CN103056867A - Flexible micro-moving manipulator - Google Patents
Flexible micro-moving manipulator Download PDFInfo
- Publication number
- CN103056867A CN103056867A CN201210543291XA CN201210543291A CN103056867A CN 103056867 A CN103056867 A CN 103056867A CN 201210543291X A CN201210543291X A CN 201210543291XA CN 201210543291 A CN201210543291 A CN 201210543291A CN 103056867 A CN103056867 A CN 103056867A
- Authority
- CN
- China
- Prior art keywords
- font
- tie
- flexible
- horizontal
- clamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Manipulator (AREA)
Abstract
The invention discloses a flexible micro-moving manipulator which is characterized in that the flexible micro-moving manipulator mainly comprises a piezoceramic driver, a ball-shaped joint, an H-shaped connecting beam, a U-shaped rigid supporting beam, a base, two flexible branched chains, two L-shaped connecting beams and two clamping ends; the ball-shaped joint is arranged at the top end of the piezoceramic driver, the tail end of the piezoceramic driver is fixedly arranged on the middle internal lateral side wall of the U-shaped rigid supporting beam through threads rigidly, and the ball-shaped joint abuts against a middle position on the lower end face of a linear-shaped beam of the H-shaped connecting beam to form hertz contact; the U-shaped rigid supporting beam is arranged on a base of a U-shaped structure; and the two flexible branched chains, the two L-shaped connecting beams and the two clamping terminals are arranged on right lateral side and left lateral side of the manipulator in a bilateral symmetry mode with the ball-shaped joint and the piezoceramic driver as a central line.
Description
Technical field
The present invention relates to the micro-/ nano operating system of mechanical field, be specially a kind of flexible micro manipulator with two clamping ends.
Background technology
Micro mechanical technology is the important branch of nanometer technique.The micromachine parts are processed, are made in operation, the remodeling processing that application scanning probe microscope technology is carried out molecule or atom magnitude and even micromechanics is whole, utilize the special-purpose mini-medical apparatuses such as small scissors, microcam, microsensor to carry out the realization that these situations of invasive medical operating are hindered by Wicresoft in the animal and plant cells transgenosis injection in the bioengineering field, medical field, all are to be based upon on the accuracy basis of micro OS or device.The positioning accuracy of micro/nano level operating system is the key of above-mentioned all kinds of microoperation successes.Along with people to the going deep into of microcosmos research, precise operation has exceeded human operating limit gradually, and the Robotics that has merged machinery, electronics, automation and the information processing technology is human day by day urgent requirements in introducing and the development of microscopic fields.The appearance of Piezoelectric Ceramic equipment so that micron and even the driving of nano grade positioning precision and resolution ratio control can realize, thereby also arise at the historic moment so that have the micro-manipulating robot technology of carrying out the precise operation ability at micro-nano-scale, and as the main execution unit of micro-manipulating robot, have the precision positioning ability and accurately the research of the manipulator of clamping action power also obtained various countries researchers' attention.
