CN103149955A - Temperature accurate control device used for integrated cavity spectrum technology isotope analysis - Google Patents

Temperature accurate control device used for integrated cavity spectrum technology isotope analysis Download PDF

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CN103149955A
CN103149955A CN2013100398442A CN201310039844A CN103149955A CN 103149955 A CN103149955 A CN 103149955A CN 2013100398442 A CN2013100398442 A CN 2013100398442A CN 201310039844 A CN201310039844 A CN 201310039844A CN 103149955 A CN103149955 A CN 103149955A
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temperature
laser
housing
secondary seal
control device
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CN103149955B (en
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张志荣
董凤忠
夏滑
庞涛
吴边
王高璇
崔小娟
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ANHUI CASZT PHOTOELECTRIC MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD.
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Hefei Institutes of Physical Science of CAS
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Abstract

A temperature accurate control device used for an integrated cavity spectrum technology isotope analysis comprises a one-time sealing shell of an optical path system and a second-time sealing system of temperature stable and accurate control. The optical path system is installed inside the one-time sealing shell and the temperature accurate control device is characterized in that an optical laser, a distributed feed back (DFB) optical laser light source, a light beam converging collimating lens assembly, a laser path, an optical cavity, a laser beam converging lens and an InGaAs detector are integrated inside the optical path system. The optical laser, the DFB optical laser light source, the light beam converging collimating lens assembly, the laser path, the optical cavity, the laser beam converging lens and the InGaAs detector are all in the nitrogen condition to be prevented from being interfered by outside gas. The second-time sealing system of the temperature stable and accurate control comprises a second-time sealing shell, platinum resistor temperature sensors, rigid supports, semiconductor refrigeration piles, net-shaped heat exchangers, fans and shock absorption foams and further comprises a temperature controller, a driving circuit module, wherein the temperature controller and the driving module are arranged outside the second-time sealing shell and various control commands and electrical signals are all connected in a sealed mode through cables. The temperature accurate control device used for the integrated cavity spectrum technology isotope analysis has the advantages of being simple in structure, convenient to operate, quick in response, good in resistance to shock, high in temperature control precision and good in stability.

Description

A kind of temperature precise control device for the spectral technique isotope analysis of integration chamber
Technical field
The present invention relates to a kind of temperature precise control device, say more specifically the device that a kind of temperature that is applied to integration chamber spectral technique gas isotope analysis field is accurately controlled.
Background technology
Stable Isotopic Analysis comes into one's own day by day in the application of environmental science and field of Environment Protection in recent years, especially in atmosphere, soil, water quality and ecologic environment research, has all brought into play vital role.As apply the variation of stable isotope abundance, study and indicative for environments pollution source and pollution level; Utilize the Detectable effects of stable isotope, can distinguish the discharge source of greenhouse gases, analyze mankind's activity as combustion of fossil fuel, manufacture of cement, cultivation herding and the agricultural production contribution to greenhouse gas emission, not only can accurately estimate that the total emission volumn of each emission source also has certain directive significance to factory, city enforcement " energy-saving and emission-reduction " work; Contribute to understand by measuring the methane isotope physical and chemical changes mechanism that in atmosphere, converge in the methane source, for the quantitative examination of the discharge of methane mechanism such as rice field, wetland and oxygenation efficiency.Stable Isotopic Analysis also is widely used at a plurality of subjects such as geology, nuclear industry, archaeology, ecologic environment scientific research, biology and chemical research, water resources development, agricultural production, food security, clinical medicine in addition.
Integration chamber spectral technique is to see through the time integral light intensity of optical cavity by measurement, with the difference of incident intensity, calculates gas concentration to be measured, and this method, closer to traditional direct absorption spectrum, more meets the Beer-Lambert law.This technology has high survey frequency, spectral resolution and measures sensitivity, simple in structure and the result of measuring equipment is demarcated without complexity, and can make Miniaturized portable, auxiliary same laser isotope analyser of other physical means can be realized the gas-liquid-solid three-state sample is analyzed, and the isotope analysis instrument of therefore comparing based on mass-spectrometric technique has many advantages.
