CN103140009A - Langmuir multi-probe control circuit used for plasma diagnosis - Google Patents
Langmuir multi-probe control circuit used for plasma diagnosis Download PDFInfo
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Abstract
The invention discloses a Langmuir multi-probe control circuit used for plasma diagnosis and belongs to the technical field of plasma diagnosis. The control circuit is located outside a plasma device and comprises three Langmuir single-probes, an alternating-current sawtooth wave supply voltage generation device, a direct-current supply voltage generation device, a double-pole-double-throw switch, a reversing switch, a first double-pole-three-throw switch, a second double-pole-three-throw switch, a first single-pole-single-throw switch, a second single-pole-single-throw switch and a transform resistor. Selection of the Langmuir single-probes, a double-probe, and a three-probe in different diagnosis circuits is carried out through switching-over of the switches in control circuits, and a cleaning circuit is provided for cleaning of the probes. According to the Langmuir multi-probe control circuit used for the plasma diagnosis, similarities of three probe diagnosis methods on an experimental instrument are used, experimental cost can be saved, different methods can be used by switching-over of the control circuits due to the fact that difference of the three probe diagnosis methods are combined, convenience and high efficiency are achieved, experimental period is greatly shortened, and experimental results are enabled to be accurate due to the fact that the probes can be cleaned during experiment.
Description
Technical field
The invention belongs to the Plasma Diagnostics field, relate to the contact diagnostic method, specifically, refer to a kind of Langmuir multiprobe control circuit for plasma diagnostic.
Background technology
Plasma diagnostic is divided into contact and contactless two kinds, and the Langmuir probe technique belongs to a kind of of contact type measurement, is the effective tool that is applied to the earliest plasma diagnostic.
During 1923-1935, Langmuir (Langmuir) uses the electrostatic probe diagnosis plasma first, has developed basic skills and theory, probe technique has been done the research work of a large amount of initiatives, so electrostatic probe is called the Langmuir probe.Electrostatic probe is a conductor that stretches in plasma, it can have various shapes and size, this depends on concrete requirement of experiment, and the most frequently used having is spherical, cylinder and dull and stereotyped three kinds of shapes, and the material of making probe generally uses tungsten, gold, platinum, iridium, graphite etc.
During the work of Langmuir probe, probe is placed in plasma, plasma, probe and external circuit consist of current circuit so.The electromotive force of probe determines by the bias voltage of external circuit, and probe is with having electrical potential difference between plasma, thereby attracts the charged particle in plasma.The variation of probe potential, the variation of locus cause the quantity of the charged particle that probe attracts to change, and react to change for the electric current in probe circuit.The electric current that probe absorbs is relevant with the state of plasma, by measuring the probe current under different condition, obtain the voltage-current curve of probe, then carry out analysis and calculation according to corresponding probe theory, just can obtain the parameters such as plasma temperature, density, current potential.
At present, what be widely used in plasma diagnostic most is the single probe of Langmuir, because the plasma parameter that single-probe method can access is maximum, as floating potential, space potential, electron temperature, electron concentration, Electron energy distribution.But in single probe theory, only has a probe as the reference electrode, at this moment need to use anode, the negative electrode of discharge spout or the locular wall that contacts with plasma etc. as another reference electrode, but this reference electrode can not find in some occasion, such as in the situation that the discharge of electrodless discharge, twilight sunset, ionospheric plasma can't find.And be to change in the cycle at the space potential of some plasma applying plasma, or attenuation change in time.During single probe measurement, the impact that keeps away unavoidable plasma space current potential is so at this moment single probe can't be measured.Therefore, must find an electrode to monitor the potential change of space plasma, develop like this floating measurement method of the two probes of Langmuir.The two probes of Langmuir have two electrodes, two probe circuits only and the very little a part of action of plasma between two probes form the probe loop, whole loop is in the integrated suspension state, the plasma disturbance is little, subject plasma space potential impact is little, can measure in plasma electron temperature, electron concentration in small size scope more.The single probe of Langmuir and two-probe me-thod all need to carry out voltage scanning to probe at specific measuring point place, record the current value under the relevant voltage state, could obtain plasma parameter to obtain typical current-voltage (I-V) indicatrix, then indicatrix to be analyzed accordingly, calculated.This analytical calculation process is very complicated, data volume is large, need rich experience, is only applicable to the parameter measurement of steady-state plasma, and there is certain limitation in the measurement of the plasma parameter of instantaneous discharge.in order to overcome these obstacles, Chen and Sekiguchi(document [1]: the Chen that sees reference, S.L., and Sekiguchi, T., " Instantaneous Direct-Display System of Plasma Parameters by Means of Triple Probe, " Journal of Applied Physics, Vol.26, No.8,1965, pp.2363 – 2375.) provided triple-probe method in nineteen sixty-five, the method is a new simple method, it does not need to carry out voltage scanning just can calculate the value of electron temperature and electron concentration on certain measuring point.The below introduces respectively three kinds of theoretical methods and simple experimental circuit thereof.
