CN102971822B - 用于电子显微镜的操纵器载体 - Google Patents
用于电子显微镜的操纵器载体 Download PDFInfo
- Publication number
- CN102971822B CN102971822B CN201080067319.6A CN201080067319A CN102971822B CN 102971822 B CN102971822 B CN 102971822B CN 201080067319 A CN201080067319 A CN 201080067319A CN 102971822 B CN102971822 B CN 102971822B
- Authority
- CN
- China
- Prior art keywords
- sample
- vacuum
- carrier arrangement
- executor
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
- H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2008—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated specially adapted for studying electrical or magnetical properties of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/204—Means for introducing and/or outputting objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/206—Modifying objects while observing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
Claims (22)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CA2010/000521 WO2011123923A1 (en) | 2010-04-07 | 2010-04-07 | Manipulator carrier for electron microscopes |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102971822A CN102971822A (zh) | 2013-03-13 |
CN102971822B true CN102971822B (zh) | 2016-03-02 |
Family
ID=44761950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080067319.6A Active CN102971822B (zh) | 2010-04-07 | 2010-04-07 | 用于电子显微镜的操纵器载体 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8822951B2 (zh) |
EP (1) | EP2561541B1 (zh) |
JP (1) | JP5583263B2 (zh) |
CN (1) | CN102971822B (zh) |
WO (1) | WO2011123923A1 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2982670B1 (fr) * | 2011-11-15 | 2013-11-29 | Commissariat Energie Atomique | Dispositif d'analyse d'un materiau irradiant a l'aide d'une microsonde |
CN102894455B (zh) * | 2012-10-24 | 2016-05-11 | 湛江市正大食品机械有限公司 | 全自动菠萝冲心去皮机 |
CN104377101B (zh) | 2013-08-14 | 2017-08-08 | Fei 公司 | 用于带电粒子束***的电路探头 |
EP3069367B1 (en) | 2013-11-11 | 2019-01-09 | Howard Hughes Medical Institute | Workpiece transport and positioning apparatus |
JP2015211119A (ja) * | 2014-04-25 | 2015-11-24 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム描画装置 |
CN105567550B (zh) * | 2016-01-11 | 2017-07-14 | 浙江大学 | 基于水压的亚纳米级单细胞运动控制*** |
US10876833B2 (en) * | 2018-03-26 | 2020-12-29 | International Business Machines Corporation | Apparatus and method for measuring micrometer scale features of electronic component over millimeter scale distances to nanometer scale precision |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7043848B2 (en) * | 2003-11-26 | 2006-05-16 | The Micromanipulator Company | Method and apparatus for maintaining accurate positioning between a probe and a DUT |
US20080073562A1 (en) * | 2006-02-28 | 2008-03-27 | Hiroyuki Suzuki | Wafer holder and sample producing apparatus using it |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2466097A1 (fr) * | 1979-09-20 | 1981-03-27 | Georges Adrien | Porte-objet a temperature variable pour microscope electronique |
EP0611485B1 (en) | 1992-09-07 | 1996-04-03 | KLEINDIEK, Stephan | Electromechanical positioning device |
US5455420A (en) | 1994-07-12 | 1995-10-03 | Topometrix | Scanning probe microscope apparatus for use in a scanning electron |
US5498545A (en) * | 1994-07-21 | 1996-03-12 | Vestal; Marvin L. | Mass spectrometer system and method for matrix-assisted laser desorption measurements |
DE9421715U1 (de) | 1994-11-15 | 1996-07-25 | Kleindiek, Stephan, 52070 Aachen | Elektromechanische Positioniereinheit |
US6198299B1 (en) * | 1998-08-27 | 2001-03-06 | The Micromanipulator Company, Inc. | High Resolution analytical probe station |
