CN103260816A - Laser beam irradiation apparatus and laser beam irradiation method - Google Patents
Laser beam irradiation apparatus and laser beam irradiation method Download PDFInfo
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- CN103260816A CN103260816A CN2011800616215A CN201180061621A CN103260816A CN 103260816 A CN103260816 A CN 103260816A CN 2011800616215 A CN2011800616215 A CN 2011800616215A CN 201180061621 A CN201180061621 A CN 201180061621A CN 103260816 A CN103260816 A CN 103260816A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
- B29D11/00788—Producing optical films
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Laser Beam Processing (AREA)
- Polarising Elements (AREA)
Abstract
Provided are a laser beam irradiation apparatus wherein output fluctuation is suppressed, and output of a laser beam to be radiated is stabilized, and a laser beam irradiation method. The laser beam irradiation apparatus (10), which irradiates a film with a laser beam for the purpose of cutting the film, is provided with: a laser beam oscillator (1), which oscillates a laser beam (L); a beam splitter (3), which splits the laser beam (L) oscillated by means of the laser beam oscillator (1) into two beams, and which irradiates the film with a laser beam, i.e., reflected light (L1); a power sensor (4), which measures the intensity of a laser beam, i.e., transmitted light (L2); and a processing board (5), which calculates the output value of the laser beam oscillator (1) on the basis of the intensity thus measured, determines the level of the output value with respect to a set value, and corrects the output value of the laser oscillator (1) such that the output value is close to the set value.
Description
Technical field
The output of the laser that the present invention relates to suppress to export change and shine is able to stabilisation, can cut off laser irradiation device and the laser irradiating method of film suitably.
Background technology
Polarizing coating is widely used in the various products such as liquid crystal panel.Always, though use cutter in the cut-out of the polarizing coating processing, owing to foreign matters such as easy generation film bits from be cut off thing, this foreign matter is attached on the polarizing coating, can make as the decrease in yield that is cut off the product of object.
Therefore, in the cut-out processing of polarizing coating, use laser to replace cutter in recent years.By cutting off processing with laser, compare with the cut-out processing of carrying out with cutter, be not easy from be cut off object, to produce foreign matters such as film bits, so can suppress the decline as the yield rate of the product that is cut off object.Therefore, the cutting-off method that utilizes laser is useful, has the whole bag of tricks as patent documentation for example 1～5 is described to be suggested.
Patent documentation
Patent documentation 1: Japan openly speciallys permit communique " spy opens 2008-284572 communique (on November 27th, 2008 is open) "
Patent documentation 2: Japan openly speciallys permit the communique spy and opens 2008-302376 communique " on December 18th, 2008 open) "
Patent documentation 3: Japan openly speciallys permit communique " spy opens 2009-22978 communique (on February 5th, 2009 is open) "
Patent documentation 4: Japan openly speciallys permit communique " spy opens 2009-167321 communique (on July 30th, 2009 is open) "
Patent documentation 5: Japan openly speciallys permit communique " spy opens 2010-53310 communique (on March 11st, 2010 is open) "
Summary of the invention
The problem that invention will solve
In general, it is unstable that laser oscillator has laser output, the characteristic that output valve changed with certain amplitude round setting value with the extremely short cycle (for example 1 millisecond).Therefore, because the output of laser oscillator change even the laser output valve is set at the needed value of processing of cutting off polarizing coating, can not suitably be cut off the problem of polarizing coating when in fact also having.Below this problem is specifically described.
Usually, the cut-out of polarizing coating processing is that one side carries long polarizing coating one surface irradiation laser to carry out continuously with certain speed.Here, when the output valve of laser is set at cut-out processing needed (and being lower) value of polarizing coating, be lower than in this output valve of change because of output (less than) setting value reaches when to a certain degree above, polarizing coating just can't cut.Therefore, when the polarizing coating of rolling after cutting off processing, end (cut-out portion) or the state for being torn of this polarizing coating will take place, or from the end to the inboard broken such undesirable situation of polarizing coating.On the other hand, for solving above-mentioned undesirable situation, the output valve that is setting laser is that needed value is processed in the cut-out that is higher than polarizing coating, also can cut off processing in order to be lower than setting value in output valve when to a certain degree above, when setting like this, because of this output valve of output change for be higher than (greater than) set value and reach when to a certain degree above, it is too high that output valve becomes, the end of polarizing coating (cut-out portion) or because the irradiation of laser causes overheated the fusing, or cause protuberance or warpage because of thermal expansion.Therefore, the such another kind of undesirable situation of quality badness just takes place in the polarizing coating that cuts off after processing.
