CN103308560A - Method for manufacturing gas sensor for detecting NH3 at room temperature - Google Patents

Method for manufacturing gas sensor for detecting NH3 at room temperature Download PDF

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Publication number
CN103308560A
CN103308560A CN2013102182955A CN201310218295A CN103308560A CN 103308560 A CN103308560 A CN 103308560A CN 2013102182955 A CN2013102182955 A CN 2013102182955A CN 201310218295 A CN201310218295 A CN 201310218295A CN 103308560 A CN103308560 A CN 103308560A
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room temperature
flexible substrate
sensitive membrane
gas sensor
zno
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李冬梅
詹爽
梁圣法
陈鑫
谢常青
刘明
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Abstract

The invention discloses a method for manufacturing a gas sensor for detecting NH3 at room temperature. The method comprises the following steps of: manufacturing a metal electrode on the surface of a flexible substrate; manufacturing a sensitive membrane Alpha-Fe2O3-ZnO; and combining the sensitive membrane Alpha-Fe2O3-ZnO and the surface, which is provided with the metal electrode, of the flexible substrate to form the gas sensor for detecting the NH3 at the room temperature. According to the method, the sensitive membrane material is combined with the flexible substrate by an indirect method, so that high-temperature operation on the flexible substrate in a sensitive membrane preparation process is avoided; the sensitive membrane Alpha-Fe2O3-ZnO is coated on the SiO2 substrate; then the lower SiO2 is etched off by HF acid, and the sensitive membrane is separated from the substrate; and finally a layer of conductive silver paste is coated on the electrode surface of the flexible substrate, so that the sensitive membrane can be combined with the flexible substrate.

Description

A kind of room temperature detects NH 3The method for making of gas sensor
Technical field
The invention belongs to the gas sensor technical field based on flexible substrate, but particularly detect NH under a kind of room temperature that obtains by high-temperature calcination 3α-Fe 2O 3-ZnO sensitive membrane, and with the method for chemical etching with this sensitive membrane from SiO 2Separate on the substrate, be transferred to the electrode surface of flexible substrate, can room temperature detect NH thereby make 3Gas sensor.
Background technology
Along with the reach of science, the application of sensor is day by day open, produce a kind of light, cheapness, but the sensor that large tracts of land is made is imperative.Based on the gas sensor of flexible substrate owing to the various advantages such as its pliability make a lot of problems obtain the improvement of essence, thereby make it have openr application prospect.In addition because its stable on heating restriction should be avoided high-temperature calcination in preparation process as far as possible.
Ammonia counterpart, nose film and the upper respiratory tract have very strong spread effect, and environment is had huge harm.Therefore, the concentration tool that accurately detects Ammonia in Air gas is of great significance.The gas sensor of monitoring ammonia has been widely used in the industries such as municipal administration, fire-fighting, combustion gas, oil, chemical industry, accumulating at present.Traditional sensor design is take alumina ceramic plate or alumina ceramic tube as substrate, need to work under heating condition.Along with the fast development of Internet of Things, design sensor portable, low-power consumption and paid close attention to widely, the sensor that in the past needs to heat lower work can not satisfy the requirement of low-power consumption.Thereby, make a kind of normal temperature, portable sensor tool is of great significance.
In recent years, gas sensor based on flexible substrate, adopt pliable and tough, light, cheap polyimide (PI) or polyethylene terephthalate (PET) as substrate, make electrode at substrate surface, be applicable to detect under the room temperature sensitive membrane of gas in electrode surface deposition, thereby can satisfy preferably the demands such as portable, low-power consumption of sensor.Therefore, preparation is a kind of can detect NH in room temperature 3Gas sensor become a very important task.
A few days ago, with α-Fe 2O 3-ZnO is as sensitive material, by spin coating, drip be coated with, the modes such as dip-coating or serigraphy are coated in SiO with this material 2On the substrate, drying evaporates the solvent in the coating.Then high-temperature calcination obtains α-Fe 2O 3-ZnO sensitive membrane utilizes the HF acid etch to fall down the SiO of layer 2, with sensitive membrane and substrate separation.Electrode surface in flexible substrate applies one deck conductive silver paste, and sensitive membrane and flexible substrate are combined, and detects NH thereby make room temperature 3The flexible air body sensor, not only satisfied the demand of flexible sensor, and can be at room temperature to NH 3Gas detects.
