CN103278107A - Device and method for measuring appearance of gear by laser scanning raster compensation - Google Patents

Abstract

The invention discloses a device and method for measuring an appearance of a gear by laser scanning raster compensation and belongs to the technical field of laser detection. The measuring accuracy in the prior art is low. The measuring device disclosed by the invention refers to a displacement zero measuring system which consists of a laser displacement sensor and a reflecting mirror; an angular displacement sensor, a z-direction raster ruler, a main adjustment raster ruler and a fine adjustment raster ruler are respectively connected with a special microprocessor. The measuring method disclosed by the invention comprises the following steps: calibrating a measuring system and zeroing the displacement zero measuring system, wherein the step of calibrating the measuring system comprises the following flows: arranging a mandrel on a workpiece bearing rotary table; dragging the mandrel to rotate by a rotary table rotary pair; and adjusting the position of the mandrel on the workpiece bearing rotary table until the displacement D3 of the cylindrical surface of the mandrel relative to the laser displacement sensor is indicated to be 0 all along during a circumferential rotating process of the mandrel and the axis of the mandrel and the axis of the rotary table rotary pair are overlapped, wherein measuring positions of the main adjustment raster ruler, the z-direction raster ruler and the fine adjustment raster ruler when the axis of the mandrel and the axis of the rotary table rotary pair are overlapped are used as zero, and the coordinate of a to-be-measured point of a measured cross section of a to-be-measured gear is shown as follows: z=D1 and theta=alpha. The step of zeroing the displacement zero measuring system comprises the flow: adjusting the main adjustment mechanism and the fine adjustment mechanism to enable the displacement D3 of the measured surface of the to-be-measured gear relative to the laser displacement sensor to be 0.

Description

The device and method of laser scanning grating compensating measure gear pattern

Technical field

The present invention relates to a kind of device and method of laser scanning grating compensating measure gear pattern, make field prototype gear pattern at gear precision, according to the angular displacement that in measuring process, obtains, displacement of the lines data, reconstruct gear pattern, compare with the design of gears pattern afterwards, provide gear pattern geometric error, belong to the laser measuring technology field.

Background technology

The gear pattern is an important errors index estimating gear, can characterize the pattern geometric error of the single flank of tooth of gear, the stationarity of reflection gear pair transmission campaign, the contact precision of Indirect evaluation gear pair is analyzed gear error source, control gear transmission quality thus.

A kind of gear pattern laser measuring technique relevant with the present invention is as follows:

Publish and be entitled as " laser gear measurement machine " document (Dai Runsheng) in one piece of the 13rd page of " external metering " the 1st phase of nineteen eighty-two and disclose a laser gear measurement machine of being made by Canadian Diffracto company.This measuring instrument has a measuring head that can move and a turntable of placing gear to be measured in fixed pan, described measuring head is a kind of laser displacement sensor.Described turntable can rotate in the plane that is parallel to the measuring basis face, when gear to be measured rotates with turntable, by the detection of reflected light beam, measuring head can be measured the coordinate of gear to be measured measured point, the signal of the angle signal that transmits from turntable and measuring head output is to deliver to the special microprocessor with a kind of mode, described signal is handled through data as raw data, obtains gear pattern geometric error.Because the nonlinear measurement characteristic of laser displacement sensor self, when different gear size to be measured differs big, its measurement range is also bigger, caused the offset error of its actual measurement characteristics curve and desirable linear response to increase, reduce the linearity of laser displacement sensor, thereby reduced gear pattern measuring accuracy.In addition, this measuring instrument can only be measured outer rotor.

Summary of the invention

For gear size, the gear kind that adapts to gear to be measured, make laser displacement sensor keep higher linearity, improve gear pattern measuring accuracy, we have invented a kind of device and method of laser scanning grating compensating measure gear pattern.