In the spectral technique isotope measure analytic process of integration chamber, in order to make the maximum performance of instrument system performance itself except selecting independently LASER Light Source, keep single a, stationary temperature and minimum ambient vibration also to be absolutely necessary.Temperature adjusting speed is all electricity systems, LASER Light Source, and instrument size, the velocities of sound etc. are in interior major influence factors.Generally these parameters can have 10 along with the variation of every Kelvin -4~ 10 -5variable quantity.If measurement target is solid or liquid, the variation of temperature will cause even measurement result greatly inaccurate of drift that system is larger.When adopting integration chamber spectroscopy measurement gas isotope to analyze, as: C 14o 2, C 13o 2, C 12o 2, the variation of temperature will affect different isotopic Boltzman distribution situations, and even the isotopic ratio of aggravation measurement known fixed component situation is inaccurate.And, the stability of the measurement of the real concentration of gas isotope and ultraprecise light path depends on temperature stability to a great extent, otherwise can't obtain measurement result accurately, and accurate, quick and stable temperature is accurately controlled, also made exactly one of important indicator of instrument zero shift minimum.Therefore accurate temperature control equipment is for the suitable environment of expanding integration chamber spectral technique isotope analysis instrument, and the actual effect that raising detects and accuracy all tool are of great significance.
Summary of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, provide a kind of temperature precise control device for the spectral technique isotope analysis of integration chamber, with accuracy, stability and the zero shift problem that solves existing integration chamber spectral technique isotope analysis temperature influence in measuring process.
Technical scheme of the present invention is as follows: a kind of temperature precise control device for the spectral technique isotope analysis of integration chamber is characterized in that comprising: optical path system 1, once sealing housing 2, four platinum resistance temperature sensors 3, secondary seal housing 5, two thermal controls apparatus, nitrogen 9 atmosphere, temperature controller 10, drive circuit module 11, rigid support 13 and damping foams 14, described two thermal controls apparatus are installed on respectively the housing two ends of secondary seal housing 5 symmetries, each thermal controls apparatus is by semiconductor refrigerating heap 6, weblike heat interchanger 7 and fan 8 form, 1/3 part of weblike heat interchanger 7 is installed on the inside of semiconductor refrigerating heap 6 and piled for 6 tight seamless being connected with semiconductor refrigerating, make the exchange heat between weblike heat interchanger 7 and semiconductor refrigerating heap 6 reach the most sufficient situation, fan 8 is installed on the same side of weblike heat interchanger 7, installation site should be consistent with left or same right, make the heat interchange air-flow under fan 8 effects form clockwise or counterclockwise laminar flow 4 directions, optical path system 1 is installed on once sealing housing 2 inside, and once sealing housing 2 carries out heat isolation and vibration damping by damping foam 14, and then is fixed on secondary seal housing 5 inside by rigid support 13, described once sealing housing 2 inside and secondary seal housing 5 inside all need to be full of nitrogen 9 atmosphere, two platinum resistance temperature sensors in four platinum resistance temperature sensors 3 are installed respectively in two ends, the diagonal angle housing that is embedded in once sealing housing 2, and two other platinum resistance temperature sensor is arranged on respectively the end of weblike heat interchanger 7 away from fan 8, all platinum resistance temperature sensors 3 all are connected with the temperature controller 10 that is installed on secondary seal housing 5 outsides, and Real-time Obtaining once sealing housing 2 is inner and the temperature conditions of secondary seal housing 5 inside, temperature controller 10 is according to the feedback information of different platinum resistance temperature sensor 3, controlling output by PID controls the drive circuit module 11 be installed on secondary seal housing 5 outsides and carries out temperature and accurately control work, when the temperature control command is sent in the PID of temperature controller 3 control, drive circuit module 11 starts normal operation, drive semiconductor refrigerating heap 6 to be heated or refrigeration control, and startup fan 8 accelerated heat circulations, shorten greatly the temperature controlled time and improved the efficiency of heat interchange, thereby guarantee the stability of temperature, and drive circuit module 11 is controlled until reach assigned temperature according to the temperature controller 10 instruction real-time circulations that receive in real time in operational process, while is real-time treatment temperature situation of change in the course of the work, carries out cycle control until reach assigned temperature.
Described optical path system 1 comprises that Distributed Feedback Laser 301, light beam converge collimation lens set 302, collimated light beam 303, optics cavity 304, laser beam plus lens 306, InGaAs detector 307.Distributed Feedback Laser 301 is subject to being installed on the laser driving source 308 driving generation modulated lasers of once sealing housing 2 and secondary seal housing 5 outsides, laser beam converges collimation lens set 302 through light beam and forms (spot diameter≤1mm) collimated light beam 303, collimated light beam 303 is after gas to be measured 305 absorptions of optics cavity 304 inside, through laser beam plus lens 306, converge on the photosurface of InGaAs detector 307, it converges spot size≤1mm 2.Then the signal after photoelectricity turns is sent into by cable 12 the signal subsequent treatment unit 309 that is installed on once sealing housing 2 and secondary seal housing 5 outsides and is carried out that follow-up signal is processed and the inverting of gas isotopic abundance, and this all parts of system is all in nitrogen 9 atmosphere.
Described laser driving source 308 is installed on once sealing housing 2 and secondary seal housing 5 outsides, comprising: temperature controller, current controller and the generation triangular voltage sweep signal that laser instrument drives, the signal generator unit of sinewave modulation signal; Temperature controller, current controller drive Distributed Feedback Laser (301) normal operation, and the signal generator unit makes Distributed Feedback Laser 301 produce modulated laser.
Described Distributed Feedback Laser 301 is semiconductor laser with tunable.
Described subsequent treatment unit 309 is installed on once sealing housing 2 and secondary seal housing 5 outsides, comprising: optical signal amplification circuit, lock-in amplifier, data collecting card and computing machine; The output signal of InGaAs detector 308 is sent into optical signal amplification circuit, signal after amplifying circuit amplifies is sent into lock-in amplifier and is carried out demodulation and obtain corresponding harmonic signal, and harmonic signal is gathered and then carries out that follow-up signal is processed and the inverting of gas isotopic abundance by the data collecting card that is installed on computer-internal.
Described optics cavity 304 is from axle integration chamber, and the cavity side connects air inlet/outlet, makes to incide laser beam 303 chamber in Multi reflection back and forth simultaneously, greatly increases the absorption optical path length of measurement gas, thus the sensitivity that improves detection gas.
Described PID controls and is adopted as the Fuzzy Adaptive PID Control algorithm, action has Temperature Setting, data acquisition, PID to control output, by comparing the difference between real time temperature, design temperature, export and control semiconductor refrigerating heap 6 refrigeration or heat by PID, make optical path system 1 keep stable in a certain temperature.
The all power supplies of described system all adopt the DC-24V power supply.
The present invention's advantage compared with prior art is:
(1) the existing general requirement of integration chamber spectrum isotope analysis commercial measurement is to have high sensitivity, high precision, and device itself should firm, portable, applied range.For example, when instrument is exposed to some ambient temperature, change frequent, exist in the environment of vibrations, the temperature precise control device of integration chamber spectrum isotope analysis just must not be subject to the interference of thermal environment and vibration environment, the stability and the accuracy that keep height, and the invention solves the temperature stability problem of existing integration chamber spectral technique isotope analysis in measuring process, accuracy, the stability measured have been improved, and can reduce the extraneous factor impact, improve the advantage of system zero drift.
(2) the optical path system sealing that the present invention will be comprised of laser instrument, eyeglass, optics cavity and InGaAs detector carries out once sealing together, then put into the secondary seal housing and again seal, whole secondary seal housing is carried out to temperature and accurately control.The purpose that temperature is accurately controlled not is that temperature is controlled to a certain temperature accurately, but pursues the stability of system light path in a certain temperature, at least can reach ± 0.01K the stable amplitude of preferably can reach ± 0.001K.
(3) each several part difference integration packaging of the present invention, adopt the multiple temperature measurement and control system, adopts the closed-loop control pid algorithm to reach real-time temperature detection and real-time precise and stable control.
(4) the present invention adopts the parts such as semiconductor refrigerating heap, weblike heat interchanger, fan to shorten greatly the temperature controlled time and improved the efficiency of heat interchange, has realized that the temperature in the short time is accurately controlled with temperature is precise and stable for a long time at the utmost point.
(5) the present invention adopts the less fan of vibrations, rigid support and anti-seismic material, when guaranteeing temperature control precision and degree of stability, has guaranteed shock resistance and the structural stability of system.
(6) once sealing housing of the present invention and secondary seal housing are strict air-proof condition, and its inside has been full of nitrogen atmosphere, therefore in the isotope measure process, have eliminated the impact of other interference gas.
The accompanying drawing explanation
The plan view from above that Fig. 1 is bulk temperature accuracy-control system of the present invention;
The side plan view that Fig. 2 is bulk temperature accuracy-control system of the present invention;
The optical path system diagram that Fig. 3 is once sealing housing of the present invention.