Summary of the invention
The technical matters that (one) will solve
The purpose of this invention is to provide a kind of at normal temperatures detection NH based on flexible substrate 3The method for making of gas sensor, to solve the problem of inorganic sensitive membrane film forming inequality, reach the sensitive material film forming even, and bonding firmly purpose between the flexible substrate.
(2) technical scheme
For achieving the above object, the invention provides a kind of room temperature and detect NH 3The method for making of gas sensor, comprising: make metal electrode on the flexible substrate surface; Make α-Fe 2O 3-ZnO sensitive membrane; And with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed on room temperature and detect NH 3Gas sensor.
In the such scheme, described at flexible substrate surface making metal electrode, comprise: clean flexible substrate, at this flexible substrate surface coating photoresist, and this photoresist carried out photoetching, carve the photoresist that the flexible substrate surface is used to form the metal electrode place, form electrode pattern on the flexible substrate surface; Then adopt electron beam evaporation to deposit successively Cr film and Au film on the flexible substrate of electrode pattern having; Cr film and Au film on last stripping photoresist and the photoresist form the surface and have the flexible substrate of metal electrode.Described flexible substrate comprises PI, PET or PEN.Described photoresist in the coating of flexible substrate surface is positive glue, comprises 9920 or 3220.
In the such scheme, described making α-Fe 2O 3-ZnO sensitive membrane comprises:
Mixed processes: with FeSO 47H 2O, CO (NH 2) 2Water-soluble, be under 10-180 rev/min the magnetic agitation, mentioned solution to be stirred 3 minutes to 4 hours at rotating speed, obtain mixed solution;
Reaction process: the mixed solution that obtains was refluxed 0.5 hour to 36 hours under 0 ℃ to 180 ℃, and then sediment is centrifugal, washing and dry obtains α-Fe 2O 3Presoma;
Calcine technology: with the α-Fe that obtains 2O 3Presoma 300 ℃ to 1000 ℃ calcinings 0.5 hour to 4 hours, and naturally cool to room temperature;
Doping process: the α-Fe after will calcining 2O 3In 0 ℃ to 100 ℃ methanol solution that is dispersed in certain volume, the volumetric molar concentration that then dropwise adds certain volume is the methanol solution of the KOH of 0-1M, stirs α-Fe that the preparation different mol ratio is mixed 2O 3-ZnO solution;
Calcine technology: with the α-Fe of different mol ratio doping 2O 3-ZnO solution by spin coating, drip be coated with, dip-coating or screen printing mode be coated in SiO 2On the substrate, drying evaporates the solvent in the coating, 200 ℃ to 1000 ℃ the calcining 0.5 hour to 4 hours, naturally cool to room temperature after, obtain being covered in SiO 2On-chip α-Fe 2O 3-ZnO sensitive membrane;
Etching technics: utilize the harsh eating away α-Fe of HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2Substrate is with α-Fe 2O 3-ZnO sensitive membrane and SiO 2Substrate separation obtains α-Fe 2O 3-ZnO sensitive membrane.
In the such scheme, be with 10mmol FeSO in the described mixed processes 47H 2O and 25mmol CO (NH 2) 2Be dissolved in the 100ml water, at room temperature stirred 10 minutes, obtain mixed liquor.Be to be 80 ℃ in temperature to reflux 6 hours in the described reaction process, centrifugal, washing is also dry, obtains α-Fe 2O 3Presoma.The α-Fe that to obtain in the described calcination process 2O 3Presoma 500 ℃ of calcinings 2 hours, and naturally cool to room temperature and obtain α-Fe 2O 3With a certain amount of α-Fe in the described doping process 2O 3In 60 ℃ of lower ultrasonic methanol solutions that are dispersed in 200ml, then with the Zn (Ac) of 0.01M 2Be dissolved in the mentioned solution, dropwise add the KOH solution of 65ml0.03M, stirred two hours.Described calcine technology is α-Fe that different mol ratio is mixed 2O 3-ZnO solution by spin coating, drip be coated with, dip-coating or screen printing mode be coated in SiO 2On the substrate, drying evaporates the solvent in the coating, 2O0 ℃ the calcining 3 hours, naturally cool to room temperature after, obtain being covered in SiO 2On-chip α-Fe 2O 3-ZnO sensitive membrane.Described etching technics is to utilize the harsh eating away α-Fe of 10 vol.%HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2Substrate is with α-Fe 2O 3-ZnO sensitive membrane and SiO 2Substrate separation obtains α-Fe 2O 3-ZnO sensitive membrane.