Its Workpiece carrier turntable 9 of device of the present invention's laser scanning grating compensating measure gear pattern is supported by turntable revolute 10, as shown in Figure 1, at turntable revolute 10 lower end established angle displacement transducers 11, the axis of turntable revolute 10 is the z of Department of Survey axle, it is characterized in that, the displacement measurement light exit of laser displacement sensor 7 is towards catoptron 8, and the displacement measurement optical axis that reflects through catoptron 8 is positioned at Workpiece carrier turntable 9 tops and vertical with the z axle; Fine adjustment mechanism 5 one side joint laser displacement sensors 7, another side joint fine adjustment grating chi 6; Z is to governor motion 3 one side joint fine adjustment mechanism 5 and catoptrons 8, and another side joint z is to grating chi 4; The 1 one side joint z of main regulation mechanism are to governor motion 3, another side joint main regulation grating chi 2; Form displacement zero measurement system by laser displacement sensor 7 and catoptron 8; Angular displacement sensor 11, z are connected with special microprocessor respectively to grating chi 4, main regulation grating chi 2 and fine adjustment grating chi 6.

The measuring process that the method for the present invention's laser scanning grating compensating measure gear pattern comprises has gear position centering, cross section scanner uni data to handle, measurement is that cylindrical measurement is O-z ρ θ, z is the axis direction of turntable revolute 10, ρ is the direction with the axis normal of turntable revolute 10, θ is tested point orientation, gear measurement to be measured cross section, it is characterized in that, as shown in Figure 1:

One, calibration measurements system before the gear position centering places mandrel 12 on the Workpiece carrier turntable 9, adjusts main regulation mechanism 1 and z to governor motion 3, and the displacement measurement light of laser displacement sensor 7 emissions can be shone on mandrel 12 cylinders; Turntable revolute 10 drags mandrel 12 rotations, mandrel 12 cylinders that observation laser displacement sensor 7 shows and the displacement D of laser displacement sensor 7 ₃, adjust the position of mandrel 12 on Workpiece carrier turntable 9 simultaneously, rotating through the D of displacement described in the journey full week up to mandrel 12 ₃All the time be designated as 0, mandrel 12 axis and 10 deads in line of turntable revolute, with at this moment main regulation grating chi 2, z to grating chi 4, fine adjustment grating chi 6 measuring positions as zero-bit; The coordinate of gear measurement to be measured cross section tested point is:

$\left\{\begin{array}{c}z={\mathrm{<figure-callout\; id="1"\; label="D"\; filenames="HDA00003223168500031.png"\; state="\{\{state\}\}">D</figure-callout>}}_1\\ \mathrm{\&rho;}=\frac{{\mathrm{<figure-callout\; id="0"\; label="d"\; filenames="HDA00003223168500011.png,HDA00003223168500021.png"\; state="\{\{state\}\}">d</figure-callout>}}_0}{2}+{\mathrm{<figure-callout\; id="0"\; label="D"\; filenames="HDA00003223168500011.png,HDA00003223168500021.png"\; state="\{\{state\}\}">D</figure-callout>}}_0+{\mathrm{<figure-callout\; id="2"\; label="D"\; filenames="HDA00003223168500011.png,HDA00003223168500021.png"\; state="\{\{state\}\}">D</figure-callout>}}_2\\ \mathrm{\&theta;}=\mathrm{\&alpha;}\end{array}\right.---\left(1\right)$

In the formula: D ₁, D ₀, D ₂Be respectively the displacement that z measures to grating chi 4, main regulation grating chi 2, fine adjustment grating chi 6, d ₀Be mandrel 12 diameters, α is the angular displacement that angular displacement sensor 11 is measured;

Two, after the gear position centering, before the cross section scanning, system makes zero with the displacement zero measurement, as Fig. 2, shown in Figure 3, adjusts main regulation mechanism 1 and fine adjustment mechanism 5, makes gear 13 to be measured measure the displacement D of surface and laser displacement sensor 7 ₃Be 0.