Germany PI, the companies such as Britain Queensgate have all produced the formed product based on the nanoscale micro-operation hand of Piezoelectric Ceramic, are mainly used in the occasions such as light system detection, little processing, little assembling.J.M.Breguet etc., new design (the J.M.Breguet of large stroke, high-resolution, multiple degrees of freedom piezoelectric ceramic actuator, R.Clavel, New designs for long range, highresolution, multi-degree-of-freedom piezoelectric actuators, Proceedings of the 6
ThInternational Conference on New Actuator, June, 1998:198-201.) in reported the six-freedom micro operation hand of engineering college of Swiss Confederation development; P.Kallio etc., 3DOF parallel micro-manipulator device (P.Kallio, M, the Lind of Piezoelectric Ceramic, Q.Zhou, H.N.Koivo, A 3-DOF piezo-hydraulic parallel micromanipulator, Proceedings of the IEEE International Conference on Robitics andAutomation, Leuven, Belgium, May, 1998:1823-1828.) in reported the freedom degree parallel connection micro-operation hand of Tampere, Finland polytechnical university development; Mohd Nashrul etc., a kind of new design (Mohd Nashrul Mohd Zubir of the flexible micro clamping device based on Piezoelectric Ceramic, BijanShirinzadeh, Yanling Tian, A new design of piezoelectric drivencompliant-based microgripper for micromanipulation, Mechanism andMachine Theory, 2009, reported a kind of optimal design and performance evaluation of the flexible parallel connection micro clamping device based on Piezoelectric Ceramic in 2248-2264.).In this field, the researchers of China have also been made certain achievement, such as W.Dong etc., adopt the design (W.Dong of the accurate flexible parallel connection detent mechanism of double piezoelectric ceramic driver drives, L.N.Sun, Z.J.Du.Design of aprecision compliant parallel positioner driven by dual piezoelectricactuators.Sensor and Actuators A, 2007,135:250-256) the six-freedom parallel micro-operation hand of the Piezoelectric Ceramic of the Harbin Institute of Technology of middle report development; Yang Guoxing etc., declining based on the flexible hinge of Finite Element Method, (China Mechanical Engineering 2006,10 phases of 17 volumes, has been introduced the micro clamping device take flexible hinge as revolute pair in 1074-1078) to the clamper optimal design.But the frame mode of the hard and soft combination of employing that above-mentioned micro clamper has, and the flexible structure proportion is relatively less, and larger displacement output mainly realizes that by the grand rotating ring joint of rigidity performance is restricted; The then modes that directly driven by piezoelectric ceramic actuator that adopt that have, the centre lacks amplifying element, has directly limited the deflection that such micro clamper end effector can provide, and can not satisfy actual needs more.
Summary of the invention
For the deficiencies in the prior art, the technical problem that quasi-solution of the present invention is determined is that a kind of flexible micro manipulator is provided.This manipulator device adopts flexible parallel connection structure, single-freedom and flexible hinge and piezoelectric ceramic actuator actuation techniques, have two clamping ends, can be applicable to little/receive the system of operating machine, have simple in structure, high rigidity, high accuracy, low inertia, compact conformation, error free accumulation, machinery-free friction, gapless, and be convenient to the advantages such as processing and manufacturing and industrializing implementation.
The technical scheme that the present invention solve the technical problem is: design a kind of flexible micro manipulator, it is characterized in that this manipulator mainly comprises: a piezoelectric ceramic actuator, a globe joint, " H " font tie-beam, " U " font rigid bracing beam and a base, and two flexible side chains, two " L " font tie-beams and two clamping ends;
Described globe joint is installed in the top of piezoelectric ceramic actuator, the tail end of piezoelectric ceramic actuator is rigidly secured on the middle madial wall of described " U " font rigid bracing beam by screw thread, and described globe joint is withstood on the centre position of " one " tee beam lower surface of described " H " font tie-beam, consist of a hertz contact;
Described base is " U " character form structure, and outside the width of the Width of its horizontal gird described " U " font rigid bracing beam counterpart was wide, all the other geomeries were consistent with described " U " font rigid bracing beam; Described " U " font rigid bracing beam is installed on the base of " U " character form structure, and makes the upper surface alignment of both horizontal girds;
Described " L " font tie-beam comprises left tie-beam and right tie-beam, and left and right sides shape is symmetrical consistent; Described flexible side chain comprises left flexible side chain and right flexible side chain, about two flexible branched structures the same; Its left flexible side chain arranges between the inboard of left side " 1 " font vertical beam of the left side of left side " 1 " the font vertical beam that is connected to described " H " font tie-beam and described " U " font rigid bracing beam; Described clamping end comprises that the terminal and right clamping of left clamping is terminal, two clamping ends are the right angle sector structure, and left and right sides shape and structure is symmetrical consistent, its arc-shaped side is vacant end, two straight flanges are mutually vertical, a straight flange horizontal positioned, another straight flange is vertically placed, two straight flanges of vertically placing are the working end, the straight flange of two horizontal positioned is link, its left clamping terminal horizontal cloth be contained in left flexible side chain directly over, the straight flange bottom surface that left clamping terminal horizontal is placed passes on left left tie-beam and is connected with the outside of left side " 1 " the font vertical beam of described " U " word rigid bracing beam, and the top of direct left side " 1 " the font straight beam with described " H " font tie-beam in the right side, bottom surface of left clamping terminal horizontal placement is connected; Described right flexible side chain, right tie-beam and right clamping end line centered by described globe joint and piezoelectric ceramic actuator, left-right symmetry cloth is contained in the right side of manipulator;
Described flexible side chain is made of two horizontal girds, and two horizontal girds are arranged from top to bottom, all have two groups of semicircle grooves on each horizontal gird, and every group of semicircle groove is two, is symmetrically distributed in up and down on the inside and outside wall at two ends, the horizontal gird left and right sides; Respectively have one group of semicircle groove on the left and right sides sidewall of two " 1 " font vertical beams of described " H " font tie-beam the first half, every group of semicircle groove is two, and structure is identical, left-right symmetry; Equal symmetry has a semicircle groove on the left and right sides sidewall of the vertical part of described " L " font tie-beam upper end, and equal symmetry has a semicircle groove on the top and bottom sidewall of described " L " font tie-beam horizontal component; Described semicircle groove shape and structure is identical.