, in the cutting-off method described in the above-mentioned patent documentation 1～5, to the above-mentioned characteristic of laser oscillator, i.e. laser output is not considered or countermeasure especially with the extremely short the sort of characteristic of cyclical swing.That is to say, in above-mentioned patent documentation 1～5 described cutting-off method, can not cut off the problem of polarizing coating suitably when having.Therefore, laser irradiation device and the laser irradiating method of polarizing coating can be often cut off in requirement suitably.
Solve the means of problem
The present invention does in view of above-mentioned problem, and its main purpose is to provide the output change to be inhibited, and the output of the laser of irradiation is able to laser irradiation device and the laser irradiating method of stabilisation.
Laser irradiation device of the present invention, for solving above-mentioned problem, be for cutting off film to the laser irradiation device of this film irradiating laser, possesses the laser oscillator that laser takes place in vibration, to be divided into two bundles by the laser that the laser oscillator vibration takes place, and the beam of laser in the separated laser shone beam splitter in film, measure the determinator of the intensity of another Shu Jiguang in the separated laser, and the output valve of calculating described laser oscillator according to the intensity that is measured to, judgement is with respect to the size of described output valve of setting value, and proofread and correct so that the output valve of described laser oscillator close to the means for correcting of setting value.
If adopt above-mentioned formation, then determinator is configured to measure the intensity of another Shu Jiguang in the laser that is separated by beam splitter, calculate the output valve of laser oscillator according to described intensity with means for correcting, judgement is with respect to the size of described output valve of setting value, and proofread and correct so that the output valve of described laser oscillator close to setting value.Thereby, even being set at, the output valve of the laser that will be taken place by the vibration of above-mentioned laser irradiation device cuts off film needed (and being lower) value, also be inhibited because of output change, this output valve can not be lower than (less than) more than setting value reaches to a certain degree, and can cut off film suitably.Therefore, can provide output change (with respect to the change of setting value) to be inhibited, the output of the laser of irradiation is able to stabilisation, can cut off the laser irradiation device of film suitably.
The transmission light intensity that the said determination device can be measured in the separated laser is then better.Again, the said determination device is that power sensor is then better.And above-mentioned laser oscillator is CO
2Laser oscillator is then better.
For solving above-mentioned problem, laser irradiating method of the present invention, be for cutting off film to the laser irradiating method of this film irradiating laser, comprise: will be divided into two bundles by the laser that the laser oscillator vibration produces, and the beam of laser in the separated laser shone in film, measure the intensity of another Shu Jiguang simultaneously, calculate the output valve of described laser oscillator according to the intensity of measuring, judgement is with respect to the size of described output valve of setting value, and carry out full-time correction so that the output valve of described laser oscillator close to the step of setting value.
If adopt above-mentioned formation, measure the intensity of another Shu Jiguang in the separated laser, calculate the output valve of described laser oscillator according to described intensity, judgement is with respect to the size of described output valve of setting value, and All Time proofread and correct so that the output valve of described laser oscillator close to setting value.Thereby, even being set at, the output valve of the laser that will be taken place by the vibration of above-mentioned laser irradiation device cuts off film needed (and being lower) value, also be inhibited because of output change, this output valve can not be lower than (less than) more than setting value reaches to a certain degree, and can cut off film suitably.Therefore, can provide output change (with respect to the change of setting value) to be inhibited, the output of the laser of irradiation is able to stabilisation, can cut off the laser irradiating method of film suitably.
The invention effect
If adopt laser irradiation device of the present invention and laser irradiating method, even the output valve of laser is set at cut-out film needed (and being lower) value, also be inhibited because of the output change, this output valve can not be lower than (less than) setting value reach to a certain degree more than, can cut off film suitably.Therefore, reaching to provide output change (with respect to the change of setting value) to be inhibited, and the output of the laser of irradiation is able to stabilisation, can cut off the effect of laser irradiation device and the laser irradiating method of film suitably.
Film with laser irradiation device of the present invention and laser irradiating method cut-out, its end (cut-out portion) can not take place or form the state that tears, or the situation of breaking to the polarizing coating inboard from the end, and, because the output valve of laser not being set to such an extent that surpass needs, so can not melt yet or cause because of thermal expansion the situation of protuberance or warpage.Therefore, do not worry to cut off membrane quality deterioration after the processing.
