CN103008313A - Lifting mechanism - Google Patents

Lifting mechanism Download PDF

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Publication number
CN103008313A
CN103008313A CN2012105207470A CN201210520747A CN103008313A CN 103008313 A CN103008313 A CN 103008313A CN 2012105207470 A CN2012105207470 A CN 2012105207470A CN 201210520747 A CN201210520747 A CN 201210520747A CN 103008313 A CN103008313 A CN 103008313A
Authority
CN
China
Prior art keywords
elevating mechanism
drive mechanism
synchronous drive
screw
line slideway
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012105207470A
Other languages
Chinese (zh)
Inventor
梅琳
金海涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Original Assignee
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd filed Critical CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Priority to CN2012105207470A priority Critical patent/CN103008313A/en
Publication of CN103008313A publication Critical patent/CN103008313A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a lifting mechanism which comprises a lifting mechanism body. The lifting mechanism body comprises a servo motor, a synchronous drive mechanism, linear guide rails and a ball screw; the linear guide rails are vertically arranged; the ball screw is arranged between the linear guide rails; the ball screw is coaxially connected with the synchronous drive mechanism; and an output shaft of the servo motor is connected with the synchronous drive mechanism by a belt. The invention provides the lifting mechanism which has a compact structure, is stable to operate, is accurate to position, is quiet and has no noise.

Description

Elevating mechanism
Technical field
The present invention relates to chuck and clean the field, refer to especially a kind of elevating mechanism for the chuck cleaning.
Background technology
The cleaning that has now has direct disassembly, cleaning or with methods such as cleaning structure cleanings, but the chuck in the cleaning machine chamber, need to rise to respectively certain position highly before cleaning and after cleaning, and want accurately the location up and down, traditional method is very inconvenient, the location is difficult to accurately research and develop elevating mechanism for this reason.
Summary of the invention
The present invention proposes a kind of elevating mechanism, has solved that wiper mechanism of the prior art location is inaccurate, the problem large, that noise is large takes up room.
Technical scheme of the present invention is achieved in that a kind of elevating mechanism, comprise the elevating mechanism body, described elevating mechanism body comprises servomotor, synchronous drive mechanism, line slideway, ball-screw, described line slideway is arranged vertically, and described ball-screw is arranged between the guide rail of line slideway; Described ball-screw is connected with synchronous drive mechanism is coaxial, and the output shaft of described servomotor is connected with synchronous drive mechanism by belt.
Further comprise, also be provided with gripper shoe on the described elevating mechanism body, described gripper shoe is connected with line slideway.
Further comprise, described gripper shoe is provided with base, and described gripper shoe is fixed on the base.
Beneficial effect: the invention solves the defective that exists in the background technology, line slideway has adopted 90 ° to be arranged vertically, and makes this mechanism structure compact, takes full advantage of the space; Accurately locate by elevating mechanism by servomotor, synchronous belt drive mechanism, ball-screw; Wherein, the transmission mechanism of Timing Belt can reduce the noise of this mechanism's generation in service effectively; Servomotor can produce the mode of accelerating with curve, allows elevating mechanism operate steadily.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of one embodiment of the invention;
Wherein: 1, servomotor; 2, synchronous drive mechanism; 3, line slideway; 4, ball-screw; 5, gripper shoe; 6, base.
The specific embodiment
As shown in Figure 1, a kind of elevating mechanism comprises the elevating mechanism body, described elevating mechanism body comprises servomotor 1, synchronous drive mechanism 2, line slideway 3, ball-screw 4, described line slideway 3 has adopted 90 ° to be arranged vertically, and makes this mechanism structure compact, takes full advantage of the space; Ball-screw 4 is arranged between the guide rail of line slideway 3; Ball-screw 4 and 2 coaxial connections of synchronous drive mechanism drive ball-screw 4 rotations by synchronous drive mechanism 2, and the output shaft of servomotor 1 drives synchronous drive mechanism 2 by belt.Also be provided with gripper shoe 5 on the elevating mechanism body, described gripper shoe 5 is connected with line slideway 3, is used for supporting line slideway 3.Gripper shoe 5 is provided with base 6, and described gripper shoe 5 is fixed on the base 6.
Ball-screw 4 among the present invention, ball screw 4 is that gyration is converted into rectilinear motion, or rectilinear motion is converted into the structure of gyration.Bearing is become sliding action from scroll actions, and it is very little that such frictional resistance will become.Allow elevating mechanism accurately locate by servomotor 1, synchronous belt drive mechanism 2, ball-screw 4; Wherein, synchronous belt drive mechanism 2 can reduce the noise of this mechanism's generation in service effectively; Servomotor 1 can produce the mode of accelerating with curve, allows elevating mechanism operate steadily.
The above only is preferred embodiment of the present invention, and is in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (3)