Embodiment
As shown in Figure 1, Figure 2, Figure 3 shows, apparatus of the present invention comprise two parts: the one, and optical path system 1; The 2nd, be used for accurately controlling the secondary sealing system of temperature; The secondary sealing system of accurately controlling temperature comprises: optical path system 1 seals for the first time by once sealing housing 2, platinum resistance temperature sensor 3, gas laminar flow 4, secondary seal housing 5, semiconductor refrigerating heap 6, weblike heat interchanger 7, fan 8, nitrogen 9 atmosphere, temperature controller 10, drive circuit module 11, cable 12, rigid support 13, damping foam 14.
Optical path system 1 as shown in Figure 3, mainly comprise: the Distributed Feedback Laser 301 that is installed on once sealing housing 2 and secondary seal housing 5 outsides, light beam converges collimation lens set 302, collimated light beam 303, optics cavity 304, the gas to be measured 305 of optics cavity 304 inside, laser beam plus lens 306, InGaAs detector 307.Distributed Feedback Laser 302 is subject to being installed on the laser driving source 308 driving generation modulated lasers of once sealing housing 2 and secondary seal housing 5 outsides, laser beam after modulation converges collimation lens set 302 through light beam and forms (spot diameter≤1mm) collimated light beam 303, collimated light beam 303 is after gas to be measured 305 absorptions of optics cavity 304 inside, through laser beam plus lens 306, converge on the photosurface of InGaAs detector 307, it converges spot size≤1mm 2then the signal after photoelectricity turns is sent into by cable 12 the signal subsequent treatment unit 309 that is installed on once sealing housing 2 and secondary seal housing 5 outsides and is carried out that follow-up signal is processed and the inverting of gas isotopic abundance, and this all parts of system is all in the nitrogen atmosphere 9 in once sealing housing 2 inside.
Detailed process of the invention process is: at first, optical path system 1 seals for the first time by being installed on once sealing housing 2 inside, and it is material that once sealing housing 2 is used coefficient of heat conductivity metal material large, that be convenient to processing.Then, the inside that optical path system 1 and once sealing housing 2 is sealed in jointly to secondary seal housing 5 seals again, the purpose of design is that it is material that the material of secondary seal housing 5 can be used the rigid plastic with better heat-proof quality in order to guarantee the complete heat isolation of external environment like this.Once sealing housing 2 carries out heat isolation and vibration damping by damping foam 14, such as: isocyanurate foam, ethylenic copolymer foam etc. is carried out heat isolation and vibration damping, and then being fixed in the inside of secondary seal housing 5 by rigid support 13, between rigid support 13 and secondary seal housing 5, the same damping foam 14 that adopts carries out vibration damping again.All platinum resistance temperature sensors 3 all are connected with the temperature controller 10 that is installed on secondary seal housing 5 outsides, for the temperature conditions of Real-time Obtaining once sealing housing 2 inside and secondary seal housing 5 inside.The temperature information that temperature controller 10 feeds back according to the platinum resistance temperature sensor 3 of different parts, the temperature of carrying out each temperature measuring point and temperature control point by the Fuzzy Adaptive PID Control algorithm compares, and send different steering orders to the drive circuit module 11 that is installed on secondary seal housing 5 outsides according to comparative result by cable 12, the accurate control work of temperature is carried out in the operation that drive circuit module 11 is controlled semiconductor refrigerating heap 6 and fan 8 according to the PID steering order of receiving.For the temperature uniform temperature that makes optical path system 1 changes, in the opposite of secondary seal housing 5, a set of thermal controls apparatus respectively has been installed, mainly contain semiconductor refrigerating heap 6, weblike heat interchanger 7, fan 8 compositions.Its installation situation is: weblike heat interchanger 7 approximately 1/3 part is installed on the inside of semiconductor refrigerating heap 6 and piled for 6 tight seamless being connected with semiconductor refrigerating, make exchange heat reach the most sufficient situation, two fans 8 are installed on the same side of two weblike heat interchangers 7, and installation site should be consistent with left or same right.When the temperature control command is sent in the PID of temperature controller 10 control, drive circuit module 11 starts normal operation, the semiconductor refrigerating heap 6 of driving based on peltier effect, semiconductor refrigerating heap 6 can be heated or refrigerating operation under the control of direction of current.When semiconductor refrigerating is piled 6 temperature generation subtle change, start fan 8 and control rotating speed, semiconductor refrigerating is piled the weblike heat interchanger 7 of 6 inside and can be responded to very rapidly and hot semiconductor refrigerating heap 6 part in addition that is transmitted to, and rapidly heat to be delivered to nitrogen 9(by fan 8 can be also the clean gas that other thermal conductivity coefficients are very little) in atmosphere, controlled flexibly the circulation of accelerated heat atmosphere.The material of weblike heat interchanger 7 is generally metal material, has fabulous thermal conductivity, can carry out fast heat interchange.Under the effect of above thermal controls apparatus, heat-exchange gas is according to forming clockwise or counterclockwise gas laminar flow 4, clockwise or anticlockwise gas laminar flow 4 is subject to the impact of secondary seal housing 5, be characterized in that central speed is large, the edge flow velocity is little, thereby formed the heat interchange air-flow on once sealing housing 2 shells of optical path system 1, control time and the heat exchanger effectiveness of temperature have been promoted greatly, adding nitrogen 9 is also the material that a kind of thermal conductivity coefficient is very little, therefore the heat interchange formed between optical path system 1 and flowing nitrogen 9 is very little, thereby guaranteed the stability of temperature.Simultaneously, the real-time treatment temperature situation of change of temperature controller 10, send instruction in real time to drive circuit module 11 in the course of the work, thereby drive circuit module 11 carries out cycle control according to the instruction received in real time, reaches heat isolation and the uniform purpose of temperature.In the situation that guarantee accurately control and stable of said temperature, the spectral technique isotope analysis of integration chamber is in duty accurately, be that optical system is in the normal stable course of work, that is: Distributed Feedback Laser 302 is subject to being installed on the laser driving source 308 driving generation modulated lasers of once sealing housing 2 and secondary seal housing 5 outsides, laser beam after modulation converges collimation lens set 302 through light beam and forms (spot diameter≤1mm) collimated light beam 303, collimated light beam 303 is after gas to be measured 305 absorptions of optics cavity 304 inside, through laser beam plus lens 306, converge on the photosurface of InGaAs detector 307, it converges spot size≤1mm 2, then the signal after photoelectricity turns is sent into by cable 12 the signal subsequent treatment unit 309 that is installed on once sealing housing 2 and secondary seal housing 5 outsides and is carried out that follow-up signal is processed and the inverting of gas isotopic abundance.Above-described all parts all in nitrogen 9 atmosphere of and secondary seal housing 5 inside inner in once sealing housing 2, is guaranteed the existence of noiseless gas.Accuracy, stability and the zero shift problem of finally guaranteeing integration chamber spectral technique isotope analysis temperature influence in measuring process are reduced to minimum.The power supply used in above-mentioned integration chamber spectral technique isotope analysis system provides by the DC-24V power supply.
Non-elaborated part of the present invention belongs to techniques well known.

Claims (8)

1. the temperature precise control device for the spectral technique isotope analysis of integration chamber, is characterized in that comprising: optical path system (1), once sealing housing (2), four platinum resistance temperature sensors (3), secondary seal housing (5), two thermal controls apparatus, nitrogen (9) atmosphere, temperature controller (10), drive circuit module (11), rigid support (13) and damping foams (14), described two thermal controls apparatus are installed on respectively the symmetrical housing two ends of secondary seal housing (5), each thermal controls apparatus is by semiconductor refrigerating heap (6), weblike heat interchanger (7) and fan (8) form, 1/3 part of weblike heat interchanger (7) is installed on the inside of semiconductor refrigerating heap (6) and piles (6) tight seamless being connected with semiconductor refrigerating, make the exchange heat between weblike heat interchanger (7) and semiconductor refrigerating heap (6) reach the most sufficient situation, fan (8) is installed on the same side of weblike heat interchanger (7), installation site should be consistent with left or same right, make the heat interchange air-flow under fan (8) effect form clockwise or counterclockwise laminar flow (4) direction, optical path system (1) is installed on once sealing housing (2) inside, and once sealing housing (2) carries out heat isolation and vibration damping by damping foam (14), and then is fixed on secondary seal housing (5) inside by rigid support (13), described once sealing housing (2) inside and secondary seal housing (5) inside all need to be full of nitrogen (9) atmosphere, two platinum resistance temperature sensors in four platinum resistance temperature sensors (3) are installed respectively in two ends, the diagonal angle housing that is embedded in once sealing housing (2), and two other platinum resistance temperature sensor is arranged on respectively the end of weblike heat interchanger (7) away from fan (8), all platinum resistance temperature sensors (3) all are connected with the temperature controller (10) that is installed on secondary seal housing (5) outside, and the temperature conditions that Real-time Obtaining once sealing housing (2) is inner and secondary seal housing (5) is inner, temperature controller (10) is according to the feedback information of different platinum resistance temperature sensors (3), controlling output by PID controls and to be installed on the outside drive circuit module (11) of secondary seal housing (5) and to carry out temperature and accurately control work, when the temperature control command is sent in the PID of temperature controller (3) control, drive circuit module (11) starts normal operation, drive semiconductor refrigerating heap (6) to be heated or refrigeration control, and startup fan (8) accelerated heat circulation, shorten greatly the temperature controlled time and improved the efficiency of heat interchange, thereby guarantee the stability of temperature, and drive circuit module (11) is controlled until reach assigned temperature according to temperature controller (10) the instruction real-time circulation received in real time in operational process, while is real-time treatment temperature situation of change in the course of the work, carries out cycle control until reach assigned temperature.
