of front end opening;
Give prominence to from the open rearward end portion of described cartridge and be configured in the inside of described cartridge and the bar-like member of electric conductivity that contacts with described checkpoint of rear end; And
By the fixed part that described cartridge is electrically connected with described bar-like member,
Described holder possesses:
There is the first plate-shaped member of the first bullport guided to described electrode body by described front end opening; And
Have the second plate-shaped member of the second bullport guided to described checkpoint the rear end of described bar-like member, described cartridge has:
Have with the front end opening of the surface contact of described electrode section and the leading section of described bar-like member be contained in inner top cylinder portion;
Be formed as the diameter identical with described top cylinder portion and be connected with described top cylinder portion and be formed on long axis direction the first notch part of flexible spiral helicine breach in the wall portion of described cartridge;
Be formed as the diameter identical with described first notch part and cylinder portion in being connected with described first notch part;
Be formed as the diameter identical with described middle cylinder portion and be connected with described middle cylinder portion and be formed on long axis direction the second notch part of flexible spiral helicine breach in the wall portion of described cartridge; And
Be formed as the diameter identical with described second notch part and be connected with described second notch part and possess the doffing portion of described fixed part,
Any one in described first notch part or described second notch part to abut with described checkpoint at described bar-like member and implements to reach when checking the limit of contraction.
2. inspection fixture as claimed in claim 1, is characterized in that: described first notch part is different with the pitch of the spiral of described second notch part.
3. inspection fixture as claimed in claim 1 or 2, is characterized in that: the gap width of described first notch part is different from the gap width of described second notch part.
4. the inspection contactor that the multiple checkpoint becoming the checked property of inspected object is electrically connected with the multiple electrode section possessed in the electrode body of inspection fixture, described electrode section is electrically connected with the testing fixture of the electrical characteristics checked between described checkpoint, and described inspection contactor possesses:
Become the outside cylindrical shell of the electrode tip that front end opening abuts with described electrode section; And
Give prominence to from the open rearward end portion of described outside cylindrical shell and be connected with the internal electrical of described outside cylindrical shell and configure coaxially and become the inside cartridge of the electric conductivity of the inspection end that rearward end crimps with described checkpoint,
Described outside cylindrical shell has:
There is the top cylinder portion, outside of the front end opening becoming described electrode tip;
With top cylinder portion, described outside same diameter and front end opening to be connected with the open rearward end portion in top cylinder portion, described outside and on side face, to possess the first notch part of the tubular of the spiral helicine breach formed on long axis direction;
With described first notch part same diameter and in the outside be connected with described first notch part cylinder portion;
With cylinder portion same diameter in described outside and be connected with cylinder portion in described outside and on side face, possess the second notch part of the tubular of the spiral helicine breach formed on long axis direction; And
With described second notch part same diameter and be connected with described second notch part and possess the doffing portion, outside of fixed part,
Described inside cartridge has:
Have and become the described doffing portion, inner side checking the rearward end of end; And
Be configured in the top cylinder portion, inner side of described outside inner barrel,
Wherein, described outside cylindrical shell is electrically connected with described inside cartridge and fixes by described fixed part; And
Described first notch part is different with the pitch of the spiral of described second notch part.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-159519 | 2011-07-21 | ||
| JP2011159519A JP5845678B2 (en) | 2011-07-21 | 2011-07-21 | Inspection contact and inspection jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102890166A CN102890166A (en) | 2013-01-23 |
| CN102890166B true CN102890166B (en) | 2015-03-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210252405.5A Active CN102890166B (en) | 2011-07-21 | 2012-07-20 | Inspection contactor and inspection fixture |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5845678B2 (en) |
| KR (1) | KR101312340B1 (en) |
| CN (1) | CN102890166B (en) |
| TW (1) | TWI457571B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6317270B2 (en) * | 2015-02-03 | 2018-04-25 | 株式会社日本マイクロニクス | Electrical connection device and pogo pin |
| TW201723492A (en) * | 2015-12-31 | 2017-07-01 | 旺矽科技股份有限公司 | Probe structure and probe device |
| JP2017142080A (en) * | 2016-02-08 | 2017-08-17 | 日本電産リード株式会社 | Contact terminal, inspection tool, and inspection device |
| JP6432017B2 (en) * | 2016-11-30 | 2018-12-05 | 日本電産リード株式会社 | Contact terminal, inspection jig, and inspection device |
| CN109596677A (en) * | 2018-11-02 | 2019-04-09 | 大族激光科技产业集团股份有限公司 | A kind of quality detection device, method, system and integrated probe component |
| JP2022060711A (en) | 2020-10-05 | 2022-04-15 | 東京特殊電線株式会社 | Contact probe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900748A (en) * | 2009-05-29 | 2010-12-01 | 日本电产理德株式会社 | Inspection fixture |
| CN101907642A (en) * | 2009-06-02 | 2010-12-08 | 日本电产理德株式会社 | Inspection fixture and inspection probe |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3990915B2 (en) | 2002-01-23 | 2007-10-17 | 日本発条株式会社 | Conductive contact |
| US6945827B2 (en) * | 2002-12-23 | 2005-09-20 | Formfactor, Inc. | Microelectronic contact structure |
| JP4614434B2 (en) * | 2004-09-30 | 2011-01-19 | 株式会社ヨコオ | probe |
| JP2010281592A (en) * | 2009-06-02 | 2010-12-16 | Nidec-Read Corp | Probe and inspection jig |
| JP5381609B2 (en) * | 2009-10-20 | 2014-01-08 | 日本電産リード株式会社 | Inspection jig and contact |
| GB201000344D0 (en) * | 2010-01-11 | 2010-02-24 | Cambridge Silicon Radio Ltd | An improved test probe |
| JP4572303B1 (en) * | 2010-02-12 | 2010-11-04 | 株式会社ルス・コム | Method for manufacturing contact for electric current inspection jig, contact for electric current inspection jig manufactured thereby, and electric current inspection jig including the same |
-
2011
- 2011-07-21 JP JP2011159519A patent/JP5845678B2/en active Active
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2012
- 2012-07-20 TW TW101126326A patent/TWI457571B/en active
- 2012-07-20 CN CN201210252405.5A patent/CN102890166B/en active Active
- 2012-07-20 KR KR1020120079080A patent/KR101312340B1/en active IP Right Grant
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900748A (en) * | 2009-05-29 | 2010-12-01 | 日本电产理德株式会社 | Inspection fixture |
| CN101907642A (en) * | 2009-06-02 | 2010-12-08 | 日本电产理德株式会社 | Inspection fixture and inspection probe |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013024716A (en) | 2013-02-04 |
| TWI457571B (en) | 2014-10-21 |
| CN102890166A (en) | 2013-01-23 |
| KR20130011964A (en) | 2013-01-30 |
| TW201329457A (en) | 2013-07-16 |
| JP5845678B2 (en) | 2016-01-20 |
| KR101312340B1 (en) | 2013-09-27 |
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