Description of drawings
Fig. 1 represents one of laser irradiation device of the present invention example, is its general block diagram that constitutes of expression.
One of the output valve stabilisation that the (a) and (b) of Fig. 2, (c) represent to utilize above-mentioned laser irradiation device to make laser together example is the curve map of output change of the laser of expression laser irradiation device irradiation.
Fig. 3 represents one of existing laser irradiation device example, is its general block diagram that constitutes of expression.
The (a) and (b) of Fig. 4, (c) are the curve maps that the output of the laser of the existing laser irradiation device irradiation of expression changes.
The (a) and (b) of Fig. 5, (c) are the curve maps that the output change of the laser of the output change of the laser of laser irradiation device irradiation of the present invention and the irradiation of existing laser irradiation device is compared.
The specific embodiment
Describe according to the present invention's one example of Fig. 1～Fig. 5 below.
In the following description, be that the situation of polarizing coating is example with cut film.Again, so-called " cut-out " film among the present invention is except cutting to two parts, be also contained in the situation of getting through hole on the film or forming prescribed depth " cutting off a part at least " such as ditches (grooving) at film to major general's divided thin film.More particularly, " cut-out " also comprise for example cut-out of the end of film (cutting), hemisect, sign processing etc.
[laser irradiation device]
Fig. 1 represents one of laser irradiation device of the present invention example.As shown in Figure 1, the laser irradiation device 10 of this example is for cutting off polarizing coating (film) to the device of this polarizing coating irradiating laser, possess: laser oscillator 1, curved reflectors 2, beam splitter 3, power sensor (determinator) 4, treatment bench (means for correcting) 5, and collector lens (not shown) also possess the optical component of optical beam expander (not shown) etc. simultaneously as required.
Laser oscillator 1 is the member that laser L takes place in vibration, for example available CO
2Laser oscillator (carbon dioxide laser oscillator), the UV laser oscillator, semiconductor laser oscillator, the YAG laser oscillator, oscillators such as excimer laser oscillator, but concrete structure is not particularly limited.In the above-mentioned illustrative oscillator, CO
2So can the vibrate laser of height output of the cut-out processing that take place to be fit to polarizing coating of laser oscillator is more satisfactory.
In general, laser oscillator has the output instability of laser, output valve with the extremely short cycle (for example 1 millisecond) round the characteristic of setting value with certain amplitude change, the output valve of laser when output the is low characteristic of unstable (amplitude of fluctuation of the more high output valve of output is more little) that becomes is easily also arranged simultaneously.Therefore, for the output valve that makes laser oscillator 1 is more stable, preferably make laser oscillator 1 be output as higher output.But when output valve was too high, polarizing coating was under laser irradiation or overheated and melt, or because thermal expansion causes protuberance or warpage, the polarizing coating that cuts off after the processing might quality badness.Therefore, the output valve of laser oscillator 1 is redefined for the corresponding suitable setting value of conditions such as the material of polarizing coating and thickness and gets final product.Just, wish the concrete output valve of laser oscillator 1 material and thickness, the transporting velocity of polarizing coating and transmitted light and the catoptrical ratio that beam splitter 3 produces according to polarizing coating is set at suitable setting value.
The frequency of the laser L of irradiation is suitably set according to the conditions such as transporting velocity of the material of the output of laser oscillator 1, polarizing coating and thickness, polarizing coating and get final product, but generally can be set at more than the 5kHz, below the 100kHz.
Then, laser oscillator 1 is according to predefined setting value output laser, and is that treatment bench 5 carries out full-time correction by means for correcting, so that its output valve is close to setting value.
Laser irradiation device 10 has optical beam expander in the light path from beam splitter 3 to polarizing coating, is more preferably form.Optical beam expander is the member that laser L1 is expanded to collimated light beam, can use known optical beam expander.Specifically, utilize optical beam expander that the diameter expansion of laser L1 is better to for example 2 times～10 times degree.Diameter by expanded laser light can more dwindle the spot diameter that shines in the laser of polarizing coating.
Curved reflectors (bent mirror) the 2nd, the member that the laser L that laser oscillator 1 vibration is taken place reflects towards beam splitter.Above-mentioned curved reflectors 2 for example adopts that plane mirror is suitable, can be with the structure of laser L to beam splitter 3 reflections as long as form.In addition, its number also is not particularly limited.
