CN103151394A - Thin-film solar cell and manufacture method thereof - Google Patents
Thin-film solar cell and manufacture method thereof Download PDFInfo
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- CN103151394A CN103151394A CN201210543693XA CN201210543693A CN103151394A CN 103151394 A CN103151394 A CN 103151394A CN 201210543693X A CN201210543693X A CN 201210543693XA CN 201210543693 A CN201210543693 A CN 201210543693A CN 103151394 A CN103151394 A CN 103151394A
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Abstract
The invention discloses a thin-film solar cell. The thin-film solar cell comprises a substrate, wherein a compound transparent conducting thin film layer, a photoelectric converting thin film layer and a back electrode layer are arranged on the substrate, and a silver thin film layer is arranged on one side of the compound transparent conducting thin film layer. Due to the fact that the silver thin film layer is added in the thin-film solar cell, conductivity of the whole thin-film solar cell can be improved through a high transmittance and an optimal conductivity of the silver thin film layer, a good light ray transmittance can also be guaranteed, light rays absorbed by the thin-film solar cell are enabled to be increased, and then conversion efficiency is improved. Due to the fact that the silver thin film layer is arranged on one side of the compound transparent conducting thin film layer, the compound transparent conducting thin film layer is enabled to provide support for the silver thin film layer, the problem of texture surface making of the silver thin film layer and the technical problem that the thin-film solar cell is in an open circuit caused by the fact that a P2 scribed line and a P3 carving line can carve the sliver thin film layer in the production process of the thin-film solar cell also can be solved, and normal electric conduction of the thin-film solar cell is guaranteed.
Description
Technical field
The present invention relates to technical field of solar batteries, relate in particular to a kind of thin-film solar cells, and the method for making this thin-film solar cells.
Background technology
Solar cell industry development in recent years is swift and violent, and along with the continuous reduction of cost, solar cell just progressively enters among people's life, plays a greater and greater role.Thin-film solar cells is a kind of in solar cell, it only adopts the thin-film material of hundreds of nano thickness to realize photoelectric conversion, main feature is: material usage is few, be convenient in deposition on glass, can produce translucent effect, low light level power generation performance is good, the high temperature power generation performance is good, the comprehensive electric generating ability is strong etc.
Current thin-film solar cells is divided into again silicon-based film solar cells, cadmium telluride diaphragm solar battery and copper-indium-galliun-selenium film solar cell, and their main distinction is that the photoelectric conversion layer material therefor of core is different.But the basic structure of battery all adopts identical sandwich structure, and namely anterior the centre is the photoelectric conversion thin layer of core take the layer of transparent conductive film as front electrode, and the rear portion is the back electrode thin layer that conductive metallic material or its composite material consist of.
Present thin film solar cell technologies all adopts the transparent conductive film of compound structure as front electrode, mainly contains four kinds: zinc oxide aluminum (ZnO:Al), fluorine doped tin oxide (SnO2:F), tin indium oxide (ITO), boron-doping zinc oxide (BZO).
For solar cell, most crucial problem is to improve transformation efficiency, and therefore for transparent conductive film material, its main performance index has 2 points:
1, high sunlight transmitance is arranged, so that the absorption luminous energy of the photoelectric conversion layer maximum at rear portion;
2, fabulous electric conductivity (namely require the square resistance of rete the smaller the better) is arranged, so that reduce the resistance loss when deriving electric energy by transparency conductive electrode.
And current thin-film solar cells industry is mainly take the relatively relatively poor compound film of electric conductivity as front electrode transparency conductive electrode.Due to the actual conductive capability of film mainly by the material performance index of film self---the thickness of conductance and film determines jointly, and the subject matter that this technology faces is:
1, the material characteristics of compound film determines that its electric conductivity is not ideal enough, and the conductance index is on the low side, and its electric conductivity far is worse than metal material, but the ordinary metallic material optical transmittance is low, is unwell to and does transparent conductive film;
2, in order to improve the actual electric conductivity of film, that usually compound film must be done is thicker (for thin-film solar cells, usually require film to reach hundreds of nano thickness, just has practical value), and film thick is when bringing electric conductivity to promote, and the loss of light by film the time but significantly increases, and causes light penetration to descend, reduce the light that solar cell absorbs, reduce transformation efficiency.