The measuring principle figure of the single probe of Lagmuir sees accompanying drawing 1.In Fig. 1,1 is the Langmuir probe, the 2nd, and plasma, the 3rd, exchange sawtooth waveforms supply power voltage generating means, the 4th, voltage measuring apparatus, the 5th, current measure device.Regulate and exchange sawtooth waveforms supply power voltage generating means (Power Unit) 3, output scanning voltage, making Langmuir probe 1 current potential produce positive negative cycle changes, in measuring circuit corresponding to the current value of each magnitude of voltage, drafting pattern, just consist of the volt-ampere characteristic of the single probe of desirable Langmuir, seen Fig. 2.The parameter that can directly obtain from Fig. 2 has: floating potential V
f, plasma space current potential V
s, electronics saturation current I
e0, ion saturation current I
satBy the single probe theory of Langmuir, can calculate the Energy distribution of plasma electron temperature, electron density and electronics.
The measuring principle figure of the two probes of Lagmuir sees Fig. 3.Equally, regulate and exchange sawtooth waveforms supply power voltage generating means 3, output scanning voltage, make the current potential of Langmuir probe 1 produce positive negative cycle variation, in measuring circuit corresponding to the current value of each magnitude of voltage, drafting pattern has just consisted of the volt-ampere characteristic of the two probes of desirable Langmuir, sees Fig. 4.Different from single probe is that the volt-ampere characteristic of two probes is symmetrical, directly can obtain ion saturation current I
Sat1And I
Sat2Theoretical by the two probes of Langmuir, can also calculate plasma electron temperature, electron density.
The measuring principle figure of Lagmuir three probes sees accompanying drawing 5.Wherein two probes of three probes are connected on respectively the two ends of direct current supply voltage generation circuit 6 output voltages, and an other probe suspends.When having plasma 2 to pass through, as long as measure the electrical potential difference V that floats between probe and positive bias probe
d2And the electric current I between positive and negative bias probe loop just can calculate according to three probe theories the value of plasma electron temperature and electron concentration.Triple-probe method not only can be measured steady-state plasma, is also the powerful of transient state plasma measurement.
In sum, if measure in the process of diagnosis at plasma parameter, the single probe of Langmuir, two probe and three kinds of methods of three probes are combined, just can obtain fast, accurately, all sidedly the characterisitic parameter of steady-state plasma and transient state plasma.
Summary of the invention
The present invention is a kind of multiprobe system that the single probe of Langmuir, two probe, three kinds of different diagnostic techniques of three probes are organically combined, can be by switching the difference setting of external circuit, reach quickly and easily three kinds of conversions between different diagnostic methods, thereby obtain the parameter such as plasma electron temperature, electron concentration (ion concentration), floating potential, space potential under different diagnostic method conditions.Langmuir multiprobe control circuit for plasma diagnostic provided by the invention takes full advantage of the single probe of Langmuir, two probe, three kinds of diagnostic methods of three probes used, measure the aspect such as parameter at power supply, cleaning method, probe identical point, and three kinds of diagnostic methods are organically combined.Whole control circuit is positioned at outside plasma device, can be in the situation that keep the plasma device internal state constant, carry out the selection between different diagnostic methods with three probes of the single probe of Langmuir, two probe by the switch in control switching circuit, and realization is to the cleaning operation of probe.