Beam splitter (beam splitter) the 3rd is divided into two members of restrainting with laser oscillator 1 vibration generation and by curved reflectors 2 laser light reflected L with certain ratio (ratio).Be that beam splitter 3 is the members that laser L are divided into reverberation L1 and transmitted light L2 with certain ratio.And, beam splitter 3 is with the reverberation L1(beam of laser in the separated laser) shine on the polarizing coating through optical components such as collector lenses, be used for the cut-out processing of polarizing coating, simultaneously with another Shu Jiguang of transmitted light L2() to shine in power sensor 4, the output that is used for laser oscillator 1 is regulated.This beam splitter 3 can use known beam splitter.
Above-mentioned collector lens for example adopts that known lens such as spherical lens or non-spherical lens get final product, and is not particularly limited.In addition, because reverberation L1 is the cut-out width that the optically focused diameter of laser determines polarizing coating, so more than the optically focused diameter of this laser on the polarizing coating is with 5 μ m, be advisable below the 500 μ m, 10 μ m are above, 400 μ m are following better.
Also have, the laser irradiation device 10 of this example adopts at polarizing coating and cuts off use reverberation L1 in the processing, in regulating, the output of laser oscillator 1 uses the formation of transmitted light L2, but also can be by using for example curved reflectors (not shown), employing is cut off at polarizing coating and is used transmitted light L2 in the processing, uses the formation of reverberation L1 in the output of laser oscillator 1 is regulated.
As the power sensor (power sensor) the 4th of determinator, transmitted light L2 is transformed to thermo-electromotive force and measures the element of the laser intensity of transmitted light L2.Be that power sensor 4 is measured the electric power that takes place because of irradiating laser, measure the intensity of this laser whereby.Utilize the interval that power sensor 4 measures shorter better, for example 10 milliseconds just, but be not particularly limited.Again, power sensor 4 can be used known power sensor.In addition, determinator so long as can measure laser intensity structure just.
Then, power sensor 4 is sent to treatment bench 5 with the data of the laser intensity (measured value) of mensuration through A/D converter (not shown).Above-mentioned A/D converter is transformed to numerical data with the analogue data of measured value, and the numerical data of measured value is sent to treatment bench 5.
Means for correcting is arithmetic processing apparatus such as treatment bench 5 built-in CPU.This treatment bench 5 is according to the numerical data of the measured value of accepting through the A/D converter from power sensor 4 and the ratio (ratio) of the transmitted light L2 that is separated by beam splitter 3, calculate the output valve of above-mentioned laser oscillator 1, judgement is with respect to the size of the above-mentioned output valve of predefined setting value (surpassing and deficiency), carry out full-time correction so that the output valve of above-mentioned laser oscillator 1 close to setting value.Be treatment bench 5 in All Time, specifically, for example per 10 milliseconds feed back to laser oscillator 1 with operation result, regulate (correction) and make the real output value of laser oscillator 1 close to setting value.More particularly, little in the intensity as the laser of transmitted light L2, the output valve of laser oscillator 1 is less than when setting value, the output of regulating laser oscillator 1 increases the output valve of the reality of laser L, on the other hand, big in the intensity as the laser of transmitted light L2, the output valve of laser oscillator 1 is during greater than setting value, and the output of regulating laser oscillator 1 reduces the real output value of laser L.Again, treatment bench 5 so long as the structure that can carry out above-mentioned calculating and judgement just, it specifically constitutes unqualified.
In the laser irradiation device 10 in this example, adopt power sensor 4 and treatment bench 5 by means of above-mentioned formation, measure the intensity of transmitted light L2 with for example 10 milliseconds measuring interval, regulate full-time stabilizer of so-called FTS(of the output valve of laser L; Full time stabilizer) system can regulate the real output value of (correction) laser oscillator 1 so that it close to setting value, therefore can cut off polarizing coating suitably.
Laser irradiation device 10 in this example is used as configuration example as a device of the tape-cutting machine (not shown) of the cut-out processing of carrying out polarizing coating continuously.Tape-cutting machine except laser irradiation device 10, also possess the polarizing coating (back explanation) of emitting long size the portion that emits, carry this polarizing coating a plurality of conveying cylinders, batch the members such as reeling end that cut off the polarizing coating after the processing.Below tape-cutting machine is illustrated.But the structure beyond the laser irradiation device 10 in the tape-cutting machine can adopt known structure, so its explanation is omitted.
The portion of emitting is the polarizing coating that keeps long size, and the member that utilizes the rotation of whirligig that the polarizing coating of reeling is emitted to conveying cylinder simultaneously specifically, can be enumerated the known portion that emits.Again, the transporting velocity of the tension force that polarizing coating is applied and polarizing coating utilizes whirligig to regulate.In addition, the portion of emitting arranges one and gets final product, but by arranging two, can before a polarizing coating of emitting portion is all emitted this polarizing coating and another polarizing coating of emitting portion be linked, and therefore can reduce the time of the reel of replacing polarizing coating.
Conveying cylinder as carrying polarizing coating has for example known conveying cylinder.Usually, the width of conveying cylinder is about 1.5m～2.5m.The transporting velocity of polarizing coating is for example taked following getting final product above, 100m/ second 1m/ second, is not particularly limited.In addition, also can possess polarizing coating by the contact cylinder that is pressed on the conveying cylinder in the tape-cutting machine.
Reeling end arranges two, is the member that batches that utilizes the rotation of whirligig to batch to cut off polarizing coating after the processing.Specifically can enumerate known reeling end.Again, the tension force that the polarizing coating that cuts off after the processing is applied and the transporting velocity of polarizing coating are regulated by whirligig.
Laser irradiation device 10 is configured in the way of the polarizing coating transport path that is formed by a plurality of conveying cylinders, continuously the polarizing coating of being carried by conveying cylinder is cut off processing.Again, also can replace the movement of polarizing coating, Yi Bian laser irradiation device 10 is moved, Yi Bian carry out the cut-out processing of polarizing coating.
Thereby, by using the tape-cutting machine of above-mentioned formation, can carry out the cut-out processing of polarizing coating continuously.
[film]
The film (cut-out object) that laser irradiation device 10 cuts off is not particularly limited, but can enumerate known polarizing coating.As this polarizing coating, usually can enumerate the polarizing coating of long size (for example the length at the polarizing coating on the cutting direction is more than the 10m), but also can be the polarizing coating of short size (for example in the length of the polarizing coating on the cutting direction be, discontented 10m) or tabular (for example in the length of the polarizing coating on the cutting direction be, discontented 2m) more than the 2m more than the 10cm.
Formation as polarizing coating; specifically; can enumerate for example applying TAC(triacetyl cellulose on the two sides of polarizing film) film, COP(cyclic olefin polymer) film such as film is as diaphragm; on the TAC film facing to the reverse side (the inside) of the face of laser irradiation device 10, by the formation of the stacked diaphragm of bonding agent.As the polarizing film at the center that is positioned at polarizing coating, can enumerate the film of polyvinyl alcohol film with the dyeing of coloring agents such as iodine and extension, the film of diaphragm members such as applying TAC.Can replace above-mentioned polyvinyl alcohol film again, and use part dimethoxym ethane polyvinyl alcohol film, ethylene-vinyl acetate copolymer pastern to divide the processed thing of hydrophilic macromolecule films such as saponification film, cellulose-based film, polyvinyl alcohol or the polyene oriented films such as desalination acid treatment thing of polyvinyl chloride.
As said protection film, also films such as available polyester film, polyethylene terephthalate thin film.Thickness and the width of said protection film are not particularly limited, but from the consideration as the diaphragm of polarizing coating, with for example thickness more than the 5 μ m, below the 60 μ m, the width that 200mm is above, 1500mm is following is advisable.
The thickness that contains the polarizing coating of diaphragm is not particularly limited, but can adopt more than the 100 μ m, below the 500 μ m.Again, the thickness of polarizing film is generally more than the 10 μ m, below the 50 μ m.Again, polarizing coating in the no problem scope, can also contain other layers again outside above-mentioned three layers (polarizing film, TAC film and COP film, diaphragms) in practicality.
[laser irradiating method]
The laser irradiating method of this example, be for cutting off polarizing coating (film) to the method for this polarizing coating irradiating laser, this method is that the laser L that laser oscillator 1 vibration takes place is divided into two bundles, with the beam of laser wherein of for example reverberation L1(in the laser that separates) shine on the polarizing coating through optical components such as collector lenses, be used for the cut-out processing of this polarizing coating, simultaneously, mensuration is as another Shu Jiguang of transmitted light L2() the intensity of laser, according to the intensity of measuring (for example numerical data of measured value) with carry out at beam splitter 3 separate in the ratio (ratio) of transmitted light L2, calculate the output valve of above-mentioned laser oscillator 1, judgement is with respect to the size of the above-mentioned output valve of predefined setting value (surpassing and deficiency), All Time proofread and correct so that the output valve of above-mentioned laser oscillator 1 close to the method for setting value.
As above-mentioned laser L, because of CO
2Laser can obtain polarizing coating is cut off the suitable high-output power of processing, so comparatively desirable.Again, the frequency of the laser L of irradiation is suitably set according to the conditions such as transporting velocity of the material of the power output of laser oscillator 1, polarizing coating and thickness, polarizing coating and get final product, generally can adopt more than the 5kHz, below the 100kHz.
For laser L is divided into two bundles, adopt beam splitter 3 to get final product as mentioned above.But the method for separating is not limited to adopt the method for beam splitter, gets final product so long as laser L can be divided into the method for two bundles.But the corresponding suitable setting value of conditions such as transporting velocity of the power output of the employing of the ratio of reverberation L1 and transmitted light L2 and laser oscillator 1, the material of polarizing coating and thickness, polarizing coating at once, there is no specific restriction.
Again, in the laser irradiating method of this example, reverberation L1 is used in the cut-out processing of film, the output of laser oscillator 1 is regulated used transmitted light L2, but also can adopt transmitted light L2 is used in the cut-out processing of film, the structure of using reverberation L1 is regulated in the output of laser oscillator 1.
For measuring the intensity as the laser of transmitted light L2, as long as by top described use power sensor 4.But assay method is not limited to use the method for power sensor, so long as can measure laser intensity method just.Measuring interval is advisable with short, as 10 milliseconds just, but be not particularly limited.
So that close to setting value, needing only, the output valve of laser oscillator 1 uses treatment bench 5 in order to carry out full-time correction as mentioned above.But bearing calibration is not limited to use the method for the treatment of bench, so long as can be for example per 10 milliseconds will feed back to laser oscillator 1 with intensity (for example numerical data of measured value), the ratio (ratio) of transmitted light L2 and the operation result that predefined setting value is carried out computing of the laser of measuring, regulate (corrections) so that the real output value of laser oscillator 1 close to the method that sets value just.More particularly, so long as can be little in the intensity as the laser of transmitted light L2, the output valve of laser oscillator 1 is less than when setting value, the output of regulating laser oscillator 1 makes the real output value of laser L become big, on the other hand, big in the intensity as the laser of transmitted light L2, the output valve of laser oscillator 1 is during greater than setting value, and the output of regulating laser oscillator 1 makes method that the real output value of laser L reduces just.
In the laser irradiating method of this example, can adopt the intensity of measuring transmitted light L2 with for example 10 milliseconds measuring interval, regulate the so-called FTS(full time stabilizer of the output valve of laser L) system, regulate (correction) so that the real output value of laser oscillator 1 close to setting value, therefore can be cut off polarizing coating suitably.
The laser irradiating method of this example, the tape-cutting machine that can process for the cut-out of for example carrying out polarizing coating continuously suitably.
Again, laser irradiation device of the present invention and laser irradiating method are to cut off the apparatus and method of film suitably, and therefore also can be understood as is laser disconnecting device and laser cutting method.
Embodiment
The performance of the laser irradiation device 10 of this example has been discussed above.In addition, for the performance with the laser irradiation device 10 of this example contrasts, the performance of existing laser irradiation device has been discussed.Specifically, measured the output change of the laser L that laser oscillator 1 vibration of the laser irradiation device 10 of this example and existing laser irradiation device takes place.
The formation that the laser irradiation device of performance is discussed is shown in Fig. 3.As shown in Figure 3, existing laser irradiation device 20 possesses laser oscillator 1, curved reflectors 2, curved reflectors 8 and collector lens (not shown).That is to say, existing laser irradiation device 20 does not possess beam splitter, power sensor, A/D converter and treatment bench, be the whole of the laser L that taken place by 1 vibration of curved reflectors 2 and curved reflectors 8 reflector laser oscillators, be used for the formation that the cut-out of film is processed.Again, be used for proofreading and correct so that the output valve of above-mentioned laser oscillator 1 close to formation optical components such as (for example) optical beam expanders beyond the formation of setting value, laser irradiation device 20 possesses equally with laser irradiation device 10.In addition, laser oscillator 1 is at laser irradiation device 10 oscillator identical with employing in the laser irradiation device 20.
And the output of measuring the laser L of laser oscillators 1 vibration generation with laser irradiation device 10 and the existing laser irradiation device 20 of this example changes.
