CN103017912A - Device and method for measuring infrared detector - Google Patents

Device and method for measuring infrared detector Download PDF

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Publication number
CN103017912A
CN103017912A CN201210525867XA CN201210525867A CN103017912A CN 103017912 A CN103017912 A CN 103017912A CN 201210525867X A CN201210525867X A CN 201210525867XA CN 201210525867 A CN201210525867 A CN 201210525867A CN 103017912 A CN103017912 A CN 103017912A
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detector
infrared
measured
reference detector
measurement mechanism
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CN103017912B (en
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熊敏
周桃飞
邢利敏
董旭
张志强
***
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Suzhou Wuzhong Zhongke Yucheng Technology Development Co ltd
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Suzhou Institute of Nano Tech and Nano Bionics of CAS
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Abstract

The invention discloses a device and method for measuring an infrared detector. The device comprises an infrared spectrometer for providing monochromatic infrared light, a low-temperature device provided with an infrared window for receiving the infrared light, a detector to be measured, a reference detector, a movable platform driving the infrared spectrometer or the detector to be measured and the reference detector to move and a pre-amplifier connected with the detector to be measured and the reference detector respectively and used for amplifying a detecting signal and outputting the detecting signal to the infrared spectrometer, wherein the detector to be measured and the reference detector are arranged in the low-temperature device. First, alignment of the reference detector with a high responding degree in the low-temperature device is finished, and after the movable platform moves for a corresponding offset, automatic alignment of the detector to be measured is achieved. By means of the device and method, alignment efficiency and measuring precision of low-temperature measuring of the small-size low-responding-degree infrared detector can be improved, and multi-time repeated measurement for various samples is convenient.

Description

The measurement mechanism of infrared eye and measuring method
Technical field
The present invention relates to a kind of measurement mechanism and measuring method of infrared eye.
Background technology
The spectral response of infrared eye, namely responsiveness is an important indicator of detector with the variation of infrared radiation wavelength.The measurement of spectral responsivity needs to estimate accurately to incide the luminous power on the detector, and photoelectric measurement requires working face with tested detector perpendicular to the spectrometer measurement light path accurately, and places on the focus that focuses on infrared light.Spot size was at hundred microns after monochromatic light focused in the general spectrometer, and the infrared eye device size is tens to the hundreds of micron, and tested detector mounting plane needs perpendicular to input path and satisfies aiming at of point-to-point between working face and the focus.
Refrigeration type infrared detector need to be enclosed in the low-temperature (low temperature) vessel, and small-sized low-temperature (low temperature) vessel can adopt manual translation platform with the fine motion head, range of adjustment number centimetre measuring accuracy 0.01mm such as the fixing and movement of metallic Dewar flask.This mode also is not suitable for the large scale low-temperature (low temperature) vessel such as the position adjustments of refrigeration machine.In addition, the window material of low-temperature (low temperature) vessel is low to transmission of visible light, directly observes difficulty.The difficulty that these infrared eyes that all increased the low-temperature (low temperature) vessel small-medium size are aimed at optical path.
The accuracy that tested detector is aimed at optical path usually by tested detector measurement to photocurrent Strength Changes assessment, maximum to punctual photocurrent intensity, if tested detector responsivity is lower or during poor signal to noise, alignment procedures photocurrent Strength Changes is very little and be difficult to judge alignment case.
In view of this, be necessary to provide a kind of apparatus and method of spectral response of the refrigeration type infrared detector that can quick and precisely measure small size low-response degree.
Summary of the invention
The measurement mechanism and the measuring method that the purpose of this invention is to provide a kind of infrared eye, the infrared eye to be measured of realization Cryo Equipment small-medium size, low-response degree can be aimed at fast and accurately with the detection infrared light path, thereby improves the measurement efficiency and precision of detector to be measured spectral responsivity under low temperature environment.
For achieving the above object, the invention provides following technical scheme:
A kind of measurement mechanism of infrared eye comprises:
Infrared spectrometer provides monochromatic infrared light;
Cryo Equipment has infrared window, and this infrared window receives described infrared light;
Be located at detector to be measured and reference detector in the described Cryo Equipment;
Mobile platform drives described detector to be measured and reference detector and moves;
Prime amplifier is connected to described detector to be measured and reference detector, and described prime amplifier exports described infrared spectrometer to after detectable signal is amplified.
Preferably, in the measurement mechanism of above-mentioned infrared eye, described infrared spectrometer provides the infrared light of focusing.
Preferably, in the measurement mechanism of above-mentioned infrared eye, also comprise aspheric mirror, described infrared spectrometer provides parallel infrared light, and described aspheric mirror focuses on described parallel infrared light.
Preferably, in the measurement mechanism of above-mentioned infrared eye, described Cryo Equipment is refrigeration machine or metallic Dewar flask.
Preferably, in the measurement mechanism of above-mentioned infrared eye, described reference detector is HgCdTe detector or InGaAs detector.
Preferably, in the measurement mechanism of above-mentioned infrared eye, described infrared window is ZnSe window or BaF 2Window.
Preferably, in the measurement mechanism of above-mentioned infrared eye, described mobile platform is three-dimensional platform, and described detector to be measured and reference detector are fixed in the described Cryo Equipment, and described Cryo Equipment is fixed on the described mobile platform.
Preferably, in the measurement mechanism of above-mentioned infrared eye, the straight line at described detector to be measured and reference detector place is vertical with described infrared light incident direction.
Accordingly, the invention also discloses a kind of measuring method of infrared eye, comprise the steps:
S1, definition coordinate system record detector to be measured with respect to the side-play amount of reference detector;
S2, adjustment mobile platform, by the light intensity that infrared spectrometer is observed reference detector, the position when the record light intensity is maximum;
S3, by the side-play amount of detector to be measured with respect to reference detector, correspondingly adjust mobile platform so that Infrared irradiation is on detector to be measured, realize treating the measurement of detector.
Compared with prior art, the invention has the advantages that:
1, mobile platform can be used for small-sized metallic Dewar flask and large-scale refrigeration machine are installed, and can use spectrometer internal focus infrared light to measure, and also exportable directional light is measured outside focusing of spectrometer;
2, reference detector is installed in Cryo Equipment, can realize infrared eye to be measured in the Cryo Equipment with measure infrared light path fast, accurately aims at, when measurement small size detector and a plurality of detector, can improve measurement efficient;
3, behind the mobile platform record reference detector aligned position, in the situation of not changing Cryo Equipment and reference detector, follow-up measurement need not again to aim at reference detector, installs behind the detector to be measured and can aim at according to the movement that coordinate position is directly carried out three-dimensional platform;
4, a plurality of detectors and be positioned at diverse location can be installed in the Cryo Equipment, the alignment precision that improves detector to be measured with aim at efficient, also different types of reference detector can be installed, use the reference detector of known response degree, can treat the survey detector demarcates, thereby can measure its absolute response degree, in measurement, realize easily detector to be measured and reference detector aplanatism with etc. the measuring condition of illuminating area, the accuracy height of demarcation.
Description of drawings
In order to be illustrated more clearly in the embodiment of the present application or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, the accompanying drawing that the following describes only is some embodiment that put down in writing among the application, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Figure 1 shows that the structural representation of the measurement mechanism of infrared eye in the first embodiment of the invention;
Figure 2 shows that the synoptic diagram of the measuring method of infrared eye in the first embodiment of the invention;
Figure 3 shows that the structural representation of the measurement mechanism of infrared eye in the second embodiment of the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is described in detail, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, the every other embodiment that those of ordinary skills obtain under the prerequisite of not making creative work belongs to the scope of protection of the invention.
Figure 1 shows that the structural representation of the measurement mechanism of infrared eye in the first embodiment of the invention.
Join shown in Figure 1, the definition coordinate system (x, y, z), the parallel infrared light B2 edge-y direction outgoing that infrared spectrometer 11 sends, light beam becomes B3 by off-axis aspheric mirror 17 rear light, light B3 is at the x direction focusing.Infrared spectrometer 11 is connected with computing machine 12 by data line, and computing machine 12 is by software control infrared spectrometer 11 and process the output measurement result.
The Cryo Equipment 13 that infrared window 131 is installed is fixed on the base 141 of mobile platform 14, and infrared window 131 is the ZnSe window, and Cryo Equipment 13 is refrigeration machine.
Mobile platform 14 is three-dimensional platform, each direction of the X of three-dimensional platform, Y and Z respectively has two guide rails, 2 and above slide block are installed on the every guide rail, the rectilinear motion of slide block on guide rail that move through of base 141 realized, but base 141 moves spacing 500 ~ 1000mm in the movement manual coarse adjustment of Y-direction; Base 141 is in X, Y and the automatically accurate adjustment of Z direction, and range of adjustment 100 ~ 500mm, driven by servomotor screw mandrel rotate and realize that slide block is accurately mobile, and the minimum amount of movement of being regulated by motor reducer is 100 ~ 200nm; Mobile platform 14 and computing machine 12 are connected by data line, and base 141 can be realized three-shaft linkage in the software control that moves through of X, Y and Z direction, base 141 in the position of X, Y and Z direction by computing machine 12 records.
Reference detector D2 and detector D1 to be measured are installed on the cold finger of Cryo Equipment 13.Reference detector D2 and detector D1 to be measured can be positioned at vertical same plane, also can be positioned at two vertical planes.Reference detector D2 is the HgCdTe detector, records the side-play amount (x, y, z) of relative reference detector D2 center, detector D1 to be measured center.Temperature in the Cryo Equipment 13 is 4-300K.
The photocurrent of reference detector D2 and detector D1 to be measured is connected to infrared spectrometer 11 by prime amplifier 15, and infrared spectrometer 11 gathers also and is delivered to computing machine 12 after the deal with data.Under the low temperature, the photocurrent Strength Changes that spectrometer software on the computer 12 shows is regulated mobile platform 14, make photocurrent intensity maximum and finish aiming at of reference detector D2 and infrared light B3 focus, the three-dimensional platform software records on the computing machine 12 at this moment position of base 141 is initial point.Aim at the photocurrent of rear witness mark detector D2 with the wavelength variations spectral line SD2 of infrared light, and the absolute value of spectral line is known.Mobile platform 14 moves (x,-y,-finish aiming at of detector D1 to be measured and infrared light B3 focus after z), measure the photocurrent of detector D1 to be measured with the wavelength variations spectral line SD1 of infrared light, the result of spectral line SD1 after divided by spectral line SD2 is the absolute spectral response S1 of detector D1 to be measured.
Detector D1 size to be measured is little, a little less than the signal, directly be difficult for capturing with the infrared light measurement, and reference detector D2 such as HgCdTe detector or InGaAs detector, size is large, signal is strong, be easy to capture by the device in the present embodiment, because the position relationship of detector D1 to be measured and reference detector D2 is fixed, in rectangular coordinate system, in the position that obtains reference detector D2 and during the relative position of two detectors, can calculate the position of detector to be measured, therefore can indirectly obtain the position of detector D1 to be measured, the movement of control Infrared or the movement of detector D1 to be measured, can be so that Infrared irradiation to corresponding position, can realize treating the measurement of surveying detector.Join shown in Figure 2ly, catch first the position (position shown in the dotted line) of reference detector D2, the then movement by control detector D1 to be measured is so that detector D1 to be measured is in the focus place (solid line is the position after mobile) of infrared light.
Figure 3 shows that the structural representation of the measurement mechanism of infrared eye in the second embodiment of the invention.
Compare with embodiment one, the Cryo Equipment 23 among the embodiment two is metallic Dewar flask, and the temperature in the Cryo Equipment 23 is 77-300K.Because the metallic Dewar flask volume is smaller, it can be arranged in the infrared spectrometer 21, therefore can be implemented in to treat in the infrared spectrometer 21 to survey detector D1 and focus on measurement.
The concrete ginseng of technical scheme is shown in Figure 3, and infrared spectrometer 21 directly sends the infrared light B1 of focusing, in the sample chamber of infrared light B1 edge-x direction focusing in Fourier infrared spectrograph 21.
The Cryo Equipment 23 that infrared window 231 is installed is fixed on the base 241 of mobile platform 24, and Cryo Equipment 23 is metallic Dewar flask, and infrared window 231 is ZnSe.
Reference detector D2 and detector D1 to be measured are installed on the cold finger of Cryo Equipment 23, and reference detector D2 is the HgCdTe detector.Record the side-play amount (x, y, z) of relative HgCdTe detector D2 center, detector D1 to be measured center.
The photocurrent of reference detector D2 and detector D1 to be measured is connected to spectrometer 21 by prime amplifier 25, and spectrometer 21 gathers also and is delivered to computing machine 22 after the deal with data.Under the low temperature, the photocurrent Strength Changes that spectrometer software on the computer 22 shows is regulated mobile platform 24, make photocurrent intensity maximum and finish aiming at of reference detector D2 and infrared light B1 focus, the position of the three-dimensional platform software records base 241 on the computing machine 22 is initial point.The photocurrent of witness mark detector D2 is with the wavelength variations spectral line SD2 of infrared light after aiming at.Mobile platform 24 moves (x,-y,-finish aiming at of detector D1 to be measured and infrared light B1 focus after z), measure the photocurrent of detector D1 to be measured with the wavelength variations spectral line SD1 of infrared light, the result of spectral line SD1 after divided by spectral line SD2 is the relative spectral response S1R of detector D1 to be measured.
It should be noted that the reference detector D2 among the second embodiment can also be the InGaAs detector, the infrared window of Cryo Equipment 23 can also be BaF 2Window.
In other embodiments, detector D1 to be measured can be a plurality of different detectors, a plurality of detectors are fixed in the diverse location of Cryo Equipment cold finger, record respectively the side-play amount of relative reference detector D2 center, a plurality of detectors center, mobile platform can be finished aligning and the measurement of detector D1 to be measured successively after the mobile corresponding side-play amount.
In sum, the advantage of technical solution of the present invention is:
1, mobile platform can be used for small-sized metallic Dewar flask and large-scale refrigeration machine are installed, and can use spectrometer internal focus infrared light to measure, and also exportable directional light is measured outside focusing of spectrometer;
2, reference detector is installed in Cryo Equipment, can realize infrared eye to be measured in the Cryo Equipment with measure infrared light path fast, accurately aims at, when measurement small size detector and a plurality of detector, can improve measurement efficient;
3, behind the mobile platform record reference detector aligned position, in the situation of not changing Cryo Equipment and reference detector, follow-up measurement need not again to aim at reference detector, installs behind the detector to be measured and can aim at according to the movement that coordinate position is directly carried out three-dimensional platform;
4, a plurality of detectors and be positioned at diverse location can be installed in the Cryo Equipment, the alignment precision that improves detector to be measured with aim at efficient, also different types of reference detector can be installed, use the reference detector of known response degree, can treat the survey detector demarcates, thereby can measure its absolute response degree, in measurement, realize easily detector to be measured and reference detector aplanatism with etc. the measuring condition of illuminating area, the accuracy height of demarcation.
Need to prove, in this article, relational terms such as the first and second grades only is used for an entity or operation are made a distinction with another entity or operation, and not necessarily requires or hint and have the relation of any this reality or sequentially between these entities or the operation.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thereby not only comprise those key elements so that comprise process, method, article or the equipment of a series of key elements, but also comprise other key elements of clearly not listing, or also be included as the intrinsic key element of this process, method, article or equipment.Do not having in the situation of more restrictions, the key element that is limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment that comprises described key element and also have other identical element.
The above only is the application's embodiment; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the application's principle; can also make some improvements and modifications, these improvements and modifications also should be considered as the application's protection domain.

Claims (9)

1. the measurement mechanism of an infrared eye is characterized in that, comprising:
Infrared spectrometer provides monochromatic infrared light;
Cryo Equipment has infrared window, and this infrared window receives described infrared light;
Be located at detector to be measured and reference detector in the described Cryo Equipment;
Mobile platform drives described detector to be measured and reference detector and moves;
Prime amplifier is connected to described detector to be measured and reference detector, and described prime amplifier exports described infrared spectrometer to after detectable signal is amplified.
2. the measurement mechanism of infrared eye according to claim 1 is characterized in that, described infrared spectrometer provides the infrared light of focusing.
3. the measurement mechanism of infrared eye according to claim 1 is characterized in that, also comprises aspheric mirror, and described infrared spectrometer provides parallel infrared light, and described aspheric mirror focuses on described parallel infrared light.
4. the measurement mechanism of infrared eye according to claim 1 is characterized in that, described Cryo Equipment is refrigeration machine or metallic Dewar flask.
5. the measurement mechanism of infrared eye according to claim 1 is characterized in that, described reference detector is HgCdTe detector or InGaAs detector.
6. the measurement mechanism of infrared eye according to claim 1 is characterized in that, described infrared window is ZnSe window or BaF 2Window.
7. the measurement mechanism of infrared eye according to claim 1 is characterized in that, described mobile platform is three-dimensional platform, and described detector to be measured and reference detector are fixed in the described Cryo Equipment, and described Cryo Equipment is fixed on the described mobile platform.
8. the measurement mechanism of infrared eye according to claim 1 is characterized in that, the straight line at described detector to be measured and reference detector place is vertical with described infrared light incident direction.
9. the measuring method of the arbitrary described infrared eye of claim 1 to 8 is characterized in that, comprises the steps:
S1, definition coordinate system record detector to be measured with respect to the side-play amount of reference detector;
S2, adjustment mobile platform, by the light intensity that infrared spectrometer is observed reference detector, the position when the record light intensity is maximum;
S3, by the side-play amount of detector to be measured with respect to reference detector, correspondingly adjust mobile platform so that Infrared irradiation is on detector to be measured, realize treating the measurement of detector.
CN201210525867.XA 2012-12-10 2012-12-10 Device and method for measuring infrared detector Active CN103017912B (en)

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Cited By (2)

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CN116559683A (en) * 2023-04-21 2023-08-08 辽宁充宝汽车新能源科技有限公司 Method and device for monitoring schedulable charging capacity of mobile energy storage station

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN106733957A (en) * 2016-11-23 2017-05-31 北海高创电子信息孵化器有限公司 A kind of intelligent cleaning device
CN116559683A (en) * 2023-04-21 2023-08-08 辽宁充宝汽车新能源科技有限公司 Method and device for monitoring schedulable charging capacity of mobile energy storage station

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