CN103266310A - 分散板及具有该分散板的镀膜装置 - Google Patents
分散板及具有该分散板的镀膜装置 Download PDFInfo
- Publication number
- CN103266310A CN103266310A CN2013101997179A CN201310199717A CN103266310A CN 103266310 A CN103266310 A CN 103266310A CN 2013101997179 A CN2013101997179 A CN 2013101997179A CN 201310199717 A CN201310199717 A CN 201310199717A CN 103266310 A CN103266310 A CN 103266310A
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- breaker plate
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- film coating
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Links
- 239000007888 film coating Substances 0.000 title claims abstract description 32
- 238000009501 film coating Methods 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 claims description 5
- 230000000704 physical effect Effects 0.000 claims description 3
- 238000009826 distribution Methods 0.000 abstract description 14
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (12)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310199717.9A CN103266310B (zh) | 2013-05-24 | 2013-05-24 | 分散板及具有该分散板的镀膜装置 |
TW102121918A TWI556487B (zh) | 2013-05-24 | 2013-06-20 | 分散板及具有該分散板的鍍膜裝置 |
JP2014090000A JP5860920B2 (ja) | 2013-05-24 | 2014-04-24 | 分散板 |
KR20140062169A KR20140138072A (ko) | 2013-05-24 | 2014-05-23 | 분산판 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310199717.9A CN103266310B (zh) | 2013-05-24 | 2013-05-24 | 分散板及具有该分散板的镀膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103266310A true CN103266310A (zh) | 2013-08-28 |
CN103266310B CN103266310B (zh) | 2015-05-20 |
Family
ID=49009970
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310199717.9A Active CN103266310B (zh) | 2013-05-24 | 2013-05-24 | 分散板及具有该分散板的镀膜装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5860920B2 (zh) |
KR (1) | KR20140138072A (zh) |
CN (1) | CN103266310B (zh) |
TW (1) | TWI556487B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104392675A (zh) * | 2014-08-22 | 2015-03-04 | 友达光电股份有限公司 | 显示装置基板及其制造方法 |
CN109262743A (zh) * | 2018-10-16 | 2019-01-25 | 苏州京浜光电科技股份有限公司 | 一种超薄树脂滤光片低翘曲度加工工艺 |
CN112530774A (zh) * | 2019-09-17 | 2021-03-19 | 中微半导体设备(上海)股份有限公司 | 等离子体处理设备 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1198213B1 (en) * | 1999-06-25 | 2010-06-09 | Vahid Saadat | Apparatus for treating tissue |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006017136A2 (en) * | 2004-07-12 | 2006-02-16 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser curvature |
CN1869409A (zh) * | 2005-05-27 | 2006-11-29 | 三菱重工业株式会社 | 燃气轮机旋转叶片的平台以及制造旋转叶片、密封板和燃气轮机的方法 |
CN201148466Y (zh) * | 2007-12-04 | 2008-11-12 | 郭铭书 | 具有分散气体的分散板的镀膜装置 |
CN102041484A (zh) * | 2009-10-20 | 2011-05-04 | 财团法人工业技术研究院 | 气体分布板及其装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4540250B2 (ja) * | 2001-04-25 | 2010-09-08 | 信越化学工業株式会社 | プラズマ装置用電極板 |
JP4698251B2 (ja) * | 2004-02-24 | 2011-06-08 | アプライド マテリアルズ インコーポレイテッド | 可動又は柔軟なシャワーヘッド取り付け |
TW200644119A (en) * | 2005-04-05 | 2006-12-16 | Matsushita Electric Ind Co Ltd | Gas shower plate for plasma processing apparatus |
JP4863074B2 (ja) * | 2006-12-05 | 2012-01-25 | 三菱マテリアル株式会社 | 耐割れ性に優れたプラズマエッチング用シリコン電極板 |
WO2009069211A1 (ja) * | 2007-11-29 | 2009-06-04 | Shimadzu Corporation | プラズマプロセス用電極及びプラズマプロセス装置 |
US20100037823A1 (en) * | 2008-08-18 | 2010-02-18 | Applied Materials, Inc. | Showerhead and shadow frame |
JP2010171244A (ja) * | 2009-01-23 | 2010-08-05 | Fuji Electric Holdings Co Ltd | プラズマ処理装置 |
JP5835722B2 (ja) * | 2009-12-10 | 2015-12-24 | オルボテック エルティ ソラー,エルエルシー | 自動順位付け多方向直列型処理装置 |
KR101306315B1 (ko) * | 2011-01-11 | 2013-09-09 | 주식회사 디엠에스 | 화학기상증착 장치 |
-
2013
- 2013-05-24 CN CN201310199717.9A patent/CN103266310B/zh active Active
- 2013-06-20 TW TW102121918A patent/TWI556487B/zh not_active IP Right Cessation
-
2014
- 2014-04-24 JP JP2014090000A patent/JP5860920B2/ja not_active Expired - Fee Related
- 2014-05-23 KR KR20140062169A patent/KR20140138072A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006017136A2 (en) * | 2004-07-12 | 2006-02-16 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser curvature |
CN1869409A (zh) * | 2005-05-27 | 2006-11-29 | 三菱重工业株式会社 | 燃气轮机旋转叶片的平台以及制造旋转叶片、密封板和燃气轮机的方法 |
CN201148466Y (zh) * | 2007-12-04 | 2008-11-12 | 郭铭书 | 具有分散气体的分散板的镀膜装置 |
CN102041484A (zh) * | 2009-10-20 | 2011-05-04 | 财团法人工业技术研究院 | 气体分布板及其装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104392675A (zh) * | 2014-08-22 | 2015-03-04 | 友达光电股份有限公司 | 显示装置基板及其制造方法 |
CN109262743A (zh) * | 2018-10-16 | 2019-01-25 | 苏州京浜光电科技股份有限公司 | 一种超薄树脂滤光片低翘曲度加工工艺 |
CN112530774A (zh) * | 2019-09-17 | 2021-03-19 | 中微半导体设备(上海)股份有限公司 | 等离子体处理设备 |
TWI767294B (zh) * | 2019-09-17 | 2022-06-11 | 大陸商中微半導體設備(上海)股份有限公司 | 等離子體處理設備 |
CN112530774B (zh) * | 2019-09-17 | 2024-04-05 | 中微半导体设备(上海)股份有限公司 | 等离子体处理设备 |
Also Published As
Publication number | Publication date |
---|---|
TWI556487B (zh) | 2016-11-01 |
TW201342683A (zh) | 2013-10-16 |
KR20140138072A (ko) | 2014-12-03 |
CN103266310B (zh) | 2015-05-20 |
JP2014227606A (ja) | 2014-12-08 |
JP5860920B2 (ja) | 2016-02-16 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee after: Shanghai Hehui optoelectronic Co., Ltd Address before: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee before: EverDisplay Optronics (Shanghai) Ltd. |
|
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 201506, No. nine, No. 1568, Jinshan Industrial Zone, Shanghai, Jinshan District Patentee after: Shanghai Hehui optoelectronic Co., Ltd Address before: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee before: Shanghai Hehui optoelectronic Co., Ltd |