The output valve that is the laser L of setting laser oscillator 1 vibration generation is 14.0W, with the speed that 6m/ divides film is cut off processing.In the laser irradiation device 10 of this example, shown in Fig. 2 (a), the output valve of the laser L of actual output is in the scope of 13.4～14.1W (average 13.8W, amplitude 0.7W) generally.Relative with it, in existing laser irradiation device 20, shown in Fig. 4 (a), generally fluctuation in the scope of 12.3～15.0W of the output valve of the laser L of actual output (average 13.8W, amplitude 2.7W).Thereby, by the result shown in Fig. 5 (a) as can be known, be set in the output valve with laser L under the situation of 14.0W, the output change of the laser L that laser oscillator 1 vibration of laser irradiation device 10 takes place is little, compare with the performance of existing laser irradiation device 20, judge the outer excellence of performance bins of the laser irradiation device 10 of this example.
The output valve of the laser L that laser oscillator 1 vibration is taken place is set at 49.5W again, with the speed that 30m/ divides film is cut off processing.The laser irradiation device 10 of this example, shown in Fig. 2 (b), the output valve of the laser L of actual output is in the scope of 48.9～50.4W (average 49.5W, amplitude 1.6W) generally.Relative with it, existing laser irradiation device 20, shown in Fig. 4 (b), generally fluctuation in the scope of 46.4～51.1W of the output valve of the laser L of actual output (average 49.2W, amplitude 4.7W).Thereby, by the result shown in Fig. 5 (b) as can be known, be set in the output valve with laser L under the situation of 49.5W, the output change of the laser L that laser oscillator 1 vibration of laser irradiation device 10 takes place is little, compare with the performance of existing laser irradiation device 20, judge the outer excellence of performance bins of the laser irradiation device 10 of this example.
The output valve of the laser L that laser oscillator 1 vibration is taken place is set at 100.0W again, carries out the cut-out processing of film with the speed that 60m/ divides.The laser irradiation device 10 of this example, shown in Fig. 2 (c), the output valve of the laser L of actual output is in the scope of 99.3～100.6W (average 99.9W, amplitude 1.3W) generally.Relative with it, existing laser irradiation device 20, shown in Fig. 4 (c), generally fluctuation in the scope of 95.2～102.8W of the output valve of the laser L of actual output (average 99.1W, amplitude 7.6W).Thereby, by the result shown in Fig. 5 (c) as can be known, output valve at laser L is set under the situation of 100.0W, the output change of the laser L that laser oscillator 1 vibration of laser irradiation device 10 takes place is little, compare with the performance of existing laser irradiation device 20, judge the outer excellence of performance bins of the laser irradiation device 10 of this example.
Namely find out significantly according to the result shown in Fig. 5 (a)～(c), the performance of the laser irradiation device 10 of this example is compared with the performance of existing laser irradiation device 20, the output change of the laser L that laser oscillator 1 vibration takes place is little, so its performance bins is outer excellent.
Again, the invention is not restricted to above-mentioned example, can in described scope, implement with the form that adds various distortion, thereby it is possible implementing various changes in the scope shown in the claim item.
Industrial utilizability
If adopt laser irradiation device of the present invention and laser irradiating method, even the output valve of laser is set at cut-out film needed (and lower) value, also be suppressed because of the output change, this output valve can not be lower than (less than) setting value reach to a certain degree more than, can cut off film suitably.Therefore, having to provide output change (with respect to the change of setting value) to be suppressed, and the output of the laser of irradiation is able to stabilisation and can cuts off the effect of laser irradiation device and the laser irradiating method of film suitably.
Therefore, laser irradiation device of the present invention and laser irradiating method can be beneficial to for example cut-out processing of polarizing coating, so in the manufacture process of the various products such as for example liquid crystal panel of using polarizing coating, namely can be used widely in the various industries with polarizing coating.
Symbol description
1 laser oscillator
2 curved reflectors
3 beam splitters
4 power sensors (determinator)
5 treatment benches (means for correcting)
10 laser irradiation devices
L laser
L1 reverberation (laser)
L2 transmitted light (laser).
Claims (5)
1. a laser irradiation device is to be the laser irradiation device of cut-out film to this film irradiating laser, it is characterized in that possessing:
The laser oscillator of laser takes place in vibration;
To be divided into two bundles by the laser that laser oscillator vibration takes place, and the beam of laser in the separated laser will be shone beam splitter in film;
Measure the determinator of the intensity of another Shu Jiguang in the separated laser; And
Calculate the output valve of described laser oscillator according to the intensity that is measured to, judge the size with respect to the described output valve of setting value, and proofread and correct so that the output valve of described laser oscillator close to the means for correcting of setting value.