1. elevating mechanism, it is characterized in that: comprise the elevating mechanism body, described elevating mechanism body comprises servomotor, synchronous drive mechanism, line slideway, ball-screw, and described line slideway is arranged vertically, and described ball-screw is arranged between the guide rail of line slideway; Described ball-screw is connected with synchronous drive mechanism is coaxial, and the output shaft of described servomotor is connected with synchronous drive mechanism by belt.
2. elevating mechanism as claimed in claim 1, it is characterized in that: also be provided with gripper shoe on the described elevating mechanism body, described gripper shoe is connected with line slideway.
3. elevating mechanism as claimed in claim 2, it is characterized in that: described gripper shoe is provided with base, and described gripper shoe is fixed on the base.
CN2012105207470A 2012-12-06 2012-12-06 Lifting mechanism Pending CN103008313A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012105207470A CN103008313A (en) 2012-12-06 2012-12-06 Lifting mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012105207470A CN103008313A (en) 2012-12-06 2012-12-06 Lifting mechanism

Publications (1)

Publication Number Publication Date
CN103008313A true CN103008313A (en) 2013-04-03

Family

ID=47957734

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012105207470A Pending CN103008313A (en) 2012-12-06 2012-12-06 Lifting mechanism

Country Status (1)

Country Link
CN (1) CN103008313A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104627831A (en) * 2014-12-31 2015-05-20 南通高盛机械制造有限公司 Lifting mechanism for fine adjustment alignment through hydraulic control

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196461A (en) * 1984-03-21 1985-10-04 Morita Tekkosho:Kk Linear actuator
JP2003230251A (en) * 2002-01-31 2003-08-15 Nsk Ltd Uniaxial actuator
US20050044973A1 (en) * 2003-08-27 2005-03-03 Ringspann Gmbh Drive arrangement
CN201147840Y (en) * 2007-12-28 2008-11-12 亨特尔(天津)科技开发有限公司 High-precision synchronous belt lifting mechanism
US20100139426A1 (en) * 2008-12-10 2010-06-10 Nippon Thompson Co., Ltd Actuator
CN201755568U (en) * 2010-06-30 2011-03-09 张家港市超声电气有限公司 Slow upward pulling mechanism
CN102052437A (en) * 2010-12-21 2011-05-11 东莞市源兴光学仪器有限公司 High precision lifting device
CN201971922U (en) * 2010-12-24 2011-09-14 株洲众欣科技发展有限责任公司 Crucible lifting and rotating device
CN202963010U (en) * 2012-12-06 2013-06-05 常州瑞择微电子科技有限公司 Lifting mechanism

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196461A (en) * 1984-03-21 1985-10-04 Morita Tekkosho:Kk Linear actuator
JP2003230251A (en) * 2002-01-31 2003-08-15 Nsk Ltd Uniaxial actuator
US20050044973A1 (en) * 2003-08-27 2005-03-03 Ringspann Gmbh Drive arrangement
CN201147840Y (en) * 2007-12-28 2008-11-12 亨特尔(天津)科技开发有限公司 High-precision synchronous belt lifting mechanism
US20100139426A1 (en) * 2008-12-10 2010-06-10 Nippon Thompson Co., Ltd Actuator
CN201755568U (en) * 2010-06-30 2011-03-09 张家港市超声电气有限公司 Slow upward pulling mechanism
CN102052437A (en) * 2010-12-21 2011-05-11 东莞市源兴光学仪器有限公司 High precision lifting device
CN201971922U (en) * 2010-12-24 2011-09-14 株洲众欣科技发展有限责任公司 Crucible lifting and rotating device
CN202963010U (en) * 2012-12-06 2013-06-05 常州瑞择微电子科技有限公司 Lifting mechanism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104627831A (en) * 2014-12-31 2015-05-20 南通高盛机械制造有限公司 Lifting mechanism for fine adjustment alignment through hydraulic control

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Application publication date: 20130403