Its technique effect of the present invention is, form a displacement zero measurement system by laser displacement sensor 7 and catoptron 8, though like this gear size because of gear to be measured causes that the zero-bit of null displacement measuring system changes, but, by adjusting main regulation mechanism 1 and fine adjustment mechanism 5, system makes zero again with the displacement zero measurement, after gear measurement to be measured cross section scanning process in, no longer provide tested point ρ coordinate figure by laser displacement sensor 7, but the displacement D that is provided by main regulation grating chi 2, fine adjustment grating chi 6 ₀, displacement D ₂Measurement data calculates tested point ρ coordinate figure by formula (1) again.Laser displacement sensor 7 is displacement zero measurement system ingredient just, is not re-used as the measurement component of gear measurement to be measured cross section tested point ρ coordinate figure.Main regulation grating chi 2, fine adjustment grating chi 6 alternative laser displacement sensors 7 become measurement component, and from measurement mechanism in general, perhaps from the measuring method overall process, in fact described two grating chis play a kind of compensating action.In measuring process, 7 of laser displacement sensors are worked in very little scope, and therefore, the linearity is very high; In addition, because the measuring accuracy of grating chi is much larger than the precision of laser displacement sensor, therefore, final gear pattern measuring accuracy obviously improves.When the size of gear to be measured not simultaneously, same earlier displacement zero measurement system being made zero finished measurement by the grating chi again, therefore, the invention enables the gear size measurement range to be enlarged.The employing of catoptron 8, the one, make the present invention can measure the pattern of the dissimilar gears that comprise outer rotor, annular wheel, as Fig. 2, shown in Figure 3; The 2nd, make gear 13 to be measured away from laser displacement sensor 7, avoid accidental collision and damage expensive laser displacement sensor.

Description of drawings

Fig. 1 is the present invention's measurement mechanism structural representation and Department of Survey's calibration process synoptic diagram of measuring method, and this figure is simultaneously as Figure of abstract.Fig. 2 adopts the present invention's measuring method to measure outer rotor process synoptic diagram.Fig. 3 adopts the present invention's measuring method to measure annular wheel process synoptic diagram.

Embodiment

Its Workpiece carrier turntable 9 of device of the present invention's laser scanning grating compensating measure gear pattern is supported by turntable revolute 10, and as shown in Figure 1, at turntable revolute 10 lower end established angle displacement transducers 11, the axis of turntable revolute 10 is the z of Department of Survey axle.Workpiece carrier turntable 9 center upper portion partly are provided with the space 14 of circling round, and are used for holding catoptron 8 when measuring annular wheel, as shown in Figure 3.Angular displacement sensor 11 is taken on by scrambler.The displacement measurement light exit of laser displacement sensor 7 is towards catoptron 8, and the displacement measurement optical axis that reflects through catoptron 8 is positioned at Workpiece carrier turntable 9 tops and vertical with the z axle.Fine adjustment mechanism 5 one side joint laser displacement sensors 7, another side joint fine adjustment grating chi 6.Z is to governor motion 3 one side joint fine adjustment mechanism 5 and catoptrons 8, and another side joint z is to grating chi 4.The 1 one side joint z of main regulation mechanism are to governor motion 3, another side joint main regulation grating chi 2.Main regulation mechanism 1, z are screw-nut body to governor motion 3, fine adjustment mechanism 5.Form displacement zero measurement system by laser displacement sensor 7 and catoptron 8.Angular displacement sensor 11, z are connected with special microprocessor respectively to grating chi 4, main regulation grating chi 2 and fine adjustment grating chi 6, described special microprocessor is the data acquisition and processing (DAP) system, carry out data to the original coordinates data of the gear measurement to be measured cross section tested point of grating chi 4, main regulation grating chi 2 and fine adjustment grating chi 6 and handle picking up from angular displacement sensor 11, z, obtain gear pattern geometric error to be measured.

In the method for the present invention's laser scanning grating compensating measure gear pattern, measurement is that cylindrical measurement is O-z ρ θ, z is the axis direction of turntable revolute 10, and ρ is and the direction of the axis normal of turntable revolute 10 that θ is tested point orientation, gear measurement to be measured cross section.This measuring method specifically may further comprise the steps:

One, calibration measurements system

Mandrel 12 is placed on the Workpiece carrier turntable 9, and described mandrel 12 is standards, has a standard cylinder, adjusts main regulation mechanism 1 and z to governor motion 3, and the displacement measurement light of laser displacement sensor 7 emissions can be shone on mandrel 12 cylinders; Turntable revolute 10 drags mandrel 12 rotations, mandrel 12 cylinders that observation laser displacement sensor 7 shows and the displacement D of laser displacement sensor 7 ₃, adjust the position of mandrel 12 on Workpiece carrier turntable 9 simultaneously, rotating through the D of displacement described in the journey full week up to mandrel 12 ₃All the time be designated as 0, mandrel 12 axis and 10 deads in line of turntable revolute, with at this moment main regulation grating chi 2, z to grating chi 4, fine adjustment grating chi 6 measuring positions as zero-bit; The coordinate of gear measurement to be measured cross section tested point is:

$\left\{\begin{array}{c}z={\mathrm{<figure-callout\; id="1"\; label="D"\; filenames="HDA00003223168500031.png"\; state="\{\{state\}\}">D</figure-callout>}}_1\\ \mathrm{\&rho;}=\frac{{\mathrm{<figure-callout\; id="0"\; label="d"\; filenames="HDA00003223168500011.png,HDA00003223168500021.png"\; state="\{\{state\}\}">d</figure-callout>}}_0}{2}+{\mathrm{<figure-callout\; id="0"\; label="D"\; filenames="HDA00003223168500011.png,HDA00003223168500021.png"\; state="\{\{state\}\}">D</figure-callout>}}_0+{\mathrm{<figure-callout\; id="2"\; label="D"\; filenames="HDA00003223168500011.png,HDA00003223168500021.png"\; state="\{\{state\}\}">D</figure-callout>}}_2\\ \mathrm{\&theta;}=\mathrm{\&alpha;}\end{array}\right.---\left(1\right)$

In the formula: D ₁, D ₀, D ₂Be respectively the displacement that z measures to grating chi 4, main regulation grating chi 2, fine adjustment grating chi 6, d ₀Be mandrel 12 diameters, α is the angular displacement that angular displacement sensor 11 is measured.

Two, gear position centering

When gear 13 to be measured is outer rotor, gear 13 to be measured is placed on the Workpiece carrier turntable 9, adjust z to governor motion 3, displacement measurement illumination is mapped on gear to be measured 13 certain cross section, as shown in Figure 2.When gear 13 to be measured is annular wheel, gear 13 to be measured is placed on the Workpiece carrier turntable 9, adjust z to governor motion 3, make and move on to the position that is higher than gear 13 to be measured on the catoptron 8, adjust main regulation mechanism 2 again, make catoptron 8 move to 14 tops, space of circling round of Workpiece carrier turntable 9 center upper portion part, adjust z again to governor motion 3, catoptron 8 is moved down drop in the gear 13 to be measured and in the described space 14 of circling round, displacement measurement illumination is mapped on gear to be measured 13 certain cross section, as shown in Figure 3.Turntable revolute 10 drags gear 13 rotations to be measured, if gear 13 outer rotor external diameters to be measured or annular wheel internal diameter and catoptron 8 interfere, then adjust the position of gear 13 to be measured on Workpiece carrier turntable 9, up to not interfering, finish gear 13 position centerings to be measured.

Three, displacement zero measurement system makes zero

As Fig. 2, shown in Figure 3, adjust main regulation mechanism 1 and fine adjustment mechanism 5, make gear 13 to be measured measure the displacement D of surface and laser displacement sensor 7 ₃Be 0.

Four, cross section scanning

Turntable revolute 10 drags gear 13 rotations to be measured, adjusts fine adjustment mechanism 5, makes gear 13 to be measured with respect to the displacement D of laser displacement sensor 7 ₃Be 0, the displacement of main regulation grating chi 2,6 demonstrations of fine adjustment grating chi at this moment is respectively displacement D ₀, displacement D ₂, rotate the coordinate sequence (z in a cross section of opening entries gear 13 to be measured from gear 13 to be measured ₁(t), ρ ₁(t), θ ₁(t)), t is the time.Behind the measurement cross section end of scan, adjust z again to governor motion 3, make displacement measurement illumination be mapped to the next cross section of gear 13 to be measured, and record the coordinate sequence (z in this cross section ₂(t), ρ ₂(t), θ ₂(t)), finish all cross section scannings successively, note the coordinate sequence (z in all cross sections _i(t), ρ _i(t), θ _i(t)) (i=1,2,3...n), wherein n is the scanning cross-section quantity of gear 13 to be measured, i is ordinal number.

Five, data are handled

By the coordinate sequence (z of data acquisition and processing (DAP) system with all cross sections _i(t), ρ _i(t), θ _i(t)) (i=1,2,3...n) carry out data and handle, obtain the pattern geometric error of gear 13 to be measured.

Claims (6)

1. the device of a laser scanning grating compensating measure gear pattern, its Workpiece carrier turntable (9) is supported by turntable revolute (10), at turntable revolute (10) lower end established angle displacement transducer (11), the axis of turntable revolute (10) is the z of Department of Survey axle, it is characterized in that, the displacement measurement light exit of laser displacement sensor (7) is towards catoptron (8), and the displacement measurement optical axis that reflects through catoptron (8) is positioned at Workpiece carrier turntable (9) top and vertical with the z axle; Fine adjustment mechanism (5) one side joint laser displacement sensors (7), another side joint fine adjustment grating chi (6); Z is to governor motion (3) one side joint fine adjustment mechanisms (5) and catoptron (8), and another side joint z is to grating chi (4); (1) the one side joint z of main regulation mechanism is to governor motion (3), another side joint main regulation grating chi (2); Form displacement zero measurement system by laser displacement sensor (7) and catoptron (8); Angular displacement sensor (11), z are connected with special microprocessor respectively to grating chi (4), main regulation grating chi (2) and fine adjustment grating chi (6).

2. the device of laser scanning grating compensating measure gear pattern according to claim 1 is characterized in that angular displacement sensor (11) is taken on by scrambler.

3. the device of laser scanning grating compensating measure gear pattern according to claim 1 is characterized in that, main regulation mechanism (1), z are screw-nut body to governor motion (3), fine adjustment mechanism (5).

4. the device of laser scanning grating compensating measure gear pattern according to claim 1 is characterized in that described special microprocessor is the data acquisition and processing (DAP) system.

5. the method for a laser scanning grating compensating measure gear pattern, the measuring process that comprises has gear position centering, cross section scanner uni data to handle, measurement is that cylindrical measurement is O-z ρ θ, z is the axis direction of turntable revolute (10), ρ is the direction with the axis normal of turntable revolute (10), θ is tested point orientation, gear measurement to be measured cross section, it is characterized in that:

A, before the gear position centering calibration measurements system, mandrel (12) is placed on the Workpiece carrier turntable (9), adjust main regulation mechanism (1) and z to governor motion (3), the displacement measurement light of laser displacement sensor (7) emission can be shone on mandrel (12) cylinder; Turntable revolute (10) drags mandrel (12) rotation, mandrel (12) cylinder that observation laser displacement sensor (7) shows and the displacement D of laser displacement sensor (7) ₃, adjust the position of mandrel (12) on Workpiece carrier turntable (9) simultaneously, rotating through the D of displacement described in the journey full week up to mandrel (12) ₃All the time be designated as 0, mandrel (12) axis and turntable revolute (10) dead in line, with at this moment main regulation grating chi (2), z to grating chi (4), fine adjustment grating chi (6) measuring position as zero-bit; The coordinate of gear measurement to be measured cross section tested point is:

$\left\{\begin{array}{c}z=D_1\\ \mathrm{\&rho;}=\frac{d_0}{2}+D_0+D_2\\ \mathrm{\&theta;}=\mathrm{\&alpha;}\end{array}\right.,$

In the formula: D ₁, D ₀, D ₂Be respectively the displacement that z measures to grating chi (4), main regulation grating chi (2), fine adjustment grating chi (6), d ₀Be mandrel (12) diameter, α is the angular displacement that angular displacement sensor (11) is measured;

B, after the gear position centering, before the cross section scanning, system makes zero with the displacement zero measurement, adjusts main regulation mechanism (1) and fine adjustment mechanism (5), makes gear to be measured (13) measure the displacement D of surface and laser displacement sensor (7) ₃Be 0.

6. the method for laser scanning grating compensating measure gear pattern according to claim 5 is characterized in that described mandrel (12) is a standard, has a standard cylinder.

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