Compared with prior art, flexible micro manipulator of the present invention has following advantage:
1. the compliant mechanism of fine motion manipulator can utilize line to cut integrated process technology integral body to process, and avoids assembling, gapless, without friction, need not lubricate, and is conducive to realize the micro/nano level hi-Fix.
2. fine motion machinery hand getting flexible parallel connection structure has the advantages such as high rigidity, high accuracy, low inertia, compact conformation, error free accumulation.
3. the hand getting of fine motion machinery as transmission mechanism, has the advantages such as machinery-free friction, gapless with the single-freedom and flexible hinge.In addition, based on the strain of material, the corner that flexible hinge produces and executor tail end working space are all very small, can effectively eliminate the shortcomings such as parallel institution unintentional nonlinearity.
4. the hand getting of fine motion machinery promotes to drive link with piezoelectric ceramic actuator, can realize little/receive the clamping position of the member such as small, frangible in the operating process, can be used as little/receive the auxiliary positioner of operating system, realize microfeed and precision positioning.
Description of drawings
Fig. 1 is the overall structure schematic diagram of a kind of embodiment of flexible micro manipulator of the present invention;
Fig. 2 is the agent structure schematic diagram of a kind of embodiment of flexible micro manipulator of the present invention;
Fig. 3 is the understructure schematic diagram of a kind of embodiment of flexible micro manipulator of the present invention;
Fig. 4 is agent structure (Fig. 2) the cross section integral structure schematic diagram of a kind of embodiment of flexible micro manipulator of the present invention.
The specific embodiment
Below in conjunction with preferred embodiment and accompanying drawing thereof, the present invention is described in further detail below.
The flexible micro manipulator of the present invention's design (is called for short manipulator, referring to Fig. 1-4), mainly comprise two flexible side chain 1, a base 2, " U " font rigid bracing beam 3, " H " font tie-beam 4, symmetrical two " L " font tie-beams 5, symmetrical two clamping ends 6, a piezoelectric ceramic actuator 7 and globe joints 8 that structure is the same;
" U " of the present invention font rigid bracing beam 3 is vertically placed along the center line of manipulator, its by about two vertical beams and a horizontal gird form, about two vertical beams in the middle of " H " font tie-beam 4 is installed, left flexible side chain 11 and right flexible side chain 12 be arranged in " U " font rigid bracing beam 3 about two vertical beams and " H " font tie-beam 4 about in two spaces between two vertical beams; Have two screwed holes 31 at about 3 two vertical beams of described " U " font rigid bracing beam, 32, described screwed hole 31,32 centers of circle are positioned on the up and down symmetrical center line of described flexible side chain 1, on horizontal gird, also have from left to right two screwed holes 33,34, described screwed hole 33, flexible side chain 11 about 34 centers of circle lay respectively at, on the left-right symmetry center line of 12 horizontal girds, described four screwed holes 31,32,33,34 is measure-alike, distributing position respectively with base 2 on screwed hole 21,22,23,24 is corresponding one by one, described " U " font rigid bracing beam 3 and base 2 are rigidly connected with bolt by described two groups of screwed holes, have the screwed hole 35 of perforation on the interior lateral wall of described " U " font rigid bracing beam 3 horizontal girds, be used for described piezoelectric ceramic actuator 7 is fixed between " U " font rigid bracing beam 3 and " H " font tie-beam 4.
