CN103205719A - Gas channel module and gas distributing device applying same - Google Patents
Gas channel module and gas distributing device applying same Download PDFInfo
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- CN103205719A CN103205719A CN2012100132321A CN201210013232A CN103205719A CN 103205719 A CN103205719 A CN 103205719A CN 2012100132321 A CN2012100132321 A CN 2012100132321A CN 201210013232 A CN201210013232 A CN 201210013232A CN 103205719 A CN103205719 A CN 103205719A
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- gas
- elongated slot
- auxilliary
- gas passage
- inlet port
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- 238000004519 manufacturing process Methods 0.000 claims description 21
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000007787 solid Substances 0.000 abstract 5
- 239000007789 gas Substances 0.000 description 77
- 239000011521 glass Substances 0.000 description 29
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000007789 sealing Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
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- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 239000005344 low-emissivity glass Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001200 Ferrotitanium Inorganic materials 0.000 description 1
- 240000005979 Hordeum vulgare Species 0.000 description 1
- 235000007340 Hordeum vulgare Nutrition 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- PWKWDCOTNGQLID-UHFFFAOYSA-N [N].[Ar] Chemical compound [N].[Ar] PWKWDCOTNGQLID-UHFFFAOYSA-N 0.000 description 1
- VVTSZOCINPYFDP-UHFFFAOYSA-N [O].[Ar] Chemical compound [O].[Ar] VVTSZOCINPYFDP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- GRPQBOKWXNIQMF-UHFFFAOYSA-N indium(3+) oxygen(2-) tin(4+) Chemical class [Sn+4].[O-2].[In+3] GRPQBOKWXNIQMF-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
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- Valve Housings (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The invention discloses a gas channel module. The whole body of the gas channel module is a rectangular solid, wherein the rectangular solid is provided with a first end surface and a second end surface in a horizontal direction, the first end surface is provided with a first long groove, and the second end surface is provided with a second long groove; the top surface of the rectangular solid is provided with a main air inlet and a plurality of auxiliary air inlets, the main body of the rectangular solid is provided with a first internal channel and a second internal channel corresponding to the main air inlet and the auxiliary air inlets, and the bottom surface of the rectangular solid is provided with a plurality of main air outlets and a plurality of auxiliary air outlets; and the main air inlet is communicated with the first long groove through the first internal channel, and the auxiliary air inlets are communicated with the second long groove through the second internal channel. The gas channel module and the gas distributing device applying the gas channel module are convenient for operation, have a good gas distributing effect and effectively prevent the problem of uniform gas distribution in different well sites.
Description
Technical field
The present invention relates to a kind of gas passage module, particularly a kind of gas distributing device that is applied to the gas passage module of glass evacuated sputtering coating equipment and uses it.
Background technology
Along with the raising of expanding economy and people's living standard, society has higher requirement to the industry-by-industry of industry, and wherein for the silicate industry, the plated film standard of glass is also more and more higher thereupon.Coated glass is pressed the different qualities of product, can be divided into following a few class: heat-reflecting glass, low emissivity glass, electropane etc.Heat-reflecting glass generally is to plate the film that one or more layers is formed such as metal such as chromium, titanium or stainless steel or its compound at glass surface, make product be abundant colors, for visible light suitable transmissivity is arranged, infrared rays there is higher reflectivity, ultraviolet ray there is the higher absorption rate, therefore, be also referred to as sunlight control glass, be mainly used in building and glass curtain wall; Low emissivity glass is the film of being made up of metal such as silver, copper or tin or its compound in glass surface plating, product has high transmittance to visible light, infrared rays there is very high reflectivity, has good thermal and insulating performance, be mainly used in building and the vehicles such as automobile, boats and ships, because film strength is relatively poor, generally all makes double glazing and use; Electropane is at conductive films such as glass surface coating tin indium oxides, can be used for heating, defrosting, the demist of glass and is used as liquid crystal display etc.
The production method of coated glass is a lot, mainly contains ion sputtering method, vacuum vapor deposition method, chemical Vapor deposition process and sol-gel method etc.Sputter-coated glasses utilizes sputtering technology can manufacture and design the complicated film of multilayer system, can plate out multiple color at the glass substrate of white, and the corrosion-resistant and wear resisting property of rete is better, is to produce and use one of maximum product at present.The kind of vacuum evaporation coating film glass is compared with sputter-coated glasses with quality and is all had certain gap, is progressively replaced by sputtering method.Chemical Vapor deposition process is to feed reactant gases at floatation glass production line to decompose at scorching hot glass surface, is deposited on glass surface equably and forms coated glass.The characteristics of this method are equipment less investment, easy-regulating, and product cost is low, chemical stability good, can carry out hot-work, are one of at present the most rising production methods.Sol-gel method production coated glass technology is simple, stability, and weak point is that the product optical transmittance is too high, and is ornamental relatively poor.
For the ion sputtering method, normally under the effect of high pressure 1500V, residual gas molecule is ionized, and forms plasma body, and positively charged ion bombards metallic target under electric field accelerates, and makes atoms metal be splashed to the surface of sample, forms conducting film.At present, in the vacuum vessel, a kind of coated glass normally is made of a series of different film materials, and whole coating process one-time continuous in filming equipment is finished.So just require to dispose different target materials on the glass coating equipment, different target materials are arranged in the different well locations, and the sputtering atmosphere between each well location is not quite similar, or sputter under straight argon atmosphere, or sputter under the argon oxygen atmosphere, or sputter under the argon nitrogen atmosphere.For the consideration of coating quality, the gas between each well location is should concentration even.Traditional glass coating equipment is that technology gas circuit distribution device is installed in the plated film inside cavity, normally in the bottom of cathode baffle, because the complicacy of gas flowfield and the compressibility of gas itself, this design causes process gas to conceal in the space of glass both sides easily, in sputter procedure, because the gas concentration of glass edge portion is bigger, make coating effects and the intermediate formation larger difference of glass edge portion; Simultaneously, because technology gas circuit distribution device is to be fixed on inside cavity, both be unfavorable for the repair and maintenance of process gas road device, also reduced interchangeableness and the handiness of apparatus and process configuration.
Those skilled in the art are devoted to provide a kind of equipment that can effectively realize the sputter gas uniformly distributing.
Summary of the invention
The technical problem to be solved in the present invention is in order to overcome the technical problem of the gas maldistribution in the existing glass coating equipment, a kind of gas passage module is provided and is applied to its gas distributing device, with gas uniformly distributing among each well location of effective realization.
The present invention solves above-mentioned technical problem by following technical proposals:
A kind of gas passage module, its characteristics are that described gas passage module totally is a rectangular parallelepiped, wherein,
Have first end face and second end face on the described rectangular parallelepiped horizontal direction, first end face is provided with first elongated slot, and second end face is provided with second elongated slot;
Described rectangular parallelepiped end face is provided with a primary inlet port and a plurality of auxilliary air inlet port, and the corresponding primary inlet port of rectangular parallelepiped main body and auxilliary air inlet port are provided with first internal passages and second internal passages, and described rectangular parallelepiped bottom surface is provided with a plurality of main production wells and a plurality of auxilliary production well; Described primary inlet port communicates with first elongated slot by first internal passages, and described auxilliary air inlet port communicates with second elongated slot by second internal passages.
Preferably, described first elongated slot communicates by main production well with the gas passage module bottom, described second elongated slot is isolated into a plurality of independently auxilliary gas elongated slots, and described a plurality of auxilliary gas elongated slots are arranged in order, and each auxilliary gas elongated slot communicates by auxilliary production well with the gas passage module bottom.
Preferably, on second end face of described gas passage module the 3rd elongated slot is set also, described the 3rd elongated slot communicates by the auxilliary air inlet port of one the 3rd internal passages and part, and described the 3rd elongated slot communicates with the auxilliary gas elongated slot of the part in second elongated slot by an auxiliary tank.
Preferably, described rectangular parallelepiped top is provided with the top air drain, and the auxilliary air inlet port of part is connected with the top air drain.
Preferably, described device comprises a gas passage module, top board, first side plate, second side plate, U-shaped cover plate, described gas passage module adopts as claim 3 or 4 described gas passage modules, wherein, described top board sealed gas passageway module end face, described first side plate seals first elongated slot, and described second side plate seals second elongated slot and/or the 3rd elongated slot.
Preferably, described top board comprises gas injection joint, described gas injection joint and the corresponding setting of described primary inlet port and auxilliary air inlet port.
Preferably, described U-shaped cover plate is installed in the bottom of gas passage module, forms mixed air cavity with the gas passage module bottom.
Preferably, described mixed air cavity inside is provided with shrouding, will mix air cavity and be divided into independently several sections.
Preferably, described U-shaped cover plate is provided with gas orifice.
Preferably, the other flow deflector that also is provided with of described gas orifice.
Among the present invention, but above-mentioned optimum condition arbitrary combination on the basis that meets this area general knowledge namely gets each preferred embodiment of the present invention.
Positive progressive effect of the present invention is: this gas passage module and to use its gas distributing device easy to operate, the gas distribution effects is good, has effectively avoided the gas distribution problem of non-uniform among the different well locations.
Description of drawings
Fig. 1 is the front view of gas passage module in one embodiment of the present of invention.
Fig. 2 is the X part enlarged view of gas passage module shown in Figure 1.
Fig. 3 is the A-A view of gas passage module shown in Figure 1.
Fig. 4 is the B-B view of gas passage module shown in Figure 1.
Fig. 5 is the C-C view of gas passage module shown in Figure 1.
Fig. 6 is the D-D view of gas passage module shown in Figure 1.
Fig. 7 is the E-E view of gas passage module shown in Figure 1.
Fig. 8 is the vertical view of gas passage module shown in Figure 1.
Fig. 9 is the Y part enlarged view of gas passage module shown in Figure 8.
Figure 10 is the rear view of gas passage module shown in Figure 1.
Figure 11 is the Z part enlarged view of gas passage module shown in Figure 10.
Figure 12 is the H-H view of gas passage module shown in Figure 11.
Figure 13 is the assembling synoptic diagram of gas distributing device in one embodiment of the present of invention.
Figure 14 is the P part enlarged view of gas passage module shown in Figure 13.
Embodiment
Embodiments of the invention describe with reference to the accompanying drawings.In Figure of description, element or device with similar structures or function will be used the components identical symbolic representation.Accompanying drawing is each embodiment of the present invention for convenience of explanation just, is not to carry out the explanation of exhaustive to the present invention, neither limit scope of the present invention.
Fig. 1 to Figure 12 shows the structural representation of the gas passage module of a preferred embodiment among the present invention.In this embodiment, gas passage module 100 overall approximate long and narrow rectangular parallelepiped valve islands, this rectangular parallelepiped valve island end face is provided with 6 air inlet ports, comprises 1 primary inlet port 18 and 5 auxilliary air inlet ports 12.Deflection valve island, primary inlet port 18 positions aft end face, comparatively speaking, auxilliary air inlet port 12 positions arrange deflection valve island front end face.
Valve island aft end face is provided with main air inlet elongated slot 28, and the length of this main air inlet elongated slot 28 is slightly less than the channel module total length.In one embodiment, main air inlet elongated slot 28 is being located natural termination near end, valve island; In another embodiment, main air inlet elongated slot 28 runs through whole valve island, and this moment, two ends, valve island sealed elongated slot with end cap and sealing ply, can access sealing to guarantee main air inlet elongated slot 28.
Valve island front end face is provided with auxilliary air inlet elongated slot 22, and in the present embodiment, auxilliary air inlet elongated slot 22 is divided into five sections, and the corresponding auxilliary air inlet elongated slot 22 in bottom surface, valve island is provided with a plurality of auxilliary production wells 30, and auxilliary air inlet elongated slot 22 communicates with the bottom surface by auxilliary production well 30.
Because the limitation of size of gas injection joint, the distance between a plurality of auxilliary air inlet ports 12 is shorter, and auxilliary air inlet elongated slot 22 length are substantially in occupation of the channel module total length, so the same way as between auxilliary air inlet port 12 and the auxilliary air inlet elongated slot 22 has three kinds:
Under the normal circumstances, auxilliary air inlet port 12 communicates (as shown in Figure 3) with auxilliary air inlet elongated slot 22 by the first auxilliary internal passages 228.
For auxilliary air inlet elongated slot 22 far away slightly, auxilliary air inlet port 12 extends to valve island end direction by the top air drain 14 that is arranged on valve island end face, after reaching corresponding auxilliary air inlet elongated slot 22 tops, by the second auxilliary internal passages 226 communicate with auxilliary air inlet elongated slot 22 (as Fig. 2 and shown in Figure 7).
For auxilliary air inlet elongated slot 22 farthest, auxiliary air drain 24 is set above this auxilliary air inlet elongated slot 22, should auxiliary air drain 24 length extend to corresponding below of assisting air inlet port 12 from the auxilliary air inlet elongated slot 22 of correspondence, auxiliary air drain 24 communicates by auxiliary passage 224 with auxilliary air inlet port 12, and auxiliary air drain 24 connects by being connected air drain 222 with auxilliary air inlet elongated slot 22.Consider the characteristic of fluid resistance, connect between air drain 222 and the auxiliary air drain 24 that the junction that connects between air drain 222 and the auxilliary air inlet elongated slot 22 should be made into cambered surface as far as possible, to avoid bigger fluid pressure loss.
Like this, auxilliary air inlet port 12 is communicated by the auxilliary air inlet elongated slot 22 of three kinds of modes and all, thereby auxilliary air inlet port 12 forms passage with auxilliary production well 30, and it is airtight that this passage is located beyond auxiliary air drain 24, auxiliary passage 224 and auxilliary air inlet elongated slot 22.
Figure 13 and Figure 14 illustrate the assembling synoptic diagram of gas distributing device in one embodiment of the present of invention.Gas passage module 100 is placed on top board 200 belows, and top board 200 is provided with a plurality of gas injection joints (scheming not shown).These gas injection joints join with primary inlet port 18 and auxilliary air inlet port 12, and top board 200 guarantees that simultaneously by the end face sealing of sealing material with gas passage module 100 sputter gas does not enter the gas passage module with having leakage.In a preferred embodiment, primary inlet port 18 and auxilliary air inlet port 12 arrange " o " RunddichtringO, to guarantee sealing effectiveness.
With the front end face sealing of front side board 42 with gas passage module 100, auxiliary air drain 24, auxiliary passage 224 and auxilliary air inlet elongated slot 22 are hedged off from the outer world, with the aft end face sealing of back side panel 43 with gas passage module 100, main air inlet elongated slot 28 is hedged off from the outer world.In a preferred embodiment, the sealing material between side plate and the end face 422 adopts highland barley paper.
U-shaped cover plate 44 is used for the bottom surface of confining gas channel module 100.As shown in figure 14, U-shaped cover plate 44 forms mixed air cavity 442 with the bottom surface of gas passage module 100, like this, the gas that comes out from main production well 32 and the auxilliary production well 30 of gas passage module 100 converges in and mixes the air cavity 442, and the gas orifice 46 by U-shaped cover plate 44 enters the glass coating well location.
In a preferred embodiment, the outlet of gas orifice 46 is other to be provided with flow deflector 45, and flow deflector 45 can be fixed on the U-shaped cover plate 44 by screw 452, also can adopt bonding or welding waits other fixed forms.In a further advantageous embodiment, mix air cavity 442 inside and be provided with little shrouding (scheming not shown), little shrouding can be divided into independently several sections with mixing air cavity.
In use, primary inlet port remains air inlet, and auxilliary air inlet port then can be controlled its whether size of air inlet or air input by valve.Like this, just can make the gaseous tension unanimity of mixing air cavity, thereby guarantee that the gas that whole gas distributing device sprays is uniform in whole length range.
Though more than described the specific embodiment of the present invention, it will be understood by those of skill in the art that these only illustrate, protection scope of the present invention is limited by appended claims.Those skilled in the art can make numerous variations or modification to these embodiments under the prerequisite that does not deviate from principle of the present invention and essence, but these changes and modification all fall into protection scope of the present invention.
Claims (10)
1. a gas passage module is characterized in that, described gas passage module totally is a rectangular parallelepiped, wherein,
Have first end face and second end face on the described rectangular parallelepiped horizontal direction, first end face is provided with first elongated slot, and second end face is provided with second elongated slot;
Described rectangular parallelepiped end face is provided with a primary inlet port and a plurality of auxilliary air inlet port, and the corresponding primary inlet port of rectangular parallelepiped main body and auxilliary air inlet port are provided with first internal passages and second internal passages, and described rectangular parallelepiped bottom surface is provided with a plurality of main production wells and a plurality of auxilliary production well;
Described primary inlet port communicates with first elongated slot by first internal passages, and described auxilliary air inlet port communicates with second elongated slot by second internal passages.
2. gas passage module as claimed in claim 1, it is characterized in that, described first elongated slot communicates by main production well with the gas passage module bottom, described second elongated slot is isolated into a plurality of independently auxilliary gas elongated slots, described a plurality of auxilliary gas elongated slot is arranged in order, and each auxilliary gas elongated slot communicates by auxilliary production well with the gas passage module bottom.
3. gas passage module as claimed in claim 2, it is characterized in that, on second end face of described gas passage module the 3rd elongated slot is set also, described the 3rd elongated slot communicates by the auxilliary air inlet port of one the 3rd internal passages and part, and described the 3rd elongated slot communicates with the auxilliary gas elongated slot of the part in second elongated slot by an auxiliary tank.
4. as claim 1,2 or 3 described gas passage modules, it is characterized in that described rectangular parallelepiped top is provided with the top air drain, the auxilliary air inlet port of part is connected with the top air drain.
5. a gas distributing device is characterized in that, described device comprises a gas passage module, top board, first side plate, second side plate, U-shaped cover plate, and described gas passage module adopts as claim 3 or 4 described gas passage modules, wherein,
Described top board sealed gas passageway module end face, described first side plate seals first elongated slot, and described second side plate seals second elongated slot and/or the 3rd elongated slot.
6. gas distributing device as claimed in claim 5 is characterized in that, described top board comprises gas injection joint, described gas injection joint and the corresponding setting of described primary inlet port and auxilliary air inlet port.
7. gas distributing device as claimed in claim 5 is characterized in that, described U-shaped cover plate is installed in the bottom of gas passage module, forms mixed air cavity with the gas passage module bottom.
8. gas distributing device as claimed in claim 6 is characterized in that, described mixed air cavity inside is provided with shrouding, will mix air cavity and be divided into independently several sections.
9. as claim 6,7 or 8 described gas distributing devices, it is characterized in that described U-shaped cover plate is provided with gas orifice.
10. gas distributing device as claimed in claim 9 is characterized in that, the other flow deflector that also is provided with of described gas orifice.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210013232.1A CN103205719B (en) | 2012-01-17 | 2012-01-17 | Gas passage module and apply its gas distributing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210013232.1A CN103205719B (en) | 2012-01-17 | 2012-01-17 | Gas passage module and apply its gas distributing device |
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| Publication Number | Publication Date |
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| CN103205719A true CN103205719A (en) | 2013-07-17 |
| CN103205719B CN103205719B (en) | 2015-09-09 |
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| CN201210013232.1A Active CN103205719B (en) | 2012-01-17 | 2012-01-17 | Gas passage module and apply its gas distributing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103396008A (en) * | 2013-08-02 | 2013-11-20 | 蚌埠雷诺真空技术有限公司 | Uniform air inlet apparatus of magnetron sputtering vacuum chambers |
| CN104034699A (en) * | 2014-06-19 | 2014-09-10 | 同济大学 | Device for automatically detecting transmissivity of collected sample |
| CN109306303A (en) * | 2017-07-28 | 2019-02-05 | 宁波乐惠国际工程装备股份有限公司 | A kind of gas distribution block, pneumatic arranges poor device and lautertuns at pneumatic system |
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| DE4120176C1 (en) * | 1991-06-19 | 1992-02-27 | Schott Glaswerke, 6500 Mainz, De | |
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| US4425218A (en) * | 1982-03-30 | 1984-01-10 | Shatterproof Glass Corporation | Gas distribution system for sputtering cathodes |
| DE4120176C1 (en) * | 1991-06-19 | 1992-02-27 | Schott Glaswerke, 6500 Mainz, De | |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104034699A (en) * | 2014-06-19 | 2014-09-10 | 同济大学 | Device for automatically detecting transmissivity of collected sample |
| CN109306303A (en) * | 2017-07-28 | 2019-02-05 | 宁波乐惠国际工程装备股份有限公司 | A kind of gas distribution block, pneumatic arranges poor device and lautertuns at pneumatic system |
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| Publication number | Publication date |
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| CN103205719B (en) | 2015-09-09 |
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