In the such scheme, described with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed on room temperature and detect NH 3Gas sensor, comprising: apply one deck conductive silver paste at the electrode surface of flexible substrate, utilize this conductive silver paste with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed for room temperature and detect NH 3Gas sensor.
(3) beneficial effect
Room temperature provided by the invention detects NH 3The method for making of gas sensor, by round-about way sensitive membrane material and flexible substrate are combined, avoided the high-temperature operation of flexible substrate in the sensitive membrane preparation process, but with sensitive material α-Fe 2O 3-ZnO is coated in SiO 2On the substrate, high-temperature calcination obtains the sensitive membrane of thickness distribution, then utilizes the SiO of the harsh eating away sensitive membrane of HF below 2, with sensitive membrane and SiO 2Substrate separation.Then the electrode surface in flexible substrate applies one deck conductive silver paste, sensitive membrane and the flexible substrate that obtains is combined, thereby reached at the uniform α-Fe of flexible substrate surface deposition a layer thickness 2O 3The purpose of the inorganic sensitive membrane of-ZnO.
Description of drawings
In order to illustrate further content of the present invention, below in conjunction with drawings and Examples, the present invention is described in detail, wherein:
Fig. 1 is that make-up room temperature detector provided by the invention is surveyed NH 3The method flow diagram of gas sensor;
Fig. 2-the 1st is according to the schematic diagram of the flexible substrate of the embodiment of the invention;
Fig. 2-the 2nd is according to the schematic diagram of the photoetching meron of the embodiment of the invention;
Fig. 2-the 3rd is according to the schematic diagram behind substrate deposition Cr and Au of the embodiment of the invention;
Fig. 2-the 4th is according to the schematic diagram after the peeling off of the embodiment of the invention;
Fig. 2-the 5th is according to the SiO of the embodiment of the invention 2The schematic diagram of substrate;
Fig. 2-the 6th, according to the embodiment of the invention at SiO 2Generate the schematic diagram of sensitive membrane on the substrate;
Fig. 2-the 7th transfers to sensitive membrane schematic diagram on the flexible substrate according to the embodiment of the invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
As shown in Figure 1, Fig. 1 is that make-up room temperature detector provided by the invention is surveyed NH 3The method flow diagram of gas sensor, the method may further comprise the steps:
Step 1: make metal electrode on the flexible substrate surface; This step specifically comprises: clean flexible substrate, apply photoresist on this flexible substrate surface, and this photoresist is carried out photoetching, carve the photoresist that the flexible substrate surface is used to form the metal electrode place, form electrode pattern on the flexible substrate surface; Then adopt electron beam evaporation to deposit successively Cr film and Au film on the flexible substrate of electrode pattern having; Cr film and Au film on last stripping photoresist and the photoresist form the surface and have the flexible substrate of metal electrode.Described flexible substrate comprises PI, PET or PEN.Described photoresist in the coating of flexible substrate surface is positive glue, comprises 9920 or 3220.