" H " of the present invention font tie-beam 4 is vertically placed along the center line of manipulator, flexible side chain 11 about being positioned at, between 12, described " H " font tie-beam is comprised of symmetrical two " 1 " word beams and middle " one " word beam, two " 1 " word beam the latter half lateral walls of described " H " font tie-beam 4 respectively with about flexible side chain 11,12 level connection joints, all have one group of semicircle groove on two " 1 " word beam the first half, every group of semicircle groove is two, structure is identical, left-right symmetry is distributed in about described " 1 " word beam the first half on two sidewalls respectively, described two pairs of semicircle grooves are labeled as 41 from left to right, 42, the upper surface of described two " 1 " word beams vertically is connected with described two fan-shaped clamping ends 6, the lower surface with about flexible side chain 11 concordant with 12 lower surface;
" L " of the present invention font tie-beam comprises
Shape tie-beam 51 Hes
Shape tie-beam 52, both are symmetrical set the outside at described " U " font rigid bracing beam 3 about the center line of manipulator, the left and right sides, vertical part upper end sidewall respectively symmetry has one group of groove 511 and 521, and horizontal component top and bottom sidewall respectively symmetry has one group of groove 512 and 522, and is described
Shape tie-beam 51 Hes
The vertical part upper end of shape tie-beam 52 vertically is connected with described two clamping ends 6, and is described
The right side of shape tie-beam 51 horizontal components is connected with described " U " font rigid bracing beam 3 lateral walls, and is described
The left side of shape tie-beam 52 horizontal components is connected with described " U " font rigid bracing beam 3 lateral walls.
Described clamping end 6 comprises left clamping terminal 61 and right clamping end 62, two clamping ends are the right angle sector structure, and left and right sides shape and structure is symmetrical consistent as symmetry axis take the center line of manipulator, is symmetrical set, its arc-shaped side is vacant end, two straight flanges are mutually vertical, a straight flange horizontal positioned, and another straight flange is vertically placed, described two vertical straight flanges are the working end, be positioned at manipulator inside, near its center line and left-right symmetry, be used for the clamping object; The straight flange of two horizontal positioned is link, and the right-hand member downside of the horizontal straight flange of wherein said left clamping end 61 is connected left end downside and described with the beam upper end, a left side " 1 " of described " H " font tie-beam 4
Shape tie-beam 51 vertically connects the part upper end, as a same reason, described right clamping terminal 62 is consistent with terminal 61 symmetrical configuration of left clamping, and the left end downside of its horizontal straight flange is connected right-hand member downside and described with the beam upper end, the right side " 1 " of described " H " font tie-beam 4
Shape tie-beam 52 vertically connects the part upper end.
The top of piezoelectric ceramic actuator 7 of the present invention or an end are equipped with (screw thread is rigidly connected) globe joint 8(referring to Fig. 1), and be connected with " U " font rigid bracing beam 3 bolts on the madial wall of its afterbody or the other end withstand on described " U " font rigid bracing beam 3 horizontal girds and by tapped through hole 35; Described globe joint 8 withstands on the centre position, lower surface of " one " tee beam of " H " font tie-beam 4, realizes a hertz contact.
Described base 2 is " U " character form structure, left and right sides vertical beam size and described " U " font rigid bracing beam 3 counterpart consistent size, and horizontal gird is then wide than described " U " font rigid bracing beam 3 counterparts; Be distributed with four screwed holes 21,22,23,24 on the described base 2, screwed hole 21,22,23,24 with described " U " font rigid bracing beam 3 on screwed hole 31,32,33,34 positions corresponding one by one, and measure-alike, realize both being rigidly connected by described one to one screwed hole and bolt.
The further feature of flexible micro manipulator of the present invention is, other structures except piezoelectric ceramic actuator 5 and globe joint 8, comprise that described two flexible side chains 1, " H " font tie-beam 4, " U " font rigid bracing beam 3 and 51,52 and two clamping ends 6 of two " L " font tie-beams are integrated, utilize line cutting (WEDM) integral processing method to be processed into (referring to Fig. 4) by whole block material.