Described control circuit comprises the single probe of three Langmuir, exchanges sawtooth waveforms supply power voltage generating means, direct current supply voltage generation circuit, double-point double-throw switch, reverser, the first DPTT double-pole triple throw switch, the second DPTT double-pole triple throw switch, the first single-pole single-throw switch (SPST), the second single-pole single-throw switch (SPST) and transfer resistance, wherein, be connected with the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST) between three Langmuir probes, control respectively the conduction of the single probe of two of up and down Langmuir and the single probe of middle Langmuir; Two the next positive pole and negative poles that exchange sawtooth waveforms supply power voltage generating means that connect respectively of described double-point double-throw switch, two upper positive pole and negative poles that connect respectively reverser, described reverser connects the both positive and negative polarity of direct current supply voltage generation circuit.
Transfer resistance, the first voltage measuring apparatus and second voltage measuring equipment are connected in parallel between the double-pole pin of described the first DPTT double-pole triple throw switch and the double-pole pin of double-point double-throw switch; The first DPTT double-pole triple throw switch be connected corresponding connection of three of upper, middle and lowers of DPTT double-pole triple throw switch; The first DPTT double-pole triple throw switch the next contact ground connection, the next contact of the second DPTT double-pole triple throw switch is unsettled, and the double-pole pin of the second DPTT double-pole triple throw switch joins with the single probe of upper two Langmuir respectively; Access tertiary voltage measuring equipment between the single probe of the single probe of upper Langmuir and lower Langmuir.
The invention has the advantages that:
(1) utilize the identical point of three kinds of probe diagnostics methods on experimental facilities, can save experimental cost.
(2) in conjunction with the difference of three kinds of diagnostic methods, switch distinct methods by conversion control circuit, convenient and swift, greatly shorten experimental period.
(3) added the cleaning circuit of probe, can clean probe in experimentation, made experimental result more accurate.
Description of drawings
Fig. 1 is the measuring principle figure of the single probe of Langmuir;
Fig. 2 is the I-V curve of the single probe of desirable Langmuir;
Fig. 3 is the measuring principle figure of the two probes of Langmuir;
Fig. 4 is the I-V curve of the two probes of desirable Langmuir;
Fig. 5 is the measuring principle figure of Langmuir three probes;
Fig. 6 is the Langmuir multiprobe control circuit structural representation for plasma diagnostic provided by the invention.
In figure:
The 1-Langmuir multiprobe; The 2-plasma device; 3-exchanges sawtooth waveforms supply power voltage generating means; The 4-voltage measuring apparatus; The 5-current measure device; 6-direct current supply voltage generation circuit; The 7-function signal generator; The 8-power amplifier; S1 is double-point double-throw switch; S2 is reverser; S3 and S4 are respectively the first DPTT double-pole triple throw switch and the second DPTT double-pole triple throw switch; S5 and S6 are respectively the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST); R1 is transfer resistance; V1, V2 and V3 are respectively first, second, and third voltage measuring apparatus.
Embodiment
Describe embodiments of the present invention in detail below in conjunction with accompanying drawing.
In the present invention with the tungsten filament of three diameter 0.3mm as Langmuir multiprobe 1, be arranged on same high-temperature resistant aluminium oxide (Al
2O
3) in four hole earthenwares, the distance of 2mm spaced to one another.Tungsten filament is in the same place with the screened coaxial cable wire bonding, passes the wall of plasma device 2 by special ring flange integral body, links together with the output of control circuit.Whole control circuit is positioned at outside plasma device 2, can be in the situation that keep plasma device 2 internal states constant, carry out the selection between different diagnostic methods with three probes of the single probe of Langmuir, two probe by the switch in control switching circuit, and realization is to the cleaning operation of probe.
As shown in Figure 6, Langmuir multiprobe control circuit for plasma diagnostic provided by the invention, mainly comprise Langmuir multiprobe 1, exchanged sawtooth waveforms supply power voltage generating means 3, direct current supply voltage generation circuit 6, double-point double-throw switch S1, reverser S2, the first DPTT double-pole triple throw switch S 3, the second DPTT double-pole triple throw switch S 4, the first single-pole single-throw switch (SPST) S5, the second single-pole single-throw switch (SPST) S6 and transfer resistance R1, V1, V2 and V3 are respectively first, second, and third voltage measuring apparatus.
Wherein, be connected with the first single-pole single-throw switch (SPST) S5 and the second single-pole single-throw switch (SPST) S6 between three probes of Langmuir multiprobe probe 1, control respectively the conduction of two probes in up and down and middle probe.
Two the next positive pole and negative poles that exchange sawtooth waveforms supply power voltage generating means 3 that connect respectively of described double-point double-throw switch S1, two upper positive pole and negative poles that connect respectively reverser S2, described reverser S2 connects the both positive and negative polarity of direct current supply voltage generation circuit 6.
Transfer resistance R1, voltage measuring apparatus V1 and voltage measuring apparatus V2 are connected in parallel between the double-pole pin of described the first DPTT double-pole triple throw switch S 3 and the double-pole pin of double-point double-throw switch S1.The first DPTT double-pole triple throw switch S 3 be connected corresponding connection of three of upper, middle and lowers of DPTT double-pole triple throw switch S 4; The next contact ground connection of the first DPTT double-pole triple throw switch S 3, the next contact of the second DPTT double-pole triple throw switch S 4 is unsettled; The double-pole pin of the second DPTT double-pole triple throw switch S 4 joins with upper two probes respectively; Access tertiary voltage measuring equipment V3 between upper probe and lower probe.
The first voltage measuring apparatus V1 is by measuring transfer resistance R1(R1=1k Ω) magnitude of voltage at two ends, determine loop current I, be equivalent to current measure device.Second voltage measuring equipment V2 is used for measuring the current potential of measuring circuit middle probe.This two-way measuring-signal is linked in acquisition system, generates current-voltage (I-V) indicatrix.The measurement data of the first voltage measuring apparatus V1 and second voltage measuring equipment V2 is that the GEN2i portable data instrument (data collecting instrument is totally 16 difference channel isolations, and the maximum acquisition rate of each passage is 200kS/s) by HBM gathers, shows and stores.
Langmuir multiprobe 1 is immersed in plasma device 2, and the multiprobe system is fixed in plasma device 2, draw by the wall that special ring flange makes the signal lead-out wire of each probe pass plasma device 2.The wall ground connection of plasma device 2.The multiprobe system is comprised three Langmuir probes, connect separately a signal lead-out wire, wherein two signal lead-out wires are connected to the output of circuit control system, and an other signal lead-out wire suspends.
Function signal generator 7 has been composed in series with power amplifier 8 and has exchanged sawtooth waveforms supply power voltage generating means 3, and being used for provides scanning voltage to the single probe of Langmuir and two probe.Exchange sawtooth waveforms supply power voltage generating means 3 and use function signal generator 7 and the power amplifier 8 of the GWINSTEK GFG-8020H of producer model to be in series, the output frequency (1-1M Hz) of convenient adjusting sawtooth waveforms and output amplitude (± 100V).
Direct current supply voltage generation circuit 6 adopts SUING SS2323 can follow the tracks of DC stable power supply, adjustable DC voltage-stabilizing signal in exportable 0-64V scope, can follow the tracks of DC stable power supply by two is in series, supply with the DC measurement voltage of 40V can for Langmuir three probes, also can export the cleaning voltage of 100V left and right, in order to the cleaning of probe.
Adopt the Langmuir multiprobe control circuit for plasma diagnostic provided by the invention, can realize single probe diagnostics circuit, two probe diagnostics circuit and three probe diagnostics circuit, specific implementation is as follows:
1, single probe diagnostics circuit:
All get to double-point double-throw switch S1, the first DPTT double-pole triple throw switch S 3 and the second DPTT double-pole triple throw switch S 4 the next, the first single-pole single-throw switch (SPST) S5 and the second single-pole single-throw switch (SPST) S6 disconnect, the positive pole that exchanges like this sawtooth waveforms supply power voltage generating means 3 outputs to a probe, negative pole output ground connection becomes and uses in three probes wherein diagnostic circuit as the single probe of Langmuir.Regulate exchanging sawtooth waveforms supply power voltage generating means 3, export positive and negative intermittent scanning voltage, use second voltage measuring equipment V2 to measure Langmuir probe 1 both end voltage, loop current is transformed by the voltage at measurement transfer resistance R1 two ends.As the x axle, current signal is as y axle drafting pattern with voltage signal, the I-V curve of single probe, obtain corresponding plasma parameter by single probe principle.If closed the first single-pole single-throw switch (SPST) S5 and the second single-pole single-throw switch (SPST) S6, that is: use as single probe with three probes that are shorted together, improved the collection area of probe, improved to a certain extent the signal to noise ratio of collection signal.Can obtain floating potential, space potential, electron concentration, electron temperature and the Electron energy distribution at the specific measuring point of plasma place by single probe principle.
