CN103235448A - Polarized light illuminating device - Google Patents
Polarized light illuminating device Download PDFInfo
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- CN103235448A CN103235448A CN2013101370590A CN201310137059A CN103235448A CN 103235448 A CN103235448 A CN 103235448A CN 2013101370590 A CN2013101370590 A CN 2013101370590A CN 201310137059 A CN201310137059 A CN 201310137059A CN 103235448 A CN103235448 A CN 103235448A
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- light filter
- polarization element
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- 230000010287 polarization Effects 0.000 claims abstract description 173
- 238000005286 illumination Methods 0.000 claims abstract description 29
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- 230000005540 biological transmission Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 238000011160 research Methods 0.000 description 7
- 230000008033 biological extinction Effects 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 230000003864 performance function Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
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- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/10—Mirrors with curved faces
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133528—Polarisers
- G02F1/133548—Wire-grid polarisers
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Polarising Elements (AREA)
- Liquid Crystal (AREA)
Abstract
A polarized light illuminating device provided by the invention is characterized in that even if a light filter is arranged at an injection side of a wire gating polarized component, deviation of a polarization axis of the polarization light does not exist distinctly. In a lamp cover (60) accommodating a rod-shaped lamp (11) and a flow groove-shaped reflecting mirror (12), a wire gating polarization component (81) is arranged. The light filter (90) is arranged between the lamp (11) and the wire gating polarization component (81). Light coming from the lamp (11) becomes polarization light under effects of the wire gating polarization component (81), and the polarization light illuminates work pieces. When observed in a direction perpendicular to the length direction of the lamp (11), the light filter (90) is larger than the wire gating polarization component (81). Obliquely entering light (Lo) from outside is not shielded; and therefore at an end point (E) of an effective illumination area, the deviation of the polarization axis does not distinctly exist.
Description
Technical field
The invention of this case relates to the polarized light illumination device that uses wire grid polarization element irradiation polarized light.
Background technology
Be used for obtaining the alignment films of liquid crystal board, having utilized the orientation process of oriented layer etc. of the compensation film for angular field of view of UV cured type liquid crystal, adopt the light orientation technology that is orientated by the polarized light to workpiece irradiation ultraviolet region.Below, in this manual, will use up to be orientated and give general name and be called light orientation, carried out film or the layer after the orientation process and be generically and collectively referred to as optical alignment film using up.In addition, so-called " orientation " is to give directivity for some character of object.
Optical alignment film used in the liquid crystal board maximizes along with the maximization of liquid crystal board, follows in this, and the polarized light illumination device of the workpiece irradiation polarized light that optical alignment film is used also maximizes.
For the workpiece that this large-area optical alignment film is used carries out light orientation, for example at No. 4506412 communique of patent documentation 1(Jap.P.) light source that proposed wire in waiting is that bar-shaped lamp and wire grid polarization element carried out the polarized light illumination device that makes up.
Fig. 8 is the three-dimensional skeleton diagram of the major part of polarized light illumination device in the past.Polarized light illumination device shown in Figure 8 comprises: the transport mechanism of conveyance workpiece W and to the illumination part 10 of the workpiece W of conveyance irradiation polarized light etc.In Fig. 8, workpiece W is the elongated workpiece of the band shape used of compensation film for angular field of view for example, and R1 sends from outlet roller, is carried out the light orientation process by polarizing light irradiation simultaneously by conveyance on the direction of arrow in the drawings, and batches by winding roller R2., by wire grid polarization element 81 polarizations the workpiece W of conveyance under illumination part 10 is shone from the light of the illumination part 10 of the catoptron 12 that comprises bar-shaped lamp 11 and chute shape (Gutter shape).Thus, carry out the light orientation process.
Wire grid polarization element 81 has the structure that has formed grid at the transparency carrier of light (polarized light) transmission of interest concessions usefulness.Grid has following pattern (line and space; Line-And-Space): when the space is set, form many abreast at the line of the upwardly extending electric conductivity in certain side or semiconduction.In the middle of the light of injecting, the major part of the polarized component parallel with the length direction of grid is reflected or is absorbed, and with the polarized component transmission of the length direction quadrature of grid.Therefore, the light behind the transmission wiregrating polarizer 81 becomes the polarized light that has polarization axle in the direction with the length direction quadrature of grid.At for example patent documentation 2(TOHKEMY 2002-328234 communique), patent documentation 3(Japanese Unexamined Patent Application Publication 2003-508813 communique) in illustrated such wire grid polarization element in detail.
Prior art document (patent documentation)
Patent documentation 1: No. 4506412 communique of Jap.P.
