CN103263950A - Manufacture method of glass base heterozygosis micro-fluidic chip - Google Patents
Manufacture method of glass base heterozygosis micro-fluidic chip Download PDFInfo
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- CN103263950A CN103263950A CN2013102037364A CN201310203736A CN103263950A CN 103263950 A CN103263950 A CN 103263950A CN 2013102037364 A CN2013102037364 A CN 2013102037364A CN 201310203736 A CN201310203736 A CN 201310203736A CN 103263950 A CN103263950 A CN 103263950A
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Abstract
The invention provides a glass base heterozygosis micro-fluidic chip and a preparation method thereof. The glass base heterozygosis micro-fluidic chip is characterized by combining glass used as a base with cover plates and double faced adhesive tapes made of of other materials. A micro-channel or a micro-structure depends on the conventional micromachining method on a glass base, and the bonding manufacture of the chip is finished by mainly depending on a two-sided adhesive manner. The heterozygosis micro-fluidic chip provided by the invention adopts the glass as the base, the base materials of the other chips are combined and used, the advantage of the glass base is fully utilized, the advantages of the other different materials are comprehensively utilized, the preparation method is simple and easy, the requirements of the micro-fluidic chip for the different materials are met, and the glass base heterozygosis micro-fluidic chip has good prospects on the application fields such as chemistry, living beings and medical science.
Description
Technical field
The present invention relates to a kind of glass-based heterozygosis micro-fluidic chip and preparation method thereof.
Background technology
In recent years, micro-fluidic chip is as a kind of novel analysis platform, has microminiaturization, automation, advantage such as integrated, convenient and quick, obtained to use widely in the environment measuring association area.The material of micro-fluidic chip mainly is divided into inorganic material and high-molecular organic material two big classes, comprise silicon, glass, quartz, PDMS, PMMA, PET, COC, PC etc., mainly utilize micro-processing technology to be used for functions such as sample introduction, reaction, analysis in its surface preparation micro-structural and microchannel.Different materials respectively has its pluses and minuses, and for example glass has numerous advantages such as good in optical property, EOF are stable, organic solvent-resistant, and is the most commonly used in the micro-fluidic chip field at present, but the bonding technology of chip is comparatively complicated; PDMS is easy to make, gas permeability good, but the bad operation of high resiliency.Therefore recently, be that the heterozygosis chip of base material becomes the research focus based on glass and other materials.Because the glass micro-fluidic chips of heterozygosis matrix is prepared from by glass and other one or several materials, material is selected face width, and can fully utilize the advantage of different materials, maximize favourable factors and minimize unfavourable ones, the demand that adapts to scientific research and practical application more, for example glass-PDMS micro-fluidic chip has the advantage that hard substrate is beneficial to operation and permeability concurrently, cultivates at cell and obtains extensive use.But, glass-PDMS heterozygosis chip mainly adopts based on the method for oxygen plasma bombardment activation back bonding and makes at present, need expensive instrument, the bonding of glass and other materials is then more difficult, therefore develop simple and easy to do glass-based heterozygosis micro-fluidic chip processing technology, be significant.
Summary of the invention
The purpose of this invention is to provide a kind of glass-based heterozygosis micro-fluidic chip and preparation method thereof, it is characterized in that this chip is made up of glass and other materials.Microchannel or micro-structural rely on conventional micro-processing method to obtain, and the bonding of chip is made and then mainly relied on the bonding mode of double faced adhesive tape to finish.
For achieving the above object, the present invention adopts following operating procedure:
1) with computer aided design software design with draw micro-structural and the microchannel figure of each layer chip in the micro-fluidic chip;
2) by micro-processing technology in required micro-structural and the microchannel of each layer micro-fluidic chip substrate surface processing and preparing, comprise microchannel and micropore;
3) utilize double-deck adhesive membrane, with each layer micro-fluidic chip align, bonding, pressurizing and sealing, form the heterozygosis micro-fluidic chip.
Among the present invention, this heterozygosis micro-fluidic chip is with the micro-fluidic chip of glass as basalis, and other base materials can be silicon, quartz, PMMA, PDMS, PET, PC etc.
Among the present invention, this heterozygosis micro-fluidic chip can be made up of glass and other a kind of base materials, also can be made up of glass and other multiple base materials.
Among the present invention, the micro-structural on the micro-fluidic chip and the size of microchannel are micron levels, mill the micro-processing method of quarter, laser ablation, LIGA technology, method of molding, pressure sintering, chemical attack, soft lithographic technique in the chip substrates surface preparation by numerical control.