2, two probe diagnostics circuit:
Get to double-point double-throw switch S1 the next, the first DPTT double-pole triple throw switch S 3 and the second DPTT double-pole triple throw switch S 4 are got to meta, the first single-pole single-throw switch (SPST) S5 and the second single-pole single-throw switch (SPST) S6 disconnect, and become to use in three probes wherein two diagnostic circuits as the two probes of Langmuir.Receive respectively on two probes at the output voltage the two poles of the earth that exchange sawtooth waveforms supply power voltage generating means 3, and like this, the circuit of two probes is integrated suspensions, has reduced the disturbance of plasma.Regulate exchanging sawtooth waveforms supply power voltage generating means 3, export positive and negative intermittent scanning voltage, measure and record two voltage and loop current drafting patterns between probe, just formed the I-V curve of two probes.Can obtain electron temperature and the electron concentration of tested plasma by two probe principles.
3, three probe diagnostics circuit:
Double-point double-throw switch S1 is got to upper, the first DPTT double-pole triple throw switch S 3 and the second DPTT double-pole triple throw switch S 4 are got to upper, and the first single-pole single-throw switch (SPST) S5 and the second single-pole single-throw switch (SPST) S6 disconnect, and have just consisted of the diagnostic loop of Langmuir three probes.Regulate the output of direct current supply voltage generation circuit 6, the setting voltage output amplitude is 40V, and output the two poles of the earth of power supply are connected on respectively on wherein two probes, and an other probe suspends.Use the electrical potential difference between tertiary voltage measuring equipment V3 measurement positive bias probe and suspension probe, loop current is still converted by transfer resistance R1, just can calculate according to three probe theories electron temperature and the electron concentration of tested plasma.
4, cleaning circuit
Owing to may causing probe to pollute in experimentation, so also designed the cleaning circuit of probe in control circuit of the present invention.Cleaning circuit be to probe in addition ± voltage of 100V left and right, utilize probe to attract electronics and ion in plasma to bombard detecting probe surface under the voltage effect, reach the purpose of removing detecting probe surface pollutant.The output amplitude of direct current supply voltage generation circuit 6 is adjusted to the 100V left and right, get to double-point double-throw switch S1 upper, the first DPTT double-pole triple throw switch S 3 and the second DPTT double-pole triple throw switch S 4 are got to the next, the first single-pole single-throw switch (SPST) S5 and the second single-pole single-throw switch (SPST) S6 are closed, become a probe to clean three probe short circuits like this, the cleaning voltage generating means adopts two SUING SS2323 can follow the tracks of DC stable power supply and is in series, adjustable DC voltage-stabilizing signal in exportable 0-128V scope.For symmetry and the adequacy that guarantees to clean, can change every now and then the polarity of cleaning power supply by reverser S2.
The present invention is taking into full account the single probe of Langmuir, two probe, three kinds of diagnostic methods of three probes on the basis of the identical point that exists aspect power supply, cleaning method, probe use, measurement parameter or discrepancy, take full advantage of identical point, utilize circuit control system to distinguish three kinds of different diagnostic methods.Whole circuit control system is positioned at outside plasma device, can be in the situation that keep the plasma device internal state constant, carry out the selection between different diagnostic methods with three probes of the single probe of Langmuir, two probe by the switch in the commutation circuit control system, and realization is to the cleaning operation of probe.
Claims (7)
1. be used for the Langmuir multiprobe control circuit of plasma diagnostic, it is characterized in that: described control circuit integral body is positioned at outside plasma device, carry out the selection between different diagnostic circuits with three probes of the single probe of Langmuir, two probe by the switch in control switching circuit, and the cleaning operation of cleaning circuit realization to probe is provided.