Patent documentation 2: TOHKEMY 2002-328234 communique
Patent documentation 3: Japanese Unexamined Patent Application Publication 2003-508813 communique
Patent documentation 4: TOHKEMY 2006-184747 communique
In above-mentioned polarized light illumination device, the purposes such as protection because of wavelength selection or wire grid polarization element need dispose light filter sometimes between light source and wire grid polarization element.For example, in light orientation, as described above to the workpiece irradiation ultraviolet radiation, but have wavelength (wavelength that uses in the light orientation) ultraviolet ray in addition of sensitivity for workpiece, therefore should remove sometimes owing to produce the deterioration etc. of workpiece.In this case, carry out cutting off the ultraviolet action make workpiece produce harmful wavelength of deterioration etc. with light filter.
In addition, one of important characteristic of wire grid polarization element has extinction ratio.In the light orientation, extinction ratio is represented with Iv/Ip.Iv is the intensity of polarization light of the direction vertical with the length direction of grid, and Ip is the intensity of polarization light of parallel direction.By irradiation than the polarized light of High Extinction Ratio, thereby can improve degree to the light orientation process of workpiece.By inventor's research, as the characteristic of wire grid polarization element, for the certain wavelengths territory, can judging sometimes, extinction ratio becomes than other wavelength domain height.If the wavelength photoreceptor territory of workpiece (can carry out the wavelength domain of light orientation) is overlapping with the wavelength domain that extinction ratio uprises, then by optionally shining the ultraviolet ray of this overlapping wavelength domain, can further improve the effect of light orientation process.The wavelength of light filter is selected sometimes also owing to this purpose is carried out.
In addition, as previously mentioned, the wire grid polarization element is the optical element that has formed the very thin of fine grid and high price at transparency carrier, for the face that has formed grid (below, be called the grid face), requires prudent especially treating.Must avoid mistake to make it stained with hand contact grid face or screw etc. is fallen and produce breach etc. at grid.Therefore, it is more the situation of light filter of protection usefulness need to be set in the mode that covers the grid face.The wire grid polarization element usually so that the grid face towards the state configuration of light source side.This be because, towards an opposite side with light source the time, become the structure that grid is showed out more, mistake uprises with the possibility that hand touches.Therefore, the light filter of protection usefulness is arranged at the light source side (injecting side) of wire grid polarization element.
Because above-mentioned any or plural purpose, existence need be in the situation of injecting side configuration light filter of wiregrating polarizer.At this, distinguish by inventor's research: when the wiregrating polarizer inject side configuration light filter the time, the periphery in the polarizing light irradiation zone, the problem that the polarization axis deviation of polarized light obviously exists will produce.
Fig. 9 overlooks skeleton diagram to what the problem of the polarization axis deviation of the periphery in polarizing light irradiation zone was represented.In Fig. 9, represent with arrow polarized light polarization axle towards.As shown in Figure 8, the polarizing light irradiation zone be chute shape catoptron 12 lower ending opening under the zone, be the rectangular zone with the length length about equally of lamp 11.In this polarizing light irradiation zone, for example disposed under the situation of wire grid polarization element 81 in the mode of ejaculation with the polarized light of the direction at the length direction right angle of lamp 11, during the polarization axle of the position measurement polarized light under lamp 11, as shown in Figure 9, accurately confirmed towards the situation of the direction at right angle.Yet, at the periphery in polarizing light irradiation zone when particularly four jiaos part is measured, as shown in Figure 9, polarization axle not towards the right angle but the situation of tilt sideling (rotation) confirmed.
For the polarization axis deviation at place, this each bight, in patent documentation 4, research improves with the structure of catoptron that tubular is set between lamp and wire grid polarization element etc.Yet, distinguish by inventor's research: when the wiregrating polarizer inject side configuration light filter the time, in the end of Width, polarization axis deviation since other want thereby obviously exist.In addition, at this Width, mean direction in the polarizing light irradiation zone, vertical with respect to the length direction of lamp 11, in example shown in Figure 9, be equivalent to the length direction (conveyance direction) of workpiece W.
Summary of the invention
This case invention is made in order to solve above-mentioned new problem (the obvious existence of the polarization axle deviation that filter configuration causes), and purpose is, even also avoid the polarization axis deviation of polarized light obviously to exist at the side configuration light filter of injecting of wiregrating polarizer.
In order to solve above-mentioned problem, the invention of technical scheme 1 record of this case has following structure: a kind of polarized light illumination device comprises: the light source of wire; The wire grid polarization element makes from the light polarization of light source and shines; And catoptron, being chute shape, this catoptron covers light source at the opposition side that is provided with wire grid polarization element one side,
On the light path between light source and the wire grid polarization element, be provided with light filter,
Be Width when observing in and the direction parallel with respect to photoirradiated surface vertical with respect to the length direction of light source, light filter is bigger than wire grid polarization element.
In addition, in order to solve above-mentioned problem, the invention of technical scheme 2 records has following structure: in the structure of described technical scheme 1, shape described catoptron, the reflecting surface on the section vertical with the length direction of described light source is para-curve, described light filter is parallel and arrange with respect to described wire grid polarization element
The length that stretch out from described wire grid polarization element the end of the Width of described light filter is more than the 2.5mm.
