CN103172185B - Ultrapure water preparation device with outlet water quality regulating mechanism - Google Patents
Ultrapure water preparation device with outlet water quality regulating mechanism Download PDFInfo
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- CN103172185B CN103172185B CN201310112637.5A CN201310112637A CN103172185B CN 103172185 B CN103172185 B CN 103172185B CN 201310112637 A CN201310112637 A CN 201310112637A CN 103172185 B CN103172185 B CN 103172185B
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 157
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 61
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 60
- 238000002360 preparation method Methods 0.000 title claims abstract description 39
- 230000001105 regulatory effect Effects 0.000 title claims abstract description 11
- 230000007246 mechanism Effects 0.000 title claims abstract description 10
- 238000001514 detection method Methods 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 3
- 238000011900 installation process Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 abstract description 2
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000026676 system process Effects 0.000 description 2
- 238000000108 ultra-filtration Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
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Abstract
The invention discloses an ultrapure water preparation device with an outlet water quality regulating mechanism. The preparation device comprises two ultrapure water preparation units, two pure water pumps, a storage trough, a water use point and a water quality detecting point, wherein the two pure water pumps are respectively located behind the storage trough and between the two ultrapure water preparation units, a branch which is provided with a regulating valve is connected between the rear part of the water storage tank and the water use point, two flow meters are mounted on a piping for respectively detecting system water inlet flow and flow passing through the ultrapure water preparation units, branch flow feedback and the pure water pump behind the storage trough form a control loop and outlet pressure feedback and the other pure water pump located between the ultrapure water preparation units form a control loop to simultaneously control the outlet pressure and the branch flow, and in addition, the ultrapure water in the branch can flow in two directions. According to the device disclosed by the invention, the water outlet quality is regulated by controlling the branch flow, system resources are fully used, and the consumption of system consumable is saved.
Description
Technical field
The present invention relates to a kind of ultrapure water preparation device, particularly relate to a kind of ultrapure water preparation device with effluent quality regulating mechanism.
Technical background
Modern ultrapure water treatment technology be take ultraviolet and is fallen the technology such as TOC, degassing film, polishing mixed bed, ultrafiltration as basis, it utilizes the free radical that UV-light produces to remove the TOC in water, utilize degassing film to remove dissolved oxygen, by polishing mixed bed, carry out ion-exchange, by ultra filtration, filter the molecule in water.Ultra-pure-water treatment system can will further purify as ultrapure water through the prepared pure water of preprocessing system (being generally semiconductor factory business water).Prepared ultrapure water, is widely used in the photoetching process of semicon industry.
According to the principle of ultrapure water treatment technology and feature, the ultrapure water water quality of such ultrapure water system institute output often determined by the water quality that enters ultrapure water purification process, and the water quality of entrance is better, and the water quality of water outlet also can improve accordingly.So industrial this feature of usually utilizing, regulates the water quality of entrance by system backwater, and then regulates the water quality in exit, and system process is fully utilized.
For example, in regulating mechanism (regulating mechanism in the product Liquidlens of Entegris company UPW Polishing System) in the past, conventionally by system outlet, draw a branch road, be connected with the entrance of system.The top hole pressure setting of system is greater than inlet pressure, adds a flow director simultaneously on branch road, realizes the control to backwater amount, thereby plays the adjusting to effluent quality.
Above-mentioned implementation method comes with some shortcomings, mainly contain following some:
(1) adjusting of system backwater amount depends on the flow director on branch road, and in ultrapure water system, such control valve is often expensive even higher to tens thousand of Renminbi, occupies the cost of the larger part of system.
(2) such setting device can only be accomplished to regulate from outlet and be flowed to the flow of entrance and can not make ultrapure water branch road from inlet streams to outlet, can only be carried out lifting system effluent quality and can not be shunted to reduce outlet water quality by branch road by backwater.The cost of backwater is lifting system power, accelerate the consumption of consumptive material, and change or enter the variation of water water quality when water outlet demand, when appearance system effluent quality purity fully reaches user demand, cannot realize by initiatively reducing system effluent quality, reduce ultrapure water treatment capacity, the consumption of relieving system consumptive material.