2. the temperature precise control device for the spectral technique isotope analysis of integration chamber according to claim 1, it is characterized in that: described optical path system (1) comprises that Distributed Feedback Laser (301), light beam converge collimation lens set (302), collimated light beam (303), optics cavity (304), laser beam plus lens (306), InGaAs detector (307); Distributed Feedback Laser (301) is subject to being installed on once sealing housing (2) and the outside laser driving source (308) of secondary seal housing (5) drives the generation modulated laser, laser beam after modulation converges collimation lens set (302) through light beam and forms collimated light beam (303), after collimated light beam (303) gas to be measured (305) inner through optics cavity (304) absorbs, through laser beam plus lens (306), converge on the photosurface of InGaAs detector (307); Then the signal after photoelectricity turns is sent into and is installed on the outside signal subsequent treatment unit (309) of once sealing housing (2) and secondary seal housing (5) and carries out that follow-up signal is processed and the inverting of gas isotopic abundance by cable (12), and this all parts of system is all in nitrogen (9) atmosphere.
3. the temperature precise control device for the spectral technique isotope analysis of integration chamber according to claim 2, it is characterized in that: described laser driving source (308) is installed on once sealing housing (2) and secondary seal housing (5) outside, comprising: temperature controller, current controller and the generation triangular voltage sweep signal that laser instrument drives, the signal generator unit of sinewave modulation signal; Temperature controller, current controller drive Distributed Feedback Laser (301) normal operation, and the signal generator unit makes Distributed Feedback Laser (301) produce modulated laser.
4. the temperature precise control device for the spectral technique isotope analysis of integration chamber according to claim 2, it is characterized in that: described Distributed Feedback Laser (301) is semiconductor laser with tunable.
5. the temperature precise control device for the spectral technique isotope analysis of integration chamber according to claim 2, it is characterized in that: described signal subsequent treatment unit (309) is installed on once sealing housing (2) and secondary seal housing (5) outside comprises: optical signal amplification circuit, lock-in amplifier, data collecting card and computing machine; The output signal of InGaAs detector (308) is sent into optical signal amplification circuit, signal after amplifying circuit amplifies is sent into lock-in amplifier and is carried out demodulation and obtain corresponding harmonic signal, harmonic signal is gathered by the data collecting card that is installed on computer-internal, then by computing machine, carries out follow-up signal processing and the under operation of gas isotopic abundance.
6. the temperature precise control device for the spectral technique isotope analysis of integration chamber according to claim 2, it is characterized in that: described optics cavity (304) is from axle integration chamber, the cavity side connects air inlet/outlet, make to incide laser beam (303) in chamber Multi reflection back and forth simultaneously, greatly increase the absorption optical path length of measurement gas, thereby improve the sensitivity that detects gas.
7. the temperature precise control device for the spectral technique isotope analysis of integration chamber according to claim 1, it is characterized in that: described PID controls and is adopted as the Fuzzy Adaptive PID Control algorithm, action has Temperature Setting, data acquisition, PID to control output, by comparing the difference between real time temperature, design temperature, export control semiconductor refrigerating heap (6) by PID and freeze or heat, make optical path system (1) keep stable in a certain temperature.
8. the temperature precise control device for the spectral technique isotope analysis of integration chamber according to claim 1 is characterized in that: all power supplies of described system all adopt the DC-24V power supply.
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