In addition, in order to solve above-mentioned problem, the invention of technical scheme 3 records has following structure: in the structure of described technical scheme 1, shape described catoptron, the reflecting surface on the section vertical with the length direction of described light source is para-curve, described light filter is parallel and arrange with respect to described wire grid polarization element
The length of stretching out from described wire grid polarization element in the end of establishing described light filter is S, if the incident angle of the light of injecting with respect to the end points of the effective coverage of described wire grid polarization element, from outermost is θ, and the separation spacing of establishing described light filter and described wire grid polarization element is when being d, and the relation of S 〉=d.tan θ is set up.
In addition, in order to solve above-mentioned problem, the invention of technical scheme 4 records has following structure: in each described structure, described light source, described wire grid polarization element and described catoptron are contained in lampshade in the described technical scheme 1 to 3,
In lampshade, be formed with by ventilating the ventilation road of cooling off in the lampshade,
Described light filter is parallel and arrange with respect to described wire grid polarization element,
Space between described light filter and the described wire grid polarization element also becomes the ventilation road, and the separation spacing of the plane of incidence of the exit facet of described light filter and described wire grid polarization element is more than the 5mm.
In addition, in order to solve above-mentioned problem, the invention of technical scheme 5 record has following structure: in the described technical scheme 1 to 4 in each described structure, described light filter is by the light filter main body and kept the light filter frame of light filter main body to constitute, be provided with a plurality of light filter main bodys, the light filter frame has kept being arranged in a plurality of light filter main bodys on the same plane.
In addition, in order to solve above-mentioned problem, the invention of technical scheme 6 records has following structure: in each described structure, described wire grid polarization element is kept by framework in the described technical scheme 1 to 5, and described light filter links with this framework and can be mobile with described wire grid polarization element.
The effect of invention
As described below, according to the invention that each technical scheme of this case is put down in writing, when Width was observed, light filter was bigger than wire grid polarization element, so the obvious existence of the polarization axis deviation at place, the end of Width is prevented.Therefore, can contribution be arranged to the higher light orientation process of homogeneity.
In addition, invention according to technical scheme 4 records, except above-mentioned effect, light filter can not hinder the cooling of wire grid polarization element, is prevented with first-class problem so the radiation heat that the wire grid polarization element is heated to more than the limit or the wire grid polarization element sends is heated to limit with optical alignment film.
In addition, according to the invention of technical scheme 5 records, except above-mentioned effect, a plurality of light filter main bodys are being arranged by the light filter frame and are being kept, and are suitable for more large-area area illumination polarized light so become.
In addition, according to the invention of technical scheme 6 record, except above-mentioned effect, light filter can be mobile with the wire grid polarization element, so the action during mounting or dismounting becomes easy.
Description of drawings
Fig. 1 is that skeleton diagram is analysed and observe in the side of the polarized light illumination device that relates to of this case working of an invention mode.
Fig. 2 is the skeleton diagram of overlooking of light filter shown in Figure 1.
Fig. 3 is the figure of relation that schematically shows the polarization axis deviation in the size of light filter and polarizing light irradiation zone.
Fig. 4 is the experimental result studied has been carried out in expression with respect to the relative size of wire grid polarization element and the relation of polarization axis deviation to light filter figure.
Fig. 5 be in the expression result's shown in Figure 4 experiment in the place where of effective irradiation area to polarization axle towards the skeleton diagram of overlooking that has carried out measuring.
Fig. 6 is the expression qualitatively skeleton diagram of an example of explanation relevant with respect to the relative size of wire grid polarization element with light filter.
Fig. 7 is that the expression increase that polarization axis deviation is accompanied by separating distance when being constant to light filter with respect to the extension elongation of wire grid polarization element becomes the figure that big this point has carried out the experimental result confirmed.
Fig. 8 is the three-dimensional skeleton diagram of the major part of polarized light illumination device in the past.
Fig. 9 be expression polarizing light irradiation zone periphery polarization axis deviation problem overlook skeleton diagram.
Symbol description
11 lamps
12 catoptrons
20 heating radiators
30 pressure fans
60 lampshades
70 illumination loopholes
81 wire grid polarization elements
82 frameworks
83 guide rails
90 light filters
91 light filter main bodys
92 light filter frames
93 binding instruments
Embodiment
Then, mode that be used for to implement this case invention (below, embodiment) is described.
Fig. 1 is that skeleton diagram is analysed and observe in the side of the polarized light illumination device that relates to of this case working of an invention mode.Fig. 1 is the cut-open view on the conveyance direction of workpiece W.Polarized light illumination device shown in Figure 1 comprises: the light source of wire; And make wire grid polarization element from the light polarization of this light source.
The light of the wavelength that light source radiation bright dipping orientation needs.With situation shown in Figure 8 similarly, for irradiates light in the long pattern of the Width of workpiece W, use bar-shaped lamp 11 as light source.In the present embodiment, the light by the ultraviolet region carries out the light orientation, so use high-pressure mercury-vapor lamp or added the metal halide lamp etc. of other metals in mercury.The LED that arranges the light that needs wavelength of a plurality of radiation ultraviolet region obtains long irradiation pattern.In addition, bar-shaped lamp 11 is configured to the Width that its length direction becomes workpiece W.Workpiece W goes up by conveyance in the horizontal direction vertical with respect to the length direction of lamp 11 (the drawing left and right directions of Fig. 1), illuminated polarized light in the process of its conveyance.
With Fig. 8 similarly, to cover the mode of lamp 11, be provided with the catoptron 12 of chute shape.Catoptron 12 will be turned back and make it and be improved the utilization ratio of light thus towards workpiece W from the light of lamp 11.As the catoptron 12 of chute shape, in the present embodiment, use the section shape of reflecting surface to become parabolical catoptron (paraboloidal mirror).
Wire grid polarization element 81 disposes in the mode between lamp 11 and workpiece W.In the present embodiment, in order to tackle the maximization of workpiece W, adopt and arrange a plurality of wire grid polarization elements 81 and with the wire grid polarization element after its blocking.Each wire grid polarization element 81 is square tabular, arranges at the Width (the paper vertical direction of Fig. 1) of workpiece W, is kept by framework 82.In the adjacent place of the end face of each wire grid polarization element 81, in order to prevent the leak light (leakage of nonpolarized light) from the gap, be provided with not shown shadow shield.For the structure of the unit of this wire grid polarization element 81 (below, be called the polarizer unit), can be with reference to patent documentation 1 disclosed structure.
In addition, for the mounting or dismounting that make the polarizer unit are easy, adopt to make it the structure that moves along guide rail 83.Lower board unit at the shell that accommodates lamp 11 grades (below, be called lampshade) 60 is provided with illumination loophole 70.Edge along illumination loophole 70 is provided with pair of guide rails 83, and the polarizer unit becomes the structure that moves at this guide rail 83 when mounting or dismounting.
In addition, in order to eliminate the problem of the heat that is caused by the light from lamp 11, adopt the structure with cooling in the lampshade 60.As shown in Figure 1, catoptron 12 is pair of right and left.About catoptron 12 on top from, form the slit of ventilation usefulness at the upside of lamp 11.Above the slit, be provided with heating radiator 20, be provided with pressure fan 30 thereon.During pressure fan 30 work, as among Fig. 1 with shown in the dotted arrow like that, by heating radiator 20, wind flow is cooled off in the lampshade 60.
Cooling purpose is more than the limit for each parts in the lampshade 60 are cooled off or avoid the surperficial heating of lampshade 60 also except inhibition lamp 11 temperature own rise.In addition, except the purpose of the damage by 81 coolings of each wire grid polarization element being prevented heat, thereby purpose also is to prevent to be heated unusually because of this radiation heat by each wire grid polarization element 81 high temperature workpiece W that becomes.
The device of present embodiment comprises light filter 90 in the side of injecting of wiregrating polarizer 81.The configuration of light filter 90 is aforesaid one or two the above object.Light filter 90 is by light filter main body 91 and kept the light filter frame 92 of light filter main body 91 to constitute.
Light filter main body 91 is necessary minimum with the abundant transmission of polarization light wavelength that utilizes.In addition, when the purpose of selecting because of wavelength disposes light filter 90, use to have the light filter that makes the characteristic of suitably cutting off as the wavelength transmission of purpose and with other wavelength and even absorbing.
Fig. 2 is the skeleton diagram of overlooking of light filter shown in Figure 1.As shown in Figure 2, with wire grid polarization element 81 similarly, for light filter 90, also adopt to arrange and dispose the structure of a plurality of light filter main bodys 91.Each light filter main body 91 is square tabular, arranges at the Width of workpiece W.As shown in Figure 2, the inner edge of light filter frame 92 has the length of amount of the number of light filter main body 91, each light filter main body 91 of arranging is at grade kept.As shown in Figure 1, each limit of light filter frame 92 has the section shape of L word shape, and has step.Each light filter main body 91 is held dropping under the state of this step.In addition, in Fig. 2, used four light filter main bodys 91, but light filter main body 91 according to the size of workpiece W and suitably change be self-evident.For the wideer workpiece W of width, use the light filter main body 91 of more numbers, for the narrower workpiece W of width, reduce number.
As shown in Figure 1, each light filter main body 91 remains in light filter frame 92 with the attitude parallel with wire grid polarization element 81.In addition, light filter frame 92 links by the framework 82 of binding instrument 93 with wire grid polarization element 81.Therefore, light filter 90 can be mobile at guide rail 83 with the polarizer unit when the mounting or dismounting of polarizer unit.
In addition, between wiregrating polarizer 81 and light filter main body 91, the cooling air that pressure fan 30 causes flows.That is, by the configuration of light filter 90, avoided the cooling of wire grid polarization element 81 to be hindered.In addition, binding instrument 93 is not for covering the cooling wind structure of flowing between light filter main body 91 and wire grid polarization element 81.
This light filter 90 as shown in Figure 1, wideer than wire grid polarization element 81 width.If more precisely, when Width was observed, light filter 90 was bigger than wire grid polarization element 81.
In addition, the situation of " light filter is bigger than wire grid polarization element " is self-evidently to be, and is bigger than wire grid polarization element but the meaning refers to as the zone of light filter performance function.As shown in Figure 1, the end of light filter main body 91 covered by light filter frame 92, the part that is covered by light filter frame 92 in the light filter main body 91 is as light filter 90 performance functions.Therefore, in embodiment, the size of the part (effective coverage) that is covered by light filter frame 92 in the light filter main body 91 is not bigger than wire grid polarization element 81.Incidentally, this also is same for wire grid polarization element 81, and the meaning refers to compare with the zone of bringing into play function as the wire grid polarization element effectively, and the effective coverage of light filter 90 is bigger.The effective coverage of wire grid polarization element 81 is part in the wire grid polarization element 81, that do not covered by framework 82 or not shown shadow shield.
As mentioned above, make light filter 90 than the wide achievement in research of the problem of the obvious existence of the polarization axis deviation in the aforesaid photoirradiated surface having been carried out the inventor of research that is based on of wire grid polarization element 81 width.Below, use Fig. 3 to describe for this point.Fig. 3 is the figure that schematically shows the relation of the size of light filter 90 and polarization axis deviation.In addition, in photoirradiated surface, be set to effective irradiation area with the zone of certain above illuminated polarized light of illumination.The polarization axle deviation that becomes problem produces uniquely at effective irradiation area.
As previously mentioned, in the wiregrating polarizer, make to the polarized light transmission of the direction polarization vertical with the length direction of grid, make polarized light reflection and even absorption to the direction polarization parallel with the length direction of grid.This characteristic optimally obtains when light is vertically injected the wire grid polarization element, even but light inject sideling, for extinction ratio also not influence itself.Yet when light was injected sideling, the polarization axle of polarized light changed, and when this influence became big, becoming became the polarization axle of problem deviation and manifest.
As shown in Figure 3, the Width (direction vertical with the length direction of lamp 11) in effective irradiation area is considered in trial.At the each point of effective irradiation area, have from the light of the lamp 11 direct light that arrive and arrival behind catoptron 12.When catoptron 12 was the chute shape paraboloidal mirror, the mode that common center with lamp 11 becomes the focal position was come configured light 11.In the case, send from the center of lamp 11 and become along the directional light of optical axis a at the light that catoptron 12 has carried out reflection, and vertically inject photoirradiated surface.The track of the light that sends from the center of lamp 11 is represented with solid line Fig. 3.
In fact, lamp 11 has the illuminating part of limited size, and the light that sends from excentral place does not become directional light.Suppose in the pipe of lamp 11 whole during for illuminating part, as among Fig. 3 with shown in the single-point line like that, light arrive photoirradiated surface a bit.In addition, as among Fig. 3 like that, also to have in catoptron 12 reflection of opposition side shown in the double dot dash line and to arrive any light.
As can easily understanding from Fig. 3, at the central portion of effective irradiation area, the incident angle of each light does not have bigger difference.But, as shown in Figure 3, at the effective some E of the end of irradiation area, the light of injecting after catoptron 12 reflection of side's side with from the direct light of lamp 11 and catoptron 12 reflections at opposition side after between the light injected, the difference of incident angle becomes greatly.Therefore, do not become the polarization axle of problem deviation even produce at the effective central portion of irradiation area, in the some E of end, produce the deviation that becomes problem sometimes yet.
At this, importantly, inject the existence of light in the light of an E, that inject from the outside.The light that this only occurs because above-mentioned lamp 11 has limited illuminating part in this embodiment, is from the bottom radiation of lamp 11 and the light that has carried out reflection at the catoptron 12 of the some E of end side.The light of injecting sideling from this outside (below, be called outside oblique fire light inlet, in Fig. 3, represent with Lo) at the point of polarization axis deviation, the effect that has the direct light that in fact makes from lamp 11, weakens in the influence of the light of injecting after catoptron 12 reflections of opposition side (below, be called central sidelight).That is, the polarization axle of the polarized light of measuring at an E place overlaps with the polarization axle of each polarized light of injecting, and overlapping reason is set up.Outside oblique fire light inlet Lo works to weaken center side polarisation of light axle, and the central portion that the zone is penetrated in polarization axle and the illumination of the polarized light that is observed total amount at an E compares significantly that the situation of different (deviations) suppresses.
At this, when covering outside oblique fire light inlet Lo by some member, the effect that the influence of central sidelight is weakened becomes and does not have, so polarization axis deviation obviously exists.In the structure of embodiment, light filter frame 92 is suitable therewith.When wiregrating polarizer 81 inject side configuration light filter 90 time, as among Fig. 3 with shown in the dotted line like that, employing and wire grid polarization element 81 be during with the light filter 90 of the width of degree, light filter 90 has light filter frame 92, so become the state that this light filter frame 92 covers outside oblique fire light inlet Lo.
The inventor of this case makes light filter 90 be and the width of wire grid polarization element 81 with degree at first, but has confirmed that aforesaid polarization axis deviation obviously exists.The inventor has carefully investigated this reason, obtains aforesaid opinion, has found to make light filter 90 than wide this solution of wire grid polarization element 81 width.
Then, to make light filter 90 than wire grid polarization element 81 big what kind of degree for describing well.Fig. 4 is the experimental result studied has been carried out in expression with respect to the relative size of wire grid polarization element 81 and the relation of polarization axis deviation to light filter 90 figure.
In this experiment, prepare the different light filter 90 of width, and how each light filter 90 research polarization axis deviation is become.Fig. 5 be illustrated in the experiment that Fig. 4 represents the result in which place of effective irradiation area to polarization axle towards the skeleton diagram of overlooking that has carried out measuring.
As shown in Figure 5, at first, A measures polarization axle at the effective central point of irradiation area (center of lamp 11 under position), and with its as the polarization axle that becomes benchmark towards.Then, effective 1 B at the angle of irradiation area measure polarization axle towards, and the angle that will become with respect to the polarization axle at A point place is as polarization axis deviation.In addition, be the point that has departed from effective irradiation area a little, measure some C place shown in Figure 5 polarization axle towards, similarly will with respect to a polarization axle at A place towards the angle that becomes as polarization axis deviation.
If size is carried out illustration, when the length of establishing lamp 11 was the 3000mm left and right sides, effectively irradiation area was about 2500 * 80mm.Point C becomes from a B and has left for example place about 150mm.In this embodiment, the width of the effective coverage of wire grid polarization element is 90mm.In addition, need be to the total length irradiation polarized light of the width of workpiece W the time, as among Fig. 5 with shown in the dotted line like that, effectively the length of irradiation area is being set greatlyyer slightly than the width of workpiece W.When Width is got the edge and workpiece W carried out the light orientation process, be set to effective irradiation area than the zone of the amount of the width narrow edge of workpiece W.
Shown in Figure 4 like that, when the width of light filter is 80mm (than the situation of the narrow 10mm of wire grid polarization element), observe the skew of the polarization axle about 0.24 degree at a B, observe skew about 1.0 degree at a C.In addition, the width of light filter and wire grid polarization element are all under the situation of 90mm, and the skew of the polarization axle about B point observation to 0.15 degree observes skew about 0.6 degree at a C.The width of light filter is than wire grid polarization element slightly greatly under the situation of 95mm, and the skew of the polarization axle about B point observation to 0.11 degree observes skew about 0.49 degree at a C.Further increase the width of light filter, make it to be 100mm, 110mm, but the skew of polarization axle is about 0.11 degree and at a C to be about 0.48 degree at a B, significantly changes.In addition, the measurement under the state that does not dispose light filter is carried out similarly, and the right-hand member of its result in Fig. 4 illustrates in the lump.Being skew about 0.11 degree at a B, is skew about 0.48 degree at a C, with the width that makes light filter be that situation more than the 95mm is same degree.
According to this result shown in Figure 4, if making the width of light filter is more than the 95mm, the polarization axle deviation that then becomes problem can not produce.As shown in Figure 1, light filter 90 and wire grid polarization element 81 disposing abreast with (center is the mode on the same normal) in the heart, and is that unidirectional mode disposes with Width each other.Therefore, whole above 5mm, get final product so the big 2.5mm of each side is above.
More than be based on the quantitative explanation of experimental data, but also can have considered the explanation qualitatively of the effect of outside oblique fire light inlet.Carry out this explanation with reference to Fig. 6.Fig. 6 is the skeleton diagram that a qualitatively example of explanation relevant with respect to the relative size of wire grid polarization element with light filter 90 represented.
Foregoing, the skew of the polarization axle at place, end is covered by outside oblique fire light inlet Lo.It is being included under the situation of consideration, obviously exist for fear of polarization axis deviation, avoid covering the light (outside oblique fire light inlet of injecting sideling from outermost at the effective end points E of the Width of irradiation area of incident angle maximum, hereinafter referred to as outermost oblique fire light inlet, with Lo ' expression) be critical condition.If do not cover this light, the outside oblique fire light inlet that then incident angle is littler can not cover yet, and at the point of the inboard of end points E, outside oblique fire light inlet can crested yet.