Operation principle and the process of flexible micro manipulator of the present invention are as follows: drive piezoelectric ceramic actuator 7, it is extended, promote " one " tee beam of " H " font tie-beam 4, under " one " tee beam drives, be connected in its left side, the flexible side chain 11 of right both sides, single-freedom and flexible hinge (semicircle groove) 111 on 12,112,113,114 and 121,122,123,124 strains that bend, so that " H " font tie-beam 4 produces traveling priority upwards, thereby promotion is connected in the terminal 6 horizontal straight flanges of two fan-shaped clampings of " H " font tie-beam 4 tops and moves up with " H " font tie-beam 4 link positions, in the moving process, active force through the terminal 6 horizontal straight flanges of fan-shaped clamping to both sides
Shape tie-beam 51 Hes
Shape tie-beam 52 transmits, and because
Shape tie-beam 51 Hes
The horizontal ends of shape tie-beam 52 is connected by two vertical beams and base 2 rigidity of " U " font rigid bracing beam 3 respectively, played certain restrictive function, thereby so that the single-freedom and flexible hinge (semicircle groove) 41 on the relevant position, 511,512 and 42,521,522 strains that also bend, draw two fan-shaped clampings terminal 6 horizontal straight flanges and producing the downward deflection of direction, the vertical straight flange of left like this clamping end 61 produces anticlockwise deflection when making progress translation, and the vertical straight flange of right clamping end 62 produces clockwise deflection when making progress translation, namely the flexible micro manipulator about two clamping ends 61,62 produce the motion that is separated from each other; Cancel the driving that is applied on the piezoelectric ceramic actuator 7, piezoelectric ceramic actuator 7 length reduction, act on " H " font tie-beam 4,
" shape tie-beam 51 Hes
Active force on the shape tie-beam 52 fades away, each locational single-freedom and flexible hinge returns to reset condition gradually under the flexible effect of material self, so that the flexible micro manipulator about two clamping ends 61,62 produce motion close to each other, thereby realize the clamping action to object.
Flexible micro manipulator of the present invention has increased flexible link, can effectively improve the actual output of end effector, can be used as the auxiliary operation mechanism of micro-nano operating system, realizes fast trace feeding and precision positioning.
The present invention does not address part and is applicable to prior art.
What need supplementary notes is, the installation position word of the parts such as description scheme of the present invention described " upper and lower ", " forward and backward ", " left and right " according to shown in the embodiment accompanying drawing or the custom, only has relativity, perhaps only be in order to narrate conveniently, not represent uniqueness and the indispensability of this installation site.
Claims (2)
1. flexible micro manipulator, it is characterized in that this manipulator mainly comprises: a piezoelectric ceramic actuator, a globe joint, " H " font tie-beam, " U " font rigid bracing beam and a base, and two flexible side chains, two " L " font tie-beams and two clamping ends;
Described globe joint is installed in the top of piezoelectric ceramic actuator, the tail end of piezoelectric ceramic actuator is rigidly secured on the middle madial wall of described " U " font rigid bracing beam by screw thread, and described globe joint is withstood on the centre position of " one " tee beam lower surface of described " H " font tie-beam, consist of a hertz contact;
Described base is " U " character form structure, and outside the width of the Width of its horizontal gird described " U " font rigid bracing beam counterpart was wide, all the other geomeries were consistent with described " U " font rigid bracing beam; Described " U " font rigid bracing beam is installed on the base of " U " character form structure, and makes the upper surface alignment of both horizontal girds;
