CN103048300A - Confocal laser scanning microscope - Google Patents
Confocal laser scanning microscope Download PDFInfo
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- CN103048300A CN103048300A CN2012105479668A CN201210547966A CN103048300A CN 103048300 A CN103048300 A CN 103048300A CN 2012105479668 A CN2012105479668 A CN 2012105479668A CN 201210547966 A CN201210547966 A CN 201210547966A CN 103048300 A CN103048300 A CN 103048300A
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- laser scanning
- scanning microscope
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- focusing microscope
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Abstract
The invention relates to a confocal laser scanning microscope. An objective table of the confocal laser scanning microscope is additionally provided with a heating device; a temperature measuring device and an infrared detector are additionally arranged between an objective lens and a sample platform of the confocal laser scanning microscope; and heat image processing software is additionally arranged in a computer system of the confocal laser scanning microscope. The confocal laser scanning microscope relates to the following novel detection characterization techniques: (1) the microstructures of materials can be researched; (2) the distribution condition in a large range is directly observed by applying impurity or doped phase fluorescence excitation; (3) fluorescence is captured to dynamically track; (4) a system is focused for many times to obtain images with different depths; and three-dimensional imaging can be implemented for samples through computer processing; and (5) the heat and mass transfer processes of various materials can be synchronously dynamically researched when the temperature is changed, so that material phase changed thermodynamics and dynamics mechanisms can be built.
Description
Technical field
The present invention relates to a kind of analysis and characterization device of novel material sample, be specifically related to a kind of laser scanning co-focusing microscope, belong to material and characterize technical field.
Background technology
The Main Means that present material sample surfaces or interface microscopic appearance characterize has scanning electron microscope (SEM), atomic force microscope (AFM), transmission electron microscopes (TEM) etc.: SEM can't test aqueous specimen, for some the are small (impurity of particle diameter＜1nm) or mix and to improve multiplying power mutually, the raising of enlargement factor causes reducing of visual field, thus can't be in larger zone (distribution situation of observing minute impurities or doping phase directly perceived in about 1mm * 1mm); The AFM difficulty or ease are judged dephasign; TEM is very high to the requirement of sample, and sample preparation is difficult, and the same with SEM, can't intuitively observe the distribution situation of minute impurities or doping phase in larger zone.The non-destructive testing means of present material sample composition have X-ray diffraction (XRD), and the energy spectrometer that adds in the scanning electron microscope (EDS) or spectrometer (WDS) etc.: XRD is for less mutually helpless of microcell specific phase or content; EDS or WDS can only obtain the element relative content, can't judge facies type (as can only know that Ti and the ratio of O are 1:2, but rutile or anatase but can't be judged), and also helpless for the inner composition in cavity.So the current defective that does not also have a kind of material sample characterization method can remedy simultaneously above-mentioned characterization technique wants to use the heat and mass transfer process of the current material field means of testing while various materials of dynamic studies when temperature change then more without possibility.
Summary of the invention
The purpose of this invention is to provide a kind of novel testing of materials characterization apparatus, this device is low to the conditional request of sample, method of testing is simple, can in larger zone, intuitively observe the distribution situation of minute impurities or doping phase, the heat and mass transfer process of the various materials of dynamic studies when temperature change simultaneously can remedy the deficiency of current material means of testing.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of laser scanning co-focusing microscope, wherein, the objective table of laser scanning co-focusing microscope is provided with heating arrangement; Temperature measuring equipment and infrared detector are set between the object lens of laser scanning co-focusing microscope and the objective table; Be provided with the heat picture process software in the computer system of laser scanning co-focusing microscope, described infrared detector is connected with computer system.
Described heating arrangement is the heater coil of objective table below.
Novel microscope of the present invention is at the technical characterstic aspect the detection sign:
(1) can be in the normal temperature and pressure air atmosphere research material microscopic appearance, remedy SEM, the TEM system must vacuumize and the defective that can't test aqueous specimen.
(2) use the fluorescence excitation of impurity or doping phase intuitively to observe its distribution situation on a large scale, the resolution of fluorescence is higher than 2 orders of magnitude of microscope of common direct observation on the dark substrate, can differentiate well dephasign, remedy the deficiency of AFM, also remedy SEM, the TEM little deficiency in visual field under high magnification.Change optical maser wavelength and namely judge microcell facies type (identical component not homophase has different Bands cracks), remedy XRD, EDS(or WDS) deficiency.
(3) catch fluorescence, dynamically follow the tracks of.
(4) repeatedly focus through system, obtain the image of different depth, machine is processed and can be carried out three-dimensional imaging to sample as calculated.
(5) heat and mass transfer process of the various materials of dynamic studies when temperature change simultaneously can be set up the thermodynamics and dynamics mechanism of material phase transformation thus.
Wherein, characteristics (3), (4), (5) are innovative function, and Material Field also exists without the instrument with identity function at present.Originality of the present invention is high, is showed no similar report both at home and abroad.The present invention can be widely used in the sign of colleges and universities, scientific research institutions and enterprise's lab material sample, the theoretical research of Material Thermodynamics dynamical foundation can be provided, also can satisfy the applied research of microcosmic imaging impurity analysis, the development that promotes Material Field is had very great meaning.
Description of drawings
Fig. 1 is that function of the present invention is strengthened the laser scanning co-focusing microscope structural drawing, among the figure, and 1-photodetector, the burnt pin hole of 2-copolymerization, 3-spectroscope, 4-light source pin hole, 5-object lens, 6-Temperature Detector, 7-infrared detector, 8-focal plane of lens, 9-heater coil;
Fig. 2 is pure CaCu 3 Ti 4 O film bright field image;
Fig. 3 is the CaCu 3 Ti 4 O film bright field image of doping ZnO;
Fig. 4 is pure CaCu 3 Ti 4 O film fluorescence picture;
Fig. 5 is the CaCu 3 Ti 4 O film fluorescence picture of doping ZnO.
Embodiment
Function of the present invention is strengthened being: (1) adds heating arrangement at the objective table of laser scanning co-focusing microscope; (2) add temperature measuring equipment and infrared detector between laser scanning co-focusing microscope object lens and the sample stage; (3) computer system at laser scanning co-focusing microscope adds the heat picture process software.The present invention adopts the life science instrument---and laser scanning co-focusing microscope (LSCM) carries out the microcosmic imaging to common material sample (pottery, metal, macromolecule and the compound substance that is comprised of them etc.), can see intuitively the distribution situation of minute impurities or doping phase in larger visual field.Add heating arrangement, material sample is heat-treated, capable of dynamic is observed material diffusion and the atomic migration situation of sample interior or material interface, but with the kinetics mechanism of this research material phase transformation in heat treatment process.Basis at heating arrangement adds pyroscan, and the infrared radiation of scanning capture material sample obtains each temperature information of material, forms heat picture, but with the Thermodynamic Mechanism of this research material phase transformation in heat treatment process.
With laser scanning co-focusing microscope the pure CaCu 3 Ti 4 O film of preparation on silicon substrate carried out the imaging of light field microcosmic.As can be seen from Figure 2, in the well imaging of inorganic thin film that opaque substrate prepares, film is evenly fine and close in a big way, contains a small amount of impurity.
With laser scanning co-focusing microscope the CaCu 3 Ti 4 O film for preparing the ZnO doping on silicon substrate is carried out the imaging of light field microcosmic.As can be seen from Figure 3, the sign that laser scanning co-focusing microscope is used for material has very large resolution, and the fine crack of film is clear and legible, can distinguish easily dephasign in the film by light and shade difference.
The laser that adopts 380 nm is light source, with laser scanning co-focusing microscope pure CaCu 3 Ti 4 O film and the CaCu 3 Ti 4 O film of mixing ZnO is carried out fluorescence imaging.As can be seen from Figure 4 and Figure 5, in pure CaCu 3 Ti 4 O film, do not have the fluorescence bright spot, and in the CaCu 3 Ti 4 O film of doping ZnO, found the blue-fluorescence bright spot of the ZnO of sparse distribution.Can clearly distinguish the ZnO of doping and the CaCu 3 Ti 4 O of parent phase in larger visual field, the distribution situation of ZnO, migratory direction and growth course are very clear in the parent phase.
Claims (2)
1. a laser scanning co-focusing microscope is characterized in that, the objective table of laser scanning co-focusing microscope is provided with heating arrangement; Temperature measuring equipment and infrared detector are set between the object lens of described laser scanning co-focusing microscope and the objective table; Be provided with the heat picture process software in the computer system of described laser scanning co-focusing microscope, described infrared detector is connected with computer system.
2. a kind of laser scanning co-focusing microscope according to claim 1 is characterized in that, described heating arrangement is the heater coil of objective table below.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012105479668A CN103048300A (en) | 2012-12-17 | 2012-12-17 | Confocal laser scanning microscope |
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| CN2012105479668A CN103048300A (en) | 2012-12-17 | 2012-12-17 | Confocal laser scanning microscope |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104111241A (en) * | 2013-04-22 | 2014-10-22 | 清华大学 | Linear scanning-based fluorescence confocal detection device |
| CN104181089A (en) * | 2013-05-22 | 2014-12-03 | 中国石油化工股份有限公司 | Equipment for scanning facial porosity of rock and method thereof |
| CN107991766A (en) * | 2016-10-26 | 2018-05-04 | 中国科学技术大学 | A kind of microscope and imaging method with three-dimensional imaging ability |
| CN111415297A (en) * | 2020-03-06 | 2020-07-14 | 清华大学深圳国际研究生院 | Imaging method of confocal microscope |
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| CN102262052A (en) * | 2010-05-26 | 2011-11-30 | 中国科学院理化技术研究所 | Laser confocal obliquely-incident ellipsometric high-throughput biomolecular reaction imaging detection device |
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2012
- 2012-12-17 CN CN2012105479668A patent/CN103048300A/en active Pending
Patent Citations (7)
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| CN1344952A (en) * | 2000-09-29 | 2002-04-17 | 中国科学院低温技术实验中心 | Heatable sample platform for scanning probe microscope |
| CN101300518A (en) * | 2005-10-13 | 2008-11-05 | 株式会社东海希多 | Microscope stage and microscope observing unit |
| US20080247038A1 (en) * | 2007-04-04 | 2008-10-09 | Olympus Corporation | Scanning confocal microscope |
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| CN102262052A (en) * | 2010-05-26 | 2011-11-30 | 中国科学院理化技术研究所 | Laser confocal obliquely-incident ellipsometric high-throughput biomolecular reaction imaging detection device |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104111241A (en) * | 2013-04-22 | 2014-10-22 | 清华大学 | Linear scanning-based fluorescence confocal detection device |
| CN104111241B (en) * | 2013-04-22 | 2017-10-03 | 清华大学 | Fluorescence co-focusing detection means based on linear scanning |
| CN104181089A (en) * | 2013-05-22 | 2014-12-03 | 中国石油化工股份有限公司 | Equipment for scanning facial porosity of rock and method thereof |
| CN107991766A (en) * | 2016-10-26 | 2018-05-04 | 中国科学技术大学 | A kind of microscope and imaging method with three-dimensional imaging ability |
| US11194142B2 (en) | 2016-10-26 | 2021-12-07 | University Of Science And Technology Of China | Microscope having three-dimensional imaging capability and three-dimensional microscopic imaging method |
| CN111415297A (en) * | 2020-03-06 | 2020-07-14 | 清华大学深圳国际研究生院 | Imaging method of confocal microscope |
| CN111415297B (en) * | 2020-03-06 | 2023-04-18 | 清华大学深圳国际研究生院 | Imaging method of confocal microscope |
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| CB03 | Change of inventor or designer information |
Inventor after: Xu Dong Inventor after: Cheng Xiaonong Inventor after: Yu Renhong Inventor after: He Kai Inventor after: Wang Yang Inventor before: Xu Dong Inventor before: Cheng Xiaonong |
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Free format text: CORRECT: INVENTOR; FROM: XU DONG CHENG XIAONONG TO: XU DONG CHENG XIAONONG YU RENHONG HE KAI WANG YANG |
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Application publication date: 20130417 |