2. the Langmuir multiprobe control circuit for plasma diagnostic according to claim 1, it is characterized in that: described control circuit comprises the single probe of three Langmuir of upper, middle and lower, exchange sawtooth waveforms supply power voltage generating means, the direct current supply voltage generation circuit, double-point double-throw switch, reverser, the first DPTT double-pole triple throw switch, the second DPTT double-pole triple throw switch, the first single-pole single-throw switch (SPST), the second single-pole single-throw switch (SPST) and transfer resistance, wherein, be connected with respectively the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST) between the single probe of three Langmuir of upper, middle and lower, control respectively the conduction of the single probe of two of up and down Langmuir and the single probe of middle Langmuir, two the next positive pole and negative poles that exchange sawtooth waveforms supply power voltage generating means that connect respectively of described double-point double-throw switch, two upper positive pole and negative poles that connect respectively reverser, described reverser connects the both positive and negative polarity of direct current supply voltage generation circuit,
Transfer resistance, the first voltage measuring apparatus and second voltage measuring equipment are connected in parallel between the double-pole pin of described the first DPTT double-pole triple throw switch and the double-pole pin of double-point double-throw switch; The first DPTT double-pole triple throw switch be connected corresponding connection of three of upper, middle and lowers of DPTT double-pole triple throw switch; The first DPTT double-pole triple throw switch the next contact ground connection, the next contact of the second DPTT double-pole triple throw switch is unsettled, and the double-pole pin of the second DPTT double-pole triple throw switch joins with the single probe of upper two Langmuir respectively; Access tertiary voltage measuring equipment between the single probe of the single probe of upper Langmuir and lower Langmuir.
3. the Langmuir multiprobe control circuit for plasma diagnostic according to claim 1 and 2, is characterized in that, the single probe diagnostics circuit of described Langmuir:
All get to double-point double-throw switch, the first DPTT double-pole triple throw switch and the second DPTT double-pole triple throw switch the next, the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST) disconnect, the positive pole that exchanges like this sawtooth waveforms supply power voltage generating means outputs to the single probe of a Langmuir, negative pole output ground connection becomes and uses in the single probes of three Langmuir wherein diagnostic circuit as the single probe of Langmuir; Regulate and exchange sawtooth waveforms supply power voltage generating means, export positive and negative intermittent scanning voltage, use the second voltage measuring equipment to measure the single probe both end voltage of Langmuir, the first voltage measuring apparatus is measured the voltage at transfer resistance two ends, and loop current is transformed by the voltage at transfer resistance two ends.
4. the Langmuir multiprobe control circuit for plasma diagnostic according to claim 1 and 2, it is characterized in that: the single probe diagnostics circuit of described Langmuir, all get to double-point double-throw switch, the first DPTT double-pole triple throw switch, the second DPTT double-pole triple throw switch the next, the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST) are closed, use as the single probe of a Langmuir with the single probe of three Langmuir that are shorted together.
5. the Langmuir multiprobe control circuit for plasma diagnostic according to claim 1 and 2 is characterized in that: the two probe diagnostics circuit of described Langmuir:
Double-point double-throw switch is got to the next, the first DPTT double-pole triple throw switch, the second DPTT double-pole triple throw switch are got to meta, the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST) disconnect, and become to use three upper two probes in Langmuir list probe as the diagnostic circuit of the two probes of Langmuir; Receive respectively on two probes at the output voltage the two poles of the earth that exchange sawtooth waveforms supply power voltage generating means; Obtain probe voltage and loop current with the first voltage measuring apparatus and second voltage measuring equipment respectively.
6. the Langmuir multiprobe control circuit for plasma diagnostic according to claim 1 and 2 is characterized in that: described Langmuir three probe diagnostics circuit:
Double-point double-throw switch is got to upper, the first DPTT double-pole triple throw switch, the second DPTT double-pole triple throw switch are got to upper, and the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST) disconnect, and have just consisted of the diagnostic loop of Langmuir three probes; Regulate the output of direct current supply voltage generation circuit, the setting voltage output amplitude is 40V, and output the two poles of the earth of power supply are connected on respectively on wherein single probes of two Langmuir, and the single probe of an other Langmuir suspends; Use the tertiary voltage measuring equipment to measure electrical potential difference between the single probe of positive bias Langmuir and the single probe of suspension Langmuir, loop current still is transformed by the voltage that the first voltage measuring apparatus is measured transfer resistance two ends.
7. the Langmuir multiprobe control circuit for plasma diagnostic according to claim 1 and 2 is characterized in that: described cleaning circuit:
The output amplitude of direct current supply voltage generation circuit is adjusted to 100V, double-point double-throw switch is got to upper, the first DPTT double-pole triple throw switch, the second DPTT double-pole triple throw switch are got to the next, the first single-pole single-throw switch (SPST) and the second single-pole single-throw switch (SPST) are closed, like this three probe short circuits are become the single probe of a Langmuir to clean, change the polarity of cleaning power supply by reverser.
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