Described " L " font tie-beam comprises left tie-beam and right tie-beam, and left and right sides shape is symmetrical consistent; Described flexible side chain comprises left flexible side chain and right flexible side chain, about two flexible branched structures the same; Its left flexible side chain arranges between the inboard of left side " 1 " font vertical beam of the left side of left side " 1 " the font vertical beam that is connected to described " H " font tie-beam and described " U " font rigid bracing beam; Described clamping end comprises that the terminal and right clamping of left clamping is terminal, two clamping ends are the right angle sector structure, and left and right sides shape and structure is symmetrical consistent, its arc-shaped side is vacant end, two straight flanges are mutually vertical, a straight flange horizontal positioned, another straight flange is vertically placed, two straight flanges of vertically placing are the working end, the straight flange of two horizontal positioned is link, its left clamping terminal horizontal cloth be contained in left flexible side chain directly over, the straight flange bottom surface that left clamping terminal horizontal is placed passes on left left tie-beam and is connected with the outside of left side " 1 " the font vertical beam of described " U " word rigid bracing beam, and the top of direct left side " 1 " the font straight beam with described " H " font tie-beam in the right side, bottom surface of left clamping terminal horizontal placement is connected; Described right flexible side chain, right tie-beam and right clamping end line centered by described globe joint and piezoelectric ceramic actuator, left-right symmetry cloth is contained in the right side of manipulator;
Described flexible side chain is made of two horizontal girds, and two horizontal girds are arranged from top to bottom, all have two groups of semicircle grooves on each horizontal gird, and every group of semicircle groove is two, is symmetrically distributed in up and down on the inside and outside wall at two ends, the horizontal gird left and right sides; Respectively have one group of semicircle groove on the left and right sides sidewall of two " 1 " font vertical beams of described " H " font tie-beam the first half, every group of semicircle groove is two, and structure is identical, left-right symmetry; Equal symmetry has a semicircle groove on the left and right sides sidewall of the vertical part of described " L " font tie-beam upper end, and equal symmetry has a semicircle groove on the top and bottom sidewall of described " L " font tie-beam horizontal component; Described semicircle groove shape and structure is identical.
2. flexible micro manipulator according to claim 1, it is characterized in that described flexible side chain, " H " font tie-beam, " U " font rigid bracing beam, " L " font tie-beam and clamping end are integrated, utilize line cutting integral processing method to be processed into by whole block material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210543291.XA CN103056867B (en) | 2012-12-13 | 2012-12-13 | Flexible micro-moving manipulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210543291.XA CN103056867B (en) | 2012-12-13 | 2012-12-13 | Flexible micro-moving manipulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103056867A true CN103056867A (en) | 2013-04-24 |
| CN103056867B CN103056867B (en) | 2015-04-15 |
Family
ID=48099903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210543291.XA Expired - Fee Related CN103056867B (en) | 2012-12-13 | 2012-12-13 | Flexible micro-moving manipulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103056867B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104647347A (en) * | 2014-09-26 | 2015-05-27 | 浙江大学 | Flexible hinge amplification-based piezoelectric microgripper |
| CN105643592A (en) * | 2016-03-15 | 2016-06-08 | 河北工业大学 | Symmetrical decoupling and single degree of freedom flexible operation mechanism |
| CN105690358A (en) * | 2016-04-18 | 2016-06-22 | 河北工业大学 | Flexible inching operation mechanism |
| CN108297086A (en) * | 2018-03-29 | 2018-07-20 | 天津大学 | A kind of asymmetric two level displacement equations flexibility microoperation mechanism |
| CN111148938A (en) * | 2017-09-22 | 2020-05-12 | 宗拓贝尔照明器材有限公司 | Lamp with stop |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006046924A1 (en) * | 2004-10-28 | 2006-05-04 | Nanofactory Instruments Ab | Microfabricated cantilever chip |
| CN101717063A (en) * | 2009-11-19 | 2010-06-02 | 大连理工大学 | Flexible microgripper through topological optimization |
| CN102079498A (en) * | 2010-11-18 | 2011-06-01 | 大连理工大学 | Flexible electrothermal drive micro-gripper and manufacturing process method |
| CN102198656A (en) * | 2011-04-21 | 2011-09-28 | 西北工业大学 | Electrostatic driving micro gripper capable of being limited and locked |