The effective coverage of wire grid polarization element is made as the size of the outermost oblique fire light inlet Lo ' transmission of injecting end points E.Usually, observe nargin, the effective coverage is set as big slightly, but in order to consider critical condition, at this, be made as shown in Figure 6, outermost oblique fire light inlet Lo ' at the end points P of the effective coverage of wiregrating polarizer 81 by considering.In addition, when critically showing outermost oblique fire light inlet Lo ', for from the each point of illuminating part, when catoptron 12 is seen illuminating part, be positioned at the light that the point of wire grid polarization element 81 sides sends from the end points E of effective irradiation area.
If the incident angle of outermost oblique fire light inlet Lo ' is θ.Light filter 90, wire grid polarization element 81 and photoirradiated surface are all parallel, so incident angle θ equates at each face.In addition, the refraction ignored in light filter main body 91 and the wire grid polarization element 81 of Fig. 6 is described.In addition, the separation spacing of establishing light filter 90 and wire grid polarization element 81 is d.Separation spacing d is the distance between the face that the effective coverage is stipulated, is the interval of each exit facet in this embodiment.In the case, if as shown in Figure 6, establish from light filter 90 to be S 〉=d.cot(pi/2-θ)=d.tan θ from the extension elongation S of wire grid polarization element 81, then not cover outermost oblique fire light inlet Lo ' and just can inject wire grid polarization element 81.During as light filter 90 whole observations, increase in advance that 2d.tan θ is above to get final product.
Separation spacing d stipulates by the relation of leading (コ Application ダ Network タ Application ス) with the required electricity of cooling air when cooling off.In the practicality, need more than the 5mm, the situation about 20～30mm is more.Incident angle θ decides according to the width of effective irradiation area of the curvature of the size of the illuminating part of lamp 11, catoptron 12, setting.For example establish θ and be 5 degree and establish d when being 25mm, 2d.tan θ reaches about 4.4mm, becomes the value close with above-mentioned experimental result 5mm.Like this, as if making light filter 90 increase more than the 5mm with respect to the wire grid polarization element or increasing more than the 2d.tan θ, the obvious existence that then becomes the polarization axle deviation of problem is avoided.
As mentioned above, under the constant situation of extension elongation S, when increasing separating distance d, it is big that polarization axis deviation becomes.Fig. 7 is the experimental result of affirmation has been carried out in expression to this point figure.The experiment of result shown in Fig. 7 is in the measurement point measurement polarization axis deviation same with Fig. 4.At this moment, according to the condition of Fig. 4, the limit approaches light filter or measures away from the wire grid polarization component outline.What among Fig. 7, have " 10mm " is data during near 10mm, and what have " 20mm " is data during near 20mm, and what have "+10mm " is data during away from 10mm.
As shown in Figure 7, king-sized variation do not occur at a B place, and at a C place, by increasing separating distance d, polarization axis deviation becomes big situation and confirmed.And by increasing separating distance d, the situation that polarization axis deviation obviously exists the value (critical point) of the extension elongation S that causes to rise is confirmed.
Like this; device according to present embodiment; the obvious existence of the deviation of polarized light is suppressed, so thereby use light filter 90 can carry out wavelength and select maybe can protect wiregrating polarizer 81, and can carry out the less polarizing light irradiation of polarization axis deviation.Therefore, can help to carry out the higher light orientation process of homogeneity.
In addition, light filter 9 be arrange a plurality of light filter main bodys 91 and the structure this point that keeps by light filter frame 92 corresponding to the maximization of workpiece W, for being effective to bigger area illumination polarized light.But the light filter main body only is one, even only keep the structure of a light filter main body by the light filter frame, this case invention also can be implemented.
In addition, light filter is for the function of purpose, can be in aforementioned any, and beyond also can be aforementioned be self-evident.
In addition, light filter frame 92 links with the framework 82 of wire grid polarization element 81 and light filter 9 can have operation such as maintenance of the making easy effect that becomes with wire grid polarization element 81 mobile this point.When maintenance, need open in the lampshade 60 in order to carry out for example inspection of lamp 11.In the case, wire grid polarization element 81, light filter 9 need be unloaded from lampshade 60, but in the present embodiment, take out together by pulling out along guide rail 83, can move to install again along guide rail 83 by making it in addition.Therefore, operation is easy.
Claims (6)
1. a polarized light illumination device is characterized in that, comprising:
The light source of wire;
The wire grid polarization element makes from the light polarization of light source and shines; And
Catoptron is chute shape, and this catoptron is covering light source with the opposition side that is provided with wire grid polarization element one side,
On the light path between light source and the wire grid polarization element, be provided with light filter,
Be Width when observing in and the direction parallel with respect to photoirradiated surface vertical with respect to the length direction of light source, light filter is bigger than wire grid polarization element.