Step 2: make α-Fe 2O 3-ZnO sensitive membrane; This step specifically comprises:
Mixed processes: with FeSO 47H 2O, CO (NH 2) 2Water-soluble, be under 10-180 rev/min the magnetic agitation, mentioned solution to be stirred 3 minutes to 4 hours at rotating speed, obtain mixed solution;
Reaction process: the mixed solution that obtains was refluxed 0.5 hour to 36 hours under 0 ℃ to 180 ℃, and then sediment is centrifugal, washing and dry obtains α-Fe 2O 3Presoma;
Calcine technology: with the α-Fe that obtains 2O 3Presoma 300 ℃ to 1000 ℃ calcinings 0.5 hour to 4 hours, and naturally cool to room temperature;
Doping process: the α-Fe after will calcining 2O 3In 0 ℃ to 100 ℃ methanol solution that is dispersed in certain volume, the volumetric molar concentration that then dropwise adds certain volume is the methanol solution of the KOH of 0-1M, stirs α-Fe that the preparation different mol ratio is mixed 2O 3-ZnO solution;
Calcine technology: with the α-Fe of different mol ratio doping 2O 3-ZnO solution by spin coating, drip be coated with, dip-coating or screen printing mode be coated in SiO 2On the substrate, drying evaporates the solvent in the coating, 200 ℃ to 1000 ℃ the calcining 0.5 hour to 4 hours, naturally cool to room temperature after, obtain being covered in SiO 2On-chip α-Fe 2O 3-ZnO sensitive membrane;
Etching technics: utilize the harsh eating away α-Fe of HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2Substrate is with α-Fe 2O 3-ZnO sensitive membrane and SiO 2Substrate separation obtains α-Fe 2O 3-ZnO sensitive membrane.
Preferably, be with 10mmol FeSO in the described mixed processes 47H 2O and 25mmol CO (NH 2) 2Be dissolved in the 100ml water, at room temperature stirred 10 minutes, obtain mixed liquor.Be to be 80 ℃ in temperature to reflux 6 hours in the described reaction process, centrifugal, washing is also dry, obtains α-Fe 2O 3Presoma.The α-Fe that to obtain in the described calcination process 2O 3Presoma 500 ℃ of calcinings 2 hours, and naturally cool to room temperature and obtain α-Fe 2O 3With a certain amount of α-Fe in the described doping process 2O 3In 60 ℃ of lower ultrasonic methanol solutions that are dispersed in 200ml, then with the Zn (Ac) of 0.01M 2Be dissolved in the mentioned solution, dropwise add the KOH solution of 65ml0.03M, stirred two hours.Described calcine technology is α-Fe that different mol ratio is mixed 2O 3-ZnO solution by spin coating, drip be coated with, dip-coating or screen printing mode be coated in SiO 2On the substrate, drying evaporates the solvent in the coating, 200 ℃ the calcining 3 hours, naturally cool to room temperature after, obtain being covered in SiO 2On-chip α-Fe 2O 3-ZnO sensitive membrane.Described etching technics is to utilize the harsh eating away α-Fe of 10vol.%HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2Substrate is with α-Fe 2O 3-ZnO sensitive membrane and SiO 2Substrate separation obtains α-Fe 2O 3-ZnO sensitive membrane.
Step 3: with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed on room temperature and detect NH 3Gas sensor; This step specifically comprises:
Electrode surface in flexible substrate applies one deck conductive silver paste, utilizes this conductive silver paste with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed for room temperature and detect NH 3Gas sensor.
Survey NH based on make-up room temperature detector shown in Figure 1 3The method flow diagram of gas sensor, Fig. 2-1 shows according to the make-up room temperature detector of the embodiment of the invention to Fig. 2-7 and surveys NH 3The schematic diagram of gas sensor, the method comprises:
1, makes metal electrode on the flexible substrate surface;
At first clean flexible substrate, shown in Fig. 2-1, at this flexible substrate surface coating photoresist, and this photoresist carried out photoetching, carve the photoresist that the flexible substrate surface is used to form the metal electrode place, form electrode pattern on the flexible substrate surface, shown in Fig. 2-2; Then adopt electron beam evaporation to deposit successively Cr film and Au film on the flexible substrate of electrode pattern having, shown in Fig. 2-3; Cr film and Au film on last stripping photoresist and the photoresist form the surface and have the flexible substrate of metal electrode, shown in Fig. 2-4.
2, make α-Fe 2O 3-ZnO sensitive membrane;
A: mixed processes: with FeSO 47H 2O, CO (NH 2) 2Water-soluble, be under 10-180 rev/min the magnetic agitation, mentioned solution to be stirred 3-4 hour at rotating speed, obtain mixed solution.Preferred a: hybrid technique is with 10mmol FeSO 47H 2O and 25mmol CO (NH 2) 2Be dissolved in the 100ml water, at room temperature stirred 10 minutes, obtain mixed liquor.
B: reaction process: the mixed solution that obtains is at 0-180 ℃ of lower backflow 0.5-36 hour, then centrifugal with sediment, washing, drying obtains α-Fe 2O 3Presoma.Preferred b: reaction process refluxed 6 hours in temperature being 80 ℃, and is centrifugal, washing, and drying obtains α-Fe 2O 3Presoma.
C: calcine technology: with the presoma of b reaction process 300-1000 ℃ of calcining 0.5-4 hour, naturally cool to room temperature after, get final product.Preferred c: calcination process is: α-Fe that the b reaction process is obtained 2O 3Presoma 500 ℃ the calcining 2 hours, obtain α-Fe 2O 3
D: doping process: α-Fe that c is obtained 2O 3In 0-100 ℃ of methanol solution that is dispersed in certain volume, then dropwise add the methanol solution of KOH of the 0-1M of certain volume, stir, prepare α-Fe that different mol ratio is mixed according to the method 2O 3-ZnO.Preferred d: doping process is: with a certain amount of α-Fe 2O 3In 60 ℃ of lower ultrasonic methanol solutions that are dispersed in 200ml, then with the Zn (Ac) of 0.01M 2Be dissolved in the mentioned solution, dropwise add the KOH solution of 65ml0.03M, stirred two hours, concentration and evaporation falls solvent, the centrifuge washing precipitation.
E: calcine technology: the product that d is obtained by spin coating, drip be coated with, the modes such as dip-coating or serigraphy are coated in SiO with this solution 2On the substrate, shown in Fig. 2-5, drying evaporates the solvent in the coating, 200-1000 ℃ the calcining 0.5-4 hour, naturally cool to room temperature after, obtain α-Fe 2O 3-ZnO sensitive membrane is shown in Fig. 2-6.Preferred e: calcine technology is: the precipitation that d obtains was calcined 3 hours for 200 ℃ times.
F: etching technics: utilize the harsh eating away α-Fe of HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2, with sensitive membrane and SiO 2Substrate separation.Preferred f: etching technics: utilize the harsh eating away α-Fe of 10vol.%HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2, with sensitive membrane and SiO 2Substrate separation.
3, with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed on room temperature and detect NH 3Gas sensor, shown in Fig. 2-7; This step is adhesion technique: the electrode surface in flexible substrate applies one deck conductive silver paste, sensitive membrane and flexible substrate is combined, thereby make the flexible NH that room temperature detects 3Gas sensor.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (12)

1. a room temperature detects NH 3The method for making of gas sensor, it is characterized in that, comprising:
Make metal electrode on the flexible substrate surface;
Make α-Fe 2O 3-ZnO sensitive membrane; And
With α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed on room temperature and detect NH 3Gas sensor.
2. room temperature according to claim 1 detects NH 3The method for making of gas sensor, it is characterized in that, describedly make metal electrode on the flexible substrate surface, comprising:
Clean flexible substrate, apply photoresist on this flexible substrate surface, and this photoresist is carried out photoetching, carve the photoresist that the flexible substrate surface is used to form the metal electrode place, form electrode pattern on the flexible substrate surface; Then adopt electron beam evaporation to deposit successively Cr film and Au film on the flexible substrate of electrode pattern having; Cr film and Au film on last stripping photoresist and the photoresist form the surface and have the flexible substrate of metal electrode.
3. room temperature according to claim 2 detects NH 3The method for making of gas sensor, it is characterized in that, described flexible substrate comprises PI, PET or PEN.
4. room temperature according to claim 2 detects NH 3The method for making of gas sensor, it is characterized in that, described photoresist in the coating of flexible substrate surface is positive glue, comprises 9920 or 3220.
5. room temperature according to claim 1 detects NH 3The method for making of gas sensor, it is characterized in that described making α-Fe 2O 3-ZnO sensitive membrane comprises:
Mixed processes: with FeSO 47H 2O, CO (NH 2) 2Water-soluble, be under 10-180 rev/min the magnetic agitation, mentioned solution to be stirred 3 minutes to 4 hours at rotating speed, obtain mixed solution;
Reaction process: the mixed solution that obtains was refluxed 0.5 hour to 36 hours under 0 ℃ to 180 ℃, and then sediment is centrifugal, washing and dry obtains α-Fe 2O 3Presoma;
Calcine technology: with the α-Fe that obtains 2O 3Presoma 300 ℃ to 1000 ℃ calcinings 0.5 hour to 4 hours, and naturally cool to room temperature;
Doping process: the α-Fe after will calcining 2O 3In 0 ℃ to 100 ℃ methanol solution that is dispersed in certain volume, the volumetric molar concentration that then dropwise adds certain volume is the methanol solution of the KOH of 0-1M, stirs α-Fe that the preparation different mol ratio is mixed 2O 3-ZnO solution;
Calcine technology: with the α-Fe of different mol ratio doping 2O 3-ZnO solution by spin coating, drip be coated with, dip-coating or screen printing mode be coated in SiO 2On the substrate, drying evaporates the solvent in the coating, 200 ℃ to 1000 ℃ the calcining 0.5 hour to 4 hours, naturally cool to room temperature after, obtain being covered in SiO 2On-chip α-Fe 2O 3-ZnO sensitive membrane;
Etching technics: utilize the harsh eating away α-Fe of HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2Substrate is with α-Fe 2O 3-ZnO sensitive membrane and SiO 2Substrate separation obtains α-Fe 2O 3-ZnO sensitive membrane.
6. room temperature according to claim 5 detects NH 3The method for making of gas sensor, it is characterized in that, be with 10mmol FeSO in the described mixed processes 47H 2O and 25mmol CO (NH 2) 2Be dissolved in the 100ml water, at room temperature stirred 10 minutes, obtain mixed liquor.
7. room temperature according to claim 5 detects NH 3The method for making of gas sensor, it is characterized in that, be to be 80 ℃ in temperature to reflux 6 hours in the described reaction process, centrifugal, washing is also dry, obtains α-Fe 2O 3Presoma.
8. room temperature according to claim 5 detects NH 3The method for making of gas sensor, it is characterized in that, be the α-Fe that will obtain in the described calcination process 2O 3Presoma 500 ℃ of calcinings 2 hours, and naturally cool to room temperature and obtain α-Fe 2O 3
9. room temperature according to claim 5 detects NH 3The method for making of gas sensor, it is characterized in that, be with a certain amount of α-Fe in the described doping process 2O 3In 60 ℃ of lower ultrasonic methanol solutions that are dispersed in 200ml, then with the Zn (Ac) of 0.01M 2Be dissolved in the mentioned solution, dropwise add the KOH solution of 65ml0.03M, stirred two hours.
10. room temperature according to claim 5 detects NH 3The method for making of gas sensor, it is characterized in that, described calcine technology is α-Fe that different mol ratio is mixed 2O 3-ZnO solution by spin coating, drip be coated with, dip-coating or screen printing mode be coated in SiO 2On the substrate, drying evaporates the solvent in the coating, 200 ℃ the calcining 3 hours, naturally cool to room temperature after, obtain being covered in SiO 2On-chip α-Fe 2O 3-ZnO sensitive membrane.
11. room temperature according to claim 5 detects NH 3The method for making of gas sensor, it is characterized in that, described etching technics is to utilize the harsh eating away α-Fe of 10vol.%HF 2O 3The SiO of-ZnO sensitive membrane lower floor 2Substrate is with α-Fe 2O 3-ZnO sensitive membrane and SiO 2Substrate separation obtains α-Fe 2O 3-ZnO sensitive membrane.
12. room temperature according to claim 1 detects NH 3The method for making of gas sensor, it is characterized in that, described with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed on room temperature and detect NH 3Gas sensor, comprising:
Electrode surface in flexible substrate applies one deck conductive silver paste, utilizes this conductive silver paste with α-Fe 2O 3-ZnO sensitive membrane and flexible substrate have the surface conjunction of metal electrode, are formed for room temperature and detect NH 3Gas sensor.
CN2013102182955A 2013-06-04 2013-06-04 Method for manufacturing gas sensor for detecting NH3 at room temperature Pending CN103308560A (en)

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