| CN102328311A (en) * | 2011-08-03 | 2012-01-25 | 河北工业大学 | Two-finger flexible micro clamper |
-
2012
- 2012-12-13 CN CN201210543291.XA patent/CN103056867B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006046924A1 (en) * | 2004-10-28 | 2006-05-04 | Nanofactory Instruments Ab | Microfabricated cantilever chip |
| CN101717063A (en) * | 2009-11-19 | 2010-06-02 | 大连理工大学 | Flexible microgripper through topological optimization |
| CN102079498A (en) * | 2010-11-18 | 2011-06-01 | 大连理工大学 | Flexible electrothermal drive micro-gripper and manufacturing process method |
| CN102198656A (en) * | 2011-04-21 | 2011-09-28 | 西北工业大学 | Electrostatic driving micro gripper capable of being limited and locked |
| CN102328311A (en) * | 2011-08-03 | 2012-01-25 | 河北工业大学 | Two-finger flexible micro clamper |
Non-Patent Citations (1)
| Title |
|---|
| 杨国兴: "基于有限元方法的柔性铰链式微夹持器优化设计", 《中国机械工程》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104647347A (en) * | 2014-09-26 | 2015-05-27 | 浙江大学 | Flexible hinge amplification-based piezoelectric microgripper |
| CN104647347B (en) * | 2014-09-26 | 2016-08-24 | 浙江大学 | The piezoelectric microgripper amplified based on flexible hinge |
| CN105643592A (en) * | 2016-03-15 | 2016-06-08 | 河北工业大学 | Symmetrical decoupling and single degree of freedom flexible operation mechanism |
| CN105690358A (en) * | 2016-04-18 | 2016-06-22 | 河北工业大学 | Flexible inching operation mechanism |
| CN111148938A (en) * | 2017-09-22 | 2020-05-12 | 宗拓贝尔照明器材有限公司 | Lamp with stop |
| CN108297086A (en) * | 2018-03-29 | 2018-07-20 | 天津大学 | A kind of asymmetric two level displacement equations flexibility microoperation mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103056867B (en) | 2015-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102328311B (en) | Two-finger flexible micromotion clamper | |
| CN101700621B (en) | Full decoupled three-dimensional moving parallel robot mechanism | |
| CN103056867B (en) | Flexible micro-moving manipulator | |
| US9366327B2 (en) | Serially-connected ball screw pair and piezoelectric actuator macro-micro driving and guiding device | |
| CN101862966B (en) | Two freedom-degree translational parallel decoupling micromotion platform | |
| CN102962683B (en) | Two-degree of freedom translational parallel high-bandwidth micro-motion platform | |
| CN107833594A (en) | A kind of two-dimentional Three Degree Of Freedom micromotion platform structure for being used for high accuracy positioning and measurement | |
| CN109909976B (en) | Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism | |
| CN105006254B (en) | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification | |
| CN104959975A (en) | Three-dimensional translational parallel mechanism based on motion decoupling | |
| CN111546312B (en) | Two-degree-of-freedom folding and unfolding three-dimensional micro manipulator with three-level amplification mechanism | |
| CN201413642Y (en) | TDOF (three degrees of freedom) integrated flexible precision positioning table | |
| CN102497129B (en) | Multi-degree-of-freedom micromanipulator driven by multi-polarization mode piezoelectric actuator | |
| CN100348377C (en) | Two freedom degrees decoupling sphere parallel mechanism | |
| CN102623070A (en) | Precise two-degree of freedom micro-displacement positioning device | |
| CN101875198A (en) | Overconstraint parallel robot mechanism with three degrees of freedom | |
| CN103486413A (en) | Three-freedom-degree decoupling large-stroke micro-positioning platform | |
| CN204748616U (en) | But three -dimensional translation parallel mechanism of motion decoupling zero | |
| CN105643592B (en) | A kind of symmetrical decoupling single-freedom and flexible operating mechanism | |
| CN107932482B (en) | Five-freedom-degree parallel mechanism capable of realizing three-dimensional rotation and two-dimensional movement | |
| CN101786269B (en) | Micrometer-nanometer transmission platform | |
| CN101969276A (en) | Two-dimensional uncoupled nano-scale motion platform mechanism | |
| CN105196280B (en) | Redundant driving type three-translation micro-operation robot | |
| CN103036474B (en) | Two degrees of freedom flexible micro operator in parallel connection | |
| CN103395059A (en) | Three-freedom-degree flexible topology decoupling parallel-connection micro displacement platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150415 Termination date: 20211213 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |