CN102994963A - 连续式卷绕溅射镀膜机 - Google Patents
连续式卷绕溅射镀膜机 Download PDFInfo
- Publication number
- CN102994963A CN102994963A CN2012101136796A CN201210113679A CN102994963A CN 102994963 A CN102994963 A CN 102994963A CN 2012101136796 A CN2012101136796 A CN 2012101136796A CN 201210113679 A CN201210113679 A CN 201210113679A CN 102994963 A CN102994963 A CN 102994963A
- Authority
- CN
- China
- Prior art keywords
- negative electrode
- electrode cell
- coating machine
- sputter coating
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210113679.6A CN102994963B (zh) | 2012-04-18 | 2012-04-18 | 连续式卷绕溅射镀膜机 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210113679.6A CN102994963B (zh) | 2012-04-18 | 2012-04-18 | 连续式卷绕溅射镀膜机 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102994963A true CN102994963A (zh) | 2013-03-27 |
CN102994963B CN102994963B (zh) | 2015-04-08 |
Family
ID=47924060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210113679.6A Active CN102994963B (zh) | 2012-04-18 | 2012-04-18 | 连续式卷绕溅射镀膜机 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102994963B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103805955A (zh) * | 2014-01-20 | 2014-05-21 | 深圳市金凯新瑞光电有限公司 | 一种用于卷绕式溅射三层介质膜的镀膜装置及镀膜方法 |
CN104611682A (zh) * | 2015-02-09 | 2015-05-13 | 常州工学院 | 一种双面往复连续镀膜磁控溅射卷绕镀膜机 |
CN104674182A (zh) * | 2015-02-09 | 2015-06-03 | 常州工学院 | 一种单面往复连续镀膜磁控溅射卷绕镀膜机 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2433262Y (zh) * | 2000-07-18 | 2001-06-06 | 湖南三才科技有限公司 | 多靶磁控溅射卷绕镀膜机 |
CN200996042Y (zh) * | 2006-11-21 | 2007-12-26 | 甘国工 | 磁控溅射卷绕镀膜机 |
CN101191195A (zh) * | 2006-11-21 | 2008-06-04 | 甘国工 | 磁控溅射卷绕镀膜机 |
-
2012
- 2012-04-18 CN CN201210113679.6A patent/CN102994963B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2433262Y (zh) * | 2000-07-18 | 2001-06-06 | 湖南三才科技有限公司 | 多靶磁控溅射卷绕镀膜机 |
CN200996042Y (zh) * | 2006-11-21 | 2007-12-26 | 甘国工 | 磁控溅射卷绕镀膜机 |
CN101191195A (zh) * | 2006-11-21 | 2008-06-04 | 甘国工 | 磁控溅射卷绕镀膜机 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103805955A (zh) * | 2014-01-20 | 2014-05-21 | 深圳市金凯新瑞光电有限公司 | 一种用于卷绕式溅射三层介质膜的镀膜装置及镀膜方法 |
CN103805955B (zh) * | 2014-01-20 | 2016-03-02 | 深圳市金凯新瑞光电股份有限公司 | 一种用于卷绕式溅射三层介质膜的镀膜方法 |
CN104611682A (zh) * | 2015-02-09 | 2015-05-13 | 常州工学院 | 一种双面往复连续镀膜磁控溅射卷绕镀膜机 |
CN104674182A (zh) * | 2015-02-09 | 2015-06-03 | 常州工学院 | 一种单面往复连续镀膜磁控溅射卷绕镀膜机 |
CN104674182B (zh) * | 2015-02-09 | 2017-03-08 | 常州工学院 | 一种单面往复连续镀膜磁控溅射卷绕镀膜机 |
Also Published As
Publication number | Publication date |
---|---|
CN102994963B (zh) | 2015-04-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104766779B (zh) | 用于涂覆衬底的方法和涂覆器 | |
CN201068469Y (zh) | 可延长靶材使用寿命的平面磁控溅射靶 | |
CN102312212B (zh) | 扫描镀膜装置及扫描镀膜组件 | |
CN106048546B (zh) | 紧凑型柔性基材磁控溅射镀膜设备及方法 | |
CN103820762A (zh) | 磁控溅射镀膜*** | |
CN106011798B (zh) | 基于pecvd的石墨烯薄膜镀膜设备及方法 | |
CN102994963A (zh) | 连续式卷绕溅射镀膜机 | |
CN104775102B (zh) | 卷对卷磁控溅射阴极与柱状多弧源相结合的真空镀膜*** | |
CN103805954B (zh) | 磁控溅射镀膜*** | |
CN108754444A (zh) | 一种pvd镀膜装置 | |
CN203021646U (zh) | 一种哑铃式柔性材料磁控溅射镀膜设备 | |
CN203487223U (zh) | 一种低温沉积柔性基材ito膜镀膜装置 | |
CN101665903A (zh) | 遮罩组件以及镀膜机台 | |
CN109735821A (zh) | 一种高场强高靶材利用率的阴极 | |
CN104204270A (zh) | 真空成膜装置及真空成膜方法 | |
CN204779787U (zh) | 一种磁控溅射靶枪 | |
CN207227531U (zh) | 一种类金刚石碳膜的双***镀覆装置 | |
CN201924076U (zh) | 一种玻璃基板支撑*** | |
KR101209651B1 (ko) | 스퍼터 장치 | |
CN202945322U (zh) | 一种电容式触摸屏磁控溅射镀膜生产线 | |
CN105274499A (zh) | 一种单室多极型pecvd反应室 | |
CN205062175U (zh) | 一种改善靶材结瘤的ito薄膜生产装置 | |
CN202465861U (zh) | 单元式溅射抽气模块 | |
CN102212779A (zh) | 磁控溅射镀膜装置 | |
CN202297758U (zh) | 镀膜用平面靶装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN GOLDENKEN OPTIC ELECTRONICS CO., LTD. Free format text: FORMER NAME: SHENZHEN GOLDENKEN OPTIC ELECTRONICS CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: 518106 Guangdong province Shenzhen Guangming New District Office of Gongming potato field Po community gold hirun Industrial Park first building, building fourth, building tenth, building third a layer and top layer Patentee after: Jin Kaixinrui Photoelectric Co., Ltd. of Shenzhen Address before: Baoan District dalanghua Shenzhen city in Guangdong province 518109 Huarong Road in Jinrui Industrial Park 4 5 floor Patentee before: Shenzhen Goldenken Electronics Co., Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 518106 Shenzhen Guangming New District, Gongming village community, the next third industrial park, building No. 12 Patentee after: Shenzhen City Kam Tin materials Limited by Share Ltd Address before: 518106 Guangdong province Shenzhen Guangming New District Office of Gongming potato field Po community gold hirun Industrial Park first building, building fourth, building tenth, building third a layer and top layer Patentee before: Jin Kaixinrui Photoelectric Co., Ltd. of Shenzhen |