Summary of the invention
The object of this invention is to provide a kind of ultrapure water preparation device with effluent quality regulating mechanism, can be according to the effluent quality of the water outlet demand of system and system reality, ultrapure water purification in system is reasonably configured, not only can pass through the water quality of backwater lifting system water outlet, when system effluent quality surpasses demand, can also reduce water quality, save the consumption of system.
In order to achieve the above object, the technical solution used in the present invention is as follows:
The present invention includes two cover ultrapure water preparation devices, first pure water pump, storage tanks, use water spot and water quality detection point; One termination front end water inlet of storage tanks, the other end of storage tanks is successively after the first water inlet pipe arrangement, the first ultrapure water preparation device, first pure water pump and the second ultrapure water preparation device, through water outlet pipe arrangement, be divided into two-way, the first via connects with water spot through water outlet pipe arrangement, the second tunnel is pipe arrangement water receiving quality inspection measuring point after testing, on water outlet pipe arrangement, connect tensimeter, manometric signal feedback is given the controller of first pure water pump; The other end at storage tanks connects the first ultrapure water preparation device through the second water inlet pipe arrangement, second pure water pump, the first water inlet pipe arrangement, between water outlet pipe arrangement and the first water inlet pipe arrangement, on the branch road pipe arrangement of parallel connection, be connected to variable valve, second pure water pump one side at the first water inlet pipe arrangement and branch road pipe arrangement intersection point is installed into water ga(u)ge, at the first ultrapure water preparation device one side installation process water ga(u)ge of the first water inlet pipe arrangement and branch road pipe arrangement intersection point, the signal of flooding velocity meter and processing water ga(u)ge feeds back to the controller of second pure water pump after asking and differing from.
The beneficial effect that the present invention has is:
The present invention carries out closed-loop control to top hole pressure and branch road flow respectively by two pure water pump, has effectively stablized the top hole pressure of system, and has controlled branch road flow in the situation that of use traffic controller not.
In branch road of the present invention, can realize flowing of both direction, thereby realized backwater, promote effluent quality and shunt the means that reduce by two kinds of water quality regulation of effluent quality.Thereby be lifted into water water quality by branch road backwater, promote produce water water quality and can make full use of system process, and shunt to realize by branch road, initiatively reduce water quality minimizing ultrapure water preparation device and load, can save the consumption of system consumptive material.
The present invention has saved the use of flowrate control valve, and uses a variable valve to replace, and the price of flowrate control valve that is applicable to ultrapure water system is very expensive, and often to reach tens thousand of Renminbi even higher for controller price, and the cost of variable valve is lower; Although increased a pure water pump here, the pressurized effect that pure water pump of former cause is born is shared in two pure water pump, and corresponding pump size requires to reduce, the therefore cost of lift pump not, and the present invention greatly reduces the cost of system on the whole.
The present invention calculates branch road flow by the difference of two under meters, has realized the accurate measurement of both direction flow, has overcome the problem that single under meter cannot be measured both direction flow.
The present invention arranges manual modulation valve on branch road, has realized in the situation that not changing pump discharge pressure regulation range, adjusts the function of branch road flow adjustment range.
Accompanying drawing explanation
Fig. 1 is the structure iron of system of the present invention.
In figure: 1, storage tanks, 2, second pure water pump, the 3, first ultrapure water preparation device, 4, first pure water pump, the 5, second ultrapure water preparation device, 6, with water spot, 7, water quality detection point, 8, variable valve, 9, flooding velocity meter, 10, process water ga(u)ge, 11, tensimeter, the 12, second water inlet pipe arrangement, 13, the first water inlet pipe arrangement, 14, water outlet pipe arrangement, 15, detect pipe arrangement, 16, branch road pipe arrangement.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further illustrated.
As shown in Figure 1, the present invention includes two cover ultrapure water preparation devices 3,5, first pure water pump 4, storage tanks 1, use water spot 6 and water quality detection point 7; One termination front end water inlet of storage tanks 1, the other end of storage tanks 1 is successively after the first water inlet pipe arrangement 13, the first ultrapure water preparation device 3, first pure water pump 4 and the second ultrapure water preparation device 5, through water outlet pipe arrangement 14, be divided into two-way, the first via connects with water spot 6 through water outlet pipe arrangement 14, the second tunnel is pipe arrangement water receiving quality inspection measuring point 7 after testing, on water outlet pipe arrangement 14, connect tensimeter 11, the signal feedback of tensimeter 11 is given the controller of first pure water pump 4.At the other end of storage tanks 1 through the second water inlet pipe arrangement 12, second pure water pump 2, the first water inlet pipe arrangement 13 connects the first ultrapure water preparation device 3, on water outlet pipe arrangement 14 and 13 branch road pipe arrangements 16 in parallel of the first water inlet pipe arrangement, be connected to variable valve 8, in the first water inlet pipe arrangement 13 and second pure water pump 2 one side of branch road pipe arrangement 16 intersection points, be installed into water ga(u)ge 9, the first ultrapure water preparation device 3 one side installation process water ga(u)ges 10 at the first water inlet pipe arrangement 13 with branch road pipe arrangement 16 intersection points, the signal of flooding velocity meter 9 and processing water ga(u)ge 10 feeds back to the controller of second pure water pump 2 after asking and differing from.
Principle of work of the present invention is:
As shown in fig. 1, the front end water inlet that system is used, by storage tanks 1 and the second water inlet pipe arrangement 12, flow to second pure water pump 2, after second pure water pump 2 boosted, with certain pressure, by the first water inlet pipe arrangement 13, flow to the first ultrapure water preparation device 3, after first pure water pump 4, enter the second ultrapure water preparation device 5, two cover ultrapure water preparation devices water is further purified, comprise that TOC removes, degassed, deionization, removal particulate etc.4 pairs of ultrapure waters of first pure water pump boost for the second time, make to obtain required pressure with water spot.Wherein, distribute can be according to the reasonable disposition of carrying out of pressure loss wherein and purification of water quality situation for the process component of two covers in ultrapure water preparation devices.Ultrapure water, through after two cover ultrapure water preparation devices, is delivered to and is used water spot by water outlet pipe arrangement 14.Before with water spot, ultrapure water small portion being made by detection pipe arrangement 15 is transported to water quality detection point 7 and carries out water quality detection.
In the ultrapure water Preparation equipment of Fig. 1, on the basis of above structure, on the first water inlet pipe arrangement 13 and water outlet pipe arrangement 14, connect a branch road pipe arrangement 16, one end of branch road pipe arrangement 16 is positioned at after second pure water pump 2 before the first ultrapure water preparation device 3, before the other end is positioned at the detection pipe arrangement 15 of water quality detection point 7 after the second ultrapure water preparation device 5.This branch road has been communicated with entrance and the outlet of ultrapure water Preparation equipment.On the first water inlet pipe arrangement 13, in the first water inlet pipe arrangement 13 and the intersection point both sides of branch road pipe arrangement 16, a under meter has respectively been installed, second pure water pump one side is flooding velocity meter 9, opposite side is for processing water ga(u)ge 10, the difference of two under meters is the flow in branch road pipe arrangement 16, and the direction that flows to entrance from outlet of take is positive dirction.These two under meters are as the feeler mechanism of flow in branch road pipe arrangement 16, only otherwise affect the ultrapure water water quality while can measure the flow of positive and negative both direction in branch road pipe arrangement 16 again, can use other structures.On branch road pipe arrangement 16, a variable valve 8 is installed, the effect of this valve is the damping regulating on branch road pipe arrangement 16, only otherwise affecting ultrapure water water quality can meet the effect of damping adjusting again, can use other various structures.Tensimeter 11 is installed before the water exit of equipment, detects mouth pressure.
Mechanism based on above-mentioned connects, by tensimeter 11 and first pure water pump 4 formation control loops, and poor (process discharge and subtract flooding velocity) and second pure water pump 2 formation control loop of the flow that two under meters are detected.During system operation, design of pressure is given to the controller of first pure water pump 4, and tensimeter 11 feeds back to the force value of outlet the controller of second pure water pump 4, first pure water pump 4 is made a response after feedback signal and control signal are compared, and controls in real time the pressure in water outlet pipe arrangement 14.Simultaneously, the flux values of branch road pipe arrangement 16 is set to the controller to second pure water pump 2, flooding velocity meter 9 value measured with processing water ga(u)ge 10 asks the actual flow that obtains branch road after poor to feed back to the controller of second pure water pump 2, controller is by comparing feedback signal and control signal, make a response, regulate the pressure in the first water inlet pipe arrangement 13, in conjunction with the pressure difference at pressure-controlling branch road pipe arrangement 16 two ends in water outlet pipe arrangement 14, thereby realize the object of controlling the flow in branch road pipe arrangement 16.
The present invention, by above mode, has realized the control to top hole pressure and branch road flow.Wherein, for the control of branch road flow, both can make ultrapure water in branch road from inlet streams to outlet, also can flow to entrance from outlet.When the ultrapure water in branch road flows to entrance from outlet, the high purity ultrapure water of outlet with enter water and mix, the water quality that system enters water is improved, thereby the water quality of system water outlet after treatment has also obtained corresponding raising, takes full advantage of the process component of system to realize the function that promotes water quality; Ultrapure water in branch road is from inlet streams to when outlet, and the water quality of system outlet is because mixing declines, and the benefit obtaining is thus in the immovable situation of water flow, required ultrapure discharge reduction to be processed, the consumption of having saved system consumptive material.
Claims (1)
1. a ultrapure water preparation device with effluent quality regulating mechanism, comprises two cover ultrapure water preparation devices (3,5), first pure water pump (4), storage tanks (1), uses water spot (6) and water quality detection point (7), one termination front end water inlet of storage tanks (1), the other end of storage tanks (1) is successively after the first water inlet pipe arrangement (13), the first ultrapure water preparation device (3), first pure water pump (4) and the second ultrapure water preparation device (5), through water outlet pipe arrangement (14), be divided into two-way, the first via connects with water spot (6) through water outlet pipe arrangement (14), the second tunnel is pipe arrangement water receiving quality inspection measuring point (7) after testing, on water outlet pipe arrangement (14), connect tensimeter (11), the signal feedback of tensimeter (11) is given the controller of first pure water pump (4), it is characterized in that: at the other end of storage tanks (1) through the second water inlet pipe arrangement (12), second pure water pump (2), the first water inlet pipe arrangement (13) connects the first ultrapure water preparation device (3), between water outlet pipe arrangement (14) and the first water inlet pipe arrangement (13), on the branch road pipe arrangement (16) of parallel connection, be connected to variable valve (8), between the intersection point of the first water inlet pipe arrangement (13) and branch road pipe arrangement (16) and second pure water pump (2), be installed into water ga(u)ge (9), installation process water ga(u)ge (10) between the intersection point of the first water inlet pipe arrangement (13) and branch road pipe arrangement (16) and the first ultrapure water preparation device (3), the signal of flooding velocity meter (9) and processing water ga(u)ge (10) feeds back to the controller of second pure water pump (2) after asking and differing from.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310112637.5A CN103172185B (en) | 2013-04-02 | 2013-04-02 | Ultrapure water preparation device with outlet water quality regulating mechanism |
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| CN201310112637.5A CN103172185B (en) | 2013-04-02 | 2013-04-02 | Ultrapure water preparation device with outlet water quality regulating mechanism |
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| CN103172185A CN103172185A (en) | 2013-06-26 |
| CN103172185B true CN103172185B (en) | 2014-05-07 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104307373A (en) * | 2014-11-07 | 2015-01-28 | 成都欧林生物科技股份有限公司 | Ultrapure water filtering equipment |
| CN107935267B (en) * | 2017-12-14 | 2023-12-12 | 浙江启尔机电技术有限公司 | Ultrapure water preparation device with total organic carbon of effluent adjustment for immersion lithography |
| CN107892420A (en) * | 2017-12-21 | 2018-04-10 | 浙江启尔机电技术有限公司 | A kind of ultrapure water preparation device for liquid immersion lithography with automatic degerming functions |
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| JP2661946B2 (en) * | 1988-03-11 | 1997-10-08 | 忠弘 大見 | Ultrapure water supply piping system |
| CN2820843Y (en) * | 2005-08-24 | 2006-09-27 | 刘星海 | Multifunction water purifying device |
| CN202430068U (en) * | 2012-01-11 | 2012-09-12 | 美的集团有限公司 | Quality-divided water supply system capable of adjusting water quality |
| CN102701503B (en) * | 2012-04-19 | 2014-02-12 | 兰州联创环保节能设备科技有限公司 | Full-automatic direct-drinking cold and hot purified water machine |
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Granted publication date: 20140507 Termination date: 20200402 |