Therefore, for existing compound transparent conductive film material, the mutual restriction of electric conductivity and light transmission causes film performance to be difficult to further promote, and is unfavorable for improving solar battery efficiency.
Summary of the invention
One object of the present invention, be to provide a kind of thin-film solar cells, by increasing the more silver-colored thin layer of high permeability, more excellent electric conductivity, make the electric conductivity of thin-film solar cells when promoting, light penetration is also rising, increase the light that solar cell absorbs, improved transformation efficiency.
Another object of the present invention, be to provide a kind of manufacture method of thin-film solar cells, side magnetron sputtering one deck silver thin layer by at compound transparent conductive film layer makes the conductivity of whole thin-film solar cells and light transformation efficiency all improve.
For reaching above-mentioned purpose, the present invention by the following technical solutions:
A kind of thin-film solar cells comprises substrate, and compound transparent conductive film layer, photoelectric conversion thin layer and dorsum electrode layer are set on described substrate, and a side of described compound transparent conductive film layer arranges silver-colored thin layer.
As a kind of preferred version of thin-film solar cells, the thickness of described silver-colored thin layer is 15nm, and its optical transmittance is greater than 90%, and square resistance is less than 5 Ω/.
A kind of preferred version as thin-film solar cells, one side of described substrate arranges described compound transparent conductive film layer, described compound transparent conductive film layer arranges described silver-colored thin layer away from a side of described substrate, described silver-colored thin layer arranges described photoelectric conversion thin layer away from a side of described compound transparent conductive film layer, and described photoelectric conversion thin layer arranges dorsum electrode layer away from a side of described silver-colored thin layer.
Preferably, described substrate adopts glass or transparent polymer manufacturing.
A kind of preferred version as thin-film solar cells, one side of described substrate arranges described dorsum electrode layer, described dorsum electrode layer arranges described photoelectric conversion thin layer away from a side of described substrate, described photoelectric conversion thin layer arranges described silver-colored thin layer away from a side of dorsum electrode layer, and described silver-colored thin layer arranges described compound transparent conductive film layer away from a side of described photoelectric conversion thin layer.
Preferably, described substrate adopts metal or nonmetal manufacturing.
Be more preferably, described substrate adopts the stainless steel manufacturing.
Be more preferably, described substrate adopts pottery manufacturing.
A kind of preferred version as thin-film solar cells, one side of described substrate arranges described silver-colored thin layer, described silver-colored thin layer arranges described compound transparent conductive film layer away from a side of described substrate, described compound transparent conductive film layer arranges described photoelectric conversion thin layer away from a side of described silver-colored thin layer, and described photoelectric conversion thin layer arranges described dorsum electrode layer away from a side of described compound transparent conductive film layer.
Preferably, described substrate adopts glass or transparent polymer manufacturing.
A kind of preferred version as thin-film solar cells, one side of described substrate arranges dorsum electrode layer, described dorsum electrode layer arranges described photoelectric conversion thin layer away from a side of described substrate, described photoelectric conversion thin layer arranges described compound transparent conductive film layer away from a side of described dorsum electrode layer, and described compound transparent conductive film layer arranges silver-colored thin layer away from a side of described photoelectric conversion thin layer.
Preferably, described substrate adopts metal or nonmetal manufacturing.
Be more preferably, described substrate adopts the stainless steel manufacturing.
Be more preferably, described substrate adopts pottery manufacturing.
As a kind of preferred version of thin-film solar cells, a side of described compound transparent conductive film layer and/or described photoelectric conversion thin layer is provided with suede structure.
As a kind of preferred version of thin-film solar cells, between described substrate and described silver-colored thin layer, articulamentum is set, described articulamentum is to have high optical transmittance, be combined good oxide film layer with substrate and silver-colored thin layer.
Preferably, described articulamentum is SiO2 thin layer or AZO thin layer.
As a kind of preferred version of thin-film solar cells, described compound transparent conductive film layer is any one in zinc oxide aluminum thin layer, fluorine doped tin oxide thin layer, indium tin oxide films layer, boron-doping zinc oxide films rete, Al-Doped ZnO film layer;
Described dorsum electrode layer is metallic diaphragm;
Described photoelectric conversion thin layer is silicon membrane layer.
Preferably, described dorsum electrode layer is aluminum film layer or nickel thin layer;
A kind of manufacture method of thin-film solar cells is used thin-film solar cells as described above, at side magnetron sputtering one deck silver thin layer of described compound transparent conductive film layer.
A kind of preferred version as the manufacture method of thin-film solar cells comprises the following steps:
Step a1, adopt chemical gaseous phase depositing process at substrate surface deposition one deck compound transparent conductive film layer, the sheet resistance of film is between 12～25 Ω/, and transmitance is more than 80%, and makes suede structure, and the Haze degree is 5%～25%;
Step b1, cleaning substrate are to qualified cleanliness factor;
Step c1, adopt magnetron sputtering technology at compound transparent conductive film layer surface deposition one deck silver thin layer, the sheet resistance of silver-colored thin layer is controlled at that 4 Ω/below, the rete transmitance is more than 90%;
Step e1, the plated film substrate that will complete the P1 groove are put into PECVD preparation photoelectric conversion thin layer;
Step f1, complete the photoelectric conversion thin layer and make after, carry out green laser grooving and scribing (P2 laser scoring);
Step h1, complete dorsum electrode layer and make after, carry out green laser grooving and scribing (P3 laser scoring);
Step I 1, hull cell complete, and enter the battery component packaging technology.
A kind of preferred version as the manufacture method of thin-film solar cells comprises the following steps:
Step a2, cleaning substrate are to qualified cleanliness factor;
Step b2, employing magnetron sputtering technology deposit one deck dorsum electrode layer at substrate surface,
Step c2, complete dorsum electrode layer and make after, carry out green laser grooving and scribing (P3 laser scoring);
Step e2, complete the photoelectric conversion thin layer and make after, carry out green laser grooving and scribing (P2 laser scoring);
Step f2, adopt magnetron sputtering technology at photoelectric conversion thin layer surface deposition one deck silver thin layer, the sheet resistance of silver-colored thin layer is controlled at that 4 Ω/below, the rete transmitance is more than 90%;
Step h2, carry out infrared laser delineation (P1 laser scoring), rete is delineated into main flow hull cell figure used;
Step I 2, hull cell complete, and enter the battery component packaging technology.
A kind of preferred version as the manufacture method of thin-film solar cells comprises the following steps:
Step a3, cleaning substrate are to qualified cleanliness factor;
Step b3, employing magnetron sputtering technology are at substrate surface deposition one deck articulamentum;
Step c3, adopt magnetron sputtering technology at articulamentum surface deposition one deck silver thin layer, the sheet resistance of silver-colored thin layer is controlled at that 4 Ω/below, the rete transmitance is more than 90%;
Step e3, carry out infrared laser delineation (P1 laser scoring), rete is delineated into main flow hull cell figure used;
Step f3, the substrate that will complete compound transparent conductive film layer are put into PECVD preparation photoelectric conversion thin layer;
Step h3, complete substrate to be sent into after the P2 groove and carry out the dorsum electrode layer preparation in magnetic-controlled sputtering coating equipment;
Step I 3, complete dorsum electrode layer and make after, carry out green laser grooving and scribing (P3 laser scoring);
Step j3, hull cell complete, and enter the battery component packaging technology.
A kind of preferred version as the manufacture method of thin-film solar cells comprises the following steps:
Step a4, cleaning substrate are to qualified cleanliness factor;
Step b4, employing magnetron sputtering technology are at substrate surface deposition one deck dorsum electrode layer;
Step c4, complete dorsum electrode layer and make after, carry out green laser grooving and scribing (P3 laser scoring);
Step e4, complete the photoelectric conversion thin layer and make after, carry out green laser grooving and scribing (P2 laser scoring), and make suede structure, the Haze degree is 5%～25%;
Step f4, complete the P2 groove after, adopt magnetically controlled sputter method at photoelectric conversion thin layer surface deposition one deck compound transparent conductive film layer, the sheet resistance of film is between 12～25 Ω/, transmitance is more than 80%;
Step h4, carry out infrared laser delineation (P1 laser scoring), rete is delineated into main flow hull cell figure used;
Step I 4, hull cell complete, and enter the battery component packaging technology.
The contrast prior art, beneficial effect of the present invention is:
1, by increase one deck silver thin layer in thin-film solar cells, the electric conductivity that can improve whole thin-film solar cells by high permeability and the excellent electric conductivity of silver-colored thin layer, and can also guarantee light penetration preferably, the light that makes solar cell absorb increases, and then improves transformation efficiency;
2, by the side at compound transparent conductive film layer, silver-colored thin layer is set, can make compound transparent conductive film layer is that silver-colored thin layer provides support, and can solve also that in silver-colored thin layer making herbs into wool problem and thin-film solar cells production process, P2 and P3 groove can carve the technological problems that disconnected silver-colored thin layer causes battery to open circuit, because P2, P3 laser can not be carved the seco compound film, therefore can complete conduction by compound film in the extremely narrow zone that P2, P3 carve disconnected silver-colored thin layer, guarantee that thin-film solar cells normally conducts electricity;
3, meet by arranging the suede structure that thin-film solar cells requires on compound transparent conductive film or photoelectric conversion thin layer, the silver thin film deposition is on this layer suede structure, because silver-colored film is very thin, so the form of deposition is surperficial consistent with the compound transparent conductive film, the surface also can present suede structure, be conducive to light in the diffuse reflection of inside battery, improve the ability that battery absorbs luminous energy;
4, by one deck articulamentum is set between silver-colored thin layer and substrate, this articulamentum is the oxide film layer of high optical transmittance, can be at the light transmittance that guarantees that silver-colored thin layer is connected with substrate does not affect whole thin-film solar cells reliably simultaneously.
Description of drawings
Fig. 1 is the structural representation of embodiment one described thin-film solar cells;
Fig. 2 is the manufacturing process schematic diagram of Fig. 1;
Fig. 3 is the structural representation of embodiment two described thin-film solar cells;
Fig. 4 is the manufacturing process schematic diagram of Fig. 3;
Fig. 5 is the structural representation of embodiment three described thin-film solar cells;
Fig. 6 is the manufacturing process schematic diagram of Fig. 5;
Fig. 7 is the structural representation of embodiment four described thin-film solar cells;
Fig. 8 is the manufacturing process schematic diagram of Fig. 7.
In figure:
1, substrate; 2, compound transparent conductive film layer; 3, silver-colored thin layer; 4, photoelectric conversion thin layer; 5, dorsum electrode layer; 6, articulamentum.
Embodiment
Embodiment one:
As shown in Fig. 1～2, thin-film solar cells described in this embodiment, comprise substrate 1, one side of substrate 1 arranges compound transparent conductive film layer 2, compound transparent conductive film layer 2 arranges silver-colored thin layer 3 away from a side of substrate 1, silver thin layer 3 arranges photoelectric conversion thin layer 4 away from a side of compound transparent conductive film layer 2, and photoelectric conversion thin layer 4 arranges dorsum electrode layer 5 away from a side of silver-colored thin layer 3.
The thickness of silver thin layer 3 is 15nm, and its optical transmittance is greater than 90%, and square resistance is less than 3 Ω/.
A side at compound transparent conductive film layer 2 close silver-colored thin layer 3 arranges suede structure.
The method of making the said film solar cell comprises the following steps:
The first step, adopt chemical gaseous phase depositing process at substrate 1 surface deposition one deck compound transparent conductive film layer 2, the sheet resistance of film is between 12～25 Ω/, and transmitance is more than 80%, and makes suede structure, and the Haze degree is 5%～25%;
Second step, cleaning substrate 1 are to qualified cleanliness factor;
The 3rd step, adopt magnetron sputtering technology at compound transparent conductive film layer 2 surface deposition one decks silver thin layer 3, the sheet resistance of silver-colored thin layer 3 is controlled at that 4 Ω/below, the rete transmitance is more than 90%;
The 4th goes on foot, carries out infrared laser delineates (P1 laser scoring), and silver-colored thin layer 3 is delineated into main flow hull cell figure used;
The 5th plated film substrate 1 that goes on foot, will complete the P1 groove is put into PECVD preparation photoelectric conversion thin layer 4;
The 6th step, complete photoelectric conversion thin layer 4 and make after, carry out green laser grooving and scribing (P2 laser scoring);
The 7th step, complete substrate 1 to be sent into after the P2 groove and carry out dorsum electrode layer 5 preparations in magnetic-controlled sputtering coating equipment;
The 8th step, complete dorsum electrode layer 5 and make after, carry out green laser grooving and scribing (P3 laser scoring);
The 9th step, hull cell complete, and enter the battery component packaging technology.
In the present embodiment, substrate 1 adopts toughened glass, and compound transparent conductive film layer 2 is the Al-Doped ZnO film layer, and photoelectric conversion thin layer 4 is silicon membrane layer, and dorsum electrode layer 5 is aluminum film layer.
Embodiment two:
As shown in Fig. 3～4, thin-film solar cells described in this embodiment, comprise substrate 1, one side of substrate 1 arranges dorsum electrode layer 5, dorsum electrode layer 5 arranges photoelectric conversion thin layer 4 away from a side of substrate 1, photoelectric conversion thin layer 4 arranges silver-colored thin layer 3 away from a side of dorsum electrode layer 5, and silver-colored thin layer 3 arranges compound transparent conductive film layer 2 away from a side of photoelectric conversion thin layer 4.
The thickness of silver thin layer is 15nm, and its optical transmittance is greater than 90%, and square resistance is less than 3 Ω/.
A side at photoelectric conversion thin layer 4 close silver-colored thin layers 3 arranges suede structure.
The method of making the said film solar cell comprises the following steps:
The first step, cleaning substrate 1 are to qualified cleanliness factor;
Second step, adopt magnetron sputtering technology at substrate 1 surface deposition one deck dorsum electrode layer 5,
The 3rd step, complete dorsum electrode layer 5 and make after, carry out green laser grooving and scribing (P3 laser scoring);
The 4th plated film substrate 1 that goes on foot, will complete the P3 groove is put into PECVD preparation photoelectric conversion thin layer 4, and makes suede structure, and the Haze degree is 5%～25%;
The 5th step, complete photoelectric conversion thin layer 4 and make after, carry out green laser grooving and scribing (P2 laser scoring);
The 6th step, adopt magnetron sputtering technology at photoelectric conversion thin layer 4 surface deposition one decks silver thin layers 3, the sheet resistance of silver-colored thin layer 3 is controlled at that 4 Ω/below, the rete transmitance is more than 90%;
The 7th step, employing magnetically controlled sputter method are at silver-colored thin layer 3 surface deposition one deck compound transparent conductive film layers 2, and the sheet resistance of film is between 12～25 Ω/, and transmitance is more than 80%;
The 8th goes on foot, carries out infrared laser delineates (P1 laser scoring), and rete is delineated into main flow hull cell figure used;
The 9th step, hull cell complete, and enter the battery component packaging technology.
In the present embodiment, substrate 1 adopts float glass, and compound transparent conductive film layer 2 is the fluorine doped tin oxide thin layer, and photoelectric conversion thin layer 4 is silicon membrane layer, and dorsum electrode layer 5 is aluminum film layer.
Embodiment three:
As shown in Fig. 5～6, thin-film solar cells described in this embodiment, comprise substrate 1, one side of substrate 1 arranges articulamentum 6, articulamentum 6 arranges silver-colored thin layer 3 away from a side of substrate 1, silver thin layer 3 arranges compound transparent conductive film layer 2 away from a side of articulamentum 6, and compound transparent conductive film layer 2 arranges photoelectric conversion thin layer 4 away from a side of silver-colored thin layer 3, and photoelectric conversion thin layer 4 arranges dorsum electrode layer 5 away from a side of compound transparent conductive film layer 2.
The thickness of silver thin layer is 15nm, and its optical transmittance is greater than 90%, and square resistance is less than 3 Ω/.
A side at compound transparent conductive film layer 2 close photoelectric conversion thin layer 4 arranges suede structure.
The method of making the said film solar cell comprises the following steps:
The first step, cleaning substrate 1 are to qualified cleanliness factor;
Second step, employing magnetron sputtering technology are at substrate 1 surface deposition one deck articulamentum 6;
The 3rd step, adopt magnetron sputtering technology at articulamentum 6 surface deposition one decks silver thin layers 3, the sheet resistance of silver-colored thin layer 3 is controlled at that 4 Ω/below, the rete transmitance is more than 90%;
The 4th step, adopt magnetically controlled sputter method at silver-colored thin layer 3 surface deposition one deck compound transparent conductive film layers 2, the sheet resistance of film is between 12～25 Ω/, and transmitance is more than 80%, and makes suede structure, and the Haze degree is 5%～25%;
The 5th goes on foot, carries out infrared laser delineates (P1 laser scoring), and rete is delineated into main flow hull cell figure used;
The 6th substrate 1 that goes on foot, will complete compound transparent conductive film layer 2 is put into PECVD preparation photoelectric conversion thin layer 4;
The 7th step, complete photoelectric conversion thin layer 4 and make after, carry out green laser grooving and scribing (P2 laser scoring);
The 8th step, complete substrate 1 to be sent into after the P2 groove and carry out dorsum electrode layer 5 preparations in magnetic-controlled sputtering coating equipment;
The 9th step, complete dorsum electrode layer 5 and make after, carry out green laser grooving and scribing (P3 laser scoring);
The tenth step, hull cell complete, and enter the battery component packaging technology.
In the present embodiment, substrate 1 adopts the toughened glass manufacturing, and compound transparent conductive film layer 2 is the indium tin oxide films layer, and photoelectric conversion thin layer 4 is silicon membrane layer, and dorsum electrode layer 5 is aluminum film layer, and articulamentum 6 is the SiO2 thin layer.
Embodiment four:
As shown in Fig. 7～8, thin-film solar cells described in this embodiment, comprise substrate 1, one side of substrate 1 arranges dorsum electrode layer 5, dorsum electrode layer 5 arranges photoelectric conversion thin layer 4 away from a side of substrate 1, photoelectric conversion thin layer 4 arranges compound transparent conductive film layer 2 away from a side of dorsum electrode layer 5, and compound transparent conductive film layer 2 arranges silver-colored thin layer 3 away from a side of photoelectric conversion thin layer 4.
The thickness of silver thin layer 3 is 15nm, and its optical transmittance is greater than 90%, and square resistance is less than 3 Ω/.
A side at photoelectric conversion thin layer 4 close compound transparent conductive film layers 2 arranges suede structure.
The method of making the said film solar cell comprises the following steps:
The first step, cleaning substrate 1 are to qualified cleanliness factor;
Second step, employing magnetron sputtering technology are at substrate 1 surface deposition one deck dorsum electrode layer 5;
The 3rd step, complete dorsum electrode layer 5 and make after, carry out green laser grooving and scribing (P3 laser scoring);
The 4th step, complete the P3 groove after, substrate 1 is put into PECVD preparation photoelectric conversion thin layer 4;
The 5th step, complete photoelectric conversion thin layer 4 and make after, carry out green laser grooving and scribing (P2 laser scoring), and make suede structure, the Haze degree is 5%～25%;
The 6th step, complete the P2 groove after, adopt magnetically controlled sputter method at photoelectric conversion thin layer 4 surface deposition one deck compound transparent conductive film layers 2, the sheet resistance of film is between 12～25 Ω/, transmitance is more than 80%;
The 7th step, adopt magnetron sputtering technology at compound transparent conductive film layer 2 surface deposition one decks silver thin layer 3, the sheet resistance of silver-colored thin layer 3 is controlled at that 4 Ω/below, the rete transmitance is more than 90%;
The 8th goes on foot, carries out infrared laser delineates (P1 laser scoring), and rete is delineated into main flow hull cell figure used;
The 9th step, hull cell complete, and enter the battery component packaging technology.
In the present embodiment, substrate 1 adopts stainless steel to make, and compound transparent conductive film layer 2 is boron-doping zinc oxide films rete, and photoelectric conversion thin layer 4 is silicon membrane layer, and dorsum electrode layer 5 is the nickel thin layer.
Know-why of the present invention has below been described in conjunction with specific embodiments.These are described just in order to explain principle of the present invention, and can not be interpreted as by any way limiting the scope of the invention.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other embodiment of the present invention, within these modes all will fall into protection scope of the present invention.
Claims (10)
1. a thin-film solar cells, comprise substrate, and compound transparent conductive film layer, photoelectric conversion thin layer and dorsum electrode layer are set on described substrate, it is characterized in that, a side of described compound transparent conductive film layer arranges silver-colored thin layer.
2. thin-film solar cells according to claim 1, is characterized in that, the thickness of described silver-colored thin layer is 15nm, and its optical transmittance is greater than 90%, and square resistance is less than 5 Ω/.
3. thin-film solar cells according to claim 2, it is characterized in that, one side of described substrate arranges described compound transparent conductive film layer, described compound transparent conductive film layer arranges described silver-colored thin layer away from a side of described substrate, described silver-colored thin layer arranges described photoelectric conversion thin layer away from a side of described compound transparent conductive film layer, and described photoelectric conversion thin layer arranges dorsum electrode layer away from a side of described silver-colored thin layer.
4. thin-film solar cells according to claim 2, it is characterized in that, one side of described substrate arranges described dorsum electrode layer, described dorsum electrode layer arranges described photoelectric conversion thin layer away from a side of described substrate, described photoelectric conversion thin layer arranges described silver-colored thin layer away from a side of dorsum electrode layer, and described silver-colored thin layer arranges described compound transparent conductive film layer away from a side of described photoelectric conversion thin layer.
5. thin-film solar cells according to claim 2, it is characterized in that, one side of described substrate arranges described silver-colored thin layer, described silver-colored thin layer arranges described compound transparent conductive film layer away from a side of described substrate, described compound transparent conductive film layer arranges described photoelectric conversion thin layer away from a side of described silver-colored thin layer, and described photoelectric conversion thin layer arranges described dorsum electrode layer away from a side of described compound transparent conductive film layer.
6. thin-film solar cells according to claim 2, it is characterized in that, one side of described substrate arranges dorsum electrode layer, described dorsum electrode layer arranges described photoelectric conversion thin layer away from a side of described substrate, described photoelectric conversion thin layer arranges described compound transparent conductive film layer away from a side of described dorsum electrode layer, and described compound transparent conductive film layer arranges silver-colored thin layer away from a side of described photoelectric conversion thin layer.
7. according to claim 1～6 arbitrary described thin-film solar cells, is characterized in that, a side of described compound transparent conductive film layer and/or described photoelectric conversion thin layer is provided with suede structure.
8. thin-film solar cells according to claim 5, is characterized in that, between described substrate and described silver-colored thin layer, articulamentum is set, and described articulamentum is to have high optical transmittance, be combined good oxide film layer with substrate and silver-colored thin layer.
9. according to claim 1～6 arbitrary described thin-film solar cells, is characterized in that,
Described compound transparent conductive film layer is any one in zinc oxide aluminum thin layer, fluorine doped tin oxide thin layer, indium tin oxide films layer, boron-doping zinc oxide films rete, Al-Doped ZnO film layer;
Described dorsum electrode layer is metallic diaphragm;
Described photoelectric conversion thin layer is silicon membrane layer.
10. the manufacture method of a thin-film solar cells, use thin-film solar cells as claimed in claim 1, it is characterized in that, at side magnetron sputtering one deck silver thin layer of described compound transparent conductive film layer.
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| CN105185843A (en) * | 2014-06-18 | 2015-12-23 | 华东师范大学 | Strippable any imaging transparent conductive thin film and applications thereof |
| CN106477914A (en) * | 2016-10-09 | 2017-03-08 | 天津市职业大学 | A kind of preparation method of compound transparent electricity conductive film glass |
| CN107742653A (en) * | 2017-10-17 | 2018-02-27 | 江阴艾能赛瑞能源科技有限公司 | A kind of solar cell module for building roof |
| CN108511535A (en) * | 2018-06-04 | 2018-09-07 | 北京铂阳顶荣光伏科技有限公司 | A kind of solar battery sheet and preparation method thereof |
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