2. polarized light illumination device as claimed in claim 1 is characterized in that,
Shape described catoptron, the reflecting surface on the section vertical with the length direction of described light source is para-curve, and described light filter is parallel and arrange with respect to described wire grid polarization element,
The length that stretch out from described wire grid polarization element the end of the Width of described light filter is more than the 2.5mm.
3. polarized light illumination device as claimed in claim 1 is characterized in that,
Shape described catoptron, the reflecting surface on the section vertical with the length direction of described light source is para-curve, and described light filter is parallel and arrange with respect to described wire grid polarization element,
The length of stretching out from described wire grid polarization element in the end of establishing described light filter is S, if the incident angle of the light of injecting with respect to the end points of the effective coverage of described wire grid polarization element, from outermost is θ, and the separation spacing of establishing described light filter and described wire grid polarization element is when being d, and the relation of S 〉=dtan θ is set up.
4. polarized light illumination device as claimed in claim 1 is characterized in that,
Described light source, described wire grid polarization element and described catoptron are contained in lampshade,
In lampshade, be formed with by ventilating the ventilation road of cooling off in the lampshade,
Described light filter is parallel and arrange with respect to described wire grid polarization element,
Space between described light filter and the described wire grid polarization element also becomes the ventilation road, and the separation spacing of the plane of incidence of the exit facet of described light filter and described wire grid polarization element is more than the 5mm.
5. polarized light illumination device as claimed in claim 1 is characterized in that,
Described light filter is by the light filter main body and kept the light filter frame of light filter main body to constitute, and a plurality of light filter main bodys are set, and the light filter frame has kept being arranged in a plurality of light filter main bodys on the same plane.
6. polarized light illumination device as claimed in claim 1 is characterized in that,
Described wire grid polarization element is kept by framework, and described light filter links with this framework and can be mobile with described wire grid polarization element.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2012097957A JP5163825B1 (en) | 2012-04-23 | 2012-04-23 | Polarized light irradiation device |
| JP2012-097957 | 2012-04-23 |
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| CN103235448A true CN103235448A (en) | 2013-08-07 |
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| JP (1) | JP5163825B1 (en) |
| KR (1) | KR101276445B1 (en) |
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| CN105093699A (en) * | 2015-09-02 | 2015-11-25 | 武汉华星光电技术有限公司 | Optical alignment device |
| CN112654910A (en) * | 2018-09-11 | 2021-04-13 | 昕诺飞控股有限公司 | Luminaire with collimating reflector and method of assembly |
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| US8468772B2 (en) | 2003-08-11 | 2013-06-25 | Interface, Inc. | Carpet tiles and carpet tile installations |
| ES2512742T3 (en) | 2007-03-27 | 2014-10-24 | Interface, Inc. | System and method for installing floor coverings |
| JP5867439B2 (en) * | 2013-03-29 | 2016-02-24 | ウシオ電機株式会社 | Grid polarizing element and optical alignment apparatus |
| KR101372932B1 (en) * | 2013-04-30 | 2014-03-12 | 한국생산기술연구원 | PHOTO-ALIGNMENT APPARATUS USING PULSE ?c? |
| JP5867460B2 (en) * | 2013-07-09 | 2016-02-24 | ウシオ電機株式会社 | Grid polarizing element, optical alignment apparatus, polarization method, and grid polarizing element manufacturing method |
| JP6201707B2 (en) * | 2013-12-11 | 2017-09-27 | 東芝ライテック株式会社 | UV irradiation equipment |
| KR102008255B1 (en) * | 2013-12-23 | 2019-08-07 | 한국생산기술연구원 | Photo-alignment apparatus using pulse uv |
| JP5979179B2 (en) * | 2014-06-11 | 2016-08-24 | ウシオ電機株式会社 | Polarized light irradiation device |
| JP5967150B2 (en) * | 2014-07-18 | 2016-08-10 | ウシオ電機株式会社 | Polarized light irradiation device |
| JP6358012B2 (en) * | 2014-09-24 | 2018-07-18 | 岩崎電気株式会社 | Light irradiation device |
| JP6534567B2 (en) * | 2015-06-30 | 2019-06-26 | アイグラフィックス株式会社 | Light irradiation device |
| JP2017032869A (en) * | 2015-08-04 | 2017-02-09 | 岩崎電気株式会社 | Optical unit and light irradiation device |
| JP6610931B2 (en) * | 2015-09-18 | 2019-11-27 | 東芝ライテック株式会社 | Polarized light irradiation device |
| JP2018156113A (en) * | 2018-06-18 | 2018-10-04 | 岩崎電気株式会社 | Light irradiation device |
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| JP5163825B1 (en) | 2013-03-13 |
| CN103235448B (en) | 2014-10-22 |
| JP2013225069A (en) | 2013-10-31 |
| TW201335641A (en) | 2013-09-01 |
| KR101276445B1 (en) | 2013-06-19 |
| TWI431344B (en) | 2014-03-21 |
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