US6747391B1 (en) | 1998-10-25 | 2004-06-08 | Nanomotion Ltd. | Driver for piezoelectric motors |
JP3669221B2 (ja) | 1998-12-11 | 2005-07-06 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP3942318B2 (ja) * | 1999-09-07 | 2007-07-11 | 日本電子株式会社 | 基板保持機構 |
JP2001088100A (ja) | 1999-09-24 | 2001-04-03 | Japan Science & Technology Corp | マイクロマニピュレーション方法 |
US6476537B1 (en) | 1999-11-03 | 2002-11-05 | New Focus, Inc. | Apparatus for controlling a piezoelectric assembly of a piezo actuator coupled with a driven member |
US6841788B1 (en) * | 2000-08-03 | 2005-01-11 | Ascend Instruments, Inc. | Transmission electron microscope sample preparation |
US6891170B1 (en) | 2002-06-17 | 2005-05-10 | Zyvex Corporation | Modular manipulation system for manipulating a sample under study with a microscope |
JP3613269B2 (ja) | 2002-08-28 | 2005-01-26 | 日本電気株式会社 | ノイズイミュニティ評価装置及びノイズイミュニティ評価方法 |
JP3946602B2 (ja) * | 2002-09-03 | 2007-07-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP2005026530A (ja) * | 2003-07-04 | 2005-01-27 | Jeol Ltd | 試料ホルダ移動機構及び真空装置並びに荷電粒子ビーム装置 |
US8110814B2 (en) | 2003-10-16 | 2012-02-07 | Alis Corporation | Ion sources, systems and methods |
JP4502193B2 (ja) * | 2004-08-10 | 2010-07-14 | 国立大学法人 奈良先端科学技術大学院大学 | 回路形成用カセットおよびその利用 |
DE102007035950A1 (de) | 2007-04-24 | 2008-11-06 | Klocke Nanotechnik | 3D-Vermessungseinheit in Vakuumkammern |
WO2008128532A2 (de) | 2007-04-24 | 2008-10-30 | Klocke Nanotechnik | Nanorobotik-modul, automatisierung und wechsel |
US8018124B2 (en) | 2007-09-19 | 2011-09-13 | Pinanotech (Piezo-Nano Technology) Ltd. | Stick-slip piezoelectric motor |
JP5608094B2 (ja) * | 2007-12-21 | 2014-10-15 | プロトチップス,インコーポレイテッド | 顕微鏡検査用試料取付け台 |
-
2010
- 2010-04-07 JP JP2013502962A patent/JP5583263B2/ja active Active
- 2010-04-07 EP EP10849202.6A patent/EP2561541B1/en not_active Not-in-force
- 2010-04-07 CN CN201080067319.6A patent/CN102971822B/zh active Active
- 2010-04-07 WO PCT/CA2010/000521 patent/WO2011123923A1/en active Application Filing
- 2010-04-07 US US13/639,737 patent/US8822951B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7043848B2 (en) * | 2003-11-26 | 2006-05-16 | The Micromanipulator Company | Method and apparatus for maintaining accurate positioning between a probe and a DUT |
US20080073562A1 (en) * | 2006-02-28 | 2008-03-27 | Hiroyuki Suzuki | Wafer holder and sample producing apparatus using it |
Also Published As
Publication number | Publication date |
---|---|
US8822951B2 (en) | 2014-09-02 |
WO2011123923A1 (en) | 2011-10-13 |
EP2561541A4 (en) | 2013-09-11 |
EP2561541B1 (en) | 2017-02-22 |
JP5583263B2 (ja) | 2014-09-03 |
EP2561541A1 (en) | 2013-02-27 |
US20130099134A1 (en) | 2013-04-25 |
CN102971822A (zh) | 2013-03-13 |
JP2013524447A (ja) | 2013-06-17 |
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Effective date of registration: 20220124 Address after: Ontario, Canada Patentee after: Sun Yu Patentee after: Ru Changhai Patentee after: Zhang Yong Address before: Ontario, Canada Patentee before: THE GOVERNING COUNCIL OF THE University OF TORONTO |
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Effective date of registration: 20220401 Address after: 215000 first floor, building 10C, Yangtze River Delta International R & D community startup area, No. 286, qinglonggang, high speed rail new town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee after: JIANGSU JICUI MICRO-NANO AUTOMATION SYSTEM AND EQUIPMENT TECHNOLOGY RESEARCH INSTITUTE Co.,Ltd. Address before: Ontario, Canada Patentee before: Sun Yu Patentee before: Ru Changhai Patentee before: Zhang Yong |