Among the present invention, the micro-structural on the micro-fluidic chip and microchannel can process on glass substrate, also can be that processing is on the double faced adhesive tape or on the other materials.
Among the present invention, the bonding of micro-fluidic chip is to utilize double-deck adhesive membrane, each layer micro-fluidic chip is aimed at the back pressurization paste involution, is combined into the heterozygosis chip.
It is substrate that this heterozygosis micro-fluidic chip that proposes among the present invention adopts glass, and other chip substrates have been used in combination, not only can take full advantage of the advantage of glass matrix, and can fully utilize the advantage of other different materials, and the preparation method is simple and easy to do, can satisfy micro-fluidic chip at the demand of different materials.Has good prospect in applications such as chemistry, biology, medical science.
Description of drawings
Fig. 1. a kind of process schematic diagram of glass-based heterozygosis micro-fluidic chip.Wherein, (a) be the processing of glazing channel; (b) be the punching of cover plate; (c) be the aligning bonding of chip.
Fig. 2. a kind of structural representation of glass-based heterozygosis micro-fluidic chip.(1) be a kind of planar structure schematic diagram of simple cross type electrophoresis chip, wherein (a) is sample cell, (b) is the microchannel, (c) is micro-fluidic chip; (2) be a kind of cross-sectional structure schematic diagram of simple cross type electrophoresis chip, wherein (A) is substrate of glass, (B) is double faced adhesive tape, (C) is the cover plate of materials such as PMMA, PDMS, PC.
Specific embodiments
The following examples will give further instruction to the present invention, but not thereby limiting the invention.
The preparation of 1 one kinds of polymethyl methacrylates of embodiment-glass heterozygosis micro-fluidic electrophoresis chip
Fig. 1 is the process schematic diagram of a kind of glass-based heterozygosis of the present invention micro-fluidic chip.Concrete preparation process is as follows: at first utilize the standard photoetching to process MCA in conjunction with wet etching technique in substrate of glass; Then utilize card punch to process sample cell on the relevant position at cover plate and double faced adhesive tape; At last, three kinds of materials according to being the order of cover plate, double faced adhesive tape and glass from top to bottom, are aimed at, fitted, finish the bonding of chip, finally prepare glass-based heterozygosis micro-fluidic chip.
Fig. 2 is the planar structure schematic diagram that 1 one kinds of simple right-angled intersection points of the embodiment of the invention are used chip, and this chip is made of sample cell, microchannel, sees Fig. 2-(1); Concrete preparation process as mentioned above, patch material is used PMMA, finally is prepared into PMMA-glass heterozygosis micro-fluidic electrophoresis chip.This chip structure is shown in Fig. 2-(2), and wherein A is substrate of glass, and B is double faced adhesive tape, and C is PMMA cover plate layer.
The preparation of 2 one kinds of dimethyl silicone polymers of embodiment-glass heterozygosis micro-fluidic electrophoresis chip
The preparation process of a kind of dimethyl silicone polymer-glass heterozygosis micro-fluidic electrophoresis chip is specific as follows: at first utilize the standard photoetching to process MCA in conjunction with wet etching technique in substrate of glass; The preparation process of a kind of dimethyl silicone polymer of poly dimethyl-glass heterozygosis micro-fluidic electrophoresis chip is specific as follows: as at first to utilize the standard photoetching to process MCA in conjunction with wet etching technique in substrate of glass; With the performed polymer of dimethyl silicone polymer and initator in 10: 1 ratio mix, degasification, be cast on the smooth base material and obtain ganoid PDMS cover plate, utilize card punch to process sample cell on the relevant position at PDMS cover plate and double faced adhesive tape; At last, three kinds of materials according to being the order of PDMS cover plate, double faced adhesive tape and glass from top to bottom, are aimed at, fitted, finish the bonding of chip, finally prepare PDMS-glass-based heterozygosis micro-fluidic chip.This chip has been integrated the advantage of the excellent special optical property of glass and PDMS, and combines the characteristics that characteristics that the glass hard substrate is convenient to operate and PDMS have permeability, therefore is with a wide range of applications in the cell culture assays field.
Claims (7)
1. the preparation method of a glass-based heterozygosis micro-fluidic chip is characterized in that the multilayer chiop that this micro-fluidic chip is made up of glass and other one or more materials.Microchannel or micro-structural rely on conventional micro-processing method to obtain, and the bonding of chip then mainly relies on the bonding mode of double faced adhesive tape to finish.
2. by the preparation method of the described glass-based heterozygosis of claim 1 micro-fluidic chip, it is characterized in that its making step is as follows:
1) with computer aided design software design with draw micro-structural and the microchannel figure of each layer chip in the micro-fluidic chip;
2) by micro-processing technology in required micro-structural and the microchannel of each layer micro-fluidic chip substrate surface processing and preparing, comprise microchannel and micropore;
3) utilize double-deck adhesive membrane, with each layer micro-fluidic chip align, bonding, pressurizing and sealing, form the heterozygosis micro-fluidic chip.
3. press the preparation method of claim 1 or 2 described glass-based heterozygosis micro-fluidic chips, it is characterized in that, this heterozygosis micro-fluidic chip is with the micro-fluidic chip of glass as basalis, and other base materials can be silicon, quartz, PMMA, PDMS, PET, PC etc.
4. by the preparation method of claim 1 or 2 described glass-based heterozygosis micro-fluidic chips, it is characterized in that this heterozygosis micro-fluidic chip can be made up of glass and other a kind of base materials, also can be formed by glass and other multiple base materials.
5. press the preparation method of claim 1 or 2 described glass-based heterozygosis micro-fluidic chips, it is characterized in that, micro-structural on the micro-fluidic chip and the size of microchannel are micron levels, mill the micro-processing method of quarter, laser ablation, LIGA technology, method of molding, pressure sintering, chemical attack, soft lithographic technique in the chip substrates surface preparation by numerical control.
6. by the preparation method of claim 1 or 2 described glass-based heterozygosis micro-fluidic chips, it is characterized in that the bonding of micro-fluidic chip is to utilize double-deck adhesive membrane, each layer micro-fluidic chip aimed at the back pressurization paste involution, be combined into the heterozygosis chip.
7. by the preparation method of claim 1 or 2 described glass-based heterozygosis micro-fluidic chips, it is characterized in that it is substrate that this heterozygosis micro-fluidic chip adopts glass, and be used in combination other chip substrates, can satisfy micro-fluidic chip at the demand of different materials.
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Cited By (7)
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| CN105233888A (en) * | 2015-10-12 | 2016-01-13 | 浪潮(北京)电子信息产业有限公司 | Glass-PDMS film-glass sandwich microfluidic chip manufacturing method |
| CN105467111A (en) * | 2014-09-05 | 2016-04-06 | 宏达国际电子股份有限公司 | Micro channel module |
| CN105854966A (en) * | 2016-06-14 | 2016-08-17 | 东华大学 | Microfluidic chip embedding functional nanofiber membrane and application of microfluidic chip |
| CN106215986A (en) * | 2016-08-10 | 2016-12-14 | 杭州电子科技大学 | A kind of PDMS microfluidic chip structure and preparation method thereof |
| CN109365012A (en) * | 2018-10-29 | 2019-02-22 | 成都博奥晶芯生物科技有限公司 | A kind of packaging method of sandwich type structural |
| CN109856095A (en) * | 2018-12-27 | 2019-06-07 | 大连海事大学 | Copper ion detection system and method in a kind of lubricating oil based on micro-fluidic chip |
| CN112275338A (en) * | 2020-10-29 | 2021-01-29 | 王晓冬 | Droplet single-layer tiled nucleic acid detection chip and preparation method thereof |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105467111A (en) * | 2014-09-05 | 2016-04-06 | 宏达国际电子股份有限公司 | Micro channel module |
| CN105233888A (en) * | 2015-10-12 | 2016-01-13 | 浪潮(北京)电子信息产业有限公司 | Glass-PDMS film-glass sandwich microfluidic chip manufacturing method |
| CN105854966A (en) * | 2016-06-14 | 2016-08-17 | 东华大学 | Microfluidic chip embedding functional nanofiber membrane and application of microfluidic chip |
| CN105854966B (en) * | 2016-06-14 | 2018-01-02 | 东华大学 | A kind of micro-fluidic chip for embedding functionalized nano-fiber film and its application |
| CN106215986A (en) * | 2016-08-10 | 2016-12-14 | 杭州电子科技大学 | A kind of PDMS microfluidic chip structure and preparation method thereof |
| CN109365012A (en) * | 2018-10-29 | 2019-02-22 | 成都博奥晶芯生物科技有限公司 | A kind of packaging method of sandwich type structural |
| CN109856095A (en) * | 2018-12-27 | 2019-06-07 | 大连海事大学 | Copper ion detection system and method in a kind of lubricating oil based on micro-fluidic chip |
| CN112275338A (en) * | 2020-10-29 | 2021-01-29 | 王晓冬 | Droplet single-layer tiled nucleic acid detection chip and preparation method thereof |
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Application publication date: 20130828 |