2. laser irradiation device as claimed in claim 1 is characterized in that, described determinator is configured to measure the transmission light intensity in the separated laser.
3. laser irradiation device as claimed in claim 1 or 2 is characterized in that, described determinator is power sensor.
4. as claim 1,2 or 3 described laser irradiation devices, it is characterized in that described laser oscillator is CO
2Laser oscillator.
5. a laser irradiating method is for the laser irradiating method of cut-out film to this film irradiating laser, it is characterized in that, comprises following step:
To be divided into two bundles by the laser that the laser oscillator vibration takes place, and the beam of laser in the separated laser will be shone in film, and measure the intensity of another Shu Jiguang,
Calculate the output valve of described laser oscillator according to the intensity that is measured to, judge the size with respect to the described output valve of setting value, and carry out full-time correction so that the output valve of described laser oscillator close to setting value.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010288671A JP2012135782A (en) | 2010-12-24 | 2010-12-24 | Apparatus and method for laser light irradiation |
| JP2010-288671 | 2010-12-24 | ||
| PCT/JP2011/079832 WO2012086764A1 (en) | 2010-12-24 | 2011-12-22 | Laser beam irradiation apparatus and laser beam irradiation method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103260816A true CN103260816A (en) | 2013-08-21 |
Family
ID=46314031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011800616215A Pending CN103260816A (en) | 2010-12-24 | 2011-12-22 | Laser beam irradiation apparatus and laser beam irradiation method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2012135782A (en) |
| KR (1) | KR20140019313A (en) |
| CN (1) | CN103260816A (en) |
| TW (1) | TW201233482A (en) |
| WO (1) | WO2012086764A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107378260A (en) * | 2016-05-17 | 2017-11-24 | 发那科株式会社 | Laser processing device and laser processing |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013128966A (en) * | 2011-12-22 | 2013-07-04 | Sumitomo Chemical Co Ltd | Laser beam irradiation apparatus, film cutting apparatus, laser beam irradiation method, and film cutting method |
| JP7475220B2 (en) * | 2020-07-03 | 2024-04-26 | 住友重機械工業株式会社 | Laser Power Measurement Device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6478694A (en) * | 1987-09-19 | 1989-03-24 | Hitachi Maxell | Method and device for cutting raw film consisting of plastic film as base material |
| JPH09122946A (en) * | 1995-10-31 | 1997-05-13 | Hitachi Cable Ltd | Method and equipment for machining substrate using co2 gas laser beam |
| JP2000357835A (en) * | 1999-06-15 | 2000-12-26 | Amada Eng Center Co Ltd | Laser oscillator |
| CN101266926A (en) * | 2007-01-24 | 2008-09-17 | 索尼株式会社 | Laser drawing method and apparatus |
-
2010
- 2010-12-24 JP JP2010288671A patent/JP2012135782A/en not_active Withdrawn
-
2011
- 2011-12-20 TW TW100147292A patent/TW201233482A/en unknown
- 2011-12-22 WO PCT/JP2011/079832 patent/WO2012086764A1/en active Application Filing
- 2011-12-22 KR KR1020137018981A patent/KR20140019313A/en not_active Application Discontinuation
- 2011-12-22 CN CN2011800616215A patent/CN103260816A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6478694A (en) * | 1987-09-19 | 1989-03-24 | Hitachi Maxell | Method and device for cutting raw film consisting of plastic film as base material |
| JPH09122946A (en) * | 1995-10-31 | 1997-05-13 | Hitachi Cable Ltd | Method and equipment for machining substrate using co2 gas laser beam |
| JP2000357835A (en) * | 1999-06-15 | 2000-12-26 | Amada Eng Center Co Ltd | Laser oscillator |
| CN101266926A (en) * | 2007-01-24 | 2008-09-17 | 索尼株式会社 | Laser drawing method and apparatus |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107378260A (en) * | 2016-05-17 | 2017-11-24 | 发那科株式会社 | Laser processing device and laser processing |
| CN107378260B (en) * | 2016-05-17 | 2019-07-05 | 发那科株式会社 | Laser processing device and laser processing |
| US10537964B2 (en) | 2016-05-17 | 2020-01-21 | Fanuc Corporation | Laser machining apparatus and laser machining method for performing laser machining while controlling reflected light |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140019313A (en) | 2014-02-14 |
| JP2012135782A (en) | 2012-07-19 |
| WO2012086764A1 (en) | 2012-06-28 |
| TW201233482A (en) | 2012-08-16 